JP2017048819A5 - - Google Patents

Download PDF

Info

Publication number
JP2017048819A5
JP2017048819A5 JP2015170851A JP2015170851A JP2017048819A5 JP 2017048819 A5 JP2017048819 A5 JP 2017048819A5 JP 2015170851 A JP2015170851 A JP 2015170851A JP 2015170851 A JP2015170851 A JP 2015170851A JP 2017048819 A5 JP2017048819 A5 JP 2017048819A5
Authority
JP
Japan
Prior art keywords
shaft
seal
housing
structure according
seal structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015170851A
Other languages
English (en)
Japanese (ja)
Other versions
JP6772440B2 (ja
JP2017048819A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2015170851A priority Critical patent/JP6772440B2/ja
Priority claimed from JP2015170851A external-priority patent/JP6772440B2/ja
Publication of JP2017048819A publication Critical patent/JP2017048819A/ja
Publication of JP2017048819A5 publication Critical patent/JP2017048819A5/ja
Application granted granted Critical
Publication of JP6772440B2 publication Critical patent/JP6772440B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2015170851A 2015-08-31 2015-08-31 シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置 Active JP6772440B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015170851A JP6772440B2 (ja) 2015-08-31 2015-08-31 シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015170851A JP6772440B2 (ja) 2015-08-31 2015-08-31 シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置

Publications (3)

Publication Number Publication Date
JP2017048819A JP2017048819A (ja) 2017-03-09
JP2017048819A5 true JP2017048819A5 (enrdf_load_stackoverflow) 2018-10-11
JP6772440B2 JP6772440B2 (ja) 2020-10-21

Family

ID=58278195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015170851A Active JP6772440B2 (ja) 2015-08-31 2015-08-31 シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置

Country Status (1)

Country Link
JP (1) JP6772440B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6565499B2 (ja) * 2015-08-31 2019-08-28 日本精工株式会社 シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置
JP7441728B2 (ja) * 2020-05-29 2024-03-01 株式会社安川電機 搬送ロボットおよび搬送システム
CN115783520A (zh) * 2022-11-30 2023-03-14 上海衍梓智能科技有限公司 真空腔体用自旋转装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1137300A (ja) * 1997-07-15 1999-02-12 Eagle Ind Co Ltd 軸封装置
US6689221B2 (en) * 2000-12-04 2004-02-10 Applied Materials, Inc. Cooling gas delivery system for a rotatable semiconductor substrate support assembly
JP6015715B2 (ja) * 2013-12-10 2016-10-26 日本精工株式会社 シール機構、シール機構の駆動装置、搬送装置及び製造装置

Similar Documents

Publication Publication Date Title
KR101453475B1 (ko) 스퀴즈 패킹
EP3184864B1 (en) Sealing structure
CN104948741B (zh) 轴密封装置
JP2017048819A5 (enrdf_load_stackoverflow)
KR101648921B1 (ko) 자성유체실링
WO2016006535A1 (ja) メカニカルシール
JP6558582B2 (ja) 流体圧装置
JP5657824B1 (ja) 軸シール
CN111094814B (zh) 机械密封件
US9000643B2 (en) Sealed rotational output unit and sealed motor assembly
WO2014054472A1 (ja) 密封装置
JP6581179B2 (ja) メカニカルシール装置、ダブルシール装置およびダブルメカニカルシール装置
US9590464B2 (en) Electric motor having air tightness test holes
JP2018538496A5 (enrdf_load_stackoverflow)
JP5998943B2 (ja) 回転機構、搬送装置および半導体製造装置
JP2018071724A5 (enrdf_load_stackoverflow)
JP6101417B2 (ja) 密閉構造及びこれを備えた搬送ロボット
KR20190124586A (ko) 개선된 플레이트 구조 및 캡 구조를 포함하는 메커니컬 씨일
JP5985288B2 (ja) 回転軸シール
JP2018168732A5 (enrdf_load_stackoverflow)
JP2017048818A5 (enrdf_load_stackoverflow)
US10718321B2 (en) Motor-integrated intake apparatus
JP2014052040A (ja) 回転軸用シール形成装置
JP2015121265A (ja) 磁性流体軸受装置並びに真空チャンバ
JP2014177965A (ja) メカニカルシール