JP2017047514A - 加工装置 - Google Patents
加工装置 Download PDFInfo
- Publication number
- JP2017047514A JP2017047514A JP2015173974A JP2015173974A JP2017047514A JP 2017047514 A JP2017047514 A JP 2017047514A JP 2015173974 A JP2015173974 A JP 2015173974A JP 2015173974 A JP2015173974 A JP 2015173974A JP 2017047514 A JP2017047514 A JP 2017047514A
- Authority
- JP
- Japan
- Prior art keywords
- processing
- fluid
- cooling
- workpiece
- exhaust pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000012530 fluid Substances 0.000 claims abstract description 53
- 238000001816 cooling Methods 0.000 claims abstract description 42
- 239000007788 liquid Substances 0.000 claims abstract description 34
- 238000009834 vaporization Methods 0.000 claims description 12
- 230000008016 vaporization Effects 0.000 claims description 12
- 238000007599 discharging Methods 0.000 claims description 4
- 239000003595 mist Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 3
- 238000001704 evaporation Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000003754 machining Methods 0.000 description 23
- 239000003507 refrigerant Substances 0.000 description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- 239000000463 material Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000008399 tap water Substances 0.000 description 2
- 235000020679 tap water Nutrition 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Landscapes
- Auxiliary Devices For Machine Tools (AREA)
Abstract
Description
4 基台
6 筐体
6a,6b 扉
6c 前面
6d 後面
8 切削ユニット(加工手段)
9 ノズル
10 切削ブレード
12 チャックテーブル
14 モニタ
16 加工液供給路
18 定温化ユニット
20 加工液供給源
22 排気ユニット(排出手段)
24 排気管
24a フィン
26 流体冷却流路
28 流体流路
30 冷却ユニット(冷却手段)
32 冷媒循環路
34 コンプレッサー
36 第1の熱交換器
38 第2の熱交換器
11 雰囲気
13 流体
15 冷媒
17 加工液
Claims (2)
- 加工液を供給しながら被加工物を加工する加工手段と、
被加工物と該加工手段とを収容する加工室と、
被加工物の加工時に発生するミスト状の該加工液を含む雰囲気を該加工室から排出する排出手段と、を備え、
該排出手段は、
ミスト状の該加工液を含む雰囲気が通過する排気管と、
該排気管に沿って設けられた流体冷却流路と、を含み、
ミスト状の該加工液の気化熱で冷却された該排気管を冷却源として、該流体冷却流路を流れる流体を冷却することを特徴とする加工装置。 - 該流体を用いる冷却手段を更に備えることを特徴とする請求項1に記載の加工装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015173974A JP6552344B2 (ja) | 2015-09-03 | 2015-09-03 | 加工装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015173974A JP6552344B2 (ja) | 2015-09-03 | 2015-09-03 | 加工装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017047514A true JP2017047514A (ja) | 2017-03-09 |
JP6552344B2 JP6552344B2 (ja) | 2019-07-31 |
Family
ID=58278503
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015173974A Active JP6552344B2 (ja) | 2015-09-03 | 2015-09-03 | 加工装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6552344B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020192633A (ja) * | 2019-05-28 | 2020-12-03 | 株式会社ディスコ | 電装冷却装置 |
-
2015
- 2015-09-03 JP JP2015173974A patent/JP6552344B2/ja active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020192633A (ja) * | 2019-05-28 | 2020-12-03 | 株式会社ディスコ | 電装冷却装置 |
Also Published As
Publication number | Publication date |
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JP6552344B2 (ja) | 2019-07-31 |
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