JP2017029975A - 被覆されたptfe膜 - Google Patents
被覆されたptfe膜 Download PDFInfo
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- JP2017029975A JP2017029975A JP2016098053A JP2016098053A JP2017029975A JP 2017029975 A JP2017029975 A JP 2017029975A JP 2016098053 A JP2016098053 A JP 2016098053A JP 2016098053 A JP2016098053 A JP 2016098053A JP 2017029975 A JP2017029975 A JP 2017029975A
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- Prior art keywords
- membrane
- fluid
- pfsa
- porous ptfe
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000012528 membrane Substances 0.000 title claims abstract description 100
- 229920001343 polytetrafluoroethylene Polymers 0.000 title claims abstract description 53
- UQSQSQZYBQSBJZ-UHFFFAOYSA-N fluorosulfonic acid Chemical compound OS(F)(=O)=O UQSQSQZYBQSBJZ-UHFFFAOYSA-N 0.000 claims abstract description 55
- 239000004810 polytetrafluoroethylene Substances 0.000 claims abstract description 52
- 239000012530 fluid Substances 0.000 claims abstract description 44
- 229910052751 metal Inorganic materials 0.000 claims abstract description 42
- 239000002184 metal Substances 0.000 claims abstract description 42
- 239000011248 coating agent Substances 0.000 claims abstract description 29
- 238000000576 coating method Methods 0.000 claims abstract description 29
- 238000001914 filtration Methods 0.000 claims abstract description 21
- 238000000034 method Methods 0.000 claims abstract description 20
- 229920000642 polymer Polymers 0.000 claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 239000000203 mixture Substances 0.000 claims abstract description 7
- 229910052723 transition metal Inorganic materials 0.000 claims abstract description 7
- 150000003624 transition metals Chemical class 0.000 claims abstract description 7
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 239000002245 particle Substances 0.000 claims description 5
- XEMZLVDIUVCKGL-UHFFFAOYSA-N hydrogen peroxide;sulfuric acid Chemical compound OO.OS(O)(=O)=O XEMZLVDIUVCKGL-UHFFFAOYSA-N 0.000 claims description 3
- 150000002739 metals Chemical class 0.000 abstract description 13
- 150000002978 peroxides Chemical class 0.000 abstract 1
- 230000002000 scavenging effect Effects 0.000 abstract 1
- 229920003937 Aquivion® Polymers 0.000 description 9
- 239000011148 porous material Substances 0.000 description 9
- 239000002904 solvent Substances 0.000 description 8
- 239000002131 composite material Substances 0.000 description 5
- GBMDVOWEEQVZKZ-UHFFFAOYSA-N methanol;hydrate Chemical compound O.OC GBMDVOWEEQVZKZ-UHFFFAOYSA-N 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000004815 dispersion polymer Substances 0.000 description 3
- -1 filter element Substances 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 229910052748 manganese Inorganic materials 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 229910052745 lead Inorganic materials 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000007873 sieving Methods 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 229920000557 Nafion® Polymers 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 241001085205 Prenanthella exigua Species 0.000 description 1
- 229910006095 SO2F Inorganic materials 0.000 description 1
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical compound C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 1
- 241000700605 Viruses Species 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 235000013405 beer Nutrition 0.000 description 1
- 235000013361 beverage Nutrition 0.000 description 1
- 239000013060 biological fluid Substances 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000012930 cell culture fluid Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 239000008235 industrial water Substances 0.000 description 1
- 238000001990 intravenous administration Methods 0.000 description 1
- 229920000554 ionomer Polymers 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000013327 media filtration Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 102000039446 nucleic acids Human genes 0.000 description 1
- 108020004707 nucleic acids Proteins 0.000 description 1
- 150000007523 nucleic acids Chemical class 0.000 description 1
- 150000004968 peroxymonosulfuric acids Chemical class 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920005990 polystyrene resin Polymers 0.000 description 1
- 238000011045 prefiltration Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 102000004169 proteins and genes Human genes 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000007614 solvation Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000011146 sterile filtration Methods 0.000 description 1
- 125000000542 sulfonic acid group Chemical group 0.000 description 1
- OBTWBSRJZRCYQV-UHFFFAOYSA-N sulfuryl difluoride Chemical compound FS(F)(=O)=O OBTWBSRJZRCYQV-UHFFFAOYSA-N 0.000 description 1
- 239000002352 surface water Substances 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 239000012815 thermoplastic material Substances 0.000 description 1
- 229920000785 ultra high molecular weight polyethylene Polymers 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/0088—Physical treatment with compounds, e.g. swelling, coating or impregnation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0079—Manufacture of membranes comprising organic and inorganic components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/0083—Thermal after-treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/06—Organic material
- B01D71/30—Polyalkenyl halides
- B01D71/32—Polyalkenyl halides containing fluorine atoms
- B01D71/36—Polytetrafluoroethene
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/20—Manufacture of shaped structures of ion-exchange resins
- C08J5/22—Films, membranes or diaphragms
- C08J5/2206—Films, membranes or diaphragms based on organic and/or inorganic macromolecular compounds
- C08J5/2218—Synthetic macromolecular compounds
- C08J5/2231—Synthetic macromolecular compounds based on macromolecular compounds obtained by reactions involving unsaturated carbon-to-carbon bonds
- C08J5/2237—Synthetic macromolecular compounds based on macromolecular compounds obtained by reactions involving unsaturated carbon-to-carbon bonds containing fluorine
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/20—Manufacture of shaped structures of ion-exchange resins
- C08J5/22—Films, membranes or diaphragms
- C08J5/2206—Films, membranes or diaphragms based on organic and/or inorganic macromolecular compounds
- C08J5/2218—Synthetic macromolecular compounds
- C08J5/2256—Synthetic macromolecular compounds based on macromolecular compounds obtained by reactions other than those involving carbon-to-carbon bonds, e.g. obtained by polycondensation
- C08J5/2262—Synthetic macromolecular compounds based on macromolecular compounds obtained by reactions other than those involving carbon-to-carbon bonds, e.g. obtained by polycondensation containing fluorine
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D181/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing sulfur, with or without nitrogen, oxygen, or carbon only; Coating compositions based on polysulfones; Coating compositions based on derivatives of such polymers
- C09D181/08—Polysulfonates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2323/00—Details relating to membrane preparation
- B01D2323/02—Hydrophilization
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2323/00—Details relating to membrane preparation
- B01D2323/08—Specific temperatures applied
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2323/00—Details relating to membrane preparation
- B01D2323/08—Specific temperatures applied
- B01D2323/081—Heating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/02—Details relating to pores or porosity of the membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/14—Membrane materials having negatively charged functional groups
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/30—Chemical resistance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
- B01D53/228—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion characterised by specific membranes
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Water Supply & Treatment (AREA)
- Analytical Chemistry (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Hydrology & Water Resources (AREA)
- Environmental & Geological Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Wood Science & Technology (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Nanotechnology (AREA)
Abstract
【解決手段】ペルフルオロスルホン酸(PFSA)ポリマーを含む非架橋コーティングを有する多孔質PTFE基材を含み、少なくとも約30ダイン/cm(約30×10−5N/cm)のCWSTを有する、多孔質PTFE膜。エレクトロニクス産業で使用される流体である硫酸過酸水素水混合物(SPM)流体を前記多孔質PTFE膜を用いてろ過し、第2族金属及び/又は遷移金属を除去する方法。
【選択図】図1
Description
[0001]PTFE膜、特に延伸PTFE(ePTFE)膜は、腐食性又は化学的に活性な液体などの浸漬・負荷流体の処理を含む用途を含めて種々の液体及び気体のろ過用途で使用される。しかし、低い流れ抵抗をもちながら、金属捕捉又は金属除去効率を示すことができる多孔質PTFE膜に対するニーズがある。
[0003]本発明の実施形態は、ペルフルオロスルホン酸(PFSA)ポリマーを含む非架橋コーティングを有する多孔質PTFE基材を含み、少なくとも約30ダイン/cm(約30×10−5N/cm)のCWSTを有する、多孔質PTFE膜を提供する。
[0009]本発明の実施形態によると、多孔質PTFE膜は、ペルフルオロスルホン酸(PFSA)ポリマーを含む非架橋コーティングを有する多孔質PTFE基材を含み、上記膜は少なくとも約30ダイン/cm(約30×10−5N/cm)のCWSTを有する。
[0030]この実施例は、本発明の実施形態に従って膜を製造する方法を説明する。
[0034]この実施例は、本発明の実施形態による2つのPFSAで被覆されたPTFE膜(異なる濃度のPFSAを用いて調製)に対する金属除去効率を、未処理の(コントロール)PTFE膜、及び市販のUV処理したPTFE膜と比較して示す。
[0038]この実施例は、本発明の実施形態による2つのPFSAで被覆されたPTFE膜(異なる濃度のPFSAを用いて製造)についての金属除去効率を示す。
[0042]この実施例は、コーティングが溶媒中に浸漬することによって除去されないので、PTFE膜上のPFSAコーティングは架橋されていないことを示す。
Claims (6)
- 金属を含有する流体をろ過する方法であって、前記方法がペルフルオロスルホン酸(PFSA)ポリマーを含む非架橋コーティングを有する多孔質PTFE基材を含む多孔質PTFE膜に金属を含有する流体を通過させるステップを含み、前記膜が少なくとも約30ダイン/cm(約30×10−5N/cm)のCWSTを有し、前記流体から金属を除去する、方法。
- 硫酸過酸化水素水混合物(SPM)流体をろ過する方法であって、前記方法がペルフルオロスルホン酸(PFSA)ポリマーを含む非架橋コーティングを有する多孔質PTFE基材を含む多孔質PTFE膜に前記流体を通過させるステップを含み、前記膜が少なくとも約30ダイン/cm(約30×10−5N/cm)のCWSTを有し、前記流体から粒子を除去する、方法。
- 前記流体がエレクトロニクス産業で使用される流体である、請求項1又は2に記載の方法。
- 前記流体から第2族金属及び/又は遷移金属を除去するステップを含む、請求項1〜3のいずれか一項に記載の方法。
- ペルフルオロスルホン酸(PFSA)ポリマーを含む非架橋コーティングを有する多孔質PTFE基材を含み、少なくとも約30ダイン/cm(約30×10−5N/cm)のCWSTを有する多孔質PTFE膜。
- ペルフルオロスルホン酸(PFSA)ポリマーを含むコーティングで多孔質PTFE基材を被覆するステップ;及び前記コーティングを約200℃未満の温度で硬化させるステップを含む、金属を除去する膜を作製する方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/814,996 US20170028359A1 (en) | 2015-07-31 | 2015-07-31 | Coated ptfe membrane |
US14/814,996 | 2015-07-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017029975A true JP2017029975A (ja) | 2017-02-09 |
JP6295456B2 JP6295456B2 (ja) | 2018-03-20 |
Family
ID=56024182
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016098053A Active JP6295456B2 (ja) | 2015-07-31 | 2016-05-16 | 被覆されたptfe膜 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20170028359A1 (ja) |
EP (1) | EP3130394B1 (ja) |
JP (1) | JP6295456B2 (ja) |
KR (1) | KR20170015118A (ja) |
CN (1) | CN106390778A (ja) |
SG (1) | SG10201603824PA (ja) |
TW (1) | TWI637988B (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017039117A (ja) * | 2015-07-31 | 2017-02-23 | ポール・コーポレーションPall Corporation | Ptfe/pfsaブレンド膜 |
WO2019181580A1 (ja) * | 2018-03-22 | 2019-09-26 | 富士フイルム株式会社 | ろ過装置、精製装置、薬液の製造方法 |
WO2022014301A1 (ja) * | 2020-07-16 | 2022-01-20 | 住友化学株式会社 | ガス分離膜及びその製造方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10322379B2 (en) | 2014-07-21 | 2019-06-18 | Ohio State Innovation Foundation | Composite membranes for separation of gases |
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- 2016-05-16 JP JP2016098053A patent/JP6295456B2/ja active Active
- 2016-05-19 EP EP16170377.2A patent/EP3130394B1/en active Active
- 2016-05-30 KR KR1020160066199A patent/KR20170015118A/ko not_active Application Discontinuation
- 2016-05-31 CN CN201610555725.6A patent/CN106390778A/zh active Pending
- 2016-05-31 TW TW105117024A patent/TWI637988B/zh active
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Publication number | Priority date | Publication date | Assignee | Title |
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JP2017039117A (ja) * | 2015-07-31 | 2017-02-23 | ポール・コーポレーションPall Corporation | Ptfe/pfsaブレンド膜 |
WO2019181580A1 (ja) * | 2018-03-22 | 2019-09-26 | 富士フイルム株式会社 | ろ過装置、精製装置、薬液の製造方法 |
KR20200111236A (ko) | 2018-03-22 | 2020-09-28 | 후지필름 가부시키가이샤 | 여과 장치, 정제 장치, 약액의 제조 방법 |
JPWO2019181580A1 (ja) * | 2018-03-22 | 2021-02-04 | 富士フイルム株式会社 | ろ過装置、精製装置、薬液の製造方法 |
JP7055195B2 (ja) | 2018-03-22 | 2022-04-15 | 富士フイルム株式会社 | ろ過装置、精製装置、薬液の製造方法 |
US11666864B2 (en) | 2018-03-22 | 2023-06-06 | Fujifilm Corporation | Filtering device, purification device, and method for manufacturing chemical liquid |
WO2022014301A1 (ja) * | 2020-07-16 | 2022-01-20 | 住友化学株式会社 | ガス分離膜及びその製造方法 |
Also Published As
Publication number | Publication date |
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TWI637988B (zh) | 2018-10-11 |
EP3130394B1 (en) | 2023-10-25 |
CN106390778A (zh) | 2017-02-15 |
US20170028359A1 (en) | 2017-02-02 |
SG10201603824PA (en) | 2017-02-27 |
KR20170015118A (ko) | 2017-02-08 |
TW201704306A (zh) | 2017-02-01 |
JP6295456B2 (ja) | 2018-03-20 |
EP3130394A1 (en) | 2017-02-15 |
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