JP2017013154A - End surface contact confirmation instrument - Google Patents

End surface contact confirmation instrument Download PDF

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Publication number
JP2017013154A
JP2017013154A JP2015130113A JP2015130113A JP2017013154A JP 2017013154 A JP2017013154 A JP 2017013154A JP 2015130113 A JP2015130113 A JP 2015130113A JP 2015130113 A JP2015130113 A JP 2015130113A JP 2017013154 A JP2017013154 A JP 2017013154A
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Prior art keywords
conductive
face
grindstone
flange
contact
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JP2015130113A
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JP6527034B2 (en
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柱三 車
Jusam Cha
柱三 車
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Disco Corp
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Disco Abrasive Systems Ltd
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Priority to JP2015130113A priority Critical patent/JP6527034B2/en
Priority to TW105114752A priority patent/TWI712476B/en
Priority to KR1020160072109A priority patent/KR102387756B1/en
Priority to CN201610478630.9A priority patent/CN106271936A/en
Publication of JP2017013154A publication Critical patent/JP2017013154A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/10—Single-purpose machines or devices
    • B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/10—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D5/00—Arrangements for operating and controlling machines or devices for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
    • B26D5/20—Arrangements for operating and controlling machines or devices for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting with interrelated action between the cutting member and work feed
    • B26D5/22—Arrangements for operating and controlling machines or devices for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting with interrelated action between the cutting member and work feed having the cutting member and work feed mechanically connected
    • B26D5/24—Arrangements for operating and controlling machines or devices for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting with interrelated action between the cutting member and work feed having the cutting member and work feed mechanically connected including a metering device
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D7/00—Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions

Abstract

PROBLEM TO BE SOLVED: To provide an end surface contact confirmation instrument capable of easily confirming a state that a grind stone is in contact with an end surface of a conductive mount flange.SOLUTION: An end surface contact confirmation instrument 1 is used for correcting an end surface 125 of a conductive mount flange 123 for mounting a cutting blade fixed to the tip of a spindle 122 using a conductive flange end surface correction jig 50 having a grind stone 60, a grind stone support member 70, and a support base 80. The end surface contact confirmation instrument 1 includes two connection members 10, a power source, and a lighting lamp 43 that lights at the time of contact. The connection members 10, the power source, and the lighting lamp 43 that lights at the time of contact are connected by wiring 30. One connection member 10 is connected to the conductive flange end surface correction jig 50, and the other connection member 10 is connected to the conductive mount flange 123. In the end surface contact confirmation instrument 1, the lighting lamp 43 that lights at the time of contact lights when the grind stone 60 comes in contact with the conductive mount flange 123.SELECTED DRAWING: Figure 6

Description

本発明は、被加工物を切削する切削ブレードをマウントするマウントフランジに砥石が接触したことを確認する端面接触確認器具に関する。   The present invention relates to an end face contact confirmation device for confirming that a grindstone has come into contact with a mount flange for mounting a cutting blade for cutting a workpiece.

被加工物を切削する切削装置は、切削ブレードをスピンドルにマウントするために、スピンドルの先端にマウントフランジを取り付ける。そして、切削装置は、切削中に切削ブレードが振れることを防止するために、マウントフランジの切削ブレードが接触する端面をスピンドルの回転中心に対して垂直に保つ必要がある。そこで、マウントフランジの切削ブレードが接触する端面をスピンドルの回転中心に対して垂直にするフランジ端面修正治具（例えば、特許文献１参照）が、従来から用いられている。   A cutting apparatus for cutting a workpiece attaches a mount flange to the tip of a spindle in order to mount a cutting blade on the spindle. In order to prevent the cutting blade from swinging during the cutting, it is necessary for the cutting device to keep the end surface of the mount flange that contacts the cutting blade perpendicular to the rotation center of the spindle. Therefore, a flange end face correction jig (for example, see Patent Document 1) that makes the end face of the mount flange that contacts the cutting blade perpendicular to the rotation center of the spindle has been conventionally used.

特許３４７２３９０号公報Japanese Patent No. 3472390

特許文献１に示されたフランジ端面修正治具を用いる際には、マウントフランジの端面を修正するための砥石がマウントフランジの端面に接しているか否かを目視で確認していた。しかしながら、目視では、砥石がマウントフランジの端面に接触しているか否かを確認しづらい。また、フランジ端面修正治具を用いる際には、砥石がマウントフランジの端面に強く押し当てられると、砥石に割れや欠けが発生する。フランジ端面修正治具を用いる際には、前記のような砥石の割れや欠けを回避しようとマウントフランジから離れた位置にフランジ端面修正治具を配置し、少しずつマウントフランジ側に送って接触させると、砥石の位置決めに時間を要していた。   When using the flange end surface correction jig shown in Patent Document 1, it was visually confirmed whether or not a grindstone for correcting the end surface of the mount flange was in contact with the end surface of the mount flange. However, it is difficult to visually check whether the grindstone is in contact with the end face of the mount flange. Further, when using the flange end face correcting jig, if the grindstone is strongly pressed against the end face of the mount flange, the grindstone is cracked or chipped. When using a flange end face correction jig, place the flange end face correction jig away from the mount flange in order to avoid cracking or chipping of the grindstone as described above, and send it gradually to the mount flange side for contact. And it took time to position the grindstone.

本発明の目的は、上記問題を解決し、砥石が導通性マウントフランジの端面に接触した状態を簡易に確認することができる端面接触確認器具を提供することである。   An object of the present invention is to solve the above-mentioned problems and to provide an end surface contact confirmation device that can easily confirm a state in which a grindstone is in contact with an end surface of a conductive mount flange.

上述した課題を解決し目的を達成するために、本発明に係る端面接触確認器具は、回転可能に支持されたスピンドルの先端に固定され、導通性保持テーブルに保持された被加工物を切削する切削ブレードをマウントする導通性マウントフランジの端面を、砥石と砥石支持部材と支持基台とを有する導通性フランジ端面修正治具を用いて修正する際に用いる端面接触確認器具であって、２つの接続部材と、電源と、ランプと、を備え、該接続部材と、電源と、ランプと、は配線で接続されており、一方の接続部材は、該導通性フランジ端面修正治具に接続され、他方の接続部材は該導通性マウントフランジに接続され、該砥石が該導通性マウントフランジに接触するとランプが点灯し該砥石と該導通性マウントフランジの接触を知らせることを特徴とする。   In order to solve the above-described problems and achieve the object, an end face contact confirmation device according to the present invention cuts a workpiece fixed to the tip of a spindle that is rotatably supported and held on a conductive holding table. An end face contact confirmation instrument for use in correcting an end face of a conductive mount flange for mounting a cutting blade using a conductive flange end face correction jig having a grindstone, a grindstone support member, and a support base. A connecting member, a power source, and a lamp, wherein the connecting member, the power source, and the lamp are connected by wiring, and one connecting member is connected to the conductive flange end face correction jig, The other connecting member is connected to the conductive mount flange, and when the grindstone comes into contact with the conductive mount flange, the lamp is turned on to notify the contact between the grindstone and the conductive mount flange. And butterflies.

そこで、本願発明の端面接触確認器具は、砥石が端面に接触するとランプが点灯するので、砥石が導通性マウントフランジの端面に接触した状態を簡易に確認することができる。   Then, since the lamp lights up when the grindstone contacts the end face, the end face contact confirmation instrument of the present invention can easily confirm the state where the grindstone is in contact with the end face of the conductive mount flange.

図１は、実施形態に係る端面接触確認器具が用いられる切削装置の構成を示す外観斜視図である。Drawing 1 is an appearance perspective view showing the composition of the cutting device in which the end face contact check instrument concerning an embodiment is used. 図２は、実施形態に係る端面接触確認器具の概略の構成を示す斜視図である。FIG. 2 is a perspective view illustrating a schematic configuration of the end surface contact confirmation instrument according to the embodiment. 図３は、実施形態に係る端面接触確認器具の回路図である。FIG. 3 is a circuit diagram of the end face contact confirmation device according to the embodiment. 図４は、図１に示された切削装置の保持テーブルに導通性フランジ端面修正治具を載置した状態を示す断面図である。FIG. 4 is a cross-sectional view showing a state in which a conductive flange end face correction jig is placed on the holding table of the cutting apparatus shown in FIG. 図５は、図４に示された導通性フランジ端面修正治具と切削装置の導通性マウントフランジに接続部材を接続した状態を示す断面図である。FIG. 5 is a cross-sectional view showing a state in which a connection member is connected to the conductive flange end face correction jig and the conductive mount flange of the cutting apparatus shown in FIG. 図６は、図５に示す導通性フランジ端面修正治具の砥石と切削装置の導通性マウントフランジの端面とが接触した状態を示す断面図である。6 is a cross-sectional view showing a state in which the grindstone of the conductive flange end face correction jig shown in FIG. 5 is in contact with the end face of the conductive mount flange of the cutting apparatus. 図７は、図６に示す導通性フランジ端面修正治具の砥石と切削装置の導通性マウントフランジの端面よりも内周部分が対面した状態を示す断面図である。FIG. 7 is a cross-sectional view showing a state in which the inner peripheral portion faces the grindstone of the conductive flange end face correction jig shown in FIG. 6 and the end face of the conductive mount flange of the cutting apparatus.

本発明を実施するための形態（実施形態）につき、図面を参照しつつ詳細に説明する。以下の実施形態に記載した内容により本発明が限定されるものではない。また、以下に記載した構成要素には、当業者が容易に想定できるもの、実質的に同一のものが含まれる。さらに、以下に記載した構成は適宜組み合わせることが可能である。また、本発明の要旨を逸脱しない範囲で構成の種々の省略、置換又は変更を行うことができる。   DESCRIPTION OF EMBODIMENTS Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. The constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the structures described below can be combined as appropriate. Various omissions, substitutions, or changes in the configuration can be made without departing from the scope of the present invention.

〔実施形態〕
本発明の実施形態に係る端面接触確認器具を図面に基づいて説明する。図１は、実施形態に係る端面接触確認器具が用いられる切削装置の構成を示す外観斜視図であり、図２は、実施形態に係る端面接触確認器具の概略の構成を示す斜視図であり、図３は、実施形態に係る端面接触確認器具の回路図である。 Embodiment
An end face contact confirmation instrument according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is an external perspective view showing a configuration of a cutting apparatus in which an end surface contact confirmation instrument according to an embodiment is used, and FIG. 2 is a perspective view showing a schematic configuration of the end surface contact confirmation instrument according to the embodiment. FIG. 3 is a circuit diagram of the end face contact confirmation device according to the embodiment.

実施形態に係る図２に示す端面接触確認器具１は、図１に示す切削装置１００の導通性マウントフランジ１２３の端面１２５を、図２に示す導通性フランジ端面修正治具５０を用いて修正する際に用いる器具である。図１に示す切削装置１００は、図示しない被加工物を切削して、被加工物を個々のデバイスに分割する装置である。   2 according to the embodiment corrects the end face 125 of the conductive mount flange 123 of the cutting apparatus 100 shown in FIG. 1 using the conductive flange end face correction jig 50 shown in FIG. It is a tool used when. A cutting apparatus 100 shown in FIG. 1 is an apparatus that cuts a workpiece (not shown) and divides the workpiece into individual devices.

切削装置１００は、図１に示すように、被加工物を保持面１１０ａで保持するチャックテーブル１１０と、チャックテーブル１１０に保持された被加工物を切削ブレード１２１で切削する切削手段１２０と、チャックテーブル１１０と切削手段１２０とを相対的に切削装置１００の装置本体１０１の長手方向と平行なＸ軸方向に移動するＸ軸移動手段（図示せず）と、チャックテーブル１１０と切削手段１２０とを相対的にＸ軸方向に直交しかつ装置本体１０１の幅方向と平行なＹ軸方向に移動するＹ軸移動手段１４０と、チャックテーブル１１０と切削手段１２０とを相対的に鉛直方向（Ｚ軸方向）に移動するＺ軸移動手段１５０と、チャックテーブル１１０をＺ軸と平行な軸心回りに回転させる回転駆動源（図示せず）などを備えている。   As shown in FIG. 1, the cutting apparatus 100 includes a chuck table 110 that holds a workpiece on a holding surface 110a, a cutting means 120 that cuts a workpiece held on the chuck table 110 with a cutting blade 121, and a chuck. An X-axis moving means (not shown) that relatively moves the table 110 and the cutting means 120 in the X-axis direction parallel to the longitudinal direction of the apparatus main body 101 of the cutting apparatus 100, and the chuck table 110 and the cutting means 120. The Y-axis moving means 140 that moves in the Y-axis direction relatively orthogonal to the X-axis direction and parallel to the width direction of the apparatus main body 101, the chuck table 110, and the cutting means 120 are relatively moved in the vertical direction (Z-axis direction). ), A rotation drive source (not shown) that rotates the chuck table 110 around an axis parallel to the Z axis, and the like.

切削装置１００は、オペレータがチャックテーブル１１０に被加工物を載置すると、チャックテーブル１１０に被加工物を吸引、保持し、切削手段１２０と被加工物とをＸ軸移動手段、Ｙ軸移動手段１４０、Ｚ軸移動手段１５０及び回転駆動源により相対的に移動させながら切削手段１２０により被加工物を切削する。切削装置１００のチャックテーブル１１０は、被加工物を保持する保持面１１０ａが設けられかつポーラスセラミック等から形成された保持部１１１と、保持部１１１を囲繞しかつ導通性の金属で構成されたリング状の枠部１１２とを備えた円盤形状である。また、チャックテーブル１１０は、装置本体１０１にＸ軸移動手段により移動自在で回転駆動源により回転自在に設けられた図４に示す導通性保持テーブル１１５に着脱自在である。本実施形態では、導通性保持テーブル１１５が真空吸引経路１１６を介して図示しない真空吸引源と接続され、真空吸引源により吸引されることで、チャックテーブル１１０が導通性保持テーブル１１５に固定されかつチャックテーブル１１０が被加工物を吸引、保持する。真空吸引源が停止されることで、チャックテーブル１１０が導通性保持テーブル１１５から取り外される。また、導通性保持テーブル１１５は、チャックテーブル１１０を介して被加工物を吸引、保持する。   When the operator places a workpiece on the chuck table 110, the cutting apparatus 100 sucks and holds the workpiece on the chuck table 110, and the cutting means 120 and the workpiece are moved to the X-axis moving means and the Y-axis moving means. 140, the workpiece is cut by the cutting means 120 while being relatively moved by the Z-axis moving means 150 and the rotational drive source. The chuck table 110 of the cutting apparatus 100 includes a holding portion 111 provided with a holding surface 110a for holding a workpiece and formed of porous ceramic or the like, and a ring that is formed of a conductive metal that surrounds the holding portion 111. It is a disk shape provided with the shape frame part 112. FIG. Further, the chuck table 110 is detachably attached to the continuity holding table 115 shown in FIG. 4 provided on the apparatus main body 101 so as to be movable by the X-axis moving means and to be rotatable by the rotation drive source. In the present embodiment, the continuity holding table 115 is connected to a vacuum suction source (not shown) via the vacuum suction path 116 and is sucked by the vacuum suction source, whereby the chuck table 110 is fixed to the continuity holding table 115 and The chuck table 110 sucks and holds the workpiece. By stopping the vacuum suction source, the chuck table 110 is removed from the conductive holding table 115. The conductivity holding table 115 sucks and holds the workpiece through the chuck table 110.

切削手段１２０は、チャックテーブル１１０に保持された被加工物を切削する切削ブレード１２１を装着したスピンドル１２２（図４に示す）を有するものである。切削ブレード１２１は、略リング形状を有する極薄の切削砥石である。スピンドル１２２は、切削ブレード１２１を回転させることで被加工物を切削する。スピンドル１２２は、スピンドルハウジング１２６内に回転可能に支持され、スピンドルハウジング１２６は、Ｚ軸移動手段１５０に支持されている。切削手段１２０のスピンドル１２２及び切削ブレード１２１の軸心は、Ｙ軸方向と平行に設定されている。   The cutting means 120 has a spindle 122 (shown in FIG. 4) on which a cutting blade 121 for cutting a workpiece held on the chuck table 110 is mounted. The cutting blade 121 is an extremely thin cutting grindstone having a substantially ring shape. The spindle 122 cuts the workpiece by rotating the cutting blade 121. The spindle 122 is rotatably supported in the spindle housing 126, and the spindle housing 126 is supported by the Z-axis moving unit 150. The axes of the spindle 122 and the cutting blade 121 of the cutting means 120 are set parallel to the Y-axis direction.

スピンドル１２２は、図４に示すように、切削ブレード１２１をマウントする導通性マウントフランジ１２３が先端に固定される。導通性マウントフランジ１２３は、導通性を有する金属により構成され、中心に孔１２３ａが形成されたボス部１２３ｂを有する円盤状に形成されている。導通性マウントフランジ１２３は、孔１２３ａにスピンドル１２２の先端に設けられたボス部１２２ａを通してスピンドル１２２の先端に装着される。導通性マウントフランジ１２３は、ボス部１２２ａの先端に設けられたねじ孔１２２ｂにボルト１２４がねじ込まれることで、スピンドル１２２の先端に固定される。   As shown in FIG. 4, the spindle 122 has a conductive mounting flange 123 for mounting the cutting blade 121 fixed to the tip. The conductive mount flange 123 is made of a conductive metal and is formed in a disk shape having a boss portion 123b having a hole 123a formed in the center. The conductive mount flange 123 is attached to the tip of the spindle 122 through a boss portion 122a provided at the tip of the spindle 122 in the hole 123a. The conductive mount flange 123 is fixed to the tip end of the spindle 122 by screwing a bolt 124 into a screw hole 122b provided at the tip end of the boss portion 122a.

スピンドル１２２は、先端に取り付けられた導通性マウントフランジ１２３のボス部１２３ｂを切削ブレード１２１の中央に設けられた貫通孔に通し、ボス部１２３ｂの外周に図示しないナットが螺合することにより切削ブレード１２１を固定する。   The spindle 122 passes the boss portion 123b of the conductive mount flange 123 attached to the tip through a through hole provided at the center of the cutting blade 121, and a nut (not shown) is screwed onto the outer periphery of the boss portion 123b. 121 is fixed.

切削手段１２０は、切削ブレード１２１を導通性マウントフランジ１２３の外周部分に設けられた端面１２５に接触させた状態で、スピンドル１２２の先端に装着する。このために、切削手段１２０は、導通性マウントフランジ１２３の端面１２５が平坦でない場合や、端面１２５のスピンドル１２２の軸心とのなす角度が直角でない場合には、スピンドル１２２の回転時に切削ブレード１２１がばたつき、精密に切削できないという問題がある。端面１２５は、図２に示す導通性フランジ端面修正治具５０を用いて、平坦でかつスピンドル１２２の軸心とのなす角度が直角に修正される。   The cutting means 120 is attached to the tip of the spindle 122 in a state where the cutting blade 121 is in contact with the end face 125 provided on the outer peripheral portion of the conductive mount flange 123. Therefore, when the end surface 125 of the conductive mounting flange 123 is not flat, or when the angle formed by the end surface 125 and the axis of the spindle 122 is not a right angle, the cutting means 120 has a cutting blade 121 when the spindle 122 rotates. There is a problem that fluttering and precise cutting is not possible. The end face 125 is flat and the angle formed with the axis of the spindle 122 is corrected to a right angle by using the conductive flange end face correcting jig 50 shown in FIG.

なお、切削装置１００は、制御手段１０２により上述した構成要素をそれぞれ制御されて、被加工物に対する加工動作が行わされるものである。なお、制御手段１０２は、例えばＣＰＵ等で構成された演算処理装置やＲＯＭ、ＲＡＭ等を備える図示しないマイクロプロセッサを主体として構成されており、加工動作の状態や画像などを表示する図示しない表示手段や、オペレータが加工内容情報などを登録する際に用いる入力手段１０３と接続されている。   Note that the cutting device 100 controls the above-described components by the control means 102 and performs a machining operation on the workpiece. The control means 102 is mainly composed of an arithmetic processing unit constituted by, for example, a CPU or the like and a microprocessor (not shown) provided with a ROM, a RAM, etc., and a display means (not shown) for displaying the state of processing operation, images and the like. In addition, it is connected to an input means 103 used when an operator registers machining content information.

導通性フランジ端面修正治具５０は、図２に示すように、砥石６０と、砥石支持部材７０と、支持基台８０とを有する。砥石６０は、ホワイトアランダム（ＷＡ）やグリーンカーボランダム（ＧＣ）等の砥粒を樹脂と導通性材料との混合剤で固めて構成される。導通性樹脂を使用する場合には、砥粒を導通性樹脂材中に分散しこれを固めて構成してもよい。代替案として、砥石６０は、超硬材から形成されてもよい。砥石６０は、端面１２５に接触して端面１２５を平坦でかつスピンドル１２２の軸心とのなす角度を直角に修正する端面修正部６１を備える。   As shown in FIG. 2, the conductive flange end face correction jig 50 includes a grindstone 60, a grindstone support member 70, and a support base 80. The grindstone 60 is configured by solidifying abrasive grains such as white alundum (WA) and green carborundum (GC) with a mixture of a resin and a conductive material. When conductive resin is used, the abrasive grains may be dispersed in the conductive resin material and hardened. As an alternative, the grindstone 60 may be formed from cemented carbide. The grindstone 60 includes an end surface correction unit 61 that contacts the end surface 125 and corrects the angle between the end surface 125 and the axis of the spindle 122 at a right angle.

砥石支持部材７０及び支持基台８０は、ステンレス鋼などの導通性の金属により構成される。砥石支持部材７０は、一対設けられ、互いの間の砥石６０と導通性プレート６２とを挟んで固定される。導通性プレート６２は、導通性を有する金属により構成される。一方の砥石支持部材７０は、支持基台８０に固定され、他方の砥石支持部材７０は、一方の砥石支持部材７０との間に砥石６０及び導通性プレート６２を挟み込んで、ボルト７１により固定される。一対の砥石支持部材７０は、砥石６０の端面修正部６１及び導通性プレート６２を露出させた状態で、砥石６０を固定する。また、砥石６０及び導通性プレート６２と一対の砥石支持部材７０との間には、絶縁体である図示しない絶縁テープが貼着され、砥石６０及び導通性プレート６２と一対の砥石支持部材７０とが電気的に絶縁される。支持基台８０は、外径が保持部１１１の外径以下の円盤状に形成され、外縁部に砥石支持部材７０を固定する。導通性フランジ端面修正治具５０は、砥石６０を支持基台８０の径方向と平行にし、導通性プレート６２を支持基台８０の外縁の接線と平行にして、支持基台８０に砥石６０及び導通性プレート６２を固定する。   The grindstone support member 70 and the support base 80 are made of a conductive metal such as stainless steel. A pair of grindstone support members 70 are provided and fixed with the grindstone 60 and the conductive plate 62 between them. The conductive plate 62 is made of a conductive metal. One grindstone support member 70 is fixed to the support base 80, and the other grindstone support member 70 is fixed by bolts 71 with the grindstone 60 and the conductive plate 62 sandwiched between the one grindstone support member 70. The The pair of grindstone support members 70 fixes the grindstone 60 in a state where the end face correcting portion 61 and the conductive plate 62 of the grindstone 60 are exposed. An insulating tape (not shown) that is an insulator is attached between the grindstone 60 and the conductive plate 62 and the pair of grindstone support members 70, and the grindstone 60 and the conductive plate 62 and the pair of grindstone support members 70 Are electrically isolated. The support base 80 is formed in a disc shape whose outer diameter is equal to or smaller than the outer diameter of the holding portion 111, and fixes the grindstone support member 70 to the outer edge portion. The conductive flange end face correction jig 50 has the grindstone 60 parallel to the radial direction of the support base 80, the conductive plate 62 parallel to the tangent line of the outer edge of the support base 80, and the grindstone 60 and the support base 80. The conductive plate 62 is fixed.

端面接触確認器具１は、導通性マウントフランジ１２３の端面１２５を、導通性フランジ端面修正治具５０を用いて、平坦でかつスピンドル１２２の軸心とのなす角度を直角に修正する際に用いる器具である。端面接触確認器具１は、図２に示すように、２つの接続部材１０と、筐体２０と、配線３０とを備える。また、端面接触確認器具１は、図３に示すように、電源４１と、駆動時点灯ランプ４２と、ランプである接触時点灯ランプ４３とを備える。   The end face contact confirmation instrument 1 is an instrument that is used when the end face 125 of the conductive mount flange 123 is flattened using the conductive flange end face correcting jig 50 and the angle between the flat face and the axis of the spindle 122 is corrected to a right angle. It is. As shown in FIG. 2, the end surface contact confirmation instrument 1 includes two connection members 10, a housing 20, and wiring 30. Further, as shown in FIG. 3, the end surface contact confirmation device 1 includes a power source 41, a driving-time lighting lamp 42, and a contact-time lighting lamp 43 that is a lamp.

一方の接続部材１０は、導通性フランジ端面修正治具５０に接続され、他方の接続部材１０は、導通性マウントフランジ１２３に接続される。接続部材１０は、図２に示すように、一対の挟持部材１１と、一対の挟持部材１１の一端部１１ａ同士を近付く方向に付勢するばねなどでの付勢部材１２とを備える。挟持部材１１は、導通性を有する板金が折り曲げられるなどして構成され、中央部同士が回転自在に連結されている。付勢部材１２は、一対の挟持部材１１の他端部１１ｂ間に設けられ、他端部１１ｂ同士を離れる方向に付勢して、一対の挟持部材１１の一端部１１ａ同士を近付く方向に付勢する。一対の挟持部材１１に外力を加えないと、付勢部材１２は、一対の挟持部材１１の一端部１１ａを互いに接触させる。接続部材１０は、一対の挟持部材１１と付勢部材１２とを備えて、導通性フランジ端面修正治具５０及び導通性マウントフランジ１２３に容易に着脱自在となる。また、接続部材１０は、一対の挟持部材１１の中央部及び他端部１１ｂを覆う絶縁性と伸縮性を有する樹脂で構成された保護カバー１３を備える。   One connection member 10 is connected to the conductive flange end face correction jig 50, and the other connection member 10 is connected to the conductive mount flange 123. As shown in FIG. 2, the connecting member 10 includes a pair of sandwiching members 11 and a biasing member 12 such as a spring that biases the ends 11 a of the pair of sandwiching members 11 toward each other. The clamping member 11 is configured by bending a sheet metal having conductivity, and the central portions are rotatably connected. The biasing member 12 is provided between the other end portions 11b of the pair of sandwiching members 11 and biases in a direction away from the other end portions 11b so as to approach the one end portions 11a of the pair of sandwiching members 11 closer to each other. Rush. If an external force is not applied to the pair of sandwiching members 11, the biasing member 12 brings the end portions 11 a of the pair of sandwiching members 11 into contact with each other. The connection member 10 includes a pair of clamping members 11 and a biasing member 12 and can be easily attached to and detached from the conductive flange end surface correcting jig 50 and the conductive mount flange 123. Further, the connection member 10 includes a protective cover 13 made of a resin having insulating properties and stretchability that covers the central portion and the other end portion 11b of the pair of sandwiching members 11.

筐体２０は、扁平な箱状に形成され、電源４１を収容する。電源４１は、直流電源に構成され、正極は、配線３０により一方の接続部材１０の挟持部材１１の他端部１１ｂに接続されている。負極は、配線３０により他方の接続部材１０の挟持部材１１の他端部１１ｂに接続されている。また、正極に接続した配線３０には、筐体２０の表面に設けられるスイッチ４４が接続されている。   The housing 20 is formed in a flat box shape and accommodates the power supply 41. The power source 41 is configured as a DC power source, and the positive electrode is connected to the other end portion 11 b of the clamping member 11 of one connecting member 10 by the wiring 30. The negative electrode is connected to the other end portion 11 b of the clamping member 11 of the other connection member 10 by the wiring 30. In addition, a switch 44 provided on the surface of the housing 20 is connected to the wiring 30 connected to the positive electrode.

駆動時点灯ランプ４２及び接触時点灯ランプ４３は、筐体２０の表面に設けられる。駆動時点灯ランプ４２は、二つの配線３０に接続して設けられ、スイッチ４４がオンになると、電源４１からの電力により点灯する。なお、電源４１の正極に接続した配線３０において、駆動時点灯ランプ４２は、スイッチ４４よりも電源４１からみて下流となる位置に接続している。また、接触時点灯ランプ４３は、電源４１の正極に接続した配線３０に設けられる。接触時点灯ランプ４３は、電源４１の正極に接続した配線３０において、駆動時点灯ランプ４２の接続箇所よりも一方の接続部材１０側に設けられる。本実施形態において、駆動時点灯ランプ４２は、点灯すると緑色に発光する発光素子により構成され、接触時点灯ランプ４３は、点灯すると赤色に発光する発光素子により構成される。こうして、端面接触確認器具１は、２つの接続部材１０と、電源４１と、ランプ４２，４３とが配線３０，３０で接続される。   The driving lighting lamp 42 and the contact lighting lamp 43 are provided on the surface of the housing 20. The driving lamp 42 is connected to the two wirings 30 and is lit by the power from the power supply 41 when the switch 44 is turned on. In the wiring 30 connected to the positive electrode of the power supply 41, the driving lamp 42 is connected to a position downstream of the switch 44 as viewed from the power supply 41. Further, the lighting lamp 43 at the time of contact is provided on the wiring 30 connected to the positive electrode of the power supply 41. The contact-time lighting lamp 43 is provided on the one connecting member 10 side of the wiring 30 connected to the positive electrode of the power source 41 with respect to the connection position of the driving-time lighting lamp 42. In the present embodiment, the driving lamp 42 is composed of a light emitting element that emits green light when lit, and the contact lighting lamp 43 is composed of a light emitting element that emits red light when lit. In this way, in the end face contact confirmation device 1, the two connection members 10, the power source 41, and the lamps 42 and 43 are connected by the wirings 30 and 30.

次に、導通性マウントフランジ１２３の端面１２５を、導通性フランジ端面修正治具５０を用いて修正する工程を説明する。図４は、図１に示された切削装置の保持テーブルに導通性フランジ端面修正治具を載置した状態を示す断面図であり、図５は、図４に示された導通性フランジ端面修正治具と切削装置の導通性マウントフランジに接続部材を接続した状態を示す断面図であり、図６は、図５に示す導通性フランジ端面修正治具の砥石と切削装置の導通性マウントフランジの端面とが接触した状態を示す断面図である。図７は、図６に示す導通性フランジ端面修正治具の砥石と切削装置の導通性マウントフランジの端面よりも内周部分が対面した状態を示す断面図である。   Next, a process of correcting the end face 125 of the conductive mount flange 123 using the conductive flange end face correction jig 50 will be described. 4 is a cross-sectional view showing a state in which a conductive flange end face correction jig is placed on the holding table of the cutting apparatus shown in FIG. 1, and FIG. 5 is a view of correcting the conductive flange end face shown in FIG. FIG. 6 is a cross-sectional view showing a state in which a connecting member is connected to the conductive mount flange of the jig and the cutting apparatus, and FIG. 6 is a diagram of the grindstone of the conductive flange end face correction jig shown in FIG. It is sectional drawing which shows the state which contacted the end surface. FIG. 7 is a cross-sectional view showing a state in which the inner peripheral portion faces the grindstone of the conductive flange end face correction jig shown in FIG. 6 and the end face of the conductive mount flange of the cutting apparatus.

まず、オペレータが、切削装置１００の切削手段１２０のスピンドル１２２の先端に導通性マウントフランジ１２３を固定し、入力手段１０３から切削装置１００を操作してスピンドル１２２の回転を停止させ、真空吸引源を停止しておく。オペレータが、チャックテーブル１１０を導通性保持テーブル１１５から取り外し、図４に示すように、導通性保持テーブル１１５上に導通性フランジ端面修正治具５０の支持基台８０を載置する。このとき、砥石６０を支持基台８０の外縁から切削手段１２０に突出し、砥石６０の長手方向とＹ軸方向即ちスピンドル１２２の軸心を平行にする。   First, the operator fixes the conductive mount flange 123 to the tip of the spindle 122 of the cutting means 120 of the cutting apparatus 100, operates the cutting apparatus 100 from the input means 103 to stop the rotation of the spindle 122, and turns off the vacuum suction source. Stop it. The operator removes the chuck table 110 from the conductive holding table 115 and places the support base 80 of the conductive flange end surface correcting jig 50 on the conductive holding table 115 as shown in FIG. At this time, the grindstone 60 protrudes from the outer edge of the support base 80 to the cutting means 120, and the longitudinal direction of the grindstone 60 and the Y-axis direction, that is, the axis of the spindle 122 are made parallel.

そして、オペレータが、図５に示すように、端面接触確認器具１の一方の接続部材１０の挟持部材１１の一端部１１ａ間に導通性フランジ端面修正治具５０の導通性プレート６２を挟んで、一方の接続部材１０を導通性フランジ端面修正治具５０の砥石６０に電気的に接続する。オペレータが端面接触確認器具１の他方の接続部材１０の挟持部材１１の一端部１１ａ間に導通性マウントフランジ１２３のボス部１２３ｂを挟んで、他方の接続部材１０を導通性マウントフランジ１２３に電気的に接続する。オペレータが、スイッチ４４をオンにし、駆動時点灯ランプ４２が点灯する。   Then, as shown in FIG. 5, the operator sandwiches the conductive plate 62 of the conductive flange end surface correction jig 50 between the one end portions 11 a of the holding member 11 of the one connection member 10 of the end surface contact confirmation instrument 1, One connecting member 10 is electrically connected to the grindstone 60 of the conductive flange end face correcting jig 50. The operator sandwiches the boss portion 123b of the conductive mount flange 123 between the one end portions 11a of the holding member 11 of the other connection member 10 of the end surface contact confirmation instrument 1, and electrically connects the other connection member 10 to the conductive mount flange 123. Connect to. The operator turns on the switch 44 and the driving lamp 42 lights up.

そして、オペレータが、入力手段１０３によりチャックテーブル１１０と切削手段１２０との位置を調整して、砥石６０の端面修正部６１と導通性マウントフランジ１２３の端面１２５とがＹ軸方向で対面する位置に調整する。その後、オペレータが、入力手段１０３によりＹ軸移動手段１４０で切削手段１２０を導通性フランジ端面修正治具５０に近づけさせ、図６に示すように、砥石６０と導通性マウントフランジ１２３とを接触させる。すると、接触時点灯ランプ４３が点灯する。こうして、端面接触確認器具１は、砥石６０が導通性マウントフランジ１２３の端面１２５に接触すると接触時点灯ランプ４３が点灯して、砥石６０と導通性マウントフランジ１２３の端面１２５の接触をオペレータに知らせる。   Then, the operator adjusts the positions of the chuck table 110 and the cutting means 120 by the input means 103 so that the end face correcting portion 61 of the grindstone 60 and the end face 125 of the conductive mount flange 123 face each other in the Y-axis direction. adjust. After that, the operator causes the cutting means 120 to approach the conductive flange end face correcting jig 50 by the Y-axis moving means 140 by the input means 103 and brings the grindstone 60 and the conductive mount flange 123 into contact as shown in FIG. . Then, the lighting lamp 43 at the time of contact lights up. Thus, when the grindstone 60 comes into contact with the end face 125 of the conductive mount flange 123, the end face contact confirmation instrument 1 turns on the contact lamp 43 and informs the operator of the contact between the grindstone 60 and the end face 125 of the conductive mount flange 123. .

その後、オペレータが、入力手段１０３を操作して真空吸引源を駆動させて、支持基台８０即ち導通性フランジ端面修正治具５０を導通性保持テーブル１１５に吸引保持（即ち固定）する。オペレータが、スイッチ４４をオフにし、一方の接続部材１０を導通性フランジ端面修正治具５０から取り外し、他方の接続部材１０を導通性マウントフランジ１２３から取り外して、端面接触確認器具１を切削装置１００から取り外す。オペレータが、入力手段１０３を操作して、Ｚ軸移動手段１５０で切削手段１２０を下降させて、図７に示すように、砥石６０の端面修正部６１が導通性マウントフランジ１２３の端面１２５よりも内周部分において導通性マウントフランジ１２３と対面する位置に調整する。オペレータが、入力手段１０３を操作して、Ｘ軸移動手段で保持テーブル１１５即ち砥石６０をＸ軸方向に往復移動させながら、スピンドル１２２を回転させて、砥石６０に導通性マウントフランジ１２３の端面１２５を接触させて、端面１２５を平坦かつスピンドル１２２の軸心とのなす角度を直角に修正する。このように、砥石６０と端面１２５とが接触する位置から切削手段１２０を下降させるのは、下降させないと端面１２５の外周部分しか修正できないとともに、砥石６０と端面１２５とが接触する位置から切削手段１２０を下降させることで、端面１２５の内周部分と外周部分の全面を修正できるからである。   Thereafter, the operator operates the input means 103 to drive the vacuum suction source to suck and hold (that is, fix) the support base 80, that is, the conductive flange end face correction jig 50, to the conductive holding table 115. The operator turns off the switch 44, removes one connection member 10 from the conductive flange end face correction jig 50, removes the other connection member 10 from the conductive mount flange 123, and connects the end face contact confirmation instrument 1 to the cutting device 100. Remove from. The operator operates the input means 103 and lowers the cutting means 120 with the Z-axis moving means 150, so that the end face correcting portion 61 of the grindstone 60 is more than the end face 125 of the conductive mount flange 123 as shown in FIG. It adjusts to the position which faces the electroconductive mounting flange 123 in an inner peripheral part. The operator operates the input means 103 to rotate the spindle 122 while the holding table 115, that is, the grindstone 60 is reciprocated in the X-axis direction by the X-axis moving means, so that the end face 125 of the conductive mount flange 123 is rotated on the grindstone 60. Are brought into contact with each other, and the angle between the end face 125 and the axis of the spindle 122 is corrected to a right angle. As described above, the cutting means 120 is lowered from the position where the grindstone 60 and the end face 125 are in contact with each other, and only the outer peripheral portion of the end face 125 can be corrected unless it is lowered. This is because the entire inner peripheral portion and outer peripheral portion of the end face 125 can be corrected by lowering 120.

以上のように、実施形態に係る端面接触確認器具１によれば、砥石６０が端面１２５に接触すると接触時点灯ランプ４３が点灯するので、砥石６０が導通性マウントフランジ１２３の端面１２５に接触した状態を簡易に確認することができる。このために、端面接触確認器具１は、目視で砥石６０と導通性マウントフランジ１２３を確認せずとも、砥石６０が端面１２５に接触すると接触時点灯ランプ４３が点灯するので、砥石６０が端面１２５に接触した時点で、砥石６０と端面１２５の接触を確認できる。よって、端面接触確認器具１は、砥石６０と導通性マウントフランジ１２３を目視しにくい場合であっても、砥石６０を破損させることなく、切削手段１２０と砥石６０との位置決めを行うことができる。したがって、端面接触確認器具１は、砥石６０を破損させることなく、切削手段１２０と砥石６０との位置決めに要する時間を抑制することができる。   As described above, according to the end face contact confirmation instrument 1 according to the embodiment, when the grindstone 60 comes into contact with the end face 125, the lighting lamp 43 is turned on at the time of contact. The state can be easily confirmed. For this reason, the end face contact confirmation instrument 1 does not visually confirm the grindstone 60 and the conductive mount flange 123, but when the grindstone 60 comes into contact with the end face 125, the lighting lamp 43 is turned on when the grindstone 60 comes into contact. At the point of time of contact, the contact between the grindstone 60 and the end face 125 can be confirmed. Therefore, the end face contact confirmation instrument 1 can position the cutting means 120 and the grindstone 60 without damaging the grindstone 60 even when the grindstone 60 and the conductive mount flange 123 are difficult to see. Therefore, the end surface contact confirmation instrument 1 can suppress the time required for positioning the cutting means 120 and the grindstone 60 without damaging the grindstone 60.

また、端面接触確認器具１は、接続部材１０が互いに回転自在に連結された一対の挟持部材１１と挟持部材１１の一端部１１ａ同士を近付く方向に付勢する付勢部材１２とを備える。このために、端面接触確認器具１は、接続部材１０が導通性フランジ端面修正治具５０の砥石６０及び導通性マウントフランジ１２３に容易に着脱自在とすることができ、切削装置１００を改造することなく、切削装置１００への設置の所要時間を抑制することができる。さらに、端面接触確認器具１は、電源４１、スイッチ４４及び接触時点灯ランプ４３を設けた筐体２０と、電源４１と接続部材１０とを接続した配線３０により構成されているので、持ち運びが容易となり、必要に応じて適宜使用することができる。   Moreover, the end surface contact confirmation instrument 1 includes a pair of sandwiching members 11 to which the connecting member 10 is rotatably connected, and a biasing member 12 that biases the one end portions 11a of the sandwiching members 11 toward each other. For this reason, in the end face contact confirmation instrument 1, the connecting member 10 can be easily attached to and detached from the grindstone 60 and the conductive mount flange 123 of the conductive flange end face correction jig 50, and the cutting device 100 can be modified. In addition, the time required for installation in the cutting apparatus 100 can be suppressed. Furthermore, since the end surface contact confirmation instrument 1 is configured by the casing 20 provided with the power source 41, the switch 44 and the contact lighting lamp 43, and the wiring 30 connecting the power source 41 and the connecting member 10, it is easy to carry. And can be used as needed.

なお、本発明は上記実施形態に限定されるものではない。即ち、本発明の骨子を逸脱しない範囲で種々変形して実施することができる。   The present invention is not limited to the above embodiment. That is, various modifications can be made without departing from the scope of the present invention.

１ 端面接触確認器具
１０ 接続部材
３０ 配線
４１ 電源
４３ 接触時点灯ランプ（ランプ）
５０ 導通性フランジ端面修正治具
６０ 砥石
７０ 砥石支持部材
８０ 支持基台
１１５ 導通性保持テーブル
１２１ 切削ブレード
１２２ スピンドル
１２３ 導通性マウントフランジ
１２５ 端面 DESCRIPTION OF SYMBOLS 1 End surface contact confirmation instrument 10 Connection member 30 Wiring 41 Power supply 43 Light lamp (lamp) at the time of contact
50 Conductive flange end face correction jig 60 Grinding stone 70 Grinding wheel support member 80 Support base 115 Conductive holding table 121 Cutting blade 122 Spindle 123 Conductive mount flange 125 End face

Claims (1)

回転可能に支持されたスピンドルの先端に固定され、導通性保持テーブルに保持された被加工物を切削する切削ブレードをマウントする導通性マウントフランジの端面を、砥石と砥石支持部材と支持基台とを有する導通性フランジ端面修正治具を用いて修正する際に用いる端面接触確認器具であって、
２つの接続部材と、電源と、ランプと、を備え、
該接続部材と、電源と、ランプと、は配線で接続されており、
一方の接続部材は、該導通性フランジ端面修正治具に接続され、他方の接続部材は該導通性マウントフランジに接続され、
該砥石が該導通性マウントフランジに接触するとランプが点灯し該砥石と該導通性マウントフランジの接触を知らせることを特徴とする端面接触確認器具。 The end face of the conductive mount flange that mounts the cutting blade that is fixed to the tip of the spindle that is rotatably supported and that cuts the workpiece held by the conductive holding table is provided with a grindstone, a grindstone support member, and a support base. An end face contact confirmation instrument used when correcting using a conductive flange end face correcting jig having
Including two connecting members, a power source, and a lamp;
The connecting member, the power source, and the lamp are connected by wiring,
One connection member is connected to the conductive flange end face correction jig, and the other connection member is connected to the conductive mount flange.
An end face contact confirmation instrument, wherein when the grindstone contacts the conductive mount flange, a lamp is lit to notify the contact between the grindstone and the conductive mount flange.
JP2015130113A 2015-06-29 2015-06-29 End face contact check device Active JP6527034B2 (en)

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