JP5690646B2 - Electrode unit - Google Patents

Description

  The present invention relates to an electrode unit that has an electrode that is attached to and detached from a cutting device having a cutting blade and that contacts an axis of rotation that rotates the cutting blade when mounted.

  A cutting apparatus used for cutting various workpieces such as semiconductor wafers includes a chuck table for holding a workpiece and a cutting means having a rotatable cutting blade for cutting the workpiece held on the chuck table. The workpiece can be cut by cutting the workpiece into a predetermined depth with respect to the workpiece.

  For the cutting blade, in order to precisely control the cutting depth, the origin in the cutting direction is set in advance. Specifically, an electrode is brought into contact with the rear end of the rotating shaft on which the cutting blade is mounted, the cutting blade and the chuck table are brought into contact with each other, and the cutting blade and the chuck table are electrically connected to each other to form a closed circuit. The cutting blade depth is precisely controlled by recognizing the position in the cutting direction of the cutting blade at the moment when is formed as the origin (see, for example, Patent Document 1).

Utility Model Registration No. 2597808

  However, since the electrode that contacts the rear end portion of the rotating shaft is fixed to the housing that rotatably supports the rotating shaft with a screw, there is a problem that it takes a considerable amount of time to attach and detach such as replacing the electrode.

  The present invention has been considered in view of such a problem, and an object of the present invention is to easily attach and detach an electrode with respect to a rear end portion of a rotating shaft on which a cutting blade is mounted.

  The present invention is attached to a cutting means in a cutting apparatus including at least a chuck table for holding a workpiece and a cutting means having a rotatable cutting blade for cutting the workpiece held on the chuck table. The electrode unit relates to a cutting means comprising a rotating shaft, a mount portion formed on one end portion of the rotating shaft, on which a cutting blade is detachably mounted, and an air bearing that supports the rotating shaft with air. A stator coupled to the housing and driving the rotating shaft; and an electrode unit mounted on the housing and in contact with the other end of the rotating shaft and energizing the rotating shaft, the electrode unit comprising the other end of the rotating shaft A cylindrical electrode terminal that is in contact with the electrode, a holder having a cylindrical part with a through-hole that accommodates the electrode terminal so as to be able to move forward and backward, and a holder formed on the holder. A flange portion mounted on the housing and a pressing spring connected to a fixing portion having one end coupled to the electrode terminal and the other end fixed to the holder. A claw portion for stopping is formed, and an engaged portion for engaging the claw portion is formed on the collar portion. The engaged portion is engaged with the claw portion, and the column portion is inserted into the housing. By rotating the collar portion around the rotation axis, the collar portion is locked to the claw portion, and the holder is fixed to the housing.

  A pair of through holes are formed in the holder, and electrode terminals are accommodated in the respective through holes. In addition, it is desirable that a concave portion is formed in the side wall of the cylindrical portion or the collar portion of the holder, and a convex portion that engages with the concave portion is pressed by a spring and disposed in the housing.

  In the present invention, the holder for accommodating the electrode terminal of the electrode unit includes a cylindrical portion and a collar portion, the cylindrical portion is inserted into the housing, and a claw portion for locking the collar portion is formed in the housing. Since the engaged portion that engages with the claw portion is provided, the electrode unit is inserted into the housing with the claw portion and the engaged portion engaged with each other, and the collar unit is simply rotated by rotating the collar portion. Can be fixed against. Therefore, the electrode unit can be attached to and detached from the housing very easily.

It is a perspective view which shows an example of a cutting device. It is a disassembled perspective view which shows a cutting means. It is sectional drawing which shows a cutting means and an electrode unit schematically. It is a disassembled perspective view which shows an electrode unit. It is a perspective view which shows the electrode unit of the state which accommodated the electrode terminal in the holder. It is a perspective view which shows the electrode unit of the state which accommodated and fixed the electrode terminal in the holder. It is a disassembled perspective view which shows a housing and an electrode unit. It is a front view which shows the state which attached the electrode unit to the housing. It is explanatory drawing which shows a cutting means and its peripheral circuit.

  A cutting apparatus 1 shown in FIG. 1 is an apparatus in which a workpiece held on a chuck table 2 is cut by a cutting means 3. The chuck table 2 is cut in the X-axis direction by a cutting feed means 4. The cutting means 3 is indexed and fed in the Y axis direction by the index feeding means 5 and cut and fed in the Z axis direction by the cutting feed means 6. An imaging means 10 for detecting the position of the workpiece to be cut is fixed to the side of the cutting means 3.

  The cutting feed means 4 includes a ball screw 40 having an axis in the X-axis direction, a pair of guide rails 41 disposed in parallel to the ball screw 40, a servo motor 42 connected to one end of the ball screw 40, and the ball screw 40. The base portion 43 includes a base portion 43 that has a nut (not shown) to be screwed therein and whose lower portion is in sliding contact with the guide rail 41. The base portion 43 is moved to the guide rail as the ball screw 40 is rotated by being driven by the servomotor 42. 41 is slid in the X-axis direction, and accordingly, the chuck table 2 moves in the X-axis direction.

  The index feeding means 5 includes a ball screw 50 having an axis in the Y-axis direction, a pair of guide rails 51 disposed in parallel to the ball screw 50, a servo motor 52 connected to one end of the ball screw 50, and the ball screw 50. It has a nut (not shown) to be screwed inside and a slide part 53 whose lower part is in sliding contact with the guide rail 51. The slide part 53 is moved to the guide rail as the ball screw 50 is rotated by being driven by the servo motor 52. 51 is slid in the Y-axis direction, and the cutting means 3 is also moved in the Y-axis direction along with this.

  The cutting feed means 6 includes a ball screw 60 having an axis in the Z-axis direction, a pair of guide rails 61 arranged in parallel to the ball screw 60, a servo motor 62 connected to one end of the ball screw 60, and the ball screw 60. It has a nut inside (not shown) that is screwed together, and a side portion that is in sliding contact with the guide rail 61 and supports the cutting means 3. The ball screw 60 is driven by the servomotor 62 and rotates. The support portion 63 is guided by the guide rail 61 and moves up and down in the Z-axis direction, and the cutting means 3 is also moved up and down in the Z-axis direction.

  A workpiece (work) W held on the chuck table 2 is attached to the tape T, a ring-shaped frame F is attached to the peripheral portion of the tape T, and the work W is attached to the frame F via the tape T. Supported. Correspondingly, the chuck table 2 includes a holding surface 20 that communicates with a suction source (not shown) and holds a workpiece, and a frame support portion 21 that supports the frame F around the holding surface 20. The holding surface 20 is supported from the outer peripheral side by a metal frame 22.

  As shown in FIG. 2, the cutting means 3 is formed at one end of the rotating shaft 30, a metal rotating shaft 30 having a Y-axis axis, a housing 31 that rotatably supports the rotating shaft 30, and the rotating shaft 30. The mounted portion 32, the cutting blade 33 that is detachably attached to the shaft portion 320 of the mount portion 32, and the nut 34 that is fastened to the male screw 321 formed at the distal end portion of the mount portion 32 and fixes the cutting blade 33. It is composed of The cutting blade 33 is configured by forming a grindstone portion 331 on the peripheral edge of a metal base 330 and has conductivity as a whole.

  As shown in FIG. 3, the housing 31 includes a thrust air bearing 310 that supports the rotating shaft 30 in the thrust direction with air, and a radial air bearing 311 that supports the rotating shaft 30 in the radial direction with air.

  The rotating shaft 30 includes a rotor 35, and a stator 36 that rotationally drives the rotor 35 is connected to the housing 31. By supplying electric power to the stator 36, the rotating shaft 30 can be rotated. An opening 312 is formed at the rear end of the housing 31, and the electrode unit 7 is inserted into the opening 312 and attached to the housing 31 of the cutting means 3.

  As shown in FIG. 4, the electrode unit 7 mounted on the housing is a cylinder in which a plurality of electrode terminals 70 formed in a columnar shape and a pair of through-holes 710 that accommodate the electrode terminals 70 so as to advance and retract are formed. A holder 71 including a portion 71a, a flange 72 formed on the holder 71 and having a diameter enlarged from the columnar portion 71a and attached to the housing 31, a pressing spring 73 having one end fixed to the electrode terminal 70 and having conductivity. The fixing portion 74 is electrically connected to the other end of the pressing spring 73 and is fixed to the holder 71. The fixing portion 74 is formed in a flat plate shape in the example of FIG. In addition, a conductive wire 75 is connected to each of the fixed portions 74.

  As shown in FIG. 5, a locking member 710 having an L-shaped cross section is provided on the rear end surface of the holder 71. The electrode terminal 70 is inserted into the through hole 710, and as shown in FIG. And the electrode terminal 70 and the pressing spring 73 are fixed inside the through hole 710 of the holder 71. When the electrode terminal 70 is accommodated and fixed in the holder 71, the tip of the electrode terminal 70 is exposed from the through hole 710 shown in FIG.

  As shown in FIGS. 4 to 6, an engaged portion 720 formed by cutting out in an arc shape is formed on a part of the outer periphery of the collar portion 72 formed in a disc shape. On the other hand, as shown in FIG. 7, the housing 31 has a small-diameter shaft portion 8a protruding from the rear end surface 31a, and a claw portion 8 having a larger diameter than the shaft portion 8a is formed at the tip of the shaft portion 8a. Is formed. The claw portion 8 is formed in a shape that can be engaged with the engaged portion 720. For example, the radius of curvature of the inner peripheral portion of the engaged portion 720 is formed to be greater than or equal to the radius of curvature of the outer periphery of the claw portion 8.

  As shown in FIG. 4, a recess 712 is formed on the side wall of the cylindrical portion 71 a of the holder 71. On the other hand, as shown in FIG. 7, a convex portion 313 that fits into the concave portion 712 is formed on the inner peripheral surface 312 a of the opening portion 312 of the housing 31. The convex portion 313 is disposed in a state of being pressed so as to protrude from the inner peripheral surface 312 a by a spring (not shown) provided inside the housing 31. The concave portion 712 may be formed on the side wall 721 of the collar portion 72, and the convex portion 313 may be formed on the rear end surface 31 a of the housing 31.

  As shown in FIG. 7, the engaged portion 720 formed on the collar portion 72 and the claw portion 8 are aligned, and in this state, the cylindrical portion 71 a of the electrode unit 7 is inserted into the opening 312 of the housing 31. Then, since the collar portion 72 is engaged with the claw portion 8, the collar portion 72 is inserted deeper than the claw portion 8. Further, when the electrode unit 7 is inserted, the convex portion 313 protruding from the inner peripheral surface 312a of the housing 31 is immersed.

  After the electrode unit 7 is inserted into the opening 312, as shown in FIG. 8, when the collar portion 72 is rotated about the axis of the cylindrical portion 71 a of the holder 71 as the rotation axis, the position of the engaged portion 720 and the claw portion 8 does not match the position of 8 and the collar portion 72 is locked to the claw portion 8. At this time, the convex portion 313 shown in FIG. 7 is engaged with the concave portion 712 shown in FIG. 4, and the electrode unit 7 is fixed to the housing 31.

  When the electrode unit 7 is thus inserted into the housing 31 and fixed, as shown in FIG. 9, the electrode terminal 70 protruding from the holder 71 of the electrode unit 7 is the end surface of the rotor 35 that is the other end of the rotating shaft 30. To touch.

  One of the conductive wires 75 constituting the electrode unit 7 is connected to the power supply 90 and the other is connected to the switch 91. An ammeter 92 is provided between the power supply 90 and the switch 91. When the switch 91 is turned on with the electrode unit 7 mounted on the housing 31 and the electrode terminal 70 contacting the rotor 35, the power supply 90 rotates. The shaft 30 (rotor 35), the electrode unit 7, the switch 91, and the ammeter 92 are connected to form a closed circuit, and the ammeter detects that the electrode terminal is in contact with the rotor 35. Can be confirmed. That is, the closed circuit including the power source 90, the rotor 35, the switch 91, and the ammeter 92 functions as a contact confirmation circuit.

  On the other hand, the power source 90 is connected to the frame body 22 of the chuck table 2 via a switch 93 and an ammeter 94. When the switch 93 is turned on and driven by the cutting feed means 6 shown in FIG. 1 and the cutting means 3 descends and the cutting blade 33 contacts the frame 22, the power supply 90, the switch 93, the ammeter 94, The frame 22, the cutting blade 33, the rotary shaft 30, the rotor 35, and the electrode unit 7 are electrically connected to form a closed circuit, and the origin detection means 95 connected to the ammeter 94 is electrically connected to form the closed circuit. And the position of the cutting blade 33 at that moment in the Z-axis direction is recognized as the origin, and the subsequent cutting depth is controlled with this origin as a reference. That is, the closed circuit including the power supply 90, the switch 93, the ammeter 94, the frame 22, the cutting blade 33, the rotating shaft 30, the rotor 35, and the electrode unit 7 is an origin for detecting the origin position of the cutting blade 33 in the Z-axis direction. Functions as a detection circuit.

  As described above, the claw portion 8 is formed in the housing 31, and the engagement portion 720 that engages the claw portion 8 is formed in the collar portion 72 of the electrode unit 7. The electrode unit 7 can be fixed to the housing 31 simply by inserting the electrode unit 7 into the opening 312 of the housing 31 with the joint portion 720 engaged and rotating the collar portion 72. On the other hand, when removing the electrode unit 7 from the housing 31, it is only necessary to rotate the collar portion 72 to align the claw portion 8 and the engaged portion 720 and to pull out the electrode unit 7 in that state. Therefore, the electrode unit 7 can be attached to and detached from the housing 31 very easily.

  In addition, a concave portion 712 is formed on the side wall of the cylindrical portion 71 a of the holder 71, and a convex portion 313 that fits into the concave portion 712 is formed on the inner peripheral surface 312 a of the opening 312 of the housing 31. When the electrode unit 7 is inserted into the opening 312 and the collar portion 72 is rotated, the convex portion 313 engages with the concave portion 712, and the electrode unit 7 is stably held inside the housing 31.

  As described above, when the origin position in the Z-axis direction of the cutting blade 33 is recognized by the origin detection means 95, the workpiece W supported by the frame F via the tape T is moved to the chuck table 2 as shown in FIG. Retained. After the position of the workpiece W to be cut is detected by the imaging means 10, the chuck table 2 is sent in the X-axis direction, and the cutting means 3 descends while the cutting blade 33 rotates at a high speed. The cut position is cut. The cutting depth of the cutting blade 33 with respect to the workpiece W at this time is accurately controlled based on the origin recognized by the origin detection means 95.

  Such cutting is performed sequentially while the cutting means 3 is indexed and fed in the Y-axis direction, and when the chuck table 2 is further rotated 90 degrees and then cut in the same manner, the workpiece W is cut vertically and horizontally to each device. Divided.

1: Cutting device 2: Chuck table 20: Holding surface 21: Frame support portion 22: Frame body 3: Cutting means 30: Rotating shaft 31: Housing 310: Thrust air bearing 311: Radial air bearing 312: Opening portion 32: Mount portion 320: Shaft part 321: Male thread 33: Cutting blade 330: Base 331: Grinding wheel part 34: Nut 35: Rotor 36: Stator 4: Cutting feed means 40: Ball screw 41: Guide rail 42: Servo motor 43: Base part 5: Index feed means 50: Guide rail 51: Guide rail 52: Servo motor 53: Slide part 6: Cut feed means 60: Ball screw 61: Guide rail 62: Servo motor 63: Lifting part 7: Electrode unit 70: Electrode terminal 71: Holder 71a: Column part 710: Through hole
72: collar part 720: engaged part 73: pressing spring 74: fixing part 75: conductive wire 8: claw part 8a: shaft part 90: power supply 91: switch 92: ammeter 93: switch 94: ammeter 95: origin Detection means

Claims (3)

An electrode attached to the cutting means in a cutting apparatus comprising at least a chuck table for holding a workpiece and a cutting means having a rotatable cutting blade for cutting the workpiece held on the chuck table A unit,
The cutting means includes a rotation shaft, a mount portion formed at one end of the rotation shaft to which a cutting blade is detachably mounted, a housing including an air bearing that supports the rotation shaft with air, A stator connected to the housing and driving the rotating shaft; and an electrode unit mounted on the housing and in contact with the other end of the rotating shaft and energizing the rotating shaft;
The electrode unit includes a cylindrical electrode terminal that contacts the other end of the rotating shaft, a holder that includes a cylindrical part in which a through hole that accommodates the electrode terminal is retractable, and is formed in the holder. And a flange portion mounted on the housing, and a pressing spring having one end coupled to the electrode terminal and the other end coupled to a fixing portion fixed to the holder,
The housing is formed with a claw portion for locking the collar portion, the collar portion is formed with an engaged portion for engaging the claw portion, and the engaged portion is connected to the claw portion. The cylindrical portion is inserted into the housing by being engaged, and the collar portion is locked to the claw portion by rotating the collar portion around the cylindrical portion as a rotation axis, and the holder is fixed to the housing. Electrode unit. The electrode unit according to claim 1, wherein the holder is formed with a pair of the through holes, and the electrode terminals are accommodated in the through holes, respectively. The electrode unit according to claim 1, wherein a concave portion is formed in a side wall of the cylindrical portion or the collar portion of the holder, and a convex portion that engages with the concave portion is pressed by a spring in the housing.

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