JP5549010B2 - Processing apparatus and method for driving the apparatus - Google Patents

Description

  The present invention relates to a machining apparatus having a machining tool position correction mechanism and a driving method thereof.

  The cutting device is a device that performs contact processing of a workpiece using a cutting tool. In a machining process using a cutting device, when damage such as chipping occurs in the cutting tool, it is necessary to replace the cutting tool.

  When the tool is exchanged, it is necessary to align the tool tip with the workpiece. This alignment is performed, for example, by a method (referred to as method 1) in which the positional relationship between the tip of the cutting tool and the workpiece is observed with the naked eye. Alternatively, a method of measuring the position of the tool tip using a contact sensor (referred to as method 2), or a method of measuring the position of the tool tip using a non-contact sensor (method 3: see Patent Document 1). From the positional relationship between the tip of the cutting tool and the object to be processed obtained by the above method, the cutting processing restart position after replacing the cutting tool is calculated.

Japanese published patent publication: Japanese Patent Application Laid-Open No. 2004-34278 (filed on February 5, 2004)

  However, in the above method 1, since it is difficult to finely adjust the positional relationship between the tip of the cutting tool and the workpiece, the tip of the cutting tool after replacement has a sufficient distance from the processing surface of the processing target. I need to keep it. In addition, since cutting after resuming cutting needs to be performed with fine precision to prevent breakage of the cutting tool, it is inevitably equivalent to several hundred cross-sections before the cutting tool tip reaches the workpiece. There is a problem that it is necessary to repeat the machining operation. In particular, when using a bit made of a very brittle material such as diamond, when using a bit with a very sharp shape, or when machining with a precision of a micron is required, the above problem is remarkable. It becomes.

  On the other hand, in the above method 2, since it is necessary to press the tip of the cutting tool against the sensor at the time of measurement, when using a cutting tool made of a very fragile material, or when using a cutting tool having a very sharp shape, the tip of the cutting tool is used. There is a problem that there is a risk of damage. In particular, this problem becomes significant in a tool used for precision machining, and cannot be employed.

  In the method 3, the possibility that the tip of the cutting tool shown in the method 2 is damaged is avoided. However, there is a problem that measurement accuracy is inferior due to the property of non-contact measurement. In particular, this problem becomes significant when the cutting tool is made of a transparent material such as diamond. Further, the non-contact type sensor has a problem in cost that it is expensive.

  The present invention has been made in view of the above problems, and a main object of the present invention is to provide a machining apparatus capable of accurately correcting the position of a machining tool with a simple configuration, and a driving method thereof.

  In order to solve the above-described problems, a processing apparatus according to the present invention includes a sample support unit configured to be capable of attaching a processing object, and a tool configured to be capable of mounting a processing tool for contact processing of the processing object. In a processing apparatus comprising a support shaft portion and an observation portion for observing a surface to be processed of the workpiece, it is configured to be able to attach a positioning sample that is contact processed by the processing tool and is different from the workpiece. A position for acquiring distance information between the positioning sample support portion, the processing surface of the positioning sample and the processing tool, and correcting the distance between the processing surface of the processing object and the processing tool based on the distance information And a correction unit.

  The distance information may be the distance between the processing surface of the positioning sample and the processing tool, or distance information (to be described later) that indirectly indicates the distance between the processing surface and the processing tool. Such as the amount of movement of the observation section until focusing is achieved.

  In the processing apparatus according to the present invention, the observation unit is configured to be capable of relative movement along the axial direction of the tool support shaft with respect to the processing object and the positioning sample. The position correction unit is configured to include an observation unit, and after the contact processing of the positioning sample with the processing tool, the position correction unit changes the interval between the processing surface of the positioning sample and the observation unit, The distance information may be a relative movement amount of the observation unit until the surface to be processed is observed and focused.

  In the processing apparatus according to the present invention, the observation unit and the tool support shaft unit are configured to be capable of integral movement along the axial direction of the tool support shaft unit, and the position correction unit includes the observation unit. After the positioning sample is contact-processed by the processing tool, the position correction unit changes the distance between the processing surface of the positioning sample and the observation unit, and the observation unit performs the processing. It is preferred that the distance information is the amount of movement of the observation unit until the surface is observed and focused.

  In addition, as an example of the relative movement amount of the observation unit or the movement amount of the observation unit, the height of the observation unit when the positioning sample is contact processed with a processing tool is set as a reference position, and the observation unit is When the height at which the surface to be processed is focused is set as the focus position, the distance in the height direction between the focus position and the reference position can be given.

  In the processing apparatus according to the present invention, the position correction unit moves the tool support shaft portion along the axial direction based on the obtained distance information, so that the surface to be processed and the processing tool of the processing object are obtained. It is preferable to correct the above distance.

  In the processing apparatus according to the present invention, the position correction unit corrects the distance between the workpiece surface of the processing object and the processing tool in the replacement of the processing tool, and is acquired before the replacement of the processing tool. A difference between the distance information and the distance information acquired after replacement of the machining tool may be used as a correction amount for the distance.

  In order to make the correction amount more accurate, it is preferable that the relative positional relationship between the observation portion and the tool support shaft portion during contact machining is constant before and after the machining tool is replaced. Or it is preferable to acquire the said distance information after replacement | exchange of a processing tool on the basis of the relative positional relationship of the observation part at the time of contact processing before replacement | exchange of a processing tool, and a tool support shaft part.

  In the processing apparatus according to the present invention, the position correction unit corrects the distance between the processing surface of the workpiece and the processing tool when the processing tool is reattached, and before the processing tool is reattached. A difference between the acquired distance information and the distance information acquired after reattaching the machining tool may be used as a correction amount for the distance.

  In order to make the correction amount more accurate, it is preferable that the relative positional relationship between the observation portion and the tool support shaft portion at the time of contact machining is constant before and after the machining tool is remounted. . Or it is preferable to acquire the said distance information after reattaching a processing tool on the basis of the relative positional relationship of the observation part and tool support shaft part at the time of contact processing before reattaching a processing tool.

  In the processing apparatus according to the present invention, the observation unit includes an imaging unit, and a three-dimensional structure constituting the three-dimensional structure of the processing object from a continuous image of the processing surface of the processing object captured by the imaging unit. It is preferable to have a component.

  In the processing apparatus according to the present invention, the observation unit includes an imaging unit, and determination on whether or not the processing tool needs to be replaced or reattached from an image of the processing surface of the processing object captured by the imaging unit. It is preferable that a part is provided.

  In the processing apparatus according to the present invention, the processing tool may be a cutting tool, a grindstone, or a knife.

  In the processing apparatus according to the present invention, the positioning sample is preferably a material having a hardness lower than that of the processing object.

  In the processing apparatus according to the present invention, the positioning sample is preferably made of resin or clay, and the processing object is preferably made of metal.

  In the processing apparatus according to the present invention, the positioning sample may have the processing surface colored with two or more colors, or the processing surface on which a predetermined pattern for focusing is formed. preferable.

  The present invention is also a method of driving the processing apparatus in a state where a processing tool is attached to a tool support shaft, a positioning sample is attached to a positioning sample support, and an object to be processed is attached to the sample support. After the contact processing is performed with the processing tool, the step (1) of acquiring distance information between the processing surface of the positioning sample and the processing tool using the observation unit, and the processing object with the processing tool Step (2) of contact processing is performed, and then, after replacing or reattaching the processing tool, the positioning sample is contact processed with the processing tool, and distance information between the processing surface of the positioning sample and the processing tool Is obtained using the observation unit, and then the position correction unit obtains the distance information obtained in the step (1) and the distance information obtained in the step (3). Based on difference Provides a method of performing step (4) for correcting the distance between the workpiece surface and the machining tool of the workpiece. Furthermore, following the step (4), a step (5) of contacting the workpiece with the machining tool using the machining tool after replacement or reattachment may be included.

  According to the present invention, it is possible to provide a machining apparatus capable of accurately correcting the position of a machining tool and a driving method thereof with a simple configuration.

It is a perspective view showing a schematic structure of a three-dimensional structure constituent device concerning one embodiment of the present invention. It is a schematic block diagram which shows the main operation control mechanisms of a spindle and an observation part applied to the three-dimensional structure constituent apparatus shown in FIG. 6 is a flowchart for explaining an example of a byte position correcting operation in the three-dimensional structure forming apparatus shown in FIG. 1. It is a perspective view which shows the structure of the workpiece | work for bite height detection (positioning sample) which concerns on one Embodiment of this invention. (A), (b), and (c) are figures which show an example of the to-be-processed surface obtained when a planar process is performed using a flat bite as a bit. (A) And (b) is a figure which shows an example of the to-be-processed surface obtained when rotating cutting is performed using R bit as a bit. (A)-(e) is a figure which shows a mode that the image processing which removes the undesired processing trace which arises by the abrasion etc. of a bite in the three-dimensional structure component apparatus shown in FIG. (A) And (b) is a figure which illustrates typically an example of the method of calculating the correction amount of the byte position with respect to an observation workpiece | work.

[Embodiment 1]
<Schematic configuration of processing equipment>
FIG. 1 is a perspective view showing a schematic configuration of a three-dimensional structure constituting apparatus 100 as a processing apparatus according to the present invention. The three-dimensional structure constructing apparatus 100 includes an observation work pedestal (sample support portion) 11, a tool (shaft support shaft portion) 21 for attaching a cutting tool (processing tool) 22, and an observation work (processing object) 12 to be processed. And an observation unit 31 for observing the surface.

  The three-dimensional structure forming apparatus 100 further includes a positioning work base (positioning sample support portion) 15, which is different from the observation work 12, and can be attached with a tool height detection work (positioning sample) 14. The tool height detection workpiece 14 is contact processed by a tool 22 common to the observation workpiece 12, and the processed surface can be observed by the observation unit 31.

  In the three-dimensional structure forming apparatus 100, the workpiece height detection work 14 is cut by the cutting tool 22, and then the processing surface is observed using the observation unit 31, whereby the distance between the processing surface and the cutting tool ( Distance information). When the tool is exchanged or reattached, the three-dimensional structure forming apparatus 100 corrects the distance between the work surface of the observation work 12 and the tool 22 based on the acquired distance information. The details of the distance correction operation will be described later.

  Hereinafter, the structure of the three-dimensional structure forming apparatus 100 will be described in more detail. The spindle 21 is a rotating shaft extending in the vertical direction, and has a cutting tool base 21a to which a cutting tool 22 is attached. The cutting tool 22 attached to the cutting tool base 21 a is rotated by the rotation of the spindle 21, and cuts an object (such as the observation workpiece 12) that contacts the tip of the cutting tool 22.

  The observation unit 31 includes a microscope unit 33 and a CCD camera (imaging unit) 32 connected to the microscope unit 33. The microscope unit 33 includes a lens barrel 33a that contains optical components for a microscope and extends in the vertical direction, and an objective lens 33b connected to the lower end side of the lens barrel 33a. The microscope unit 33 observes an object (such as the observation work 12) arranged to face the lower side of the objective lens 33b. The CCD camera 32 captures an image of an object (such as a processing surface of the observation work 12) that is observed by the microscope unit 33.

  The spindle 21 and the observation unit 31 are supported and fixed to a common Z stage 41. The spindle 21 and the observation unit 31 are configured to be capable of integral movement along a vertical direction (Z direction: up and down direction) using an actuator (movement mechanism: not shown) built in the Z stage 41. Here, “integral movement” refers to movement in which the relative positional relationship between the spindle 21 and the observation unit 31 does not change. The spindle 21 and the observation unit 31 are configured to be movable along the vertical direction independently of each other by different actuators. The observation unit 31 is provided with an observation unit manual stage 42. If the observation part manual stage 42 is used, only the observation part 31 can be manually moved along the vertical direction.

  The Z stage 41 is supported and fixed to the X stage 51. The Z stage 41 is configured to be movable along one horizontal direction (X direction: left and right direction of the apparatus) using an actuator (movement mechanism: not shown) built in the X stage 51. That is, the spindle 21 and the observation unit 31 supported and fixed to the Z stage 41 are configured to be able to move integrally in the X direction as well as in the Z direction.

  The observation work base 11 supports and fixes the observation work 12 so that one of the surfaces of the observation work 12 can face the lower end side of the spindle 21 (the tip of the cutting tool 22). The positioning work base 15 supports and fixes the tool height detection work 14 so that one of the surfaces of the tool height detection work 14 can face the lower end side of the spindle 21 (the tip of the tool 22). The observation work base 11 and the positioning work base 15 are fixed on a common base plate 16. The base plate 16 is supported and fixed on a base (Y stage) 17. The base plate 16 is configured to be movable along one horizontal direction (Y direction: front-rear direction of the apparatus) integrally with the base 17 by an actuator (not shown). That is, the observation work pedestal 11 and the positioning work pedestal 15 supported and fixed to the base plate 16 are configured to be integrally movable along the Y direction. Note that the observation work base 11, the positioning work base 15, the base plate 16, and the base 17 are all designed so that their upper surfaces are horizontal.

  As described above, in the three-dimensional structure forming apparatus 100, the spindle 21 and the observation unit 31 are in any of the X direction, the Y direction, and the Z direction with respect to the observation work base 11 and the positioning work base 15. Even relative movement is possible. Therefore, in the three-dimensional structure constituting apparatus 100, the observation work 12 and the cutting tool 22 are made to face each other and cutting is performed, or the observation work 12 and the observation part (objective lens 33b) 31 are made to face each other. The surface to be processed can be observed using the microscope unit 33. Similarly, in the three-dimensional structure forming apparatus 100, cutting is performed with the tool height detection workpiece 14 and the tool 22 facing each other, or the tool height detection workpiece 14 and the observation unit (objective lens 33 b) 31 are used. The processing surface of the tool height detection workpiece 14 can be observed using the microscope unit 33. At the time of cutting the observation workpiece 12 or the tool height detection workpiece 14, the Z stage 41 is continuously moved in the X direction according to a predetermined machining pitch. As a result, the entire processing surface of the observation workpiece 12 or the tool height detection workpiece 14 is processed at a predetermined processing pitch.

  The spindle 21 includes an air blow nozzle 61 attached integrally. The air blow nozzle 61 blows gas to the processing surface of the observation workpiece 12 and the processing surface of the tool height detection workpiece 14 to remove debris and the like generated by the cutting processing.

<Main motion control mechanism of spindle and observation unit>
FIG. 2 is a schematic block diagram showing main operation control mechanisms of the spindle 21 and the observation unit 31, which are applied to the three-dimensional structure forming apparatus 100 shown in FIG.

  As shown in FIG. 2, the operation control mechanism includes a main control unit 82 that controls the entire operation of the three-dimensional structure forming apparatus 100 and a Z-direction position control unit 81 as control mechanisms. The Z-direction position control unit 81 controls the movement of the observation unit 31 and the spindle 21 provided in the Z stage 41 in the Z direction under the control of the main control unit 82. When the observation unit 31 and the spindle 21 move in the Z direction, the movement amount information is transmitted to the main control unit 82 and the Z direction position control unit 81 via the Z stage 41 and stored therein.

  Regarding the operation other than the movement in the Z direction, the observation unit 31 and the spindle 21 are controlled by the main control unit 82. The imaging data of the CCD camera 32 built in the observation unit 31 is always input to the main control unit 82, and the main control unit 82 determines whether or not the imaging data is obtained in a focused state. The That is, the main control unit 82 holds information indicating whether or not the observation unit 31 is focused on the observation target and the movement amount information of the observation unit 31 in the Z direction in association with each other. As will be described later, these pieces of information are used when the position of the byte 22 is corrected. Details will be described later in the <Byte position correction> column.

  The imaging data of the CCD camera 32 is recorded in an image storage unit (memory) 71 and then transmitted from the image storage unit 71 to the image determination / processing unit 72. The image determination / processing unit 72 determines whether or not the cutting process is normally performed from the imaging data, and if it is determined that the cutting process is not normally performed, a warning signal is sent to the main control unit 82. The operation of the spindle 21 is stopped by transmitting.

  Further, the image determination / processing unit 72 determines the quality of the imaging data. If the imaging data is determined to be a non-defective product, the imaging data is transmitted to the three-dimensional structure forming unit 73, and the three-dimensional structure of the cutting object (observation work 12 or the like) is a plurality of continuous images. Reconstructed from data. Even when the imaging data is determined to be defective, the imaging data may be used for reconstruction of the three-dimensional structure by performing predetermined image processing on the imaging data. Details of the operation of the image determination / processing unit 72 will be described in the sections <determination of byte exchange or reattachment timing> and <three-dimensional structure configuration using image correction> described later.

  Operation control of the image storage unit 71, the image determination / processing unit 72, and the three-dimensional structure forming unit 73 is performed by the main control unit 82. In addition, what is necessary is just to comprise the image determination / process part 72, the three-dimensional structure structure part 73, the Z direction position control part 81, and the main control part 82 by hardware logic. Alternatively, it may be realized by software using a CPU (Central Processing Unit).

<Example of byte position correction>
Hereinafter, the byte position correcting operation in the three-dimensional structure forming apparatus 100 will be described with reference to the flowchart shown in FIG. The byte position correction is performed, for example, when the byte 22 is replaced with a new one or when the byte 22 is reattached. Hereinafter, a case where the byte 22 is replaced with a new one will be described as an example.

(Steps S1 to S3)
As shown in FIG. 3, when using the three-dimensional structure forming apparatus 100, the cutting tool 22 is attached to the cutting tool base 21 a of the spindle 21 as shown in steps S <b> 1 to S <b> 3. Further, the observation work 12 is attached to the observation work base 11, and the tool height detection work 14 is attached to the positioning work base 15. In addition, you may replace suitably the order which performs step S1-S3.

(Step S4)
Next, the process proceeds to step S4, and the bite height using the bite 22 is brought close to the bite 22 and the bite height detection work 14 in accordance with commands from the main control unit 82 and the Z-direction position control unit 81. The workpiece 14 for length detection is cut. At the time of cutting, the tool 22 and the tool height detecting work 14 are relatively moved in the X direction at a predetermined pitch to cut the surface of the tool height detecting work 14. Next, if the surface cutting of the tool height detection work 14 is completed, the distance between the tool 22 and the tool height detection work 14 in the Z direction is made closer to the surface, and the surface of the tool height detection work 14 is cut. Continue. Thereafter, the surface cutting in which the cutting tool 22 and the cutting tool height detecting work 14 are relatively moved in the X direction and the cutting tool feeding in the Z direction are repeated as many times as necessary. Note that the position in the Z direction of the cutting tool 22 during cutting (more precisely, the position of the spindle 21 and the observation unit 31) is input and stored in the Z direction position control unit 81.

(Step S5)
Next, the process proceeds to step S5. When the cutting of the tool height detection workpiece 14 is completed, the surface to be processed (the surface to be cut) of the observation unit 31 (exactly the objective lens 33a) and the workpiece 14 for tool height detection are specified by a command from the main control unit 82. ) And the observation unit 31 and the spindle 21 are moved integrally in the X direction. Next, the observation unit 31 continuously performs imaging of the processing surface while moving the observation unit 31 and the spindle 21 integrally in the Z direction. Imaging data of the CCD camera 32 incorporated in the observation unit 31 is always input to the main control unit 82, and the main control unit 82 determines whether the imaging data is obtained in a focused state. When focused imaging data is obtained, the movement of the observation unit 31 and the spindle 21 in the Z direction is stopped.

  In the three-dimensional structure forming apparatus 100, by performing mechanically (by image analysis) whether or not it is in focus, it is possible to prevent variations in the focus position as in the case where an operator visually focuses. can do.

(Step S6)
Next, the process proceeds to step S6. The main control unit 82 has positional information in the Z direction of the spindle 21 and the observation unit 31 at the end of step S4 (cutting), and positional information in the Z direction of the spindle 21 and the observation unit 31 at the end of step S5. And the calculation result is stored as the amount of movement of the spindle 21 and the observation unit 31 in the Z direction (distance A (1): distance information).

(Step S7)
Next, the process proceeds to step S7, and the cutting of the observation workpiece 12 using the cutting tool 22 is performed by causing the cutting tool 22 and the observation work 12 to approach each other according to instructions from the main control unit 82 and the Z-direction position control unit 81. I do. In addition, the observation surface of the observation workpiece 12 (the surface to be cut) is observed, imaged, and the three-dimensional structure of the observation workpiece 12 is reconfigured by the three-dimensional structure configuration unit 73.

  Cutting of the observation workpiece 12 is performed in the same manner as in step S4, and observation and imaging of the processing surface of the observation workpiece 12 can be performed in the same manner as in step S5. More specifically, the surface of the observation workpiece 12 is cut by relatively moving the cutting tool 22 and the observation workpiece 12 in the X direction at a predetermined pitch. Next, when the surface cutting of the observation work 12 is completed, the surface to be processed (the surface to be cut) of the observation work is observed and imaged using the observation unit 31. Next, the distance between the cutting tool 22 and the observation work 12 in the Z direction is made minute and the cutting of the surface of the observation work 12 is continued. Thereafter, surface cutting in which the cutting tool 22 and the cutting tool 14 for detecting the tool height are relatively moved in the X direction, observation of the processing surface using the observation unit 31, and feeding of the cutting tool along the Z direction are repeated as many times as necessary. And do it.

  If the spindle 21 and the observation unit 31 are integrally moved along the Z direction by the amount of movement (distance A (1)) obtained in step S6 after the end of cutting, the work piece of the observation workpiece 12 is processed. Focusing of the observation unit 31 with respect to the surface can be performed relatively easily.

(Step S8)
Next, the process proceeds to step S8, and the image determination / processing unit 72 determines whether or not the cutting process is normally performed from the imaging data acquired by the observation unit 31 (CCD camera 32). As will be described later, when wear or chipping of the cutting tool 22 occurs, a unique pattern appears in the image data, so that it is possible to determine the image of the wear or the like of the cutting tool 22.

(Step S9)
Next, the process proceeds to step S9, and when the image determination / processing unit 72 determines that cutting is not performed normally due to wear or chipping of the cutting tool 22, a warning signal is transmitted to the main control unit 82. Then, the operation of the spindle 21 (that is, the cutting operation) is stopped. Then, the position in the Z direction of the cutting tool 22 when the cutting operation is stopped (more precisely, the position of the spindle 21 and the observation unit 31) is input to the Z direction position control unit 81 and stored therein.

(Step S10)
Next, the process proceeds to step S <b> 10, where the tool 22 with wear or the like is removed from the tool base 21 a of the spindle 21 and replaced with a new tool 22.

(Steps S11 to S12)
Then, it progresses to step S11 and step S12. Step S11 can be performed in the same manner as step S4. Step S12 can be performed in the same manner as step S5.

(Step S13)
Next, the process proceeds to step S13. The main control unit 82 differs in the position information in the Z direction of the spindle 21 and the observation unit 31 at the time of focusing in step S5 and the position information in the Z direction of the spindle 21 and the observation unit 31 at the end of step S12. It is determined whether or not. If these pieces of positional information are the same (NO in FIG. 3), the cutting tool 22 after replacement has not reached the cutting tool 14 for detecting the tool height, and the cutting operation has not been performed. Continue. On the other hand, if these pieces of position information are different (YES in the figure), the tool height detection work 14 is cut, and the process proceeds to step S14.

(Step S14)
Next, the process proceeds to step S14. The main control unit 82 positions information of the spindle 21 and the observation unit 31 in the Z direction at the end of step S11 (cutting), and position information of the spindle 21 and the observation unit 31 in the Z direction at the end of step S12. And the calculation result is stored as the amount of movement of the spindle 21 and the observation unit 31 in the Z direction (distance A (2): distance information).

(Step S15)
Next, the process proceeds to step S15, and the main control unit 82 calculates the difference between the distance A (1) obtained in step S6 and the distance A (2) obtained in step S14. In step S5 and step S12, the position where the observation unit 31 is in focus (that is, the distance between the observation unit 31 in the Z direction and the tool height detection work 14: the working distance of the objective lens 33b) is equal, so the distance A ( The difference between 1) and the distance A (2) represents the amount of misalignment of the tip of the tool before and after replacement (difference in tool size and / or attachment error). This point will be described in detail later with reference to FIG.

(Step S16)
Next, the process proceeds to step S16, where the Z-direction position control unit 81 and the main control unit 82 use the position of the cutting tool 22 (the cutting tool before the replacement) at the cutting operation stop in step S9 as a reference in the Z direction of the cutting tool 22 after the replacement. Correct the position to. More specifically, using the absolute value of the difference between the distance A (1) and the distance A (2) obtained in step S15 as a correction amount, the height of the byte 22 (byte before replacement) in step S9 is corrected. Thus, the height of the cutting tool 22 (the tool after the replacement) is determined when cutting is resumed. For example, when the difference between the distance A (1) and the distance A (2) is a negative value, the position of the bite 22 is increased by the correction amount along the Z direction. When the difference between the distance A (1) and the distance A (2) is a positive value, the position of the cutting tool 22 is lowered by the correction amount along the Z direction.

(Step S17)
Next, the process proceeds to step S17, and similarly to step S7, the cutting of the observation work 12 and the observation / imaging of the work surface are resumed. Thereafter, every time the cutting tool 22 is exchanged, the steps from Step S4 to Step S17 are repeated, and the observation work 12 is cut while correcting the position of the cutting tool 22 in the height direction.

  In the three-dimensional structure forming apparatus 100, processes other than steps S1 to S3 and step S10 are fully automated.

(Modified aspects at each step)
The correction amount in step S15 may be set with a margin with respect to the absolute value of the difference between the distance A (1) and the distance A (2). The margin is, for example, 5 microns or less, and the position correction of the cutting tool 22 is performed so that the cutting tool 22 and the observation work 12 are further separated by the margin. Thereby, after resuming cutting of the observation workpiece 12, it is possible to more reliably prevent the bite 22 from being deeply cut into the observation workpiece 12 and being damaged. Further, if the margin is within the above range, it is possible to minimize the wasteful cutting operation of the cutting tool 22 until the observation work 12 and the cutting tool 22 come into contact with each other.

  Further, when a workpiece having a relatively low hardness as will be described later is used as the workpiece height detection work 14, there is a low possibility that the cutting tool 22 is damaged even if the workpiece is cut deeply. Therefore, the cutting of the workpiece 14 for detecting the bite height in steps S4 and S11 can be performed at a high speed and a narrow pitch from the beginning. Here, the high speed and narrow pitch are the same conditions as those required when the observation workpiece 12 is cut at high speed, for example. In steps S4 to S5 or steps S11 to S12, first, the tool height detection work 14 is cut deeply and at a wide pitch (coarse cutting conditions) to roughly determine the position where the observation unit is in focus. Then, it is possible to accurately determine the position where the observation unit is in focus by cutting with a shallower and narrower pitch (more precise cutting conditions). According to this, the time required for the above steps S4 to S5 or steps S11 to S12 can be shortened.

<Detailed example of correction amount calculation>
Hereinafter, a method for determining the difference (correction amount: distance information) calculated in step S15 in FIG. 3 will be described in more detail with reference to FIG.

  FIG. 8A is a schematic diagram illustrating a case where the relative positional relationship in the Z direction (height direction) between the spindle 21 and the observation unit 31 during the cutting operation is the same before and after replacement of the cutting tool 22. It is. For convenience of explanation, it is described that the height of the spindle 21 is the same before (on the left side in the drawing) and after replacement (on the right side) of the cutting tool 22, but this is particularly limited to this state. It is not something.

  In FIG. 8A, the spindle 21 and the observation unit 31 indicated by solid lines indicate the positions at the time of the cutting operation, and the observation units 31 indicated by broken lines indicate the positions in the focused state by the observation after the cutting operation. ing. The length of the byte 22 before exchange (left side in the figure) is X1, and the length of the byte 22 after exchange (right side in the figure) is X2. The observation unit 31 is focused on the processing surface at a position where the distance from the processing surface of the workpiece 14 for detecting the tool height is Y.

  In the state before exchanging the cutting tool 22, the observation unit 31 moves in the Z direction by a distance A (1), so that the distance from the work surface of the tool height detection workpiece 14 becomes Y and is in focus (FIG. 3 steps S5 to S6).

  On the other hand, in the state after replacement of the cutting tool 22, the observation unit 31 moves in the Z direction by the distance A (2), so that the distance from the processing surface of the tool height detection workpiece 14 becomes Y and is focused. (Corresponding to steps S12 to S13 in FIG. 3).

  Here, since the relative positional relationship in the Z direction (height direction) between the spindle 21 and the observation unit 31 is the same before and after replacement of the cutting tool 22, the distance A (2) and the distance A (1) are the same. Is equivalent to the difference (C in the figure) between the length X2 of the byte 22 after replacement and the length X1 of the byte 22 before replacement.

  Therefore, the distance A (2) and the distance A (1) with respect to the position in the Z direction of the cutting tool 22 when the cutting operation is stopped with respect to the observation work 12 before the cutting tool is replaced (corresponding to step S9 shown in FIG. 3). If the position of the cutting tool 22 after replacement is corrected upward by the difference between the cutting tool 22 and the cutting tool 22 after the replacement, the cutting operation after the tool replacement can be resumed smoothly.

  In the position correction method shown in FIG. 8A, the relative positional relationship in the Z direction between the spindle 21 and the observation unit 31 during the cutting operation during the cutting operation is the same before and after replacement of the cutting tool 22. It is widely applicable to such cases. Therefore, the step of moving the observation unit 31 in the Z direction to determine the in-focus position is not only when the observation unit 31 and the spindle 21 are moved together (see FIG. 3), but only the observation unit 31 is moved. You may carry out by moving to a Z direction.

  On the other hand, (b) in FIG. 8 shows the case where the relative positional relationship in the Z direction (height direction) between the spindle 21 and the observation unit 31 during the cutting operation is not the same, that is, the observation unit 31 during the cutting operation. It is a schematic diagram explaining the case where there are multiple types of standby positions. For convenience of explanation, it is described that the height of the spindle 21 is the same before (on the left side in the drawing) and after replacement (on the right side) of the cutting tool 22, but this is particularly limited to this state. It is not something.

  In FIG. 8B, the spindle 21 and the observation unit 31 indicated by solid lines indicate positions at the time of the cutting operation, and the observation unit 31 indicated by broken lines indicate the position in a focused state by observation after the cutting operation. ing. The length of the byte 22 before exchange (left side in the figure) is X1, and the length of the byte 22 after exchange (right side in the figure) is X2. The observation unit 31 is focused on the processing surface at a position where the distance from the processing surface of the workpiece 14 for detecting the tool height is Y.

  In the state before exchanging the cutting tool 22, the observation unit 31 moves in the Z direction by a distance A (1), so that the distance from the work surface of the tool height detection workpiece 14 becomes Y and is in focus (FIG. 3 steps S5 to S6).

  On the other hand, in the state after exchanging the cutting tool 22, the observation unit 31 is further moved in the Z direction by a distance A (2) with reference to the position where the relative positional relationship between the observation unit 31 and the spindle 21 is the same as that before the cutting tool replacement. , The distance from the work surface of the workpiece 14 for detecting the tool height becomes Y and in focus (corresponding to steps S12 to S13 in FIG. 3).

  Here, the difference between the distance A (2) and the distance A (1) is the difference between the length X2 of the byte 22 after replacement and the length X1 of the byte 22 before replacement (C in the figure). It corresponds to.

  Therefore, the distance A (2) and the distance A (1) with respect to the position in the Z direction of the cutting tool 22 when the cutting operation is stopped with respect to the observation work 12 before the cutting tool is replaced (corresponding to step S9 shown in FIG. 3). If the position of the cutting tool 22 after replacement is corrected upward by the difference between the cutting tool 22 and the cutting tool 22 after the replacement, the cutting operation after the tool replacement can be resumed smoothly.

<Detailed example of workpiece height detection work>
One of the characteristic points of the present invention is that the distance between the observation workpiece 12 and the cutting tool 22 is adjusted using the cutting tool height detection work 14. One advantage of this configuration is that the surface of the observation work 12 is not damaged because the tool 22 can be accurately positioned without making contact with the observation work 12.

  However, in order to make the best use of the above feature points, the tool height detection work 14 is preferably a material having a lower hardness than the observation work 12. According to this structure, compared with the case where the observation workpiece 12 is cut deeply with the cutting tool 22 (direct positioning), the possibility that the cutting tool 22 is damaged or worn is reduced. As an example, there is a combination in which the tool height detection workpiece 14 is made of resin or clay, and the observation workpiece 12 is made of metal such as an aluminum alloy. Examples of the resin-made tool height detection workpiece 14 include chemical wood. An example of the clay workpiece height detection work 14 is a clay model. Examples of the metal observation work 12 include aircraft parts, ship parts, automobile parts, other metal parts, or test pieces thereof. The plastic or clay bit height detection workpiece 14 is advantageous in that it can be easily cut and a mirror surface can be easily formed.

  Further, it is preferable that the tool height detecting work 14 provides a work surface (work surface) on which a predetermined pattern for focusing is formed. As such a tool height detecting work 14, for example, as shown in FIG. 4, a cylindrical structure 14b set to a predetermined size is a block formed in the center, and the cylindrical structure 14b and its work The peripheral structure 14a can be identified by image processing. In addition, it is preferable that the boundary between the columnar structure 14b and the peripheral structure 14a is clear and that the cross-sectional shape (surface to be processed) of the same pattern is provided even when cutting at different depths. Note that the tool height detection workpiece 14 shown in FIG. 4 has an upper surface that is a cutting target surface, and a cross section having a circular pattern in the center of a quadrangle is obtained regardless of the depth of cutting.

  As an example of the tool height detection workpiece 14 shown in FIG. 4, the cylindrical structure 14b and the peripheral structure 14a are colored in different colors. Here, as the different colors, for example, black and white, which have mutually different luminance values and can be easily identified by image processing, are preferable. When such a tool height detection workpiece 14 is used, the determination as to whether or not the main control unit 82 is in focus (step S5 in FIG. 3) is performed by, for example, imaging data based on a luminance value. Binarization based on a threshold (for example, white is equal to or higher than a predetermined luminance value and black is lower than the predetermined luminance value). Area ratio after binarization or distance between edges (region corresponding to the cylindrical structure 14b) Can be performed based on the diameter).

  Alternatively, another example of the tool height detection workpiece 14 shown in FIG. 4 is one in which the columnar structure 14b is a hollow portion (hole) formed in the center of the workpiece. When such a tool height detection workpiece 14 is used, the determination as to whether or not the focus state is performed by the main control unit 82 (step S5 in FIG. 3) is based on, for example, the imaging data based on the luminance value. Binarization based on the threshold value (for example, white above the predetermined luminance value is black and black below the predetermined luminance is black), based on the area ratio after binarization or the distance between edges (diameter of the black area) I can do it. Note that when the imaging data is binarized by the luminance value, the hollow portion (hole portion) is usually black.

  In addition, when the workpiece | work 14 for a bite height detection is a rectangular parallelepiped block shape as shown in FIG. 4, it can also be determined whether it is an in-focus state using the corner | angular of a rectangular parallelepiped.

  Whether the workpiece for detecting the tool height is in an in-focus state more easily if there is an edge (machining trace, groove, hole, etc .: grooves and holes may be provided in advance) on the work surface. Can be determined.

  In the three-dimensional structure forming apparatus 100, even when the different objective lens 33b is exchanged, it is possible to determine whether or not it is in an in-focus state using the same tool height detection work.

<Judgment example of byte exchange or reattachment timing>
An example of the determination performed by the image determination / processing unit 72 in step S8 illustrated in FIG. 3 will be described below. This determination is performed using the fact that a unique pattern appears in the imaging data when the bite 22 is worn or chipped.

(When using flat bytes)
FIG. 5 shows imaging data of a surface to be processed, which is obtained when planar processing is performed using a flat bit (a bit having a flat tip cutter shape) as a bit. When a flat tool is used, a processing step (so-called nose drop) is inevitably generated. Therefore, it is necessary to distinguish this processing step from a scratch due to wear or chipping of the flat tool.

  (A) in FIG. 5 is imaging data of the surface to be processed obtained when using a flat cutting tool with almost no chipping of the blade, etc., at a predetermined interval according to the size and processing pitch of the flat cutting tool. Only the pattern (A) corresponding to the processing step appears. (B) in FIG. 5 is imaging data obtained when a region not including the processing step in (a) is observed at a higher magnification.

  On the other hand, (c) in FIG. 5 is imaged data of the surface to be processed obtained when a flat cutting tool with a chipped blade or the like is used. In this imaging data, a pattern (B) repeatedly appearing as a plurality of linear patterns is observed in addition to the pattern (A) corresponding to the processing step seen in (a) of FIG.

  The image determination / processing unit 72 continuously observes the imaging data over time, and determines the timing at which the pattern (B) begins to appear in addition to the pattern (A) as the timing for byte replacement or reattachment. It suffices to be configured. In addition, in order to remove fine patterns that are patterns other than the patterns (A) and (B) and are inevitably generated by processing with a flat bite, the image determination / processing unit 72 sets the imaging data according to the luminance value. A binarization process may be performed.

(When using R byte)
FIG. 6 shows imaging data of the surface to be processed, which is obtained when rotating cutting is performed using an R cutting tool (a cutting tool provided with a predetermined R on the tip blade shape) as the cutting tool 22.

  (A) in FIG. 6 is imaging data of the surface to be processed obtained when using an R tool having almost no chipping of the blade, and a fine uneven pattern (C) corresponding to R of the R tool and the processing pitch. Appears. The fine concavo-convex pattern (C) continuously extends along the rotation direction of the cutting tool 22, and the height (depth) thereof is usually a very small one of 100 nm or less. In addition, the black acicular structure distributed irregularly in the figure is a crystal contained in the cutting sample.

  On the other hand, (b) in FIG. 6 is imaged data of the surface to be processed that is obtained when an R tool with a chipped blade or the like is used. A linear pattern (D) extending continuously along the rotation direction of the cutting tool 22 is observed in the imaging data. Note that (b) in FIG. 6 is observed at a lower magnification than (a), and the fine uneven pattern (C) cannot be confirmed at this magnification. As shown in FIG. 6, the fine concavo-convex pattern (C) and the linear pattern (D) can be easily identified based on their sizes and appearance manners.

  The image determination / processing unit 72 is configured to continuously observe the imaging data over time and determine the timing at which the linear pattern (D) begins to appear as the timing for byte replacement or reattachment. That's fine. In addition, in order to remove a fine pattern (such as the fine uneven pattern (C) described above) that is a pattern other than the linear pattern (D) and is inevitably generated by processing with an R bite, the image determination / processing unit 72 includes: You may perform the process which binarizes imaging data according to a luminance value.

<Three-dimensional structure using image correction>
The three-dimensional structure forming apparatus 100 is configured to be able to reconstruct the three-dimensional structure of the cutting object (such as the observation workpiece 12) using the imaging data after the bite 22 is worn or chipped. Yes.

  For example, when the image determination / processing unit 72 shown in FIG. 2 determines that the imaging data is a defective product, the three-dimensional structure forming unit 73 causes an undesired processing mark (processing pattern) caused by wear or chipping of the cutting tool 22. ) Is removed, and the three-dimensional structure is reconstructed from the processed data. Hereinafter, a specific description will be given with reference to FIG.

  When the surface of an object to be machined is cut so as to be flat by precision cutting, a cross section of these intervening tissues is observed in the imaging data at a place where there are intervening tissues such as inclusions, cracks, and voids. Typically, these intervening tissue boundaries can be distinguished from surrounding tissue from the color or brightness values of the digital image. Similarly, if there is a flaw due to processing on the surface of the object to be cut and adhesion of chips, it is reflected as color or luminance value information.

  (A) in FIG. 7 shows a cross-sectional structure image in which a machining mark remains due to chipping of the cutting edge of the cutting tool 22. Under the precision cutting condition, the above-mentioned machining mark is generated along the traveling direction of the cutting tool 22. (B) in FIG. 7 shows a tissue image when cutting the existing portion of the intervening tissue with the cutting tool 22 having the same cutting edge as described above. From this image, even if the shape of the intervening tissue is extracted from the luminance value, it cannot be distinguished from the processing mark.

  Therefore, by calculating the luminance value of each pixel of the cross-sectional image showing only the processing mark shown in (a) of FIG. 7 with the luminance value of the image shown in (b) of FIG. Only the effect of the scar is reduced.

  (C) in FIG. 7 is obtained by dividing the luminance value of each pixel of the image shown in (b) of FIG. 7 by the luminance value of the corresponding pixel of the image shown in (a) of FIG. It is an image. Since only the intervening tissue is emphasized in the image shown in (c) in FIG. 7, it is easy to extract a region where the intervening tissue exists.

  Note that (d) in FIG. 7 is an image obtained by binarizing (b) in FIG. 7 according to the luminance value of the pixel, and (e) in FIG. 7 is (c) in FIG. ) Is binarized according to the luminance value of the pixel. Here, in the image after the binarization processing, the pixel whose luminance value is equal to or higher than a predetermined threshold is displayed as white, and the pixel whose luminance value is less than the threshold is displayed as black. As is clear from these figures, the binarization process makes it easier to extract the region where the intervening tissue exists.

  That is, in order to accurately recognize the boundary of the intervening tissue, the three-dimensional structure constituting unit 73 removes an undesired processing mark (processing pattern) caused by wear or chipping of the cutting tool 22 from the image data (image processing). Correction). This image processing is a step of acquiring reference data having substantially only the processing trace (such as (a) in FIG. 7), and then comparing imaging data other than the reference data having processing trace with the reference data. A step of removing image data corresponding to the processing mark from the imaging data. The reference data may be acquired by acquiring a single piece of imaging data having substantially only the above-mentioned processing marks. You may produce by extracting the area | region contained in common as a process trace. As described above, the step of removing the image data corresponding to the processing mark can be realized by comparing and dividing the luminance value of each corresponding pixel between the reference data to be compared and the imaging data.

  And by using the image correction as described above, it is possible to further reduce the frequency of tool replacement, so that the shape of intervening tissues such as inclusions, voids, and cracks inside the material can be made more quickly and accurately. Can be observed. That is, the effect of speeding up by precision cutting becomes more remarkable, and the influence of tool wear can be reduced, so that automatic observation over a longer period (multi-section) becomes possible.

  There are innumerable casting holes especially in castings used for automobile parts and the like. Therefore, there is a need for a technique for reducing the number of cast holes generated and controlling the occurrence location. When searching for the optimum conditions for reducing the voids in the manufacturing process, the examination time can be further shortened by using a high-speed and accurate void distribution observation technique (the technique of the present invention).

<Modification of processing equipment>
In the above description, an example using a cutting tool as a processing tool has been illustrated, but the processing tool may be a grindstone or a knife.

  In the above description, the three-dimensional structure constituting apparatus is exemplified as the processing apparatus. However, the present invention is an apparatus provided with a processing tool for contact processing such as a cutting tool or a grinding apparatus, such as a cutting tool or a grinding machine. Widely applicable.

  In the above description, the machining apparatus is illustrated as having the machining tool attached to the lower end of the rotary shaft extending in the vertical direction, but the present invention is not limited to this, for example, the rotary shaft extending in one horizontal direction. A machining tool that can be exchanged or reattached is provided around the machine tool, and the present invention can also be applied to an apparatus that performs contact machining of a machining object that is arranged to face the machining tool.

  According to the present invention, a machining apparatus capable of accurately correcting the position of a machining tool with a simple configuration and a driving method thereof are provided.

11 Pedestal for observation work (sample support part)
12 Observation work (object to be processed)
14 Byte height detection workpiece (positioning sample)
15 Positioning work base (positioning sample support)
16 Base plate 17 Base 21 Spindle (tool support shaft)
21a Pedestal for bite 22 bite (machining tool)
31 Observation unit (also serves as a configuration of the position correction unit)
32 CCD camera (configuration of observation unit: imaging unit)
33 Microscope part (one structure of observation part)
33a Lens barrel (one configuration of observation unit)
33b Objective lens (one configuration of observation unit)
41 Z stage 42 Manual stage 51 for observation unit X stage 61 Air blow nozzle 71 Image storage unit 72 Image determination / processing unit (determination unit)
73 3D structure component 81 Z direction position control unit (one configuration of position correction unit)
82 Main control unit (one configuration of position correction unit)
100 Three-dimensional structural equipment (processing equipment)
A (1) Distance (distance information)
A (2) Distance (distance information)

Claims (12)

A sample support portion configured to allow attachment of a workpiece;
A tool support shaft portion configured to be capable of attaching a processing tool for contact processing the workpiece,
In a processing apparatus provided with an observation unit that observes a processing surface of the processing object,
A positioning sample support portion configured to be able to attach a positioning sample which is contact processed by the processing tool and is different from the processing object;
Acquires distance information between the workpiece surface and the machining tool of the positioning samples, e Bei and a position correcting unit for correcting the distance between the workpiece surface and the machining tool of the workpiece on the basis of the distance information ,
The position correction unit corrects the distance between the processing surface of the processing object and the processing tool in the replacement of the processing tool,
A processing apparatus characterized in that a difference between the distance information acquired before replacement of the processing tool and the distance information acquired after replacement of the processing tool is used as a correction amount for the distance. A sample support portion configured to allow attachment of a workpiece;
A tool support shaft portion configured to be capable of attaching a processing tool for contact processing the workpiece,
In a processing apparatus provided with an observation unit that observes a processing surface of the processing object,
A positioning sample support portion configured to be able to attach a positioning sample which is contact processed by the processing tool and is different from the processing object;
Acquires distance information between the workpiece surface and the machining tool of the positioning samples, e Bei and a position correcting unit for correcting the distance between the workpiece surface and the machining tool of the workpiece on the basis of the distance information ,
The position correction unit corrects the distance between the processing surface of the processing object and the processing tool in the reattachment of the processing tool,
A processing apparatus characterized in that a difference between the distance information acquired before remounting the processing tool and the distance information acquired after remounting the processing tool is used as a correction amount for the distance. The observation unit is configured to be capable of relative movement along the axial direction of the tool support shaft with respect to the workpiece and the positioning sample,
The position correction unit includes the observation unit,
After the positioning sample is contact processed by the processing tool, the position correction unit observes the processing surface by the observation unit while changing the interval between the processing surface of the positioning sample and the observation unit, The processing apparatus according to claim 1 , wherein a relative movement amount of the observation unit until focusing is used as the distance information. The observation part and the tool support shaft part are configured to be capable of integral movement along the axial direction of the tool support shaft part,
The position correction unit includes the observation unit,
After the positioning sample is contact processed by the processing tool, the position correction unit observes the processing surface by the observation unit while changing the interval between the processing surface of the positioning sample and the observation unit, The processing apparatus according to claim 1 , wherein a distance of movement of the observation unit until focusing is used as the distance information. The position correction unit corrects the distance between the workpiece surface of the workpiece and the machining tool by moving the tool support shaft along the axial direction based on the obtained distance information. The processing apparatus according to any one of claims 1 to 4 , wherein: The observation unit includes an imaging unit,
6. The apparatus according to claim 1 , further comprising: a three-dimensional structure constituting unit that forms a three-dimensional structure of the processing target from a continuous image of the processing target surface of the processing target captured by the imaging unit. The processing apparatus according to one item. The observation unit includes an imaging unit,
6. The apparatus according to claim 1, further comprising: a determination unit that determines whether the processing tool needs to be replaced or reattached from an image of the processing surface of the processing object captured by the imaging unit. The processing apparatus as described in the item. The said processing tool is a cutting tool, a grindstone, or a knife, The processing apparatus as described in any one of Claim 1 to 7 characterized by the above-mentioned. The processing apparatus according to any one of claims 1 to 8 , wherein the positioning sample is a material having a hardness lower than that of the processing object. The processing apparatus according to claim 9 , wherein the positioning sample is made of resin or clay, and the processing object is made of metal. The positioning samples, 10 from claim 1, characterized in that it comprises a having the workpiece surface that is colored with two or more colors, or the workpiece surface on which a predetermined pattern is formed for focusing The processing apparatus as described in any one of. The method for driving the processing apparatus according to any one of claims 1 to 11, with a processing tool attached to the tool support shaft, a positioning sample attached to the positioning sample support, and a workpiece to be processed attached to the sample support. Because
After the positioning sample is contact-processed with the processing tool, the step (1) of acquiring distance information between the processing surface of the positioning sample and the processing tool using the observation unit; Step (2) of contact machining with a machining tool is performed, and then
After the replacement or reattachment of the processing tool, the positioning sample is contact processed with the processing tool, and distance information between the processing surface of the positioning sample and the processing tool is acquired using the observation unit (3) ), Then
Based on the difference between the distance information acquired in the step (1) and the distance information acquired in the step (3) by the position correction unit, the distance between the processing surface of the processing object and the processing tool (4) which correct | amends. The method characterized by the above-mentioned.

Images