JP2016537681A - Euv投影リソグラフィのための照明系 - Google Patents
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Abstract
Description
であり、図3に示すように、照明光3の矩形ビームプロファイルがもたらされる。EUV集合出力ビーム7は、均一に照明される矩形の形状を有する。このアスペクト比寄与
は、望ましい設定値アスペクト比、例えば、照明される物体視野のアスペクト比を乗じることができる。
のx/yアスペクト比を有する。図3の右から第2の断面図は、このアスペクト比を有するEUV個別出力ビーム9のうちの1つを示している。従って、N=4の場合に、x/yアスペクト比は1:2である。このアスペクト比寄与にも、望ましい設定値アスペクト比を乗じることができる。
T=1−0.9NA
b/a〜0.8NA
a/f>50
2 シンクロトロン放射線ベースの光源
4 EUV生ビーム
8 出力結合光学ユニット
10 ビーム案内光学ユニット
Claims (16)
- EUV投影リソグラフィのための照明系のための偏向光学ユニット(13;35;36;37,38;39;40)であって、
複数の偏向ミラー(D1からD4;D1からD5,D1からD6;D1からD8)を含み、その上にEUV放射線(3)が、かすめ入射で共通偏向入射平面(xz)に入射し、
70°よりも大きい偏向効果を前記偏向入射平面(xz)に併せて有する少なくとも4つのかすめ入射のための偏向ミラー(D1からD4)が設けられ、
前記偏向ミラー(D1からD8)のうちの少なくとも1つが、凸円柱ミラーとして具現化され、及び/又は該偏向ミラー(D1からD8)のうちの少なくとも1つが、凹円柱ミラーとして具現化される、
ことを特徴とする偏向光学ユニット(13;35;36;37,38;39;40)。 - 前記偏向ミラー(D1;D1からD8;D1からD4)のうちの少なくとも1つが、従動様式で変位可能であるように具現化されることを特徴とする請求項1に記載の偏向光学ユニット。
- 前記偏向ミラー(D1からD8)のうちの少なくとも1つが、従動様式で可変である曲率半径を用いて具現化されることを特徴とする請求項1及び請求項2のいずれか1項に記載の偏向光学ユニット。
- EUV投影リソグラフィのための照明系のためのビーム成形光学ユニット(6)であって、
ミラー(27i,28i)の少なくとも2つの群(27,28)を含み、その上にEUV放射線(3)が、かすめ入射で入射し、
各ミラー群(27,28)が、共通群入射平面(yz,xz)を有し、
前記ミラー群(27,28)の前記群入射平面(yz,xz)は、互いに異なっている、
ことを特徴とするビーム成形光学ユニット(6)。 - 前記ミラー群のうちの一方(28)の全てのミラー(281,282)が、更に別のミラー群(27)の最初のミラー(271)の下流、かつ該更に別のミラー群(27)の最後のミラー(272;273)の上流のビーム経路に配置されることを特徴とする請求項4に記載のビーム成形光学ユニット。
- 前記ミラー群(27,28)のうちの一方の全てのミラー(27i,28i)上への前記EUV放射線の入射の角度(α)が、同一の大きさのものであることを特徴とする請求項4又は請求項5に記載のビーム成形光学ユニット。
- 前記ミラー群(27,28)のうちの一方の少なくとも2つのミラー(271,272;281,282;271,272,273)上への前記EUV放射線(3)の入射の異なる角度(α,β;α,β,γ)を特徴とする請求項4又は請求項5に記載のビーム成形光学ユニット。
- 入射の異なる角度(α,β;α,β,γ)で前記ミラー群(27)の前記群入射平面(xz)の上に投影されると、発生されたEUV集合出力ビーム(7)が、ビーム成形光学ユニット(30)に入射するEUV生ビーム(4)と同じ方向(z)に進むことを特徴とする請求項4から請求項7のいずれか1項に記載のビーム成形光学ユニット。
- EUV投影リソグラフィのための照明系のためのビーム案内光学ユニット(10)であって、
それぞれのEUV個別出力ビーム(9i)をビーム案内光学ユニット(10)の中間フォーカス(42)内に伝達するフォーカスアセンブリ(14;41;45;46;49;52;55)を含む、
ことを特徴とするビーム案内光学ユニット(10)。 - 前記フォーカスアセンブリ(14;41;45,46;49;52;55)は、少なくとも2つのミラー(47,48;50;51;53,54)、すなわち
一方で少なくとも1つの楕円面ミラー(47;50;54)と、
他方で少なくとも1つの放物面ミラー(53)又は少なくとも1つの双曲面ミラー(48;51)と、
を含むことを特徴とする請求項9に記載のビーム案内光学ユニット(10)。 - EUV投影リソグラフィのための照明系であって、
シンクロトロン放射線ベースの光源(2)のEUV生ビーム(4)からEUV集合出力ビーム(7)を発生させるためのビーム成形光学ユニット(6)を含み、
前記EUV集合出力ビーム(7)から複数のEUV個別出力ビーム(9i)を発生させるための出力結合光学ユニット(8)を含み、
各場合に、前記それぞれのEUV個別出力ビーム(9i)をリソグラフィマスク(12)を配置可能である物体視野(11)に向けて案内するためのビーム案内光学ユニット(10)を含む、
ことを特徴とする照明系。 - EUV光源(2)を含むことを特徴とする請求項11又は請求項12に記載の照明系。
- EUVリソグラフィのための投影露光装置(1)であって、
請求項11から請求項13のいずれか1項に記載の照明系を含み、
光学系の照明光(3)が入射することになるレチクル(12)を物体視野(11)に装着するためのレチクルホルダ(20)を含み、
照明視野(11)を像平面(23)内の像視野(22)の中に結像するための投影光学ユニット(19)を含み、
投影露光中に前記物体視野(11)に配置されたレチクル構造が前記像視野(22)に配置されたウェーハセクションの上に結像されるようにウェーハ(24)を前記像平面(23)に装着するためのウェーハホルダ(25)を含む、
ことを特徴とする投影露光装置(1)。 - 構造化構成要素を生成する方法であって、
レチクル(12)及びウェーハ(24)を与える段階と、
請求項13に記載の投影露光装置(1)を用いて前記レチクル(12)上の構造を前記ウェーハ(24)の感光層の上に投影する段階と、
微細構造又はナノ構造を前記ウェーハ(24)上に生成する段階と、
を含むことを特徴とする方法。 - 請求項15に記載の方法に従って生成された構造化構成要素。
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DE102013223935.1 | 2013-11-22 | ||
DE102013223935.1A DE102013223935A1 (de) | 2013-11-22 | 2013-11-22 | Beleuchtungssystem für die EUV-Belichtungslithographie |
PCT/EP2014/075257 WO2015078776A1 (de) | 2013-11-22 | 2014-11-21 | Beleuchtungssystem für die euv-projektionslithographie |
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KR (2) | KR102380615B1 (ja) |
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Cited By (2)
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JP2022501584A (ja) * | 2018-09-20 | 2022-01-06 | エーエスエムエル ネザーランズ ビー.ブイ. | 光学系、メトロロジ装置、及び関連の方法 |
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DE102013223935A1 (de) | 2013-11-22 | 2015-05-28 | Carl Zeiss Smt Gmbh | Beleuchtungssystem für die EUV-Belichtungslithographie |
DE102014221173A1 (de) | 2014-10-17 | 2016-04-21 | Carl Zeiss Smt Gmbh | Strahlungsquellenmodul |
DE102014226920A1 (de) | 2014-12-23 | 2016-06-23 | Carl Zeiss Smt Gmbh | Optische Komponente |
DE102014226921A1 (de) | 2014-12-23 | 2016-06-23 | Carl Zeiss Smt Gmbh | Strahlungsquellenmodul |
TWI701517B (zh) | 2014-12-23 | 2020-08-11 | 德商卡爾蔡司Smt有限公司 | 光學構件 |
DE102014226918A1 (de) | 2014-12-23 | 2016-06-23 | Carl Zeiss Smt Gmbh | Optische Komponente |
DE102015212878A1 (de) | 2015-07-09 | 2017-01-12 | Carl Zeiss Smt Gmbh | Strahlführungsvorrichtung |
DE102015215216A1 (de) * | 2015-08-10 | 2017-02-16 | Carl Zeiss Smt Gmbh | Optisches System |
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DE102015220955A1 (de) | 2015-10-27 | 2015-12-17 | Carl Zeiss Smt Gmbh | Optisches Bauelement |
DE102016217426A1 (de) | 2016-09-13 | 2017-08-24 | Carl Zeiss Smt Gmbh | Strahlteiler |
DE102017205548A1 (de) | 2017-03-31 | 2018-10-04 | Carl Zeiss Smt Gmbh | Optische Baugruppe zum Führen eines Ausgabestrahls eines Freie-Elektronen-Lasers |
CN107166180A (zh) * | 2017-06-14 | 2017-09-15 | 杨毅 | 灯具 |
DE102017210190A1 (de) | 2017-06-19 | 2018-03-15 | Carl Zeiss Smt Gmbh | Optisches Element |
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DE102018212224A1 (de) | 2018-07-23 | 2020-01-23 | Carl Zeiss Smt Gmbh | Vorrichtung zur Rückkopplung von emittierter Strahlung in eine Laserquelle |
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US20160252823A1 (en) | 2016-09-01 |
CN105765460B (zh) | 2018-12-28 |
US20180224750A1 (en) | 2018-08-09 |
DE102013223935A1 (de) | 2015-05-28 |
CN105765460A (zh) | 2016-07-13 |
KR102380615B1 (ko) | 2022-03-30 |
JP6623156B2 (ja) | 2019-12-18 |
CN110068990B (zh) | 2021-12-28 |
EP3072015A1 (de) | 2016-09-28 |
US10310381B2 (en) | 2019-06-04 |
KR20210039000A (ko) | 2021-04-08 |
WO2015078776A1 (de) | 2015-06-04 |
EP3467590A1 (de) | 2019-04-10 |
KR102413481B1 (ko) | 2022-06-27 |
US9958783B2 (en) | 2018-05-01 |
CN110068990A (zh) | 2019-07-30 |
EP3072015B1 (de) | 2019-01-02 |
KR20160088421A (ko) | 2016-07-25 |
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