JP2016535933A - 圧電駆動プラットフォーム - Google Patents
圧電駆動プラットフォーム Download PDFInfo
- Publication number
- JP2016535933A JP2016535933A JP2016524009A JP2016524009A JP2016535933A JP 2016535933 A JP2016535933 A JP 2016535933A JP 2016524009 A JP2016524009 A JP 2016524009A JP 2016524009 A JP2016524009 A JP 2016524009A JP 2016535933 A JP2016535933 A JP 2016535933A
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- Prior art keywords
- piezoelectric
- drive platform
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- electrode
- piezoelectric drive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims abstract description 48
- 239000000463 material Substances 0.000 claims abstract description 41
- 239000013078 crystal Substances 0.000 claims abstract description 20
- 235000019687 Lamb Nutrition 0.000 claims abstract description 7
- 238000010897 surface acoustic wave method Methods 0.000 claims abstract description 5
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 21
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 5
- 239000010931 gold Substances 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 5
- 229910002601 GaN Inorganic materials 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000007788 liquid Substances 0.000 description 41
- 239000002245 particle Substances 0.000 description 23
- 239000012530 fluid Substances 0.000 description 9
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 9
- 230000001133 acceleration Effects 0.000 description 8
- 230000008901 benefit Effects 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 230000002776 aggregation Effects 0.000 description 3
- 238000004220 aggregation Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000000889 atomisation Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000001427 coherent effect Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007363 ring formation reaction Methods 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 239000012620 biological material Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000012377 drug delivery Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000009688 liquid atomisation Methods 0.000 description 1
- 210000004072 lung Anatomy 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/25—Constructional features of resonators using surface acoustic waves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0653—Details
- B05B17/0661—Transducer materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0653—Details
- B05B17/0676—Feeding means
- B05B17/0684—Wicks or the like
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/12—Specific details about materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Dispersion Chemistry (AREA)
- Analytical Chemistry (AREA)
- Hematology (AREA)
- Clinical Laboratory Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Acoustics & Sound (AREA)
- Physics & Mathematics (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Transducers For Ultrasonic Waves (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Special Spraying Apparatus (AREA)
Abstract
Description
Claims (10)
- 単結晶圧電材料から形成された圧電基板と、
前記圧電基板に接し、ラム波または表面音響波が前記基板内で生成され得るように電気信号を前記基板に印加するための少なくとも一つの単純な電極と、
を含む圧電駆動プラットフォーム。 - 前記単結晶圧電材料は、以下のグループの一つから選択される請求項1に記載の圧電駆動プラットフォーム:
バルクニオブ酸リチウム、薄膜ニオブ酸リチウム、バルクタンタル酸リチウム、薄膜タンタル酸リチウム、窒化ガリウム、水晶、およびランガサイト。 - 前記単純な電極は、前記圧電基板の表面に物理的に接している、請求項1または2に記載の圧電駆動プラットフォーム。
- 前記単純な電極は、前記圧電基板の表面にスパッタリングされた導電性材料の形態である、請求項1または2に記載の圧電駆動プラットフォーム。
- 前記導電性材料は、金などの金属である、請求項4に記載の圧電駆動プラットフォーム。
- 前記圧電基板の表面は、研磨されていない、請求項3乃至5のいずれか一項に記載の圧電駆動プラットフォーム。
- 前記単純な電極は、前記圧電基板表面の大部分に接する大きな電極である、請求項3乃至6のいずれか一項に記載の圧電駆動プラットフォーム。
- 前記単純な電極は、導電性シート材料の形態である、請求項7に記載の圧電駆動プラットフォーム。
- 前記単純な電極は、前記圧電基板面の表面上の点に接する点電極である、請求項3乃至5のいずれか一項に記載の圧電駆動プラットフォーム。
- 前記電気信号は、前記圧電基板の共振周波数と実質的に一致する1つまたは複数の周波数である、請求項1乃至9のいずれか一項に記載の圧電駆動プラットフォーム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2013903999 | 2013-10-17 | ||
AU2013903999A AU2013903999A0 (en) | 2013-10-17 | Piezoelectric Actuation Platform | |
PCT/AU2014/050259 WO2015054742A1 (en) | 2013-10-17 | 2014-09-30 | Piezoelectric actuation platform |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016535933A true JP2016535933A (ja) | 2016-11-17 |
JP6672143B2 JP6672143B2 (ja) | 2020-03-25 |
Family
ID=52827463
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016524009A Active JP6672143B2 (ja) | 2013-10-17 | 2014-09-30 | 圧電駆動プラットフォーム |
Country Status (7)
Country | Link |
---|---|
US (1) | US10404232B2 (ja) |
EP (1) | EP3058603B1 (ja) |
JP (1) | JP6672143B2 (ja) |
AU (1) | AU2014336971B2 (ja) |
ES (1) | ES2776354T3 (ja) |
PT (1) | PT3058603T (ja) |
WO (1) | WO2015054742A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108872084B (zh) * | 2018-04-24 | 2022-05-17 | 河北工业大学 | 一种基于非对称铌酸锂夹层结构的全光微液滴分离方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003258596A (ja) * | 2002-03-01 | 2003-09-12 | Yasuhiko Nakagawa | ラム波型高周波共振器、これを用いた発振装置、及びラム波を用いた高周波信号生成方法 |
JP2005217818A (ja) * | 2004-01-30 | 2005-08-11 | River Eletec Kk | 圧電振動子 |
JP2007325269A (ja) * | 2006-05-31 | 2007-12-13 | Avago Technologies Wireless Ip (Singapore) Pte Ltd | 圧電式共振子構造および電気フィルタ |
US20080048804A1 (en) * | 2006-08-28 | 2008-02-28 | Stmicroelectronics Sa | Coupled lamb wave resonators filter |
JP2009147917A (ja) * | 2007-10-22 | 2009-07-02 | Centre Natl De La Recherche Scientifique | ラム波共振器 |
WO2010004741A1 (ja) * | 2008-07-11 | 2010-01-14 | パナソニック株式会社 | 板波素子と、これを用いた電子機器 |
JP2010136317A (ja) * | 2008-03-24 | 2010-06-17 | Ngk Insulators Ltd | バルク弾性波装置の製造方法 |
JP2010220204A (ja) * | 2009-02-17 | 2010-09-30 | Ngk Insulators Ltd | ラム波装置 |
Family Cites Families (10)
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US3790709A (en) * | 1972-03-30 | 1974-02-05 | Siemens Ag | Device for registering the instantaneous contact pressure of a probe and for the electronic recording of the instantaneous location of a probe on the surface of a plate |
JPS632414A (ja) * | 1986-06-21 | 1988-01-07 | Alps Electric Co Ltd | 弾性表面波共振子 |
US6295247B1 (en) * | 1998-10-02 | 2001-09-25 | The Board Of Trustees Of The Leland Stanford Junior University | Micromachined rayleigh, lamb, and bulk wave capacitive ultrasonic transducers |
WO2007128045A1 (en) | 2006-05-02 | 2007-11-15 | Monash University | Microfluidic systems using surface acoustic energy and method of use thereof |
EP2277265A1 (en) * | 2008-04-29 | 2011-01-26 | Nxp B.V. | Bulk acoustic wave resonator |
US20100140185A1 (en) * | 2008-12-05 | 2010-06-10 | John Hill | Wastewater treatment |
WO2010114602A1 (en) * | 2009-03-31 | 2010-10-07 | Sand9, Inc. | Integration of piezoelectric materials with substrates |
WO2010129994A1 (en) * | 2009-05-11 | 2010-11-18 | Monash University | Microfluidic apparatus for the atomisation of a liquid |
WO2012114931A1 (ja) * | 2011-02-25 | 2012-08-30 | 株式会社村田製作所 | 可変容量素子及びチューナブルフィルタ |
US9728708B2 (en) * | 2011-10-18 | 2017-08-08 | Dalhousie University | Piezoelectric materials and methods of property control |
-
2014
- 2014-09-30 ES ES14853674T patent/ES2776354T3/es active Active
- 2014-09-30 US US15/029,433 patent/US10404232B2/en active Active
- 2014-09-30 EP EP14853674.1A patent/EP3058603B1/en active Active
- 2014-09-30 AU AU2014336971A patent/AU2014336971B2/en active Active
- 2014-09-30 JP JP2016524009A patent/JP6672143B2/ja active Active
- 2014-09-30 PT PT148536741T patent/PT3058603T/pt unknown
- 2014-09-30 WO PCT/AU2014/050259 patent/WO2015054742A1/en active Application Filing
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003258596A (ja) * | 2002-03-01 | 2003-09-12 | Yasuhiko Nakagawa | ラム波型高周波共振器、これを用いた発振装置、及びラム波を用いた高周波信号生成方法 |
JP2005217818A (ja) * | 2004-01-30 | 2005-08-11 | River Eletec Kk | 圧電振動子 |
JP2007325269A (ja) * | 2006-05-31 | 2007-12-13 | Avago Technologies Wireless Ip (Singapore) Pte Ltd | 圧電式共振子構造および電気フィルタ |
US20080048804A1 (en) * | 2006-08-28 | 2008-02-28 | Stmicroelectronics Sa | Coupled lamb wave resonators filter |
JP2009147917A (ja) * | 2007-10-22 | 2009-07-02 | Centre Natl De La Recherche Scientifique | ラム波共振器 |
JP2010136317A (ja) * | 2008-03-24 | 2010-06-17 | Ngk Insulators Ltd | バルク弾性波装置の製造方法 |
WO2010004741A1 (ja) * | 2008-07-11 | 2010-01-14 | パナソニック株式会社 | 板波素子と、これを用いた電子機器 |
JP2010220204A (ja) * | 2009-02-17 | 2010-09-30 | Ngk Insulators Ltd | ラム波装置 |
Also Published As
Publication number | Publication date |
---|---|
JP6672143B2 (ja) | 2020-03-25 |
AU2014336971B2 (en) | 2020-03-26 |
EP3058603B1 (en) | 2020-02-05 |
WO2015054742A1 (en) | 2015-04-23 |
PT3058603T (pt) | 2020-03-27 |
AU2014336971A1 (en) | 2016-06-09 |
EP3058603A4 (en) | 2017-06-14 |
US20160301381A1 (en) | 2016-10-13 |
EP3058603A1 (en) | 2016-08-24 |
US10404232B2 (en) | 2019-09-03 |
ES2776354T3 (es) | 2020-07-30 |
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