JP2016532774A5 - - Google Patents
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- Publication number
- JP2016532774A5 JP2016532774A5 JP2016527057A JP2016527057A JP2016532774A5 JP 2016532774 A5 JP2016532774 A5 JP 2016532774A5 JP 2016527057 A JP2016527057 A JP 2016527057A JP 2016527057 A JP2016527057 A JP 2016527057A JP 2016532774 A5 JP2016532774 A5 JP 2016532774A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- gap
- fluid
- roll
- item
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 37
- 239000012530 fluid Substances 0.000 claims description 31
- 239000011248 coating agent Substances 0.000 claims description 11
- 238000000576 coating method Methods 0.000 claims description 11
- 125000006850 spacer group Chemical group 0.000 claims description 8
- 238000005086 pumping Methods 0.000 claims description 6
- 238000004804 winding Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- XPBBUZJBQWWFFJ-UHFFFAOYSA-N fluorosilane Chemical compound [SiH3]F XPBBUZJBQWWFFJ-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361846672P | 2013-07-16 | 2013-07-16 | |
| US61/846,672 | 2013-07-16 | ||
| PCT/US2014/046785 WO2015009779A1 (en) | 2013-07-16 | 2014-07-16 | Roll processing of film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2016532774A JP2016532774A (ja) | 2016-10-20 |
| JP2016532774A5 true JP2016532774A5 (https=) | 2017-08-31 |
Family
ID=52346691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016527057A Pending JP2016532774A (ja) | 2013-07-16 | 2014-07-16 | フィルムのロール加工 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10252940B2 (https=) |
| EP (1) | EP3022331A4 (https=) |
| JP (1) | JP2016532774A (https=) |
| KR (1) | KR20160032128A (https=) |
| CN (1) | CN105378148B (https=) |
| WO (1) | WO2015009779A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108025960A (zh) * | 2015-08-21 | 2018-05-11 | 康宁公司 | 用于大量处理基板卷材之系统及方法 |
| FR3112796B1 (fr) | 2020-07-21 | 2022-11-25 | Inst Polytechnique Grenoble | Procédé de fonctionnalisation d’un substrat à base d’un polymère par dépôt chimique d’une couche mince |
Family Cites Families (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3923556A (en) | 1973-12-03 | 1975-12-02 | Wilson Eng Co Inc Lee | Formation of open coil with spacer band |
| US4110878A (en) * | 1976-06-15 | 1978-09-05 | Kurt Wenzel | Method for manufacturing an impregnated wound foil capacitor |
| FR2528225A1 (fr) * | 1982-06-04 | 1983-12-09 | Europ Composants Electron | Procede de fabrication d'un pave elementaire de condensateur multi-couches et dispositif pour sa mise en oeuvre |
| JPH10513112A (ja) * | 1995-02-02 | 1998-12-15 | ミネソタ・マイニング・アンド・マニュファクチャリング・カンパニー | 薄膜液状コーティングを適用するための方法および装置 |
| US5505995A (en) * | 1995-02-02 | 1996-04-09 | Minnesota Mining And Manufacturing Company | Method and apparatus for coating substrates using an air knife |
| DE19839916A1 (de) * | 1998-09-02 | 2000-03-09 | Jagenberg Papiertech Gmbh | Verfahren und Vorrichtung zur Verminderung des Volumens oder Drucks eines Fluids, das von sich bewegenden Oberflächen in einen Spalt eingeschleppt wird |
| US6168827B1 (en) | 1999-08-30 | 2001-01-02 | General Electric Company | Fiber coating method |
| EP1162227B1 (en) * | 1999-12-28 | 2008-06-18 | Teijin Limited | Polyester film roll |
| JP2002246310A (ja) * | 2001-02-14 | 2002-08-30 | Sony Corp | 半導体薄膜の形成方法及び半導体装置の製造方法、これらの方法の実施に使用する装置、並びに電気光学装置 |
| US7115304B2 (en) | 2004-02-19 | 2006-10-03 | Nanosolar, Inc. | High throughput surface treatment on coiled flexible substrates |
| US8304019B1 (en) | 2004-02-19 | 2012-11-06 | Nanosolar Inc. | Roll-to-roll atomic layer deposition method and system |
| EP1889947A4 (en) | 2005-04-06 | 2009-09-30 | Toyo Seikan Kaisha Ltd | METHOD AND DEVICE FOR FORMING A STEAM SEPARATION FILM THROUGH SURFACE FLUID PLASMA |
| US7407892B2 (en) * | 2005-05-11 | 2008-08-05 | Micron Technology, Inc. | Deposition methods |
| JP4783117B2 (ja) * | 2005-10-21 | 2011-09-28 | 東レ・ダウコーニング株式会社 | シリカ系ガラス薄層付き無機質基板、その製造方法、コーテイング剤および半導体装置 |
| WO2007106076A2 (en) | 2006-03-03 | 2007-09-20 | Prasad Gadgil | Apparatus and method for large area multi-layer atomic layer chemical vapor processing of thin films |
| US20070281089A1 (en) | 2006-06-05 | 2007-12-06 | General Electric Company | Systems and methods for roll-to-roll atomic layer deposition on continuously fed objects |
| US8236116B2 (en) * | 2007-06-06 | 2012-08-07 | Centre Luxembourgeois De Recherches Pour Le Verre Et Al Ceramique S.A. (C.R.V.C.) | Method of making coated glass article, and intermediate product used in same |
| JP2009013473A (ja) * | 2007-07-05 | 2009-01-22 | Dainippon Printing Co Ltd | 薄膜形成装置および薄膜形成方法 |
| US7760486B2 (en) * | 2007-08-28 | 2010-07-20 | E. I. Du Pont De Nemours And Company | Aluminum electrolytic capacitors utilizing fine fiber spacers |
| US20090087646A1 (en) * | 2007-10-01 | 2009-04-02 | Cf Supplies International Ltd. | Coated substrate, composition for treating a substrate and process of treatment |
| JP5071428B2 (ja) | 2009-04-15 | 2012-11-14 | 住友金属鉱山株式会社 | 金属ベース層付耐熱性樹脂フィルムと金属膜付耐熱性樹脂フィルムの製造方法および金属ベース層付耐熱性樹脂フィルムの製造装置 |
| JP5562723B2 (ja) | 2009-05-29 | 2014-07-30 | 富士フイルム株式会社 | 成膜方法、成膜装置、およびガスバリアフィルムの製造方法 |
| US8529700B2 (en) | 2009-08-31 | 2013-09-10 | E I Du Pont De Nemours And Company | Apparatus for gaseous vapor deposition |
| JP5486249B2 (ja) | 2009-09-11 | 2014-05-07 | 富士フイルム株式会社 | 成膜方法 |
| BR112012005212A2 (pt) | 2009-09-22 | 2016-03-15 | 3M Innovative Properties Co | método para aplicação de revestimetos por deposição de camada atômica em subtratos não cerâmicos porosos |
| US8637117B2 (en) | 2009-10-14 | 2014-01-28 | Lotus Applied Technology, Llc | Inhibiting excess precursor transport between separate precursor zones in an atomic layer deposition system |
| CN102741316B (zh) * | 2009-11-30 | 2016-06-01 | 那诺思卡乐康母庞特公司 | 制备基于储能装置的织构化电极的方法 |
| JP5621258B2 (ja) | 2009-12-28 | 2014-11-12 | ソニー株式会社 | 成膜装置および成膜方法 |
| US9297076B2 (en) | 2010-07-23 | 2016-03-29 | Lotus Applied Technology, Llc | Substrate transport mechanism contacting a single side of a flexible web substrate for roll-to-roll thin film deposition |
| JP5733507B2 (ja) | 2011-03-17 | 2015-06-10 | 凸版印刷株式会社 | 成膜方法 |
| JP6231483B2 (ja) | 2011-10-31 | 2017-11-15 | スリーエム イノベイティブ プロパティズ カンパニー | ロール形態の基材にコーティングを適用する方法 |
| JP5536018B2 (ja) | 2011-11-29 | 2014-07-02 | 月島機械株式会社 | 真空成膜装置および樹脂フィルムの真空成膜方法 |
| EP2882540B1 (en) * | 2012-08-09 | 2017-12-27 | DSM IP Assets B.V. | Roll coating process |
-
2014
- 2014-07-16 KR KR1020167002325A patent/KR20160032128A/ko not_active Withdrawn
- 2014-07-16 CN CN201480039959.4A patent/CN105378148B/zh not_active Expired - Fee Related
- 2014-07-16 JP JP2016527057A patent/JP2016532774A/ja active Pending
- 2014-07-16 WO PCT/US2014/046785 patent/WO2015009779A1/en not_active Ceased
- 2014-07-16 EP EP14826833.7A patent/EP3022331A4/en not_active Withdrawn
- 2014-07-16 US US14/905,201 patent/US10252940B2/en active Active
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