JP2016524340A - ナトリウムインジウム硫化物緩衝層を有する薄膜太陽電池のための層システム - Google Patents
ナトリウムインジウム硫化物緩衝層を有する薄膜太陽電池のための層システム Download PDFInfo
- Publication number
- JP2016524340A JP2016524340A JP2016522545A JP2016522545A JP2016524340A JP 2016524340 A JP2016524340 A JP 2016524340A JP 2016522545 A JP2016522545 A JP 2016522545A JP 2016522545 A JP2016522545 A JP 2016522545A JP 2016524340 A JP2016524340 A JP 2016524340A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- sodium
- buffer layer
- sulfide
- indium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000872 buffer Substances 0.000 title claims abstract description 144
- 239000010409 thin film Substances 0.000 title claims abstract description 49
- AXCIGYOXXCQVPM-UHFFFAOYSA-N [In]=S.[Na] Chemical compound [In]=S.[Na] AXCIGYOXXCQVPM-UHFFFAOYSA-N 0.000 title description 22
- 239000006096 absorbing agent Substances 0.000 claims abstract description 13
- 239000011734 sodium Substances 0.000 claims description 91
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 58
- 229910052708 sodium Inorganic materials 0.000 claims description 58
- GKCNVZWZCYIBPR-UHFFFAOYSA-N sulfanylideneindium Chemical compound [In]=S GKCNVZWZCYIBPR-UHFFFAOYSA-N 0.000 claims description 39
- 229910052717 sulfur Inorganic materials 0.000 claims description 38
- 229910052738 indium Inorganic materials 0.000 claims description 36
- 238000000034 method Methods 0.000 claims description 36
- 239000010949 copper Substances 0.000 claims description 35
- GRVFOGOEDUUMBP-UHFFFAOYSA-N sodium sulfide (anhydrous) Chemical compound [Na+].[Na+].[S-2] GRVFOGOEDUUMBP-UHFFFAOYSA-N 0.000 claims description 30
- 229910052979 sodium sulfide Inorganic materials 0.000 claims description 28
- 229910052733 gallium Inorganic materials 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 26
- 238000010521 absorption reaction Methods 0.000 claims description 24
- 229910052711 selenium Inorganic materials 0.000 claims description 22
- 238000004519 manufacturing process Methods 0.000 claims description 18
- 238000000151 deposition Methods 0.000 claims description 16
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 16
- 230000008021 deposition Effects 0.000 claims description 13
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 11
- 229910052951 chalcopyrite Inorganic materials 0.000 claims description 10
- 229910052802 copper Inorganic materials 0.000 claims description 10
- 238000004544 sputter deposition Methods 0.000 claims description 10
- 239000002250 absorbent Substances 0.000 claims description 9
- 230000002745 absorbent Effects 0.000 claims description 9
- RLIUKKHIBMHFOK-UHFFFAOYSA-N indium sodium Chemical compound [Na].[In] RLIUKKHIBMHFOK-UHFFFAOYSA-N 0.000 claims description 9
- 238000000231 atomic layer deposition Methods 0.000 claims description 8
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
- -1 chalcopyrite compound Chemical class 0.000 claims description 7
- 239000001301 oxygen Substances 0.000 claims description 7
- 239000002253 acid Substances 0.000 claims description 6
- 229910052736 halogen Inorganic materials 0.000 claims description 6
- 150000002367 halogens Chemical class 0.000 claims description 6
- 238000005240 physical vapour deposition Methods 0.000 claims description 6
- 238000002207 thermal evaporation Methods 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- 238000000224 chemical solution deposition Methods 0.000 claims description 5
- 238000005229 chemical vapour deposition Methods 0.000 claims description 4
- 239000000460 chlorine Substances 0.000 claims description 4
- 229910052801 chlorine Inorganic materials 0.000 claims description 4
- 238000005566 electron beam evaporation Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 4
- 238000005118 spray pyrolysis Methods 0.000 claims description 4
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 3
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims 1
- 239000011669 selenium Substances 0.000 description 22
- 239000000463 material Substances 0.000 description 20
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 17
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 17
- 239000011593 sulfur Substances 0.000 description 17
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 14
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 14
- 239000000126 substance Substances 0.000 description 13
- 239000000203 mixture Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 9
- 239000011521 glass Substances 0.000 description 7
- 239000012535 impurity Substances 0.000 description 7
- 239000011787 zinc oxide Substances 0.000 description 7
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910052750 molybdenum Inorganic materials 0.000 description 6
- 239000011733 molybdenum Substances 0.000 description 6
- 239000002243 precursor Substances 0.000 description 6
- 230000006978 adaptation Effects 0.000 description 5
- DVRDHUBQLOKMHZ-UHFFFAOYSA-N chalcopyrite Chemical compound [S-2].[S-2].[Fe+2].[Cu+2] DVRDHUBQLOKMHZ-UHFFFAOYSA-N 0.000 description 5
- HVMJUDPAXRRVQO-UHFFFAOYSA-N copper indium Chemical compound [Cu].[In] HVMJUDPAXRRVQO-UHFFFAOYSA-N 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
- 229920003023 plastic Polymers 0.000 description 5
- 239000004033 plastic Substances 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 239000002585 base Substances 0.000 description 4
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 229910001092 metal group alloy Inorganic materials 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000007704 wet chemistry method Methods 0.000 description 3
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- BWGNESOTFCXPMA-UHFFFAOYSA-N Dihydrogen disulfide Chemical compound SS BWGNESOTFCXPMA-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910000528 Na alloy Inorganic materials 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 229910052798 chalcogen Inorganic materials 0.000 description 2
- 150000001787 chalcogens Chemical class 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 2
- 239000002800 charge carrier Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 2
- SIXIBASSFIFHDK-UHFFFAOYSA-N indium(3+);trisulfide Chemical compound [S-2].[S-2].[S-2].[In+3].[In+3] SIXIBASSFIFHDK-UHFFFAOYSA-N 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- RBORURQQJIQWBS-QVRNUERCSA-N (4ar,6r,7r,7as)-6-(6-amino-8-bromopurin-9-yl)-2-hydroxy-2-sulfanylidene-4a,6,7,7a-tetrahydro-4h-furo[3,2-d][1,3,2]dioxaphosphinin-7-ol Chemical compound C([C@H]1O2)OP(O)(=S)O[C@H]1[C@@H](O)[C@@H]2N1C(N=CN=C2N)=C2N=C1Br RBORURQQJIQWBS-QVRNUERCSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- BKQMNPVDJIHLPD-UHFFFAOYSA-N OS(=O)(=O)[Se]S(O)(=O)=O Chemical compound OS(=O)(=O)[Se]S(O)(=O)=O BKQMNPVDJIHLPD-UHFFFAOYSA-N 0.000 description 1
- QEWCDOSBINPOPV-UHFFFAOYSA-N S(=O)(=O)(O)[Se]S(=O)(=O)O.[Sn].[Zn].[Cu] Chemical compound S(=O)(=O)(O)[Se]S(=O)(=O)O.[Sn].[Zn].[Cu] QEWCDOSBINPOPV-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910003363 ZnMgO Inorganic materials 0.000 description 1
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000012876 carrier material Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 150000004770 chalcogenides Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- ZZEMEJKDTZOXOI-UHFFFAOYSA-N digallium;selenium(2-) Chemical compound [Ga+3].[Ga+3].[Se-2].[Se-2].[Se-2] ZZEMEJKDTZOXOI-UHFFFAOYSA-N 0.000 description 1
- VDQVEACBQKUUSU-UHFFFAOYSA-M disodium;sulfanide Chemical compound [Na+].[Na+].[SH-] VDQVEACBQKUUSU-UHFFFAOYSA-M 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000005038 ethylene vinyl acetate Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000005289 physical deposition Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920001021 polysulfide Polymers 0.000 description 1
- 239000005077 polysulfide Substances 0.000 description 1
- 150000008117 polysulfides Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 150000003388 sodium compounds Chemical class 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000002042 time-of-flight secondary ion mass spectrometry Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type
- H01L31/0749—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type including a AIBIIICVI compound, e.g. CdS/CulnSe2 [CIS] heterojunction solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02425—Conductive materials, e.g. metallic silicides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02485—Other chalcogenide semiconducting materials not being oxides, e.g. ternary compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02491—Conductive materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02568—Chalcogenide semiconducting materials not being oxides, e.g. ternary compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/0328—Inorganic materials including, apart from doping materials or other impurities, semiconductor materials provided for in two or more of groups H01L31/0272 - H01L31/032
- H01L31/0336—Inorganic materials including, apart from doping materials or other impurities, semiconductor materials provided for in two or more of groups H01L31/0272 - H01L31/032 in different semiconductor regions, e.g. Cu2X/CdX hetero-junctions, X being an element of Group VI of the Periodic System
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
Description
(a)吸収層、特に、黄銅鉱半導体を含む吸収層が製造され、
(b)緩衝層が吸収層の上に配置され、緩衝層が、NaxIny−x/3Sを含有し、ここで、0.063≦x≦0.625および0.681≦y≦1.50である、方法を含む。
2 基材
3 裏側電極
4 吸収層
5 緩衝層
6 第2の緩衝層
7 前側電極
8 硫化インジウム源
9 硫化ナトリウム源
10 輸送方向
11 硫化インジウム蒸気ビーム
12 硫化ナトリウム蒸気ビーム
13 サンプル担体
100 薄膜太陽電池
Claims (15)
- 薄膜太陽電池(100)のための層システム(1)であって、
光を吸収するための吸収層(4)と、
吸収層(4)の上に配置され、NaxIny−x/3Sを含有し、
0.063≦x≦0.625、
0.681≦y≦1.50である緩衝層(5)とを備える、層システム(1)。 - 緩衝層(5)が、NaxIny−x/3Sを含有し、
0.063≦x≦0.469、
0.681≦y≦1.01である、請求項1に記載の層システム(1)。 - 緩衝層(5)がNaxIny−x/3Sを含有し、
0.13≦x≦0.32、
0.681≦y≦0.78である、請求項1に記載の層システム(1)。 - 緩衝層(5)中、ナトリウムとインジウムのモル分率の比率が0.2より大きい、請求項1から3のいずれか一項に記載の層システム(1)。
- 緩衝層(5)は、ナトリウムのモル分率が5原子%より大きく、特に、7原子%より大きく、特に、7.2原子%より大きい、請求項1から4のいずれか一項に記載の層システム(1)。
- 緩衝層(5)は、ハロゲン、例えば、塩素のモル分率、または銅のモル分率が7原子%未満、特に、5原子%未満である、請求項1から5のいずれか一項に記載の層システム(1)。
- 緩衝層(5)は、酸素のモル分率が10原子%未満である、請求項1から6のいずれか一項に記載の層システム(1)。
- 緩衝層(5)は、層の厚みが10nmから100nm、特に、20nmから60nmであり、緩衝層(5)は、アモルファス性または微結晶性である、請求項1から7のいずれか一項に記載の層システム(1)。
- 吸収層(4)は、黄銅鉱化合物半導体、特に、Cu2ZnSn(S,Se)4、Cu(In,Ga,Al)(S,Se)2、CuInSe2、CuInS2、Cu(In,Ga)Se2およびCu(In,Ga)(S,Se)2から選択される黄銅鉱化合物半導体を含有する、請求項1から8のいずれか一項に記載の層システム(1)。
- 薄膜太陽電池(100)であって、
基材(2)と、
基材(2)の上に配置される裏側電極(3)と、
裏側電極(3)の上に配置される請求項1から9のいずれか一項に記載の層システム(1)と、
層システム(1)の上に配置される前側電極(7)とを備える、薄膜太陽電池(100)。 - 薄膜太陽電池(100)のための層システム(1)を製造するための方法であって、
(a)吸収層(4)が製造され、
(b)吸収層(4)の上に緩衝層(5)が製造され、緩衝層(5)が、NaxIny−x/3Sを含有し、
0.063≦x≦0.625、
0.681≦y≦1.50である、方法。 - 緩衝層(5)を製造するために、工程(b)において、
吸収層(4)の上に硫化インジウムが堆積し、
硫化インジウムの堆積の前および/または最中および/または後に、硫化ナトリウムまたはインジウム酸ナトリウムが吸収層(4)の上に堆積する、請求項11に記載の方法。 - 硫化ナトリウムまたはインジウム酸ナトリウムが、湿式化学浴堆積、原子層堆積(ALD)、イオン層気体堆積(ILGAR)、噴霧熱分解、化学蒸着(CVD)または物理蒸着(PVD)、特に、硫化インジウムおよび硫化ナトリウムまたはインジウム酸ナトリウムのための別個の供給源からの、スパッタリング、熱蒸着または電子ビーム蒸着によって堆積する、請求項11または請求項12に記載の方法。
- 吸収層(4)は、硫化ナトリウムまたはインジウム酸ナトリウムの少なくとも1つの蒸気ビーム(12)および硫化インジウムの少なくとも1つの蒸気ビーム(11)を通るインライン方法または回転方法で運ばれ、これらは、例えば、輸送方向に交互に配置され、特に、硫化ナトリウムまたはインジウム酸ナトリウムの蒸気ビーム(12)から始まり、蒸気ビーム(11、12)が完全に、または部分的に重なり合う、請求項11から13のいずれか一項に記載の方法。
- 吸収層(4)は、硫化ナトリウムまたはインジウム酸ナトリウムの少なくとも1つの蒸気ビーム(12)および硫化インジウムの少なくとも1つの蒸気ビーム(11)を通るインライン方法または回転方法で運ばれ、これらは、例えば、輸送方向に交互に配置され、特に、硫化ナトリウムまたはインジウム酸ナトリウムの蒸気ビーム(12)から始まり、蒸気ビーム(11、12)が重なり合わない、請求項11から13のいずれか一項に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP13173956.7 | 2013-06-27 | ||
EP13173956 | 2013-06-27 | ||
PCT/EP2014/063747 WO2014207226A1 (de) | 2013-06-27 | 2014-06-27 | Schichtsystem für dünnschichtsolarzellen mit natriumindiumsulfid-pufferschicht |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016524340A true JP2016524340A (ja) | 2016-08-12 |
JP6147926B2 JP6147926B2 (ja) | 2017-06-14 |
Family
ID=48692333
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016522545A Active JP6147926B2 (ja) | 2013-06-27 | 2014-06-27 | ナトリウムインジウム硫化物緩衝層を有する薄膜太陽電池のための層システム |
Country Status (7)
Country | Link |
---|---|
US (1) | US20160163905A1 (ja) |
EP (1) | EP3014652B1 (ja) |
JP (1) | JP6147926B2 (ja) |
KR (1) | KR101799087B1 (ja) |
CN (1) | CN105474371B (ja) |
ES (1) | ES2909538T3 (ja) |
WO (1) | WO2014207226A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018500774A (ja) * | 2014-12-22 | 2018-01-11 | ベンブー デザイン アンド リサーチ インスティテュート フォー グラス インダストリーBengbu Design and Research Institute for Glass Industry | 硫化ナトリウムインジウム緩衝層を有する薄膜太陽電池のための層システムの製造方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3627564A1 (de) * | 2018-09-22 | 2020-03-25 | (CNBM) Bengbu Design & Research Institute for Glass Industry Co., Ltd. | Verfahren zur nachbehandlung einer absorberschicht |
KR20200042054A (ko) | 2018-10-12 | 2020-04-23 | 삼성디스플레이 주식회사 | 증착 장치 및 이를 이용한 표시 장치 제조 방법 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10125941A (ja) * | 1996-10-23 | 1998-05-15 | Asahi Chem Ind Co Ltd | カルコパイライト型太陽電池 |
JPH11204810A (ja) * | 1998-01-08 | 1999-07-30 | Asahi Chem Ind Co Ltd | 化合物半導体太陽電池 |
JP2000174306A (ja) * | 1998-12-01 | 2000-06-23 | Asahi Chem Ind Co Ltd | 化合物半導体薄膜の製造方法 |
US20100247745A1 (en) * | 2007-09-12 | 2010-09-30 | Dominik Rudmann | Method for manufacturing a compound film |
JP2011521463A (ja) * | 2008-05-19 | 2011-07-21 | サン−ゴバン グラス フランス エス アー | 太陽電池用層システム |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4442824C1 (de) | 1994-12-01 | 1996-01-25 | Siemens Ag | Solarzelle mit Chalkopyrit-Absorberschicht |
DE19956735B4 (de) | 1999-11-25 | 2008-08-21 | Shell Erneuerbare Energien Gmbh | Dünnfilmsolarzelle mit einer Chalkopyritverbindung und einer Titan und Sauerstoff enthaltenden Verbindung |
FR2820241B1 (fr) | 2001-01-31 | 2003-09-19 | Saint Gobain | Substrat transparent muni d'une electrode |
FR2826951B1 (fr) * | 2001-07-06 | 2003-09-26 | Univ Nantes | Nouveau compose derive de la variete spinelle de sulfure d'indium, ses procedes de fabrication et ses applications |
EP2360289A1 (de) | 2010-02-23 | 2011-08-24 | Saint-Gobain Glass France | Vorrichtung und Verfahren zum Abscheiden einer aus mindestens zwei Komponenten bestehenden Schicht auf einem Gegenstand |
CN102782853A (zh) * | 2010-03-05 | 2012-11-14 | 第一太阳能有限公司 | 具有分级缓冲层的光伏器件 |
-
2014
- 2014-06-27 KR KR1020167001898A patent/KR101799087B1/ko active IP Right Grant
- 2014-06-27 JP JP2016522545A patent/JP6147926B2/ja active Active
- 2014-06-27 WO PCT/EP2014/063747 patent/WO2014207226A1/de active Application Filing
- 2014-06-27 CN CN201480047433.0A patent/CN105474371B/zh active Active
- 2014-06-27 EP EP14734459.2A patent/EP3014652B1/de active Active
- 2014-06-27 ES ES14734459T patent/ES2909538T3/es active Active
- 2014-06-27 US US14/900,939 patent/US20160163905A1/en not_active Abandoned
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10125941A (ja) * | 1996-10-23 | 1998-05-15 | Asahi Chem Ind Co Ltd | カルコパイライト型太陽電池 |
JPH11204810A (ja) * | 1998-01-08 | 1999-07-30 | Asahi Chem Ind Co Ltd | 化合物半導体太陽電池 |
JP2000174306A (ja) * | 1998-12-01 | 2000-06-23 | Asahi Chem Ind Co Ltd | 化合物半導体薄膜の製造方法 |
US20100247745A1 (en) * | 2007-09-12 | 2010-09-30 | Dominik Rudmann | Method for manufacturing a compound film |
JP2011521463A (ja) * | 2008-05-19 | 2011-07-21 | サン−ゴバン グラス フランス エス アー | 太陽電池用層システム |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018500774A (ja) * | 2014-12-22 | 2018-01-11 | ベンブー デザイン アンド リサーチ インスティテュート フォー グラス インダストリーBengbu Design and Research Institute for Glass Industry | 硫化ナトリウムインジウム緩衝層を有する薄膜太陽電池のための層システムの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN105474371B (zh) | 2018-03-27 |
EP3014652A1 (de) | 2016-05-04 |
CN105474371A (zh) | 2016-04-06 |
US20160163905A1 (en) | 2016-06-09 |
ES2909538T3 (es) | 2022-05-06 |
KR101799087B1 (ko) | 2017-11-20 |
EP3014652B1 (de) | 2022-02-16 |
JP6147926B2 (ja) | 2017-06-14 |
KR20160023842A (ko) | 2016-03-03 |
WO2014207226A1 (de) | 2014-12-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101335810B1 (ko) | 태양 전지용 층 시스템 | |
US9087954B2 (en) | Method for producing the pentanary compound semiconductor CZTSSe, and thin-film solar cell | |
US20110155226A1 (en) | Compound thin film solar cell, method of manufacturing a compound thin film solar cell, and a compound thin film solar cell module | |
KR20140099865A (ko) | 광전지용 전도성 기판 | |
KR20140109457A (ko) | 나트륨으로 도핑된 5원 화합물 반도체 cztsse의 제조 방법 | |
JP6147926B2 (ja) | ナトリウムインジウム硫化物緩衝層を有する薄膜太陽電池のための層システム | |
EP3087615B1 (en) | Layer system for thin-film solar cells | |
US9871155B2 (en) | Layer system for thin-film solar cells having an NaxIn1SyClz buffer layer | |
EP3238228B1 (en) | Method for producing a layer system for thin-film solar cells having a sodium indium sulfide buffer layer | |
CN103348488B (zh) | 具有金属硫氧化物窗口层的光伏装置 | |
KR102594725B1 (ko) | 흡수체층의 후처리 방법 | |
KR102212042B1 (ko) | 원자층 증착법으로 형성된 버퍼층을 포함하는 태양전지 및 이의 제조방법 | |
JP2018006558A (ja) | 光電変換モジュール | |
KR101768788B1 (ko) | 화합물 반도체의 제조 방법 및 박막 태양 전지 | |
JP2018006547A (ja) | 光電変換モジュール | |
JP2018006543A (ja) | 光電変換モジュールの製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20161219 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170110 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170410 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20170418 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20170517 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6147926 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |