JP2016514197A5 - - Google Patents
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- Publication number
- JP2016514197A5 JP2016514197A5 JP2015555651A JP2015555651A JP2016514197A5 JP 2016514197 A5 JP2016514197 A5 JP 2016514197A5 JP 2015555651 A JP2015555651 A JP 2015555651A JP 2015555651 A JP2015555651 A JP 2015555651A JP 2016514197 A5 JP2016514197 A5 JP 2016514197A5
- Authority
- JP
- Japan
- Prior art keywords
- gas
- substrate
- separation unit
- gas separation
- deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000926 separation method Methods 0.000 claims description 297
- 230000008021 deposition Effects 0.000 claims description 284
- 239000000758 substrate Substances 0.000 claims description 270
- 239000011248 coating agent Substances 0.000 claims description 182
- 238000000576 coating method Methods 0.000 claims description 182
- 238000012545 processing Methods 0.000 claims description 171
- 238000000034 method Methods 0.000 claims description 118
- 239000010409 thin film Substances 0.000 claims description 39
- 239000000463 material Substances 0.000 claims description 28
- 238000012806 monitoring device Methods 0.000 claims description 20
- 239000012530 fluid Substances 0.000 claims description 12
- 238000004891 communication Methods 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000012544 monitoring process Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 430
- 238000000151 deposition Methods 0.000 description 304
- 230000008569 process Effects 0.000 description 92
- 238000010586 diagram Methods 0.000 description 21
- 238000010926 purge Methods 0.000 description 14
- 238000005086 pumping Methods 0.000 description 11
- 238000005137 deposition process Methods 0.000 description 9
- 238000001816 cooling Methods 0.000 description 7
- 239000010408 film Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000005240 physical vapour deposition Methods 0.000 description 7
- 238000011282 treatment Methods 0.000 description 7
- 238000004804 winding Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 6
- 230000033001 locomotion Effects 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000008602 contraction Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000011888 foil Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 238000004070 electrodeposition Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000002985 plastic film Substances 0.000 description 3
- 229920006255 plastic film Polymers 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 241000287463 Phalacrocorax Species 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000012809 cooling fluid Substances 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical group O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- 238000010943 off-gassing Methods 0.000 description 2
- 238000006748 scratching Methods 0.000 description 2
- 230000002393 scratching effect Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000000427 thin-film deposition Methods 0.000 description 2
- 241000287462 Phalacrocorax carbo Species 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000012864 cross contamination Methods 0.000 description 1
- 230000009849 deactivation Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000013529 heat transfer fluid Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000011866 long-term treatment Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 150000003384 small molecules Chemical class 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP13153501.5 | 2013-01-31 | ||
| EP13153501.5A EP2762608B1 (en) | 2013-01-31 | 2013-01-31 | Gas separation by adjustable separation wall |
| PCT/EP2014/051261 WO2014118063A1 (en) | 2013-01-31 | 2014-01-22 | Gas separation by adjustable separation wall |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020067243A Division JP2020125544A (ja) | 2013-01-31 | 2020-04-03 | 基板上に被膜を被覆する装置及び堆積装置の２つの堆積源間にガス分離を提供する方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016514197A JP2016514197A (ja) | 2016-05-19 |
| JP2016514197A5 true JP2016514197A5 (https=) | 2017-02-23 |
| JP7068766B2 JP7068766B2 (ja) | 2022-05-17 |
Family
ID=47747377
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015555651A Active JP7068766B2 (ja) | 2013-01-31 | 2014-01-22 | 基板上に被膜を被覆する装置及び堆積装置の２つの堆積源間にガス分離を提供する方法 |
| JP2020067243A Pending JP2020125544A (ja) | 2013-01-31 | 2020-04-03 | 基板上に被膜を被覆する装置及び堆積装置の２つの堆積源間にガス分離を提供する方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020067243A Pending JP2020125544A (ja) | 2013-01-31 | 2020-04-03 | 基板上に被膜を被覆する装置及び堆積装置の２つの堆積源間にガス分離を提供する方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US20140208565A1 (https=) |
| EP (1) | EP2762608B1 (https=) |
| JP (2) | JP7068766B2 (https=) |
| KR (1) | KR102228608B1 (https=) |
| CN (1) | CN104968831B (https=) |
| TW (1) | TWI655314B (https=) |
| WO (1) | WO2014118063A1 (https=) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013108751A1 (ja) * | 2012-01-16 | 2013-07-25 | 株式会社アルバック | 成膜装置 |
| EP2762609B1 (en) * | 2013-01-31 | 2019-04-17 | Applied Materials, Inc. | Apparatus and method for depositing at least two layers on a substrate |
| EP2762607B1 (en) * | 2013-01-31 | 2018-07-25 | Applied Materials, Inc. | Deposition source with adjustable electrode |
| EP2784176B1 (en) | 2013-03-28 | 2018-10-03 | Applied Materials, Inc. | Deposition platform for flexible substrates |
| MX393887B (es) * | 2015-02-13 | 2025-03-24 | Buehler Alzenau Gmbh | Método para operar un sistema de recubrimiento en línea y sistema de recubrimiento en línea. |
| FR3035122B1 (fr) * | 2015-04-20 | 2017-04-28 | Coating Plasma Ind | Procede de traitement de surface d'un film en mouvement et installation pour la mise en oeuvre de ce procede |
| US20180258536A1 (en) * | 2015-09-02 | 2018-09-13 | Beneq Oy | Apparatus for processing a surface of substrate and method operating the apparatus |
| JP6803917B2 (ja) * | 2016-02-12 | 2020-12-23 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 真空処理システム及び真空処理を行う方法 |
| WO2017140384A1 (en) * | 2016-02-19 | 2017-08-24 | Applied Materials, Inc. | Method of examining a gas separation quality of a gas separation passage in a vacuum chamber, and vacuum processing apparatus |
| FR3058161B1 (fr) * | 2016-10-27 | 2018-11-16 | Coating Plasma Innovation | Installation de traitement de surface d'un substrat en mouvement sous atmosphere controlee, et son procede de dimensionnement |
| JP7014790B2 (ja) | 2016-10-27 | 2022-02-01 | コーティング プラズマ イノベーション | 制御雰囲気において移動する基板の表面を処理するための設備およびそのサイズを画定するための方法 |
| WO2019105534A1 (en) * | 2017-11-28 | 2019-06-06 | Applied Materials, Inc. | Deposition apparatus, method of coating a flexible substrate and flexible substrate having a coating |
| KR102896631B1 (ko) * | 2020-06-04 | 2025-12-04 | 엘리베이티드 머티어리얼스 저머니 게엠베하 | 진공 챔버에서 기판을 코팅하기 위한 기상 증착 장치 및 방법 |
| TWI839613B (zh) | 2020-06-04 | 2024-04-21 | 美商應用材料股份有限公司 | 用於蒸發源的溫度控制屏蔽、用於在基板上沉積材料的材料沉積設備及方法 |
| US20220033958A1 (en) * | 2020-07-31 | 2022-02-03 | Applied Materials, Inc. | Evaporation source, vapor deposition apparatus, and method for coating a substrate in a vacuum chamber |
| US11552283B2 (en) * | 2020-08-04 | 2023-01-10 | Applied Materials, Inc. | Method of coating a flexible substrate in a R2R deposition system, and vapor deposition system |
| WO2022040075A1 (en) * | 2020-08-21 | 2022-02-24 | Applied Materials, Inc. | Processing system for processing a flexible substrate and method of measuring at least one of a property of a flexible substrate and a property of one or more coatings on the flexible substrate |
| CN114192602B (zh) * | 2021-12-14 | 2022-09-13 | 大连理工大学 | 一种高性能多元NiAl基合金管件迭覆级进成形方法 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0122092A3 (en) * | 1983-04-06 | 1985-07-10 | General Engineering Radcliffe Limited | Vacuum coating apparatus |
| GB8309324D0 (en) * | 1983-04-06 | 1983-05-11 | Gen Eng Radcliffe | Vacuum coating apparatus |
| GB8408023D0 (en) * | 1984-03-28 | 1984-05-10 | Gen Eng Radcliffe Ltd | Vacuum coating apparatus |
| JP2932602B2 (ja) * | 1990-04-27 | 1999-08-09 | 松下電器産業株式会社 | 薄膜製造装置 |
| DE4039930A1 (de) * | 1990-12-14 | 1992-06-17 | Leybold Ag | Vorrichtung fuer plasmabehandlung |
| JP2001023907A (ja) * | 1999-07-07 | 2001-01-26 | Mitsubishi Heavy Ind Ltd | 成膜装置 |
| JP4279218B2 (ja) * | 2004-07-20 | 2009-06-17 | 三菱重工業株式会社 | 給電装置およびこれを備えたプラズマ処理装置並びにプラズマ処理方法 |
| JP2006344758A (ja) * | 2005-06-08 | 2006-12-21 | Sharp Corp | 気相成長装置およびそれを用いた半導体装置の製造方法 |
| JP2008031521A (ja) * | 2006-07-28 | 2008-02-14 | Sony Corp | ロールツーロール型のプラズマ真空処理装置 |
| EP2180768A1 (en) * | 2008-10-23 | 2010-04-28 | TNO Nederlandse Organisatie voor Toegepast Wetenschappelijk Onderzoek | Apparatus and method for treating an object |
| WO2010052846A1 (ja) * | 2008-11-05 | 2010-05-14 | 株式会社アルバック | 巻取式真空処理装置 |
| EP3020850B1 (en) * | 2009-07-08 | 2018-08-29 | Aixtron SE | Apparatus for plasma processing |
| US20110033638A1 (en) * | 2009-08-10 | 2011-02-10 | Applied Materials, Inc. | Method and apparatus for deposition on large area substrates having reduced gas usage |
| JP5665290B2 (ja) * | 2009-08-24 | 2015-02-04 | 富士フイルム株式会社 | 成膜装置 |
| JP5542488B2 (ja) * | 2010-03-18 | 2014-07-09 | 富士フイルム株式会社 | 成膜装置 |
| EP2762607B1 (en) * | 2013-01-31 | 2018-07-25 | Applied Materials, Inc. | Deposition source with adjustable electrode |
| EP2762609B1 (en) * | 2013-01-31 | 2019-04-17 | Applied Materials, Inc. | Apparatus and method for depositing at least two layers on a substrate |
| EP2784176B1 (en) * | 2013-03-28 | 2018-10-03 | Applied Materials, Inc. | Deposition platform for flexible substrates |
-
2013
- 2013-01-31 EP EP13153501.5A patent/EP2762608B1/en active Active
- 2013-04-26 US US13/871,789 patent/US20140208565A1/en not_active Abandoned
-
2014
- 2014-01-22 WO PCT/EP2014/051261 patent/WO2014118063A1/en not_active Ceased
- 2014-01-22 JP JP2015555651A patent/JP7068766B2/ja active Active
- 2014-01-22 KR KR1020157023458A patent/KR102228608B1/ko active Active
- 2014-01-22 CN CN201480006989.5A patent/CN104968831B/zh active Active
- 2014-01-28 TW TW103103027A patent/TWI655314B/zh active
-
2018
- 2018-12-11 US US16/217,027 patent/US20190112706A1/en not_active Abandoned
-
2020
- 2020-04-03 JP JP2020067243A patent/JP2020125544A/ja active Pending
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