GB8309324D0 - Vacuum coating apparatus - Google Patents

Vacuum coating apparatus

Info

Publication number
GB8309324D0
GB8309324D0 GB838309324A GB8309324A GB8309324D0 GB 8309324 D0 GB8309324 D0 GB 8309324D0 GB 838309324 A GB838309324 A GB 838309324A GB 8309324 A GB8309324 A GB 8309324A GB 8309324 D0 GB8309324 D0 GB 8309324D0
Authority
GB
United Kingdom
Prior art keywords
coating apparatus
vacuum coating
vacuum
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB838309324A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Engineering Co Ltd
Original Assignee
General Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Engineering Co Ltd filed Critical General Engineering Co Ltd
Priority to GB838309324A priority Critical patent/GB8309324D0/en
Publication of GB8309324D0 publication Critical patent/GB8309324D0/en
Priority to EP84302188A priority patent/EP0122092A3/en
Priority to US06/597,123 priority patent/US4692233A/en
Priority to JP6781884A priority patent/JPS6070175A/en
Pending legal-status Critical Current

Links

GB838309324A 1983-04-06 1983-04-06 Vacuum coating apparatus Pending GB8309324D0 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB838309324A GB8309324D0 (en) 1983-04-06 1983-04-06 Vacuum coating apparatus
EP84302188A EP0122092A3 (en) 1983-04-06 1984-03-30 Vacuum coating apparatus
US06/597,123 US4692233A (en) 1983-04-06 1984-04-05 Vacuum coating apparatus
JP6781884A JPS6070175A (en) 1983-04-06 1984-04-06 Vacuum film formation and device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB838309324A GB8309324D0 (en) 1983-04-06 1983-04-06 Vacuum coating apparatus

Publications (1)

Publication Number Publication Date
GB8309324D0 true GB8309324D0 (en) 1983-05-11

Family

ID=10540708

Family Applications (1)

Application Number Title Priority Date Filing Date
GB838309324A Pending GB8309324D0 (en) 1983-04-06 1983-04-06 Vacuum coating apparatus

Country Status (2)

Country Link
JP (1) JPS6070175A (en)
GB (1) GB8309324D0 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008007790A (en) * 2006-06-27 2008-01-17 Sumitomo Metal Mining Co Ltd Winding type compound vacuum surface treatment apparatus, and film surface treatment method
EP2762608B1 (en) * 2013-01-31 2019-10-02 Applied Materials, Inc. Gas separation by adjustable separation wall
DE102015104039B4 (en) * 2015-03-18 2018-06-21 Von Ardenne Gmbh Tape substrate coater with a magnetron assembly
WO2017108081A1 (en) * 2015-12-21 2017-06-29 Applied Materials, Inc. Film forming apparatus
JP6959210B2 (en) * 2018-10-10 2021-11-02 株式会社ヒラノＫ＆Ｅ Film deposition equipment
JP6859307B2 (en) * 2018-10-10 2021-04-14 株式会社ヒラノＫ＆Ｅ Film deposition equipment
JP7305565B2 (en) * 2020-01-17 2023-07-10 株式会社アルバック Vacuum processing equipment

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57126825A (en) * 1981-01-29 1982-08-06 Matsushita Electric Ind Co Ltd Vacuum film-forming apparatus
JPS5916535A (en) * 1982-07-20 1984-01-27 Konishiroku Photo Ind Co Ltd Method and device for vapor deposition

Also Published As

Publication number Publication date
JPS6070175A (en) 1985-04-20

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