GB8309324D0 - Vacuum coating apparatus - Google Patents
Vacuum coating apparatusInfo
- Publication number
- GB8309324D0 GB8309324D0 GB838309324A GB8309324A GB8309324D0 GB 8309324 D0 GB8309324 D0 GB 8309324D0 GB 838309324 A GB838309324 A GB 838309324A GB 8309324 A GB8309324 A GB 8309324A GB 8309324 D0 GB8309324 D0 GB 8309324D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- coating apparatus
- vacuum coating
- vacuum
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB838309324A GB8309324D0 (en) | 1983-04-06 | 1983-04-06 | Vacuum coating apparatus |
EP84302188A EP0122092A3 (en) | 1983-04-06 | 1984-03-30 | Vacuum coating apparatus |
US06/597,123 US4692233A (en) | 1983-04-06 | 1984-04-05 | Vacuum coating apparatus |
JP6781884A JPS6070175A (en) | 1983-04-06 | 1984-04-06 | Vacuum film formation and device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB838309324A GB8309324D0 (en) | 1983-04-06 | 1983-04-06 | Vacuum coating apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
GB8309324D0 true GB8309324D0 (en) | 1983-05-11 |
Family
ID=10540708
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB838309324A Pending GB8309324D0 (en) | 1983-04-06 | 1983-04-06 | Vacuum coating apparatus |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS6070175A (en) |
GB (1) | GB8309324D0 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008007790A (en) * | 2006-06-27 | 2008-01-17 | Sumitomo Metal Mining Co Ltd | Winding type compound vacuum surface treatment apparatus, and film surface treatment method |
EP2762608B1 (en) * | 2013-01-31 | 2019-10-02 | Applied Materials, Inc. | Gas separation by adjustable separation wall |
DE102015104039B4 (en) * | 2015-03-18 | 2018-06-21 | Von Ardenne Gmbh | Tape substrate coater with a magnetron assembly |
WO2017108081A1 (en) * | 2015-12-21 | 2017-06-29 | Applied Materials, Inc. | Film forming apparatus |
JP6959210B2 (en) * | 2018-10-10 | 2021-11-02 | 株式会社ヒラノK&E | Film deposition equipment |
JP6859307B2 (en) * | 2018-10-10 | 2021-04-14 | 株式会社ヒラノK&E | Film deposition equipment |
JP7305565B2 (en) * | 2020-01-17 | 2023-07-10 | 株式会社アルバック | Vacuum processing equipment |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57126825A (en) * | 1981-01-29 | 1982-08-06 | Matsushita Electric Ind Co Ltd | Vacuum film-forming apparatus |
JPS5916535A (en) * | 1982-07-20 | 1984-01-27 | Konishiroku Photo Ind Co Ltd | Method and device for vapor deposition |
-
1983
- 1983-04-06 GB GB838309324A patent/GB8309324D0/en active Pending
-
1984
- 1984-04-06 JP JP6781884A patent/JPS6070175A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
JPS6070175A (en) | 1985-04-20 |
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