JP2016506623A5 - - Google Patents

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Publication number
JP2016506623A5
JP2016506623A5 JP2015547965A JP2015547965A JP2016506623A5 JP 2016506623 A5 JP2016506623 A5 JP 2016506623A5 JP 2015547965 A JP2015547965 A JP 2015547965A JP 2015547965 A JP2015547965 A JP 2015547965A JP 2016506623 A5 JP2016506623 A5 JP 2016506623A5
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JP
Japan
Prior art keywords
integrated circuit
under test
images
circuit under
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2015547965A
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English (en)
Japanese (ja)
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JP2016506623A (ja
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Publication date
Priority claimed from US14/066,111 external-priority patent/US10180402B2/en
Application filed filed Critical
Publication of JP2016506623A publication Critical patent/JP2016506623A/ja
Publication of JP2016506623A5 publication Critical patent/JP2016506623A5/ja
Pending legal-status Critical Current

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JP2015547965A 2012-12-14 2013-11-21 自動集積回路分析を行うための方法および装置 Pending JP2016506623A (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201261737516P 2012-12-14 2012-12-14
US61/737,516 2012-12-14
US201361772712P 2013-03-05 2013-03-05
US61/772,712 2013-03-05
US14/066,111 US10180402B2 (en) 2012-12-14 2013-10-29 Method and apparatus for conducting automated integrated circuit analysis
US14/066,111 2013-10-29
PCT/US2013/071231 WO2014105304A2 (en) 2012-12-14 2013-11-21 Method and apparatus for conducting automated integrated circuit analysis

Publications (2)

Publication Number Publication Date
JP2016506623A JP2016506623A (ja) 2016-03-03
JP2016506623A5 true JP2016506623A5 (enExample) 2017-01-12

Family

ID=50931901

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015547965A Pending JP2016506623A (ja) 2012-12-14 2013-11-21 自動集積回路分析を行うための方法および装置

Country Status (5)

Country Link
US (1) US10180402B2 (enExample)
EP (1) EP2932283A4 (enExample)
JP (1) JP2016506623A (enExample)
SG (1) SG11201504585QA (enExample)
WO (1) WO2014105304A2 (enExample)

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Publication number Priority date Publication date Assignee Title
JP6281193B2 (ja) * 2013-05-30 2018-02-21 ソニー株式会社 レーザー走査型顕微鏡システム
JP2016109673A (ja) * 2014-10-16 2016-06-20 ディーシージー システムズ、 インコーポレイテッドＤｃｇ Ｓｙｓｔｅｍｓ Ｉｎｃ． レーザボルテージイメージングのシステム及び方法
US10386409B2 (en) 2015-09-15 2019-08-20 International Business Machines Corporation Non-destructive determination of components of integrated circuits
US10282510B2 (en) * 2017-04-07 2019-05-07 Fei Company Alignment of CAD data to images in high resolution optical fault analysis
US10768211B2 (en) * 2017-08-25 2020-09-08 Oracle International Corporation System and method for current sense resistor compensation
CN108613967B (zh) * 2018-08-09 2020-12-08 江苏师范大学 一种拉曼光谱测试系统
KR102594414B1 (ko) * 2018-10-24 2023-10-30 삼성전자주식회사 프로브 장치 및 이를 포함하는 테스트 장치
JP7173937B2 (ja) 2019-08-08 2022-11-16 株式会社日立ハイテク 荷電粒子線装置
JP7159128B2 (ja) 2019-08-08 2022-10-24 株式会社日立ハイテク 荷電粒子線装置
JP7189103B2 (ja) * 2019-08-30 2022-12-13 株式会社日立ハイテク 荷電粒子線装置
CN113030713B (zh) * 2021-03-05 2021-11-09 中国科学院国家空间科学中心 一种激光探测集成电路内部电平状态的系统
WO2022191958A1 (en) 2021-03-12 2022-09-15 Battelle Memorial Institute Systems and methods for backside optical carrier injection into microelectronic devices
WO2022260923A1 (en) 2021-06-08 2022-12-15 Battelle Memorial Institute High resolution imaging of microelectronic devices

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JP6054984B2 (ja) * 2011-11-16 2016-12-27 ディーシージー システムズ、 インコーポレイテッドDcg Systems Inc. 偏光ダイバーシティ撮像およびアライメントのための装置および方法

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