JP2016505125A5 - - Google Patents

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Publication number
JP2016505125A5
JP2016505125A5 JP2015556147A JP2015556147A JP2016505125A5 JP 2016505125 A5 JP2016505125 A5 JP 2016505125A5 JP 2015556147 A JP2015556147 A JP 2015556147A JP 2015556147 A JP2015556147 A JP 2015556147A JP 2016505125 A5 JP2016505125 A5 JP 2016505125A5
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JP
Japan
Prior art keywords
valve
diaphragm
valve seat
port
seat carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015556147A
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English (en)
Japanese (ja)
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JP2016505125A (ja
JP6335926B2 (ja
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Publication date
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Priority claimed from PCT/US2014/013998 external-priority patent/WO2014120997A1/en
Publication of JP2016505125A publication Critical patent/JP2016505125A/ja
Publication of JP2016505125A5 publication Critical patent/JP2016505125A5/ja
Application granted granted Critical
Publication of JP6335926B2 publication Critical patent/JP6335926B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015556147A 2013-02-01 2014-01-31 溶接されたダイヤフラム弁座担体を有するダイヤフラム弁 Active JP6335926B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361759705P 2013-02-01 2013-02-01
US61/759,705 2013-02-01
PCT/US2014/013998 WO2014120997A1 (en) 2013-02-01 2014-01-31 Diaphragm valve with welded diaphragm seat carrier

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018054402A Division JP6646701B2 (ja) 2013-02-01 2018-03-22 溶接されたダイヤフラム弁座担体を有するダイヤフラム弁

Publications (3)

Publication Number Publication Date
JP2016505125A JP2016505125A (ja) 2016-02-18
JP2016505125A5 true JP2016505125A5 (enExample) 2017-03-09
JP6335926B2 JP6335926B2 (ja) 2018-05-30

Family

ID=51258520

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2015556147A Active JP6335926B2 (ja) 2013-02-01 2014-01-31 溶接されたダイヤフラム弁座担体を有するダイヤフラム弁
JP2018054402A Active JP6646701B2 (ja) 2013-02-01 2018-03-22 溶接されたダイヤフラム弁座担体を有するダイヤフラム弁
JP2019225558A Withdrawn JP2020046076A (ja) 2013-02-01 2019-12-13 溶接されたダイヤフラム弁座担体を有するダイヤフラム弁

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2018054402A Active JP6646701B2 (ja) 2013-02-01 2018-03-22 溶接されたダイヤフラム弁座担体を有するダイヤフラム弁
JP2019225558A Withdrawn JP2020046076A (ja) 2013-02-01 2019-12-13 溶接されたダイヤフラム弁座担体を有するダイヤフラム弁

Country Status (4)

Country Link
US (3) US9863542B2 (enExample)
JP (3) JP6335926B2 (enExample)
KR (2) KR102207127B1 (enExample)
WO (1) WO2014120997A1 (enExample)

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WO2014120997A1 (en) * 2013-02-01 2014-08-07 Swagelok Company Diaphragm valve with welded diaphragm seat carrier
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WO2019181397A1 (ja) * 2018-03-19 2019-09-26 日立金属株式会社 ダイアフラム弁及びそれを用いた質量流量制御装置
US11402029B2 (en) 2018-04-06 2022-08-02 Fujikin Incorporated Valve device, fluid control system, fluid control method, semiconductor manufacturing system, and semiconductor manufacturing method
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US11506295B2 (en) 2018-07-24 2022-11-22 Fujikin Incorporated Valve device, fluid control device, fluid control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method
KR102074096B1 (ko) * 2019-04-04 2020-02-05 브이에스이앤지(주) 제어 밸브, 이를 이용한 유체 커플링 장치 및 펌프 시스템
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JP7633703B2 (ja) * 2020-03-26 2025-02-20 株式会社フジキン バルブ装置
KR102312722B1 (ko) * 2020-06-19 2021-10-14 아래스 주식회사 키락구조를 구비한 다이어프램 밸브
JP7426149B2 (ja) * 2020-10-20 2024-02-01 株式会社フジキン ダイヤフラムバルブ
US11808381B2 (en) 2020-11-04 2023-11-07 Swagelok Company Valves with integrated orifice restrictions
CN116420042B (zh) 2020-11-06 2024-06-21 斯瓦戈洛克公司 阀腔盖布置
US11761547B1 (en) * 2022-04-07 2023-09-19 Horiba Stec, Co., Ltd. Valve orifice insert
KR102673586B1 (ko) * 2022-12-28 2024-06-12 주식회사 현대케피코 수소공급 밸브 및 조립방법
KR102673585B1 (ko) * 2022-12-28 2024-06-12 주식회사 현대케피코 교체 가능한 밸브시트가 적용된 수소공급 밸브
KR20250133311A (ko) 2023-01-13 2025-09-05 스웨이지락 캄파니 액추에이터 베어링 요소를 구비한 다이어프램 밸브
JP2025163342A (ja) 2024-04-17 2025-10-29 株式会社キッツエスシーティー ダイヤフラムバルブ

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