JP2016200399A - 表面形状測定装置及び表面形状測定方法 - Google Patents

表面形状測定装置及び表面形状測定方法 Download PDF

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JP2016200399A
JP2016200399A JP2015078282A JP2015078282A JP2016200399A JP 2016200399 A JP2016200399 A JP 2016200399A JP 2015078282 A JP2015078282 A JP 2015078282A JP 2015078282 A JP2015078282 A JP 2015078282A JP 2016200399 A JP2016200399 A JP 2016200399A
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surface shape
sensor
measurement
actuator
moving
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JP2016200399A5 (enExample
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本田　裕
Yutaka Honda
裕 本田
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Kosaka Laboratory Ltd
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Kosaka Laboratory Ltd
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JP2015078282A 2015-04-07 2015-04-07 表面形状測定装置及び表面形状測定方法 Pending JP2016200399A (ja)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020067443A (ja) * 2018-10-26 2020-04-30 株式会社ミツトヨ 形状測定装置および形状測定方法
JP2022122450A (ja) * 2021-02-10 2022-08-23 セイコーエプソン株式会社 メディア高さ検出方法、印刷装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6382390A (ja) * 1986-09-26 1988-04-13 日立電子エンジニアリング株式会社 移動ステ−ジ機構
JP2003075322A (ja) * 2001-09-07 2003-03-12 Mitsutoyo Corp プローブ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6382390A (ja) * 1986-09-26 1988-04-13 日立電子エンジニアリング株式会社 移動ステ−ジ機構
JP2003075322A (ja) * 2001-09-07 2003-03-12 Mitsutoyo Corp プローブ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020067443A (ja) * 2018-10-26 2020-04-30 株式会社ミツトヨ 形状測定装置および形状測定方法
JP7198631B2 (ja) 2018-10-26 2023-01-04 株式会社ミツトヨ 形状測定装置および形状測定方法
JP2022122450A (ja) * 2021-02-10 2022-08-23 セイコーエプソン株式会社 メディア高さ検出方法、印刷装置
JP7676798B2 (ja) 2021-02-10 2025-05-15 セイコーエプソン株式会社 印刷装置

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