JP2016192544A - 半導体基板配列、および半導体基板配列の形成方法 - Google Patents
半導体基板配列、および半導体基板配列の形成方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 368
- 239000000758 substrate Substances 0.000 title claims abstract description 321
- 238000000034 method Methods 0.000 title claims abstract description 52
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 38
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 37
- 239000013078 crystal Substances 0.000 claims description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 13
- 229910052799 carbon Inorganic materials 0.000 claims description 8
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 7
- 238000002161 passivation Methods 0.000 claims description 7
- 229910002601 GaN Inorganic materials 0.000 claims description 6
- 229910002804 graphite Inorganic materials 0.000 claims description 5
- 239000010439 graphite Substances 0.000 claims description 5
- 229910052582 BN Inorganic materials 0.000 claims description 4
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 4
- 238000002844 melting Methods 0.000 claims description 4
- 230000008018 melting Effects 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 150000004767 nitrides Chemical class 0.000 claims description 4
- 229910052594 sapphire Inorganic materials 0.000 claims description 4
- 239000010980 sapphire Substances 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 239000011819 refractory material Substances 0.000 claims description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 125
- 230000008569 process Effects 0.000 description 13
- 230000012010 growth Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 10
- 238000000407 epitaxy Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 230000007547 defect Effects 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 230000006870 function Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 5
- 230000001419 dependent effect Effects 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000004590 computer program Methods 0.000 description 2
- 238000013500 data storage Methods 0.000 description 2
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 229910003468 tantalcarbide Inorganic materials 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000005092 sublimation method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Abstract
【解決手段】半導体基板配列100は、キャリアウェハ110と、このキャリアウェハに固定され、キャリアウェハ上に横方向に分布される複数の半導体基板片120と、を含む。複数の半導体基板片の半導体基板片は六角形形状を有する。
【選択図】図1
Description
110 キャリアウェハ
120 半導体基板片
122 間隙
130 炭化ケイ素SiCエピタキシャルサブレイヤ
132 炭化ケイ素SiCエピタキシャルサブレイヤ
134 炭化ケイ素SiCエピタキシャルサブレイヤ
700 半導体基板配列
1000 半導体基板配列
1050 トレンチ
1100 方法
また、本発明は以下に記載する態様を含む。
(態様1)
半導体基板配列(100)であって、
キャリアウェハ(110)と、
前記キャリアウェハ(110)に固定される複数の半導体基板片(120)であって、前記複数の半導体基板片(120)の前記半導体基板片(120)は六角形形状を有する、複数の半導体基板片(120)と、
を備える、半導体基板配列(100)。
(態様2)
半導体基板配列(700)であって、
キャリアウェハ(110)と、
前記キャリアウェハ(110)に固定される複数の半導体基板片(120)であって、前記複数の半導体基板片の前記半導体基板片(120)は1cm未満の最大横寸法を有する、複数の半導体基板片(120)と、
を備える、半導体基板配列(700)。
(態様3)
半導体基板配列(1000)であって、
キャリアウェハ(110)と、
前記キャリアウェハ(110)の表側に固定される複数の半導体基板片(120)であって、前記キャリアウェハ(110)は前記表側において複数のトレンチ(1050)を備える、複数の半導体基板片(120)と、
を備える、半導体基板配列(1000)。
(態様4)
前記複数のトレンチ(1050)の隣り合うトレンチ(1050)が、前記複数の半導体基板片(120)の前記半導体基板片(120)の最大横寸法未満の相互距離を有する、態様3に記載の半導体基板配列。
(態様5)
前記複数の半導体基板片(120)が、10個を超える半導体基板片(120)を含む、態様1から4のいずれか一つに記載の半導体基板配列。
(態様6)
前記複数の半導体基板片(120)が、複数の炭化ケイ素基板片または複数の窒化ガリウム基板片である、態様1から5のいずれか一つに記載の半導体基板配列。
(態様7)
前記複数の半導体基板片(120)の前記半導体基板片(120)の隣り合う縁部間の間隙(122)が5μm未満である、態様1から6のいずれか一つに記載の半導体基板配列。
(態様8)
前記複数の半導体基板片(120)の前記半導体基板片(120)が実質的に等しいサイズおよび実質的に等しい形状のものである、態様1から7のいずれか一つに記載の半導体基板配列。
(態様9)
前記複数の半導体基板片(120)の前記半導体基板片(120)の結晶方向が5°未満のずれをもって互いに整列される、態様1から8のいずれか一つに記載の半導体基板配列。
(態様10)
前記キャリアウェハ(110)の表面の70%超が前記複数の半導体基板片(120)の前記半導体基板片(120)によって覆われる、態様1から9のいずれか一つに記載の半導体基板配列。
(態様11)
前記複数の半導体基板片の前記半導体基板片(120)を覆い、前記複数の半導体基板片(120)の半導体基板片の隣り合う縁部間の前記間隙を橋絡する、成長させた半導体層をさらに含む、態様1から10のいずれか一つに記載の半導体基板配列。
(態様12)
前記キャリアウェハ(110)が、180mm超の直径を有する、態様1から11のいずれか一つに記載の半導体基板配列。
(態様13)
前記キャリアウェハ(110)が、1800℃よりも高い融点を有する高融点材料ウェハである、態様1から12のいずれか一つに記載の半導体基板配列。
(態様14)
前記キャリアウェハ(110)が、モリブデン、タンタル、タングステン、サファイア、黒鉛、炭素、三元系炭化物または三元系窒化物の群のうちの少なくとも1つを含む、態様1から13のいずれか一つに記載の半導体基板配列。
(態様15)
前記キャリアウェハ(110)が、前記キャリアウェハ(110)の少なくとも一部を覆う不活性化層を含み、前記不活性化層は窒化ホウ素を含む、態様1から14のいずれか一つに記載の半導体基板配列。
(態様16)
前記キャリアウェハ(110)が非円形形状を有する、態様1から15のいずれか一つに記載の半導体基板配列。
(態様17)
前記複数の半導体基板片(120)の前記半導体基板片(120)が、横に重なることなく前記キャリアウェハ(110)の上に分布される、態様1から16のいずれか一つに記載の半導体基板配列。
(態様18)
半導体基板配列を形成するための方法(1100)であって、前記方法は、
キャリアウェハに固定された複数の半導体基板片上にエピタキシャル半導体層を、前記エピタキシャル半導体層が前記複数の半導体基板片の半導体基板片の隣り合う縁部間の間隙を橋絡するように、形成すること(1110)、
を含む、方法。
(態様19)
前記エピタキシャル半導体層の前記形成すること(1110)が、半導体材料をエッチバック処理し、前記エピタキシャル半導体層のサブレイヤを成長させることを含み、半導体材料をエッチバック処理し、前記エピタキシャル半導体層のサブレイヤを成長させることは、少なくとも、前記エピタキシャル半導体層が前記複数の半導体基板片の前記半導体基板片の前記隣り合う縁部間の前記間隙を橋絡するまで繰り返される、態様18に記載の方法。
(態様20)
前記エピタキシャル半導体層上に第2のキャリアウェハの表側を接合し(1120)、前記エピタキシャル半導体層を、前記エピタキシャル半導体層の一部が前記第2のキャリアウェハに残るように分割することをさらに含む、態様18または19に記載の方法。
(態様21)
前記第2のキャリアウェハが前記表側において複数のトレンチを備える、態様20に記載の方法。
Claims (21)
- 半導体基板配列(100)であって、
キャリアウェハ(110)と、
前記キャリアウェハ(110)に固定される複数の半導体基板片(120)であって、前記複数の半導体基板片(120)の前記半導体基板片(120)は六角形形状を有する、複数の半導体基板片(120)と、
を備える、半導体基板配列(100)。 - 半導体基板配列(700)であって、
キャリアウェハ(110)と、
前記キャリアウェハ(110)に固定される複数の半導体基板片(120)であって、前記複数の半導体基板片の前記半導体基板片(120)は1cm未満の最大横寸法を有する、複数の半導体基板片(120)と、
を備える、半導体基板配列(700)。 - 半導体基板配列(1000)であって、
キャリアウェハ(110)と、
前記キャリアウェハ(110)の表側に固定される複数の半導体基板片(120)であって、前記キャリアウェハ(110)は前記表側において複数のトレンチ(1050)を備える、複数の半導体基板片(120)と、
を備える、半導体基板配列(1000)。 - 前記複数のトレンチ(1050)の隣り合うトレンチ(1050)が、前記複数の半導体基板片(120)の前記半導体基板片(120)の最大横寸法未満の相互距離を有する、請求項3に記載の半導体基板配列。
- 前記複数の半導体基板片(120)が、10個を超える半導体基板片(120)を含む、請求項1〜4のいずれか一項に記載の半導体基板配列。
- 前記複数の半導体基板片(120)が、複数の炭化ケイ素基板片または複数の窒化ガリウム基板片である、請求項1〜5のいずれか一項に記載の半導体基板配列。
- 前記複数の半導体基板片(120)の前記半導体基板片(120)の隣り合う縁部間の間隙(122)が5μm未満である、請求項1〜6のいずれか一項に記載の半導体基板配列。
- 前記複数の半導体基板片(120)の前記半導体基板片(120)が実質的に等しいサイズおよび実質的に等しい形状のものである、請求項1〜7のいずれか一項に記載の半導体基板配列。
- 前記複数の半導体基板片(120)の前記半導体基板片(120)の結晶方向が5°未満のずれをもって互いに整列される、請求項1〜8のいずれか一項に記載の半導体基板配列。
- 前記キャリアウェハ(110)の表面の70%超が前記複数の半導体基板片(120)の前記半導体基板片(120)によって覆われる、請求項1〜9のいずれか一項に記載の半導体基板配列。
- 前記複数の半導体基板片の前記半導体基板片(120)を覆い、前記複数の半導体基板片(120)の半導体基板片の隣り合う縁部間の前記間隙を橋絡する、成長させた半導体層をさらに含む、請求項1〜10のいずれか一項に記載の半導体基板配列。
- 前記キャリアウェハ(110)が、180mm超の直径を有する、請求項1〜11のいずれか一項に記載の半導体基板配列。
- 前記キャリアウェハ(110)が、1800℃よりも高い融点を有する高融点材料ウェハである、請求項1〜12のいずれか一項に記載の半導体基板配列。
- 前記キャリアウェハ(110)が、モリブデン、タンタル、タングステン、サファイア、黒鉛、炭素、三元系炭化物または三元系窒化物の群のうちの少なくとも1つを含む、請求項1〜13のいずれか一項に記載の半導体基板配列。
- 前記キャリアウェハ(110)が、前記キャリアウェハ(110)の少なくとも一部を覆う不活性化層を含み、前記不活性化層は窒化ホウ素を含む、請求項1〜14のいずれか一項に記載の半導体基板配列。
- 前記キャリアウェハ(110)が非円形形状を有する、請求項1〜15のいずれか一項に記載の半導体基板配列。
- 前記複数の半導体基板片(120)の前記半導体基板片(120)が、横に重なることなく前記キャリアウェハ(110)の上に分布される、請求項1〜16のいずれか一項に記載の半導体基板配列。
- 半導体基板配列を形成するための方法(1100)であって、前記方法は、
キャリアウェハに固定された複数の半導体基板片上にエピタキシャル半導体層を、前記エピタキシャル半導体層が前記複数の半導体基板片の半導体基板片の隣り合う縁部間の間隙を橋絡するように、形成すること(1110)、
を含む、方法。 - 前記エピタキシャル半導体層の前記形成(1110)が、半導体材料をエッチバック処理し、前記エピタキシャル半導体層のサブレイヤを成長させることを含み、半導体材料をエッチバック処理し、前記エピタキシャル半導体層のサブレイヤを成長させることは、少なくとも、前記エピタキシャル半導体層が前記複数の半導体基板片の前記半導体基板片の前記隣り合う縁部間の前記間隙を橋絡するまで繰り返される、請求項18に記載の方法。
- 前記エピタキシャル半導体層上に第2のキャリアウェハの表側を接合し(1120)、前記エピタキシャル半導体層を、前記エピタキシャル半導体層の一部が前記第2のキャリアウェハに残るように分割することをさらに含む、請求項18または19に記載の方法。
- 前記第2のキャリアウェハが前記表側において複数のトレンチを備える、請求項20に記載の方法。
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