JP2016188841A5 - - Google Patents

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JP2016188841A5
JP2016188841A5 JP2015069865A JP2015069865A JP2016188841A5 JP 2016188841 A5 JP2016188841 A5 JP 2016188841A5 JP 2015069865 A JP2015069865 A JP 2015069865A JP 2015069865 A JP2015069865 A JP 2015069865A JP 2016188841 A5 JP2016188841 A5 JP 2016188841A5
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JP
Japan
Prior art keywords
light
scanning lens
distance
deflection angle
lens
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JP2015069865A
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English (en)
Japanese (ja)
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JP6519860B2 (ja
JP2016188841A (ja
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Publication of JP2016188841A5 publication Critical patent/JP2016188841A5/ja
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JP2015069865A 2015-03-30 2015-03-30 非接触形状測定装置及び走査レンズ収差補正方法 Active JP6519860B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015069865A JP6519860B2 (ja) 2015-03-30 2015-03-30 非接触形状測定装置及び走査レンズ収差補正方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015069865A JP6519860B2 (ja) 2015-03-30 2015-03-30 非接触形状測定装置及び走査レンズ収差補正方法

Publications (3)

Publication Number Publication Date
JP2016188841A JP2016188841A (ja) 2016-11-04
JP2016188841A5 true JP2016188841A5 (enExample) 2018-02-22
JP6519860B2 JP6519860B2 (ja) 2019-05-29

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JP2015069865A Active JP6519860B2 (ja) 2015-03-30 2015-03-30 非接触形状測定装置及び走査レンズ収差補正方法

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JP (1) JP6519860B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7435784B2 (ja) * 2020-07-15 2024-02-21 日本電信電話株式会社 分光装置、分光測定装置および分光方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2778530B2 (ja) * 1995-07-21 1998-07-23 日本電気株式会社 光ビーム走査装置
JP4067602B2 (ja) * 1996-12-09 2008-03-26 富士通株式会社 高さ検査方法、それを実施する高さ検査装置
JP2000171742A (ja) * 1998-12-03 2000-06-23 Canon Inc 走査光学系及び走査撮像光学系
US6426840B1 (en) * 2001-02-23 2002-07-30 3D Systems, Inc. Electronic spot light control
US7053979B2 (en) * 2004-05-12 2006-05-30 Litel Instruments Process for amelioration of scanning synchronization error
JP2010085395A (ja) * 2008-09-05 2010-04-15 Oputouea Kk 光学式位置角度検出装置
WO2014016994A1 (ja) * 2012-07-26 2014-01-30 日本電気株式会社 インターフェース装置、プログラム、及び制御方法
JP6006693B2 (ja) * 2013-08-06 2016-10-12 日本電信電話株式会社 光偏向装置

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