JP2016024009A5 - - Google Patents

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Publication number
JP2016024009A5
JP2016024009A5 JP2014147542A JP2014147542A JP2016024009A5 JP 2016024009 A5 JP2016024009 A5 JP 2016024009A5 JP 2014147542 A JP2014147542 A JP 2014147542A JP 2014147542 A JP2014147542 A JP 2014147542A JP 2016024009 A5 JP2016024009 A5 JP 2016024009A5
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JP
Japan
Prior art keywords
light
measurement object
optical system
reflected
optical axis
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Pending
Application number
JP2014147542A
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English (en)
Japanese (ja)
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JP2016024009A (ja
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Publication date
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Priority to JP2014147542A priority Critical patent/JP2016024009A/ja
Priority claimed from JP2014147542A external-priority patent/JP2016024009A/ja
Priority to US14/795,311 priority patent/US9354044B2/en
Priority to DE102015008969.2A priority patent/DE102015008969A1/de
Publication of JP2016024009A publication Critical patent/JP2016024009A/ja
Publication of JP2016024009A5 publication Critical patent/JP2016024009A5/ja
Pending legal-status Critical Current

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JP2014147542A 2014-07-18 2014-07-18 厚さ測定装置及び厚さ測定方法 Pending JP2016024009A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014147542A JP2016024009A (ja) 2014-07-18 2014-07-18 厚さ測定装置及び厚さ測定方法
US14/795,311 US9354044B2 (en) 2014-07-18 2015-07-09 Thickness measurement apparatus and thickness measurement method
DE102015008969.2A DE102015008969A1 (de) 2014-07-18 2015-07-10 Dickenmessgerät, Dickenmessverfahen und Computerprogrammprodukt hierfür

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014147542A JP2016024009A (ja) 2014-07-18 2014-07-18 厚さ測定装置及び厚さ測定方法

Publications (2)

Publication Number Publication Date
JP2016024009A JP2016024009A (ja) 2016-02-08
JP2016024009A5 true JP2016024009A5 (enExample) 2017-07-13

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ID=55021862

Family Applications (1)

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JP2014147542A Pending JP2016024009A (ja) 2014-07-18 2014-07-18 厚さ測定装置及び厚さ測定方法

Country Status (3)

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US (1) US9354044B2 (enExample)
JP (1) JP2016024009A (enExample)
DE (1) DE102015008969A1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10317344B2 (en) * 2016-09-07 2019-06-11 Kla-Tencor Corporation Speed enhancement of chromatic confocal metrology
JP6762221B2 (ja) * 2016-12-19 2020-09-30 大塚電子株式会社 光学特性測定装置および光学特性測定方法
US10382230B2 (en) * 2017-03-31 2019-08-13 Mitsubishi Electric Research Laboratories, Inc. System and method for channel estimation in mmWave communications exploiting joint AoD-AoA angular spread
CN109990719B (zh) * 2019-04-11 2024-03-01 无锡奥特维科技股份有限公司 一种厚度检测设备和方法
CN112556991B (zh) * 2019-09-10 2024-11-12 宁波法里奥光学科技发展有限公司 一种镜片折射率测量装置及其测量方法
CN110632073A (zh) * 2019-09-25 2019-12-31 合肥京东方卓印科技有限公司 真空干燥设备及监控装置
JP7141120B2 (ja) * 2019-12-25 2022-09-22 株式会社ヒューテック 厚み測定装置
CN213481255U (zh) * 2020-11-16 2021-06-18 海伯森技术（深圳）有限公司 一种线光谱共焦传感器
US11486694B2 (en) * 2020-12-18 2022-11-01 Mitutoyo Corporation Chromatic range sensor system for measuring workpiece thickness
JP7650585B2 (ja) * 2021-01-22 2025-03-25 株式会社ディスコ 計測装置
CN116295051B (zh) * 2023-03-20 2024-01-05 河北日泰新型管材有限公司 一种基于特频光照识别技术的交联聚乙烯管壁厚测量方法
CN117006955A (zh) * 2023-07-28 2023-11-07 江苏集萃激光科技有限公司 用于在线测量电池膜电极厚度的装置及方法
CN118776471B (zh) * 2024-06-12 2025-11-14 北京遥测技术研究所 一种基于法珀干涉原理的光学芯片厚度测量方法及装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58161808A (ja) * 1982-03-19 1983-09-26 Hitachi Ltd レプリカの製造方法
JPS60200108A (ja) * 1984-03-23 1985-10-09 Daicel Chem Ind Ltd 光学式厚み測定法および装置
GB2301884A (en) * 1995-06-06 1996-12-18 Holtronic Technologies Ltd Characterising multilayer thin film systems by interferometry
JP2008276070A (ja) * 2007-05-02 2008-11-13 Olympus Corp 拡大撮像装置
US8149668B2 (en) * 2008-12-24 2012-04-03 Lite-On It Corporation Optical disk drive and method for determining disk type
JP5520036B2 (ja) * 2009-07-16 2014-06-11 株式会社ミツトヨ 光学式変位計
JP5994504B2 (ja) * 2012-09-14 2016-09-21 オムロン株式会社 共焦点計測装置

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