JP2016175161A - Surface-coated cutting tool - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a coated tool exerting superior wear resistance even when cutting a carbon steel, alloy steel, high hardness steel or the like under a high-speed, high-feed cutting condition accompanying high heat generation.SOLUTION: There is provided a surface-coated cutting tool obtained by deposition-forming a hard coating layer having the total layer thickness of 0.5 to 10 μm on the surface of a tool substrate consisting of a WC-based hard metal and a TiCN-based cermet. The hard coating layer comprises an alternate lamination structure by the A and B layers. The A layer satisfies 0.3≤a≤0.6 when representing a composition formula as (AlTi)N (a is an atomic ratio), and the B layer satisfies 0.75≤b≤0.99 when representing the composition formula as (AlTi)N (b is the atomic ratio). Further, the surface-coated cutting tool satisfies 0.8y≥x≥0.5y, and 270(nm)≥x+y≥13.5(nm) when defining the layer thickness per one A layer as x (nm) and that per one B layer as y (nm).SELECTED DRAWING: Figure 1

Description

  The present invention relates to a surface-coated cutting tool (hereinafter referred to as a coated tool), and more specifically, high-speed and high-feed that causes a high load on a cutting edge with high heat generation such as carbon steel, alloy steel, high-hardness steel, and the like. The present invention relates to a coated tool that exhibits excellent wear resistance in a hard coating layer.

In general, for coated tools, inserts that are detachably attached to the tip of a cutting tool for drilling and cutting of work materials such as various steels and high-hardness steels for turning and planing. There are drills and miniature drills used, as well as solid type end mills used for chamfering, grooving and shoulder machining of work materials, etc. Also, inserts can be attached detachably and cutting is performed in the same way as solid type end mills An insert type end mill tool or the like is known.
From the point of excellent wear resistance, a composite of Al and Ti is formed on the surface of a tool base made of tungsten carbide-based cemented carbide, titanium carbonitride-based cermet, etc. by arc ion plating, which is a kind of physical vapor deposition. 2. Description of the Related Art Conventionally, a coated tool in which nitride (hereinafter referred to as (Al, Ti) N) is coated as a hard coating layer is known.

For example, Patent Document 1 discloses that two types of Ti _x Al _1-x N and Ti _y Al _1-y N (0 ≦ x <0.5, 0.5 <y ≦ 1) are formed on the surface of a substrate. Compound (A, B) is laminated alternately and repeatedly, and an aluminum-rich ultra-thin laminate coating is formed with a repeated lamination period λ of 0.5 nm to 20 nm and an overall film thickness of 0.5 μm to 10 μm. Thus, a cutting tool that realizes both high hardness and oxidation resistance and prolongs the wear life of the tool has been proposed.

Patent Document 2 discloses that the surface of a cutting tool base has an average layer thickness of 0.05 to 1 μm and a composition formula: (Al _1-x Ti _x ) N (wherein the atomic ratio is x Is 0.40 to 0.65) and has an average layer thickness of 2 to 15 μm through a crystal history layer composed of a composite nitride layer of Al and Ti having a cubic crystal structure. And an Al group composite that satisfies the composition formula: (Al _1-y Ti _y ) N (wherein y represents 0.05 to 0.25 in atomic ratio) and also has a cubic crystal structure It has been proposed to improve wear resistance by physical vapor deposition of an oxidation resistant coating layer made of a nitride layer.

Further, in Patent Document 3, in a coated tool in which a hard coating layer composed of an (Al, Ti) N layer is formed on the surface of a tool base, the Al highest content point (Ti lowest content point) and Al lowest content points (Ti highest content points) are alternately present at predetermined intervals, and the Al highest content point to the Al lowest content point, the Al lowest content point to the Al highest content point Al ( Ti) It has a component concentration distribution structure in which the content changes continuously, and the Al highest content point is the composition formula: (Al _x Ti _1-x ) N (wherein the atomic ratio, x is 0.8. 70 to 0.95), and the above-mentioned Al minimum content point is a composition formula: (Al _y Ti _1-y ) N (wherein y is 0.40 to 0.65 in atomic ratio). Satisfactory and adjacent Al highest content point and Al lowest content point It has been proposed to improve the wear resistance of the hard coating layer by forming an (Al, Ti) N layer with an overall average layer thickness of 1 to 15 μm, with an interval of 0.01 to 0.1 μm. .

  Furthermore, the above-mentioned conventional coated tool, for example, inserts a tool base into an arc ion plating apparatus which is one type of physical vapor deposition apparatus schematically shown in FIG. Arc discharge was generated between the anode electrode and the cathode electrode (evaporation source) on which an Al—Ti alloy having a predetermined composition was set in a state of 90-100 A while being heated to a temperature of ℃, Nitrogen gas is introduced into the apparatus as a reaction gas to form a nitrogen atmosphere. On the other hand, evaporated particles are deposited on the surface of the tool base under the condition that a bias voltage of, for example, −100 to −200 V is applied to the tool base. It is also known that a hard coating layer made of an (Al, Ti) N layer is formed.

JP-A-7-97679 JP 2003-205405 A JP 2003-326402 A

  In recent years, automation of cutting machines has been remarkable. On the other hand, there is a strong demand for labor saving, energy saving, and cost reduction for cutting. Accordingly, cutting tends to be faster. In the case of a tool, there is no particular problem when it is used in normal cutting conditions such as carbon steel and alloy steel. However, this is accompanied by high heat generation and high load on the cutting edge. When used in working high-speed, high-feed cutting conditions, wear progresses very quickly due to insufficient heat resistance and hardness of the hard coating layer, which leads to a service life in a relatively short time. is the current situation.

  Therefore, from the above viewpoint, the present inventor has a hard coating layer in high-speed and high-feed cutting processing in which a high load acts on the cutting edge with high heat generation of carbon steel, alloy steel, high hardness steel, etc. As a result of earnest research to develop a coated tool that exhibits wear resistance, the following findings were obtained.

In the (Al, Ti) N layer, Al, which is a constituent component, improves high temperature hardness and heat resistance, and Ti improves high temperature strength. As a result, the (Al, Ti) N layer has excellent high temperature. Shows hardness and high temperature strength. However, the (Al, Ti) N layer is
Composition _{formula: (Al b Ti 1-b} ) N
When the value of b indicating the Al content ratio (atomic ratio) becomes 0.75 or more, hexagonal (Al, Ti) N crystal grains are formed, and therefore (Al , Ti) The hardness of the entire N layer is reduced, and as a result, the wear resistance is reduced.
Therefore, the present inventor made a single layer of an (Al, Ti) N layer (hereinafter also referred to as “B layer”) in which the value of b indicating the Al content ratio (however, the atomic ratio) is 0.75 or more. Is formed as an alternate stacked structure with an (Al, Ti) N layer (hereinafter sometimes referred to as “A layer”) having a cubic structure with a lower Al content than the B layer. The inventors have found that by controlling the layer thicknesses of the A layer and the B layer within appropriate ranges, the crystal structure of the B layer can be maintained in a cubic crystal structure instead of a hexagonal crystal.
In other words, even when the Al content ratio is increased, the entire (Al, Ti) N layer can have a cubic structure, so that the obtained hard coating layer has high hardness and excellent heat resistance. The coated tool formed on the surface of the tool base must exhibit excellent wear resistance in high-speed, high-feed cutting processes in which high loads are applied to the cutting edge with high heat generation such as carbon steel, alloy steel, and high hardness steel. Was found.

The present invention has been made based on the above findings,
“(1) In a surface-coated cutting tool formed by vapor-depositing a hard coating layer having a total layer thickness of 0.5 to 10 μm on the surface of a tool base composed of tungsten carbide-based cemented carbide or titanium carbonitride-based cermet,
(A) The hard coating layer has an alternately laminated structure of A layers and B layers,
(B) The A layer satisfies 0.3 ≦ a ≦ 0.6 when expressed by _a composition formula: (Al _a Ti _1-a ) N (where a is an atomic ratio),
(C) The B layer satisfies 0.75 ≦ b ≦ 0.99 when represented by a composition formula: (Al _b Ti _1-b ) N (where b is an atomic ratio),
(D) When the layer thickness per layer of the A layer is x (nm) and the layer thickness per layer of the B layer is y (nm), 0.8y ≧ x ≧ 0.5y and 270 ( nm) ≧ x + y ≧ 13.5 (nm). "
It is characterized by.

  Next, the hard coating layer of the coated tool of the present invention will be described in more detail.

Hard coating composition:
The (Al, Ti) N layer constituting the A layer of the hard coating layer indicates the Al content when represented by the composition formula: (Al _a Ti _1-a ) N (where a is an atomic ratio). If the value of a is less than 0.3, the proportion of Ti is relatively increased, and an excellent high temperature strength can be obtained, but sufficient hardness cannot be secured, while the value of a is 0.6. In addition to the fact that the high-temperature strength tends to decrease, the (Al, Ti) N crystal grains having a hexagonal crystal structure are likely to be formed, so that the high-temperature hardness decreases and excellent wear resistance. Can no longer demonstrate.
Therefore, in the present invention, the value of a in (Al _a Ti _1-a ) N constituting the A layer is determined to be 0.3 ≦ a ≦ 0.6.

In addition, the B layer that forms the alternate laminated structure of the hard coating layer together with the A layer has a composition of 0 when the composition is represented by a composition formula: (Al _b Ti _1-b ) N (where b is an atomic ratio). It is necessary to satisfy .75 ≦ b ≦ 0.99.
By setting the value of b in the B layer to 0.75 or more, the hard coating layer has a high Al content, so that the heat resistance is improved. However, if the value of b exceeds 0.99, the high temperature strength decreases due to the relative decrease in the Ti content, and hexagonal (Al, Ti) N crystal grains increase in the layer. In addition, the wear resistance tends to decrease.
Therefore, in the present invention, the value of b in (Al _b Ti _1-b ) N constituting the B layer is defined as 0.75 ≦ b ≦ 0.99.

What should be noted here is that the layer having the same composition as that of the B layer (that is, the Al content is not less than 0.75 and not more than 0.99) is not an alternately laminated structure with the A layer, but itself. When formed as a hard coating layer, most of the (Al, Ti) N crystal grains are hexagonal crystal grains, so the hardness of the hard coating layer is greatly reduced and wear resistance is exhibited. It is not possible.
However, in the present invention, the Al content ratio of the B layer is increased to 0.75 or more and 0.99 or less by determining the layer thicknesses of the A layer and the B layer so as to be within the appropriate ranges and forming an alternate laminated structure. Even in such a case, the B layer can be formed not as a hexagonal crystal but as a cubic structure.

Hard coating layer comprising an alternating layered structure of A and B layers:
0.8y when the average layer thickness of one layer of the A layer constituting the alternate laminated structure is x (nm) and the average layer thickness of the B layer constituting the alternate laminated structure is y (nm). ≧ x ≧ 0.5y.
When x is less than 0.5y, the proportion of the B layer having a high Al content in the hard coating layer is increased, and it is easy to form a hexagonal crystal structure crystal having a low hardness. On the other hand, if the hardness of the layer is reduced and x exceeds 0.8y, the proportion of the B layer having a high Al content is reduced, and sufficient heat resistance cannot be exhibited.
Therefore, in the present invention, the relationship between the single layer average layer thickness x of the A layer and the single layer average layer thickness y of the B layer is determined so as to satisfy 0.8y ≧ x ≧ 0.5y.

Further, in order to make the hard coating layer composed of the alternately laminated structure exhibit higher hardness, the unit thickness x + y of the A layer and the B layer (that is, one A layer and one B layer are used as a unit). The total layer thickness in the case is 13.5 (nm) or more and 270 (nm) or less.
When the unit thickness is less than 13.5 (nm), the average layer thickness y of the B layer is relatively small, and the effect of improving the heat resistance of the hard coating layer is reduced. When the thickness exceeds 270 (nm), crystal grains having a hexagonal crystal structure are easily generated in the B layer, and as a result, the hardness of the hard coating layer is decreased.
Therefore, in the present invention, the unit thickness x + y of the A layer and the B layer is determined so as to satisfy 270 (nm) ≧ x + y ≧ 13.5 (nm).

Total thickness of hard coating layer:
When the total layer thickness of the hard coating layer composed of the alternately laminated structure is less than 0.5 μm, sufficient wear resistance cannot be exhibited over a long period of use, while when the total layer thickness exceeds 10 μm, Since abnormal damage such as chipping, chipping and peeling is likely to occur during cutting, the total thickness of the hard coating layer is determined to be 0.5 to 10 μm.

According to the coated tool of the present invention, the hard coating layer formed on the surface of the tool base has a composition formula: (Al _a Ti _1-a ) N (where a is an atomic ratio, and 0.3 ≦ a ≦ A layer represented by the following formula: (Al _b Ti _1-b ) N (where b is an atomic ratio and satisfies 0.75 ≦ b ≦ 0.99) The layer thickness x (nm) per layer of the A layer and the layer thickness y (nm) per layer of the B layer are 0.8y ≧ Since x ≧ 0.5y and 270 (nm) ≧ x + y ≧ 13.5 (nm) are satisfied, the hard coating layer has excellent heat resistance and high hardness, and as a result, carbon steel, Chipping, chipping, and delamination even in high-speed, high-feed cutting with high load on the cutting edge with high heat generation such as alloy steel and high hardness steel Without generating abnormal damage, it is to exhibit excellent wear resistance for a long time of use.

The arc ion plating apparatus used for forming the hard coating layer which comprises this invention coated tool and a comparative coated tool is shown, (a) is a schematic plan view, (b) is a schematic front view. It is a schematic explanatory drawing of the conventional arc ion plating apparatus explaining a prior art.

Next, the coated tool of the present invention will be specifically described with reference to examples.
Here, a coated tool using a tungsten carbide (WC) based cemented carbide as a tool base will be described, but the same applies to a case where a titanium carbonitride (TiCN) based cermet is used as a tool base.

As raw material powders, WC powder, VC powder, Cr ₃ C ₂ powder, and Co powder each having an average particle diameter of 1 to ₃ μm are prepared, and these raw material powders are blended in the blending composition shown in Table 1. , 72 hours wet mixing with a ball mill, drying, press molding into a green compact at a pressure of 100 MPa, and sintering the green compact in a 6 Pa vacuum at a temperature of 1400 ° C. for 1 hour, After sintering, tool bases A-1 to A-3 made of a WC-based cemented carbide having an ISO standard / CNMG120408 insert shape were formed.

In addition, as raw material powders, all are TiCN (weight ratio TiC / TiN = 50/50) powder, Mo ₂ C powder, ZrC powder, NbC powder, TaC powder, WC powder having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and then pressed into a compact at a pressure of 100 MPa. The green compact was sintered in a nitrogen atmosphere of 2 kPa at a temperature of 1500 ° C. for 1 hour, and after sintering, the cutting edge portion was subjected to a honing process of R: 0.03 to obtain ISO standard / CNMG120408. The tool bases B-1 to B-3 made of TiCN base cermet having the insert shape were formed.

(A) Next, each of the tool bases A-1 to A-3 and B-1 to B-3 is ultrasonically cleaned in acetone and dried, and then the arc ion plating apparatus shown in FIG. It is mounted along the outer periphery at a position that is a predetermined distance in the radial direction from the central axis on the inner rotary table, and is used for forming an A layer Ti-Al alloy and a B layer at positions facing each other across the rotary table. Arrange the cathode electrode (evaporation source) made of Al-Ti alloy,
(B) First, the interior of the apparatus is evacuated and kept at a vacuum of 0.1 Pa or less, the interior of the apparatus is heated to 600 ° C. with a heater, and then the tool base that rotates while rotating on the rotary table is set to −1000 V. A DC bias voltage was applied, and an arc discharge was generated by passing a current of 100 A between the Al—Ti alloy (cathode electrode) and the anode electrode, and the tool substrate surface was bombarded.
(C) Next, the atmosphere in the apparatus is maintained in a nitrogen atmosphere of 0.5 to 9.0 Pa, and a DC bias voltage of -20 to -150 V is applied to the rotating tool base while rotating on the rotary table, and the cathode A current of 50 to 250 A is passed between an Al-Ti alloy electrode for forming an A layer, which is an electrode (evaporation source), and an anode electrode to generate an arc discharge to form an A layer having a predetermined thickness, By flowing an electric current of 50 to 250 A between the Al-Ti alloy electrode for forming the B layer and the anode electrode to generate an arc discharge to form a B layer having a predetermined layer thickness, By vapor-depositing a hard coating layer composed of an alternately laminated structure of the target composition and the target layer thickness shown in Table 3 and A layer,
Surface coated inserts (hereinafter referred to as the present coated inserts) 1 to 10 as the coated tools of the present invention were produced.

For comparison purposes,
(A) Each of the tool bases A-1 to A-3, B-1 to B-3 is ultrasonically cleaned in acetone and dried, and then in the arc ion plating apparatus shown in FIG. An Al—Ti alloy (hereinafter referred to as a cathode electrode) having a different composition as a cathode electrode is mounted along the outer peripheral portion at a predetermined distance in the radial direction from the central axis on the rotary table, and is opposed to the rotary table. The Al-Ti alloy for forming the C layer, the Al-Ti alloy for forming the D layer),
(B) First, the interior of the apparatus is evacuated and kept at a vacuum of 0.1 Pa or less, the interior of the apparatus is heated to 600 ° C. with a heater, and then the tool base that rotates while rotating on the rotary table is set to −1000 V. A DC bias voltage was applied, and an arc discharge was generated by passing a current of 100 A between the Al—Ti alloy (cathode electrode) and the anode electrode, and the tool substrate surface was bombarded.
(C) Next, the atmosphere in the apparatus is maintained in a nitrogen atmosphere of 0.5 to 9.0 Pa, and a DC bias voltage of -20 to -150 V is applied to the rotating tool base while rotating on the rotary table, and the cathode An electric current of 50 to 250 A is passed between an Al-Ti alloy electrode for forming a C layer, which is an electrode (evaporation source), and an anode electrode to generate arc discharge to form a C layer having a predetermined composition, and then D A target composition and a target shown in Table 4 are formed by depositing a D layer having a predetermined composition by depositing a D layer having a predetermined composition by causing a current of 50 to 250 A to flow between the Al-Ti alloy electrode for layer formation and the anode electrode to generate arc discharge. Evaporate and form a hard coating layer consisting of alternating layers of layer thickness,
Surface coated inserts (hereinafter referred to as comparative coated inserts) 1 to 5 as comparative coated tools were manufactured.

Next, with respect to the present invention coated inserts 1 to 10 and comparative coated inserts 1 to 5, the composition of each layer showing the alternate laminated structure of the hard coating layer, the longitudinal section of the hard coating layer, and the energy dispersion using a transmission electron microscope When measured by a type X-ray analysis method, each showed substantially the same composition as the target composition.
Moreover, when the average layer thickness of each layer showing the alternate laminated structure of the hard coating layers was measured by cross-section using a transmission electron microscope, the average value was substantially the same as the target layer thickness (average value of 5 locations). )showed that.
Tables 3 and 4 show these measured values.

Next, cutting test was performed on the present invention coated inserts 1 to 10 and comparative coated inserts 1 to 5 under the following cutting conditions, and the flank wear width of the cutting edge was measured in any high-speed high-feed cutting test.
Cutting condition A:
Work material: JIS SCM430 (HB300) round bar,
Cutting speed: 210 m / min. ,
Cutting depth: 0.2mm,
Feed: 0.25 mm / rev. ,
Cutting time: 5 minutes
Continuous high-speed, high-feed cutting test of alloy steel under normal conditions (normal cutting speed and feed are 150 m / min. And 0.20 mm / rev., Respectively).
Cutting condition B:
Work material: JIS S50C (HB260) round bar,
Cutting speed: 200 m / min. ,
Cutting depth: 0.2 mm,
Feed: 0.30 mm / rev. ,
Cutting time: 5 minutes
Continuous high-speed, high-feed cutting test of carbon steel under the conditions of (normal cutting speed and feed are 140 m / min. And 0.25 mm / rev., Respectively).
Cutting condition C:
Work material: JIS · SKD61 (HRC60) round bar,
Cutting speed: 115 m / min. ,
Cutting depth: 0.2 mm,
Feed: 0.25 mm / rev. ,
Cutting time: 3 minutes
Continuous high-speed high-feed cutting test of high-hardness steel under the conditions (normal cutting speed and feed are 70 m / min. And 0.1 mm / rev., Respectively).
Table 5 shows the measurement results.

As in Example 1, all of the raw material powders consisting of WC powder, VC powder, Cr ₃ C ₂ powder, and Co powder having an average particle diameter of 1 to 3 μm were blended in the blending composition shown in Table 1, and ball mill The mixture is wet-mixed for 72 hours and dried, and then pressed into a green compact at a pressure of 100 MPa. The green compact is sintered in a 6 Pa vacuum at a temperature of 1400 ° C. for 1 hour, and the diameter is A 13 mm round sintered body for forming a tool base is formed, and from the above round bar sintered body, the diameter x length of the cutting edge portion is 10 mm x 22 mm and the helix angle is 30 degrees by grinding. WC-base cemented carbide tool bases (end mills) A-1 to A-3 having a four-blade square shape were manufactured.

  Next, the surfaces of these tool bases (end mills) A-1 to A-3 were ultrasonically cleaned in acetone and dried, and then loaded into the arc ion plating apparatus shown in FIG. The surface coating of the present invention as a coating tool of the present invention is formed by vapor-depositing a hard coating layer comprising an alternately laminated structure of layer A and layer B having the target composition and target layer thickness shown in Table 6 under the same conditions as in Table 1. Carbide end mills (hereinafter referred to as the present invention coated end mills) 1 to 6 were produced, respectively.

  For comparison purposes, the surfaces of the tool bases (end mills) A-1 to A-3 are ultrasonically cleaned in acetone and dried, and then loaded into the arc ion plating apparatus shown in FIG. Then, in the same process as in Example 1, a hard coating layer consisting of an alternating lamination of the target composition and target layer thickness shown in Table 7 is formed by vapor deposition, so that a surface coated carbide end mill (hereinafter referred to as a comparative coated tool) is formed. (Referred to as comparative coated end mills) 1 to 5 were produced.

Next, regarding the coated end mills 1 to 6 and the comparative coated end mills 1 to 5, the composition of each layer showing the alternately laminated structure of the hard coating layer, the longitudinal section of the hard coating layer, and the energy dispersion using a transmission electron microscope When measured by a type X-ray analysis method, each showed substantially the same composition as the target composition.
Moreover, when the average layer thickness of each layer showing the alternate laminated structure of the hard coating layers was measured by cross-section using a transmission electron microscope, the average value was substantially the same as the target layer thickness (average value of 5 locations). )showed that.
Tables 6 and 7 show these measured values.

Next, for the present invention coated end mills 1-6 and comparative coated end mills 1-5,
Work material—planar dimensions: 100 mm × 250 mm, thickness: 50 mm, JIS SCM440 (HB300) plate material,
Cutting speed: 245 m / min. ,
Groove depth (cut): 15 mm,
Table feed: 815 mm / min. ,
Wet high-speed grooving test of chromium molybdenum steel under the following conditions (cutting condition D) (normal cutting speed and table feed are 195 m / min. And 650 mm / min., Respectively),
The cutting groove length was measured until the flank wear width of the outer peripheral edge of the cutting edge reached 0.1 mm, which is a guide for the service life.
The measurement results are shown in Tables 6 and 7, respectively.

From the results shown in Tables 5 to 7, the coated tool of the present invention is formed by forming a hard coating layer composed of an alternately laminated structure of A and B layers having a predetermined composition and layer thickness on the surface of the tool base. Because the hard coating layer has excellent heat resistance and high hardness, high-speed high-feed cutting such as carbon steel, alloy steel, high-hardness steel, etc., without causing abnormal damage such as chipping, chipping, peeling, etc. Exhibits excellent wear resistance over a long period of use.
On the other hand, in the comparative coated tool in which any of the layers constituting the hard coating layer deviates from the composition, layer thickness, etc. defined in the present invention, the wear resistance is not sufficient and the service life is shortened in a relatively short time. It is clear that

  As described above, the coated tool of the present invention has excellent wear resistance not only in high-speed high-feed cutting such as carbon steel, alloy steel, and high-hardness steel, but also in cutting of general work materials. Since it exhibits and exhibits excellent cutting performance over a long period of time, it can satisfactorily cope with automation of cutting devices, labor saving and energy saving of cutting, and cost reduction.

Claims (1)

In a surface-coated cutting tool formed by vapor-depositing a hard coating layer having a total layer thickness of 0.5 to 10 μm on the surface of a tool base composed of tungsten carbide-based cemented carbide or titanium carbonitride-based cermet,
(A) The hard coating layer has an alternately laminated structure of A layers and B layers,
(B) The A layer satisfies 0.3 ≦ a ≦ 0.6 when expressed by _a composition formula: (Al _a Ti _1-a ) N (where a is an atomic ratio),
(C) The B layer satisfies 0.75 ≦ b ≦ 0.99 when represented by a composition formula: (Al _b Ti _1-b ) N (where b is an atomic ratio),
(D) When the layer thickness per layer of the A layer is x (nm) and the layer thickness per layer of the B layer is y (nm), 0.8y ≧ x ≧ 0.5y and 270 ( nm) ≧ x + y ≧ 13.5 (nm).