JP2016167024A5 - - Google Patents

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Publication number
JP2016167024A5
JP2016167024A5 JP2015047413A JP2015047413A JP2016167024A5 JP 2016167024 A5 JP2016167024 A5 JP 2016167024A5 JP 2015047413 A JP2015047413 A JP 2015047413A JP 2015047413 A JP2015047413 A JP 2015047413A JP 2016167024 A5 JP2016167024 A5 JP 2016167024A5
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JP
Japan
Prior art keywords
optical system
discharge lamp
cooling nozzle
shadow
illumination optical
Prior art date
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Application number
JP2015047413A
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English (en)
Japanese (ja)
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JP2016167024A (ja
JP6494339B2 (ja
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Publication date
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Priority claimed from JP2015047413A external-priority patent/JP6494339B2/ja
Priority to JP2015047413A priority Critical patent/JP6494339B2/ja
Priority to TW105104765A priority patent/TWI636335B/zh
Priority to KR1020160024852A priority patent/KR101985059B1/ko
Priority to CN201610126205.3A priority patent/CN105974742B/zh
Priority to US15/064,771 priority patent/US9946056B2/en
Publication of JP2016167024A publication Critical patent/JP2016167024A/ja
Publication of JP2016167024A5 publication Critical patent/JP2016167024A5/ja
Publication of JP6494339B2 publication Critical patent/JP6494339B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015047413A 2015-03-10 2015-03-10 照明光学系、露光装置、及び物品の製造方法 Active JP6494339B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2015047413A JP6494339B2 (ja) 2015-03-10 2015-03-10 照明光学系、露光装置、及び物品の製造方法
TW105104765A TWI636335B (zh) 2015-03-10 2016-02-18 照明光學系統、曝光設備及製造物品的方法
KR1020160024852A KR101985059B1 (ko) 2015-03-10 2016-03-02 조명 광학계, 노광 장치, 및 물품 제조 방법
CN201610126205.3A CN105974742B (zh) 2015-03-10 2016-03-07 照明光学系统、曝光设备以及制造物品的方法
US15/064,771 US9946056B2 (en) 2015-03-10 2016-03-09 Illumination optical system, exposure apparatus, and method of manufacturing article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015047413A JP6494339B2 (ja) 2015-03-10 2015-03-10 照明光学系、露光装置、及び物品の製造方法

Publications (3)

Publication Number Publication Date
JP2016167024A JP2016167024A (ja) 2016-09-15
JP2016167024A5 true JP2016167024A5 (OSRAM) 2018-02-08
JP6494339B2 JP6494339B2 (ja) 2019-04-03

Family

ID=56887738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015047413A Active JP6494339B2 (ja) 2015-03-10 2015-03-10 照明光学系、露光装置、及び物品の製造方法

Country Status (5)

Country Link
US (1) US9946056B2 (OSRAM)
JP (1) JP6494339B2 (OSRAM)
KR (1) KR101985059B1 (OSRAM)
CN (1) CN105974742B (OSRAM)
TW (1) TWI636335B (OSRAM)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7353894B2 (ja) * 2019-09-26 2023-10-02 キヤノン株式会社 光源装置、照明装置、露光装置及び物品の製造方法
JP7450363B2 (ja) * 2019-10-23 2024-03-15 キヤノン株式会社 照明光学系、露光装置および物品製造方法
JP7520675B2 (ja) * 2020-10-02 2024-07-23 キヤノン株式会社 光源装置、露光装置および物品製造方法
JP7645690B2 (ja) * 2021-04-12 2025-03-14 キヤノン株式会社 ランプ、光源装置、露光装置、および物品製造方法
JP7753075B2 (ja) * 2021-12-06 2025-10-14 キヤノン株式会社 光源装置、リソグラフィ装置、及び物品の製造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5305054A (en) 1991-02-22 1994-04-19 Canon Kabushiki Kaisha Imaging method for manufacture of microdevices
EP0658810B1 (de) 1993-12-13 1998-11-25 Carl Zeiss Beleuchtungseinrichtung für ein optisches System mit einem Reticle-Maskierungssystem
US6107752A (en) * 1998-03-03 2000-08-22 Osram Sylvania Inc. Coaxial applicators for electrodeless high intensity discharge lamps
JP2000075496A (ja) * 1998-08-31 2000-03-14 Canon Inc 冷却機構を有する光源、光源装置及びこれを用いた露光装置
JP4640688B2 (ja) 2000-07-10 2011-03-02 株式会社ニコン 照明光学装置および該照明光学装置を備えた露光装置
JP2004095286A (ja) * 2002-08-30 2004-03-25 Ichikoh Ind Ltd 車両用灯具
US20050134820A1 (en) * 2003-12-22 2005-06-23 Asml Netherlands B.V. Method for exposing a substrate, patterning device, and lithographic apparatus
US7001055B1 (en) * 2004-01-30 2006-02-21 Kla-Tencor Technologies Corporation Uniform pupil illumination for optical inspection systems
DE102005004216A1 (de) * 2005-01-29 2006-08-03 Carl Zeiss Smt Ag Beleuchtungssystem, insbesondere für eine Projektionsbelichtungsanlage in der Halbleiterlithographie
JP2006344726A (ja) * 2005-06-08 2006-12-21 Mejiro Precision:Kk 照明装置
CN102522316B (zh) * 2007-04-12 2016-08-03 株式会社尼康 放电灯、连接用线缆、光源装置及曝光装置
JP5135991B2 (ja) * 2007-10-23 2013-02-06 ウシオ電機株式会社 光源装置
JP2011187335A (ja) * 2010-03-09 2011-09-22 Nikon Corp 放電ランプおよび光源装置

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