JP2016145824A5 - - Google Patents

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Publication number
JP2016145824A5
JP2016145824A5 JP2016015852A JP2016015852A JP2016145824A5 JP 2016145824 A5 JP2016145824 A5 JP 2016145824A5 JP 2016015852 A JP2016015852 A JP 2016015852A JP 2016015852 A JP2016015852 A JP 2016015852A JP 2016145824 A5 JP2016145824 A5 JP 2016145824A5
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JP
Japan
Prior art keywords
axis direction
guide
support column
dimensional coordinate
coordinate measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016015852A
Other languages
English (en)
Japanese (ja)
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JP2016145824A (ja
JP6288477B2 (ja
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Publication date
Application filed filed Critical
Publication of JP2016145824A publication Critical patent/JP2016145824A/ja
Publication of JP2016145824A5 publication Critical patent/JP2016145824A5/ja
Application granted granted Critical
Publication of JP6288477B2 publication Critical patent/JP6288477B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2016015852A 2015-01-30 2016-01-29 三次元座標測定装置 Active JP6288477B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015016243 2015-01-30
JP2015016243 2015-01-30

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018018410A Division JP6454952B2 (ja) 2015-01-30 2018-02-05 三次元座標測定装置

Publications (3)

Publication Number Publication Date
JP2016145824A JP2016145824A (ja) 2016-08-12
JP2016145824A5 true JP2016145824A5 (enExample) 2017-11-24
JP6288477B2 JP6288477B2 (ja) 2018-03-07

Family

ID=56686235

Family Applications (5)

Application Number Title Priority Date Filing Date
JP2016015852A Active JP6288477B2 (ja) 2015-01-30 2016-01-29 三次元座標測定装置
JP2018018410A Active JP6454952B2 (ja) 2015-01-30 2018-02-05 三次元座標測定装置
JP2018207342A Pending JP2019035764A (ja) 2015-01-30 2018-11-02 三次元座標測定装置
JP2018230748A Pending JP2019035777A (ja) 2015-01-30 2018-12-10 三次元座標測定装置
JP2019081046A Active JP6788208B2 (ja) 2015-01-30 2019-04-22 三次元座標測定装置

Family Applications After (4)

Application Number Title Priority Date Filing Date
JP2018018410A Active JP6454952B2 (ja) 2015-01-30 2018-02-05 三次元座標測定装置
JP2018207342A Pending JP2019035764A (ja) 2015-01-30 2018-11-02 三次元座標測定装置
JP2018230748A Pending JP2019035777A (ja) 2015-01-30 2018-12-10 三次元座標測定装置
JP2019081046A Active JP6788208B2 (ja) 2015-01-30 2019-04-22 三次元座標測定装置

Country Status (1)

Country Link
JP (5) JP6288477B2 (enExample)

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61131612U (enExample) * 1985-02-04 1986-08-16
JPS62198710A (ja) * 1986-02-26 1987-09-02 Mitsutoyo Mfg Corp 三次元測定機
JPS62235514A (ja) * 1986-04-07 1987-10-15 Amada Co Ltd ３次元測定装置の駆動装置
JPS62167111U (enExample) * 1986-04-14 1987-10-23
JPS6435310A (en) * 1987-07-31 1989-02-06 Mitutoyo Corp Multidimensional measuring machine
GB8908854D0 (en) * 1989-04-19 1989-06-07 Renishaw Plc Method of and apparatus for scanning the surface of a workpiece
US4928396A (en) * 1989-03-07 1990-05-29 The Warner & Swasey Company Coordinate measuring machine with improved carriage drive system
JP2776427B2 (ja) * 1992-05-14 1998-07-16 株式会社東京精密 座標測定機
JPH07139936A (ja) * 1993-11-15 1995-06-02 Tokyo Seimitsu Co Ltd 座標測定機
JPH09145342A (ja) * 1995-11-27 1997-06-06 Nikon Corp 直線案内装置のコードガイド装置
JPH1026203A (ja) * 1996-07-12 1998-01-27 Mitsutoyo Corp 摩擦駆動機構
DE19821372A1 (de) * 1998-05-13 1999-11-18 Zeiss Carl Fa Koordinatenmeßgerät und Verfahren zur Steuerung eines solchen
JP4722400B2 (ja) * 2004-01-26 2011-07-13 株式会社ミツトヨ ガイドレールの支持装置、ガイドレール装置、駆動装置および測定機
DE102005058504B3 (de) * 2005-12-02 2007-05-16 Zeiss Ind Messtechnik Gmbh Vorrichtung zum Bestimmen einer Messgröße an einem Messobjekt
JP2011135751A (ja) * 2009-12-25 2011-07-07 Nikon Corp 駆動装置および測定装置
JP2012127851A (ja) * 2010-12-16 2012-07-05 Nikon Corp ガイド機構および３次元測定機
JP2014056352A (ja) * 2012-09-11 2014-03-27 Canon Inc 位置決め装置及び計測装置
JP2014130091A (ja) * 2012-12-28 2014-07-10 Canon Inc 測定装置および測定方法
JP2014238376A (ja) * 2013-06-10 2014-12-18 キヤノン株式会社 測定装置

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