JP2016145822A5 - - Google Patents

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Publication number
JP2016145822A5
JP2016145822A5 JP2016015850A JP2016015850A JP2016145822A5 JP 2016145822 A5 JP2016145822 A5 JP 2016145822A5 JP 2016015850 A JP2016015850 A JP 2016015850A JP 2016015850 A JP2016015850 A JP 2016015850A JP 2016145822 A5 JP2016145822 A5 JP 2016145822A5
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JP
Japan
Prior art keywords
coordinate measuring
axis direction
dimensional coordinate
plate
surface plate
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Application number
JP2016015850A
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English (en)
Japanese (ja)
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JP2016145822A (ja
JP6347260B2 (ja
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Publication of JP2016145822A publication Critical patent/JP2016145822A/ja
Publication of JP2016145822A5 publication Critical patent/JP2016145822A5/ja
Application granted granted Critical
Publication of JP6347260B2 publication Critical patent/JP6347260B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2016015850A 2015-01-30 2016-01-29 三次元座標測定装置 Active JP6347260B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015016240 2015-01-30
JP2015016240 2015-01-30

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018074878A Division JP6454953B2 (ja) 2015-01-30 2018-04-09 三次元座標測定装置

Publications (3)

Publication Number Publication Date
JP2016145822A JP2016145822A (ja) 2016-08-12
JP2016145822A5 true JP2016145822A5 (enExample) 2017-11-30
JP6347260B2 JP6347260B2 (ja) 2018-06-27

Family

ID=56686301

Family Applications (6)

Application Number Title Priority Date Filing Date
JP2016015850A Active JP6347260B2 (ja) 2015-01-30 2016-01-29 三次元座標測定装置
JP2018074878A Active JP6454953B2 (ja) 2015-01-30 2018-04-09 三次元座標測定装置
JP2018207341A Pending JP2019015746A (ja) 2015-01-30 2018-11-02 三次元座標測定装置
JP2018229028A Pending JP2019056713A (ja) 2015-01-30 2018-12-06 三次元座標測定装置
JP2019002672A Active JP6880417B2 (ja) 2015-01-30 2019-01-10 三次元座標測定装置
JP2020200064A Active JP7463258B2 (ja) 2015-01-30 2020-12-02 三次元座標測定装置

Family Applications After (5)

Application Number Title Priority Date Filing Date
JP2018074878A Active JP6454953B2 (ja) 2015-01-30 2018-04-09 三次元座標測定装置
JP2018207341A Pending JP2019015746A (ja) 2015-01-30 2018-11-02 三次元座標測定装置
JP2018229028A Pending JP2019056713A (ja) 2015-01-30 2018-12-06 三次元座標測定装置
JP2019002672A Active JP6880417B2 (ja) 2015-01-30 2019-01-10 三次元座標測定装置
JP2020200064A Active JP7463258B2 (ja) 2015-01-30 2020-12-02 三次元座標測定装置

Country Status (1)

Country Link
JP (6) JP6347260B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7360790B2 (ja) * 2018-10-23 2023-10-13 株式会社ミツトヨ 三次元測定機

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3774311A (en) * 1971-03-01 1973-11-27 Bendix Corp Carriage and bearing arrangement for a measuring machine
JPS61131612U (enExample) * 1985-02-04 1986-08-16
JPS62235514A (ja) * 1986-04-07 1987-10-15 Amada Co Ltd ３次元測定装置の駆動装置
JPS6435310A (en) * 1987-07-31 1989-02-06 Mitutoyo Corp Multidimensional measuring machine
US4815213A (en) * 1987-10-09 1989-03-28 Brown & Sharpe Manufacturing Co. Apparatus for temperature compensation of sensing means of a machine
GB8908854D0 (en) * 1989-04-19 1989-06-07 Renishaw Plc Method of and apparatus for scanning the surface of a workpiece
US4928396A (en) * 1989-03-07 1990-05-29 The Warner & Swasey Company Coordinate measuring machine with improved carriage drive system
JP2501989B2 (ja) * 1991-12-06 1996-05-29 株式会社ミツトヨ 測定機
JP2776427B2 (ja) * 1992-05-14 1998-07-16 株式会社東京精密 座標測定機
JPH07139936A (ja) * 1993-11-15 1995-06-02 Tokyo Seimitsu Co Ltd 座標測定機
JPH09145342A (ja) * 1995-11-27 1997-06-06 Nikon Corp 直線案内装置のコードガイド装置
JPH11190339A (ja) * 1997-12-25 1999-07-13 Kyocera Corp 静圧流体軸受
JP4722400B2 (ja) * 2004-01-26 2011-07-13 株式会社ミツトヨ ガイドレールの支持装置、ガイドレール装置、駆動装置および測定機
DE102005058504B3 (de) * 2005-12-02 2007-05-16 Zeiss Ind Messtechnik Gmbh Vorrichtung zum Bestimmen einer Messgröße an einem Messobjekt
JP2011135751A (ja) * 2009-12-25 2011-07-07 Nikon Corp 駆動装置および測定装置
JP2012127851A (ja) * 2010-12-16 2012-07-05 Nikon Corp ガイド機構および３次元測定機
JP2012220339A (ja) 2011-04-08 2012-11-12 Nikon Corp 形状測定装置、形状測定方法、及びそのプログラム
JP2014056352A (ja) * 2012-09-11 2014-03-27 Canon Inc 位置決め装置及び計測装置
JP2014130091A (ja) * 2012-12-28 2014-07-10 Canon Inc 測定装置および測定方法
JP2014238376A (ja) * 2013-06-10 2014-12-18 キヤノン株式会社 測定装置

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