JP2019070666A5 - - Google Patents

Download PDF

Info

Publication number
JP2019070666A5
JP2019070666A5 JP2019002672A JP2019002672A JP2019070666A5 JP 2019070666 A5 JP2019070666 A5 JP 2019070666A5 JP 2019002672 A JP2019002672 A JP 2019002672A JP 2019002672 A JP2019002672 A JP 2019002672A JP 2019070666 A5 JP2019070666 A5 JP 2019070666A5
Authority
JP
Japan
Prior art keywords
axis direction
support member
guide
surface plate
carriage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2019002672A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019070666A (ja
JP6880417B2 (ja
Filing date
Publication date
Application filed filed Critical
Publication of JP2019070666A publication Critical patent/JP2019070666A/ja
Publication of JP2019070666A5 publication Critical patent/JP2019070666A5/ja
Priority to JP2020200064A priority Critical patent/JP7463258B2/ja
Application granted granted Critical
Publication of JP6880417B2 publication Critical patent/JP6880417B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2019002672A 2015-01-30 2019-01-10 三次元座標測定装置 Active JP6880417B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2020200064A JP7463258B2 (ja) 2015-01-30 2020-12-02 三次元座標測定装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015016240 2015-01-30
JP2015016240 2015-01-30

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2018229028A Division JP2019056713A (ja) 2015-01-30 2018-12-06 三次元座標測定装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2020200064A Division JP7463258B2 (ja) 2015-01-30 2020-12-02 三次元座標測定装置

Publications (3)

Publication Number Publication Date
JP2019070666A JP2019070666A (ja) 2019-05-09
JP2019070666A5 true JP2019070666A5 (enExample) 2019-06-13
JP6880417B2 JP6880417B2 (ja) 2021-06-02

Family

ID=56686301

Family Applications (6)

Application Number Title Priority Date Filing Date
JP2016015850A Active JP6347260B2 (ja) 2015-01-30 2016-01-29 三次元座標測定装置
JP2018074878A Active JP6454953B2 (ja) 2015-01-30 2018-04-09 三次元座標測定装置
JP2018207341A Pending JP2019015746A (ja) 2015-01-30 2018-11-02 三次元座標測定装置
JP2018229028A Pending JP2019056713A (ja) 2015-01-30 2018-12-06 三次元座標測定装置
JP2019002672A Active JP6880417B2 (ja) 2015-01-30 2019-01-10 三次元座標測定装置
JP2020200064A Active JP7463258B2 (ja) 2015-01-30 2020-12-02 三次元座標測定装置

Family Applications Before (4)

Application Number Title Priority Date Filing Date
JP2016015850A Active JP6347260B2 (ja) 2015-01-30 2016-01-29 三次元座標測定装置
JP2018074878A Active JP6454953B2 (ja) 2015-01-30 2018-04-09 三次元座標測定装置
JP2018207341A Pending JP2019015746A (ja) 2015-01-30 2018-11-02 三次元座標測定装置
JP2018229028A Pending JP2019056713A (ja) 2015-01-30 2018-12-06 三次元座標測定装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2020200064A Active JP7463258B2 (ja) 2015-01-30 2020-12-02 三次元座標測定装置

Country Status (1)

Country Link
JP (6) JP6347260B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7360790B2 (ja) * 2018-10-23 2023-10-13 株式会社ミツトヨ 三次元測定機

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3774311A (en) * 1971-03-01 1973-11-27 Bendix Corp Carriage and bearing arrangement for a measuring machine
JPS61131612U (enExample) * 1985-02-04 1986-08-16
JPS62235514A (ja) * 1986-04-07 1987-10-15 Amada Co Ltd ３次元測定装置の駆動装置
JPS6435310A (en) * 1987-07-31 1989-02-06 Mitutoyo Corp Multidimensional measuring machine
US4815213A (en) * 1987-10-09 1989-03-28 Brown & Sharpe Manufacturing Co. Apparatus for temperature compensation of sensing means of a machine
GB8908854D0 (en) * 1989-04-19 1989-06-07 Renishaw Plc Method of and apparatus for scanning the surface of a workpiece
US4928396A (en) * 1989-03-07 1990-05-29 The Warner & Swasey Company Coordinate measuring machine with improved carriage drive system
JP2501989B2 (ja) * 1991-12-06 1996-05-29 株式会社ミツトヨ 測定機
JP2776427B2 (ja) * 1992-05-14 1998-07-16 株式会社東京精密 座標測定機
JPH07139936A (ja) * 1993-11-15 1995-06-02 Tokyo Seimitsu Co Ltd 座標測定機
JPH09145342A (ja) * 1995-11-27 1997-06-06 Nikon Corp 直線案内装置のコードガイド装置
JPH11190339A (ja) * 1997-12-25 1999-07-13 Kyocera Corp 静圧流体軸受
JP4722400B2 (ja) * 2004-01-26 2011-07-13 株式会社ミツトヨ ガイドレールの支持装置、ガイドレール装置、駆動装置および測定機
DE102005058504B3 (de) * 2005-12-02 2007-05-16 Zeiss Ind Messtechnik Gmbh Vorrichtung zum Bestimmen einer Messgröße an einem Messobjekt
JP2011135751A (ja) * 2009-12-25 2011-07-07 Nikon Corp 駆動装置および測定装置
JP2012127851A (ja) * 2010-12-16 2012-07-05 Nikon Corp ガイド機構および３次元測定機
JP2012220339A (ja) 2011-04-08 2012-11-12 Nikon Corp 形状測定装置、形状測定方法、及びそのプログラム
JP2014056352A (ja) * 2012-09-11 2014-03-27 Canon Inc 位置決め装置及び計測装置
JP2014130091A (ja) * 2012-12-28 2014-07-10 Canon Inc 測定装置および測定方法
JP2014238376A (ja) * 2013-06-10 2014-12-18 キヤノン株式会社 測定装置

Similar Documents

Publication Publication Date Title
CN102230789B (zh) 一种高速铁路钢轨平直度测量仪及其测量面定位方法
CN103616007B (zh) 一种微小零件平面度精密测量装置
CN105806224A (zh) 一种大尺寸轴类零件高精度测量装置及方法
US7895764B2 (en) Measuring instrument
CN205561759U (zh) 一种非接触式三坐标测量机
WO2017143639A1 (zh) 一种3d打印机
WO2017012444A1 (zh) 一种用于板材检测的行走装置
CN102773767A (zh) 一种接触式扫描测头
CN204128499U (zh) 多功能三坐标测量机
CN212512907U (zh) 一种铝模板长度激光检测装置及系统
JP2019070666A5 (enExample)
CN105737781B (zh) 细长薄壁类工件专用三维测量设备
CN102645190A (zh) 用于测量异形件的三坐标测量仪
CN108050974A (zh) 高度精密检测机
CN207636024U (zh) 一种三坐标测量仪
CN203464915U (zh) 三坐标测量机
CN102794757A (zh) 船模三座标划线装置
CN105136253A (zh) 磁致伸缩液位计检测装置
JP2018124288A5 (enExample)
JP2012242193A (ja) 外側寸法測定機
JP2015068676A (ja) すり板測定装置及びすり板測定方法
CN202599378U (zh) 用于测量异形件的三坐标测量仪
JP2016145823A5 (enExample)
CN205748320U (zh) 细长薄壁类工件专用三维测量设备
CN221796112U (zh) 一种交替检测平台及检测设备