JP2016127115A5 - - Google Patents

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Publication number
JP2016127115A5
JP2016127115A5 JP2014266139A JP2014266139A JP2016127115A5 JP 2016127115 A5 JP2016127115 A5 JP 2016127115A5 JP 2014266139 A JP2014266139 A JP 2014266139A JP 2014266139 A JP2014266139 A JP 2014266139A JP 2016127115 A5 JP2016127115 A5 JP 2016127115A5
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JP
Japan
Prior art keywords
adhesive sheet
semiconductor chips
pressure
sensitive adhesive
interval
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JP2014266139A
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English (en)
Japanese (ja)
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JP6482865B2 (ja
JP2016127115A (ja
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Priority to JP2014266139A priority Critical patent/JP6482865B2/ja
Priority claimed from JP2014266139A external-priority patent/JP6482865B2/ja
Priority to TW104143853A priority patent/TWI676210B/zh
Publication of JP2016127115A publication Critical patent/JP2016127115A/ja
Publication of JP2016127115A5 publication Critical patent/JP2016127115A5/ja
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JP2014266139A 2014-12-26 2014-12-26 半導体装置の製造方法 Active JP6482865B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2014266139A JP6482865B2 (ja) 2014-12-26 2014-12-26 半導体装置の製造方法
TW104143853A TWI676210B (zh) 2014-12-26 2015-12-25 半導體裝置之製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014266139A JP6482865B2 (ja) 2014-12-26 2014-12-26 半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JP2016127115A JP2016127115A (ja) 2016-07-11
JP2016127115A5 true JP2016127115A5 (enrdf_load_stackoverflow) 2017-11-16
JP6482865B2 JP6482865B2 (ja) 2019-03-13

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JP2014266139A Active JP6482865B2 (ja) 2014-12-26 2014-12-26 半導体装置の製造方法

Country Status (2)

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JP (1) JP6482865B2 (enrdf_load_stackoverflow)
TW (1) TWI676210B (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7173000B2 (ja) * 2017-05-22 2022-11-16 昭和電工マテリアルズ株式会社 半導体装置の製造方法及びエキスパンドテープ
JP2019012714A (ja) * 2017-06-29 2019-01-24 株式会社ディスコ 半導体パッケージの製造方法
KR102507691B1 (ko) * 2017-11-16 2023-03-09 린텍 가부시키가이샤 반도체 장치의 제조 방법
JP7185638B2 (ja) * 2017-11-16 2022-12-07 リンテック株式会社 半導体装置の製造方法
WO2019112033A1 (ja) * 2017-12-07 2019-06-13 リンテック株式会社 粘着性積層体、粘着性積層体の使用方法、及び半導体装置の製造方法
JP7084228B2 (ja) 2018-06-26 2022-06-14 日東電工株式会社 半導体装置製造方法
JP7250468B6 (ja) * 2018-10-12 2023-04-25 三井化学株式会社 電子装置の製造方法および粘着性フィルム
KR102123419B1 (ko) * 2018-10-29 2020-06-17 한국기계연구원 소자 간격 제어가 가능한 시트 및 이를 이용한 소자 간격 제어방법
CN113366080B (zh) * 2019-01-31 2023-12-26 琳得科株式会社 扩片方法以及半导体装置的制造方法
CN114823456B (zh) * 2021-01-19 2025-08-22 矽磐微电子(重庆)有限公司 转膜治具及芯片贴片方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010058646A1 (ja) * 2008-11-21 2010-05-27 インターナショナル・ビジネス・マシーンズ・コーポレーション 半導体パッケージおよびその製造方法
JP2011077235A (ja) * 2009-09-30 2011-04-14 Nitto Denko Corp 素子保持用粘着シートおよび素子の製造方法
JP5350980B2 (ja) * 2009-11-02 2013-11-27 シチズン電子株式会社 Ｌｅｄ素子の製造方法
JP5460374B2 (ja) * 2010-02-19 2014-04-02 シチズン電子株式会社 半導体装置の製造方法
WO2014002535A1 (ja) * 2012-06-29 2014-01-03 シャープ株式会社 半導体装置の製造方法

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