JP2016125976A - テラヘルツ波時間波形取得装置 - Google Patents
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- OYLGJCQECKOTOL-UHFFFAOYSA-L barium fluoride Chemical compound [F-].[F-].[Ba+2] OYLGJCQECKOTOL-UHFFFAOYSA-L 0.000 description 1
- 229910001632 barium fluoride Inorganic materials 0.000 description 1
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- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
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- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
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- 238000005549 size reduction Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000002887 superconductor Substances 0.000 description 1
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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Abstract
【解決手段】テラヘルツ波時間波形取得装置1は、光源10、分岐部20、テラヘルツ波発生素子31、テラヘルツ波検出素子32、遅延付与媒質40、温度調整部50および解析部60を備える。遅延付与媒質40は、テラヘルツ波発生素子31からテラヘルツ波検出素子32までのテラヘルツ波LTの光路上に設けられ、テラヘルツ波LTに対する屈折率が温度に依存する材料からなり、温度に応じた遅延をテラヘルツ波LTに与える。
【選択図】図1
Description
図1は、第1実施形態のテラヘルツ波時間波形取得装置1の構成を示す図である。第1実施形態のテラヘルツ波時間波形取得装置1は、光源10、分岐部20、ミラー21〜23、テラヘルツ波発生素子31、テラヘルツ波検出素子32、遅延付与媒質40、温度調整部50および解析部60を備え、測定対象物100の情報を取得するものである。
図10は、第2実施形態のテラヘルツ波時間波形取得装置2の構成を示す図である。第2実施形態のテラヘルツ波時間波形取得装置2は、光源10、テラヘルツ波発生素子31、テラヘルツ波検出素子32、遅延付与媒質40、温度調整部50、解析部60、光ファイバカプラ80および光ファイバ81〜83を備え、測定対象物100の情報を取得するものである。
図11は、第3実施形態のテラヘルツ波時間波形取得装置3の構成を示す図である。第3実施形態のテラヘルツ波時間波形取得装置3は、第1実施形態の構成において、複数の遅延付与媒質を備えることとしたものである。同図では、2つの遅延付与媒質40A,40Bが示され、また、遅延付与媒質40Aの温度を調整する温度調整部50A、および、遅延付与媒質40Bの温度を調整する温度調整部50Bも示されている。
Claims (8)
- パルス光を出力する光源と、
前記光源から出力されたパルス光を分岐して、一方の分岐光をポンプ光として出力するとともに、他方の分岐光をプローブ光として出力する分岐部と、
前記分岐部から出力されたポンプ光を入力することでテラヘルツ波を発生し出力するテラヘルツ波発生素子と、
前記テラヘルツ波発生素子から出力され測定対象物で透過または反射したテラヘルツ波を入力するとともに、前記分岐部から出力されたプローブ光を入力して、これらテラヘルツ波とプローブ光との間の相関値を検出するテラヘルツ波検出素子と、
前記テラヘルツ波発生素子から前記テラヘルツ波検出素子までのテラヘルツ波の光路上に設けられ、テラヘルツ波に対する屈折率が温度に依存する材料からなり、温度に応じた遅延をテラヘルツ波に与える遅延付与媒質と、
前記遅延付与媒質の温度を調整する温度調整部と、
前記温度調整部により前記遅延付与媒質の温度を各値に設定したときに前記テラヘルツ波検出素子により検出された前記相関値に基づいて、前記テラヘルツ波検出素子に入力されたテラヘルツ波の電場振幅の時間波形を取得する解析部と、
を備えるテラヘルツ波時間波形取得装置。 - 前記遅延付与媒質が、テラヘルツ波を入力面から内部に入力し、テラヘルツ波を内部において反射させながら伝搬させた後、テラヘルツ波を出力面から外部へ出力する、
請求項1に記載のテラヘルツ波時間波形取得装置。 - 前記遅延付与媒質が、テラヘルツ波を内部において反射させながら伝搬させる際に該テラヘルツ波を平行光または収斂光にする反射面を有する、
請求項2に記載のテラヘルツ波時間波形取得装置。 - 前記遅延付与媒質と前記テラヘルツ波発生素子とが一体化されている、
請求項1〜3の何れか1項に記載のテラヘルツ波時間波形取得装置。 - 前記遅延付与媒質と前記テラヘルツ波検出素子とが一体化されている、
請求項1〜4の何れか1項に記載のテラヘルツ波時間波形取得装置。 - 前記光源から前記分岐部まで前記パルス光を導光するパルス光導光用光ファイバと、
前記分岐部から前記テラヘルツ波発生素子まで前記ポンプ光を導光するポンプ光導光用光ファイバと、
前記分岐部から前記テラヘルツ波検出素子まで前記プローブ光を導光するプローブ光導光用光ファイバと、
を更に備える請求項1〜5の何れか1項に記載のテラヘルツ波時間波形取得装置。 - 前記遅延付与媒質を低温から高温に変化させてテラヘルツ波の電場振幅の時間波形を取得することと、前記遅延付与媒質を高温から低温に変化させてテラヘルツ波の電場振幅の時間波形を取得することとを交互に行って、該時間波形の積算値を求める、
請求項1〜6の何れか1項に記載のテラヘルツ波時間波形取得装置。 - 前記遅延付与媒質を複数備え、
前記テラヘルツ波発生素子から前記テラヘルツ波検出素子までのテラヘルツ波の光路上に、これら複数の遅延付与媒質を1つずつ配置して、その配置した遅延付与媒質の温度を各値に設定してテラヘルツ波の電場振幅の時間波形を取得して、該時間波形の積算値を求める、
請求項1〜6の何れか1項に記載のテラヘルツ波時間波形取得装置。
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JP2015002053A JP6363511B2 (ja) | 2015-01-08 | 2015-01-08 | テラヘルツ波時間波形取得装置 |
EP15202492.3A EP3043167B1 (en) | 2015-01-08 | 2015-12-23 | Terahertz wave temporal waveform acquisition apparatus |
US14/982,022 US9417183B2 (en) | 2015-01-08 | 2015-12-29 | Terahertz wave temporal waveform acquistion apparatus |
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US10872792B2 (en) | 2017-09-12 | 2020-12-22 | Samsung Electronics., Ltd. | Measurement device and semiconductor manufacturing system including the same |
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CN111537466B (zh) * | 2020-05-15 | 2022-07-05 | 西安理工大学 | 一种用于检测细胞和生物大分子的瞬态THz光谱仪 |
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JP2008102352A (ja) * | 2006-10-19 | 2008-05-01 | Aisin Seiki Co Ltd | 光学遅延器械及び光学遅延器械を備える光学測定装置 |
JP2008151618A (ja) * | 2006-12-18 | 2008-07-03 | Canon Inc | テラヘルツ波を用いた対象物の情報取得装置及び方法 |
JP2009175127A (ja) * | 2007-12-28 | 2009-08-06 | Canon Inc | 波形情報取得装置及び波形情報取得方法 |
JP2009206484A (ja) * | 2008-01-29 | 2009-09-10 | Canon Inc | パルスレーザおよびテラヘルツ計測装置 |
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JP2012122981A (ja) * | 2010-11-15 | 2012-06-28 | Fujitsu Ltd | 電磁波イメージング装置 |
EP2538186A1 (de) * | 2011-06-20 | 2012-12-26 | Philipps-Universität Marburg | Variable Laufzeitänderung von elektromagnetischer Strahlung |
US20130188661A1 (en) * | 2012-01-24 | 2013-07-25 | Rafal Wilk | Optical assembly and method for generating light pulses of variable delay |
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- 2015-01-08 JP JP2015002053A patent/JP6363511B2/ja active Active
- 2015-12-23 EP EP15202492.3A patent/EP3043167B1/en active Active
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Patent Citations (8)
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JP2008102352A (ja) * | 2006-10-19 | 2008-05-01 | Aisin Seiki Co Ltd | 光学遅延器械及び光学遅延器械を備える光学測定装置 |
JP2008151618A (ja) * | 2006-12-18 | 2008-07-03 | Canon Inc | テラヘルツ波を用いた対象物の情報取得装置及び方法 |
JP2009175127A (ja) * | 2007-12-28 | 2009-08-06 | Canon Inc | 波形情報取得装置及び波形情報取得方法 |
JP2009206484A (ja) * | 2008-01-29 | 2009-09-10 | Canon Inc | パルスレーザおよびテラヘルツ計測装置 |
JP2009210423A (ja) * | 2008-03-04 | 2009-09-17 | Sony Corp | テラヘルツ分光装置 |
JP2012122981A (ja) * | 2010-11-15 | 2012-06-28 | Fujitsu Ltd | 電磁波イメージング装置 |
EP2538186A1 (de) * | 2011-06-20 | 2012-12-26 | Philipps-Universität Marburg | Variable Laufzeitänderung von elektromagnetischer Strahlung |
US20130188661A1 (en) * | 2012-01-24 | 2013-07-25 | Rafal Wilk | Optical assembly and method for generating light pulses of variable delay |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US10872792B2 (en) | 2017-09-12 | 2020-12-22 | Samsung Electronics., Ltd. | Measurement device and semiconductor manufacturing system including the same |
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US20160202179A1 (en) | 2016-07-14 |
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EP3043167A1 (en) | 2016-07-13 |
US9417183B2 (en) | 2016-08-16 |
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