JP2016122777A5 - - Google Patents

Download PDF

Info

Publication number
JP2016122777A5
JP2016122777A5 JP2014262862A JP2014262862A JP2016122777A5 JP 2016122777 A5 JP2016122777 A5 JP 2016122777A5 JP 2014262862 A JP2014262862 A JP 2014262862A JP 2014262862 A JP2014262862 A JP 2014262862A JP 2016122777 A5 JP2016122777 A5 JP 2016122777A5
Authority
JP
Japan
Prior art keywords
holding
holding unit
unit
fixing member
support device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014262862A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016122777A (ja
JP6485687B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2014262862A priority Critical patent/JP6485687B2/ja
Priority claimed from JP2014262862A external-priority patent/JP6485687B2/ja
Publication of JP2016122777A publication Critical patent/JP2016122777A/ja
Publication of JP2016122777A5 publication Critical patent/JP2016122777A5/ja
Application granted granted Critical
Publication of JP6485687B2 publication Critical patent/JP6485687B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2014262862A 2014-12-25 2014-12-25 保持装置、物体支持装置及び露光装置、並びにデバイス製造方法 Active JP6485687B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014262862A JP6485687B2 (ja) 2014-12-25 2014-12-25 保持装置、物体支持装置及び露光装置、並びにデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014262862A JP6485687B2 (ja) 2014-12-25 2014-12-25 保持装置、物体支持装置及び露光装置、並びにデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2016122777A JP2016122777A (ja) 2016-07-07
JP2016122777A5 true JP2016122777A5 (enrdf_load_stackoverflow) 2018-01-18
JP6485687B2 JP6485687B2 (ja) 2019-03-20

Family

ID=56329172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014262862A Active JP6485687B2 (ja) 2014-12-25 2014-12-25 保持装置、物体支持装置及び露光装置、並びにデバイス製造方法

Country Status (1)

Country Link
JP (1) JP6485687B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7051455B2 (ja) * 2018-01-16 2022-04-11 キオクシア株式会社 パターン形成装置および半導体装置の製造方法
JP7110005B2 (ja) * 2018-06-20 2022-08-01 キヤノン株式会社 基板回転装置、基板回転方法、リソグラフィ装置、および物品製造方法
KR102822419B1 (ko) * 2020-12-08 2025-06-18 에스케이하이닉스 주식회사 반도체 제조 장치, 이를 이용하는 캐리어 위치 판독 방법 및 반도체 다이의 부착 방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6358564B2 (ja) * 2012-11-30 2018-07-18 株式会社ニコン 搬送システム、露光装置、搬送方法、露光方法及びデバイス製造方法、並びに吸引装置

Similar Documents

Publication Publication Date Title
JP2016157131A5 (enrdf_load_stackoverflow)
JP2011044712A5 (enrdf_load_stackoverflow)
JP2011044713A5 (enrdf_load_stackoverflow)
JP2016122777A5 (enrdf_load_stackoverflow)
CN109414881A (zh) 多轴机械系统与视觉监视相结合的3d打印方法与装置
JP2009117877A5 (enrdf_load_stackoverflow)
JP2013502600A5 (enrdf_load_stackoverflow)
JP2014139938A5 (enrdf_load_stackoverflow)
BR112012021276A2 (pt) máquina de processamento de engrenagem.
JP2016056930A5 (ja) 玉軸受の玉配列方法及び玉配列装置
JP2013517191A5 (enrdf_load_stackoverflow)
MX2017011763A (es) Dispositivo de soporte para soportar un tubo en una maquina procesadora de tubos, en particular una cortadora de tubos por laser, y maquina procesadora de tubos que comprende este dispositivo de soporte.
CN104044097B (zh) 一种小型杆式弹性零件的夹持装置
JP2015212767A5 (enrdf_load_stackoverflow)
JP3179725U (ja) 接着剤塗布装置
JP2014099598A5 (enrdf_load_stackoverflow)
JPWO2020090961A5 (enrdf_load_stackoverflow)
JP2009016385A5 (enrdf_load_stackoverflow)
TWD192486S (zh) Rotator for substrate processing apparatus
US11047179B2 (en) In-pipe passive centering mechanism with radial probe or tool deployment mechanism
JP2010243488A5 (enrdf_load_stackoverflow)
CN103691678A (zh) 一种轴承外径尺寸挑选机器人
BR112014006464A2 (pt) aparelho de filtro de indexação e método de uso
JP2013254038A5 (enrdf_load_stackoverflow)
JP2006233283A5 (enrdf_load_stackoverflow)