JP2016119300A - 基準マークに基づく相関顕微鏡法 - Google Patents

基準マークに基づく相関顕微鏡法 Download PDF

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JP2016119300A
JP2016119300A JP2015243742A JP2015243742A JP2016119300A JP 2016119300 A JP2016119300 A JP 2016119300A JP 2015243742 A JP2015243742 A JP 2015243742A JP 2015243742 A JP2015243742 A JP 2015243742A JP 2016119300 A JP2016119300 A JP 2016119300A
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sample volume
charged particle
imaging
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JP2016119300A5 (enExample
Inventor
スティーブン・ランドルフ
Steven Randolph
ジェームズ・ミヤサキ
Miyasaki James
マーカス・ストロー
Marcus Straw
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FEI Co
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6486—Measuring fluorescence of biological material, e.g. DNA, RNA, cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/222—Image processing arrangements associated with the tube
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6428—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G01N21/6458—Fluorescence microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0076—Optical details of the image generation arrangements using fluorescence or luminescence
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/16—Microscopes adapted for ultraviolet illumination ; Fluorescence microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365—Control or image processing arrangements for digital or video microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6428—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • G01N2021/6439—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" with indicators, stains, dyes, tags, labels, marks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/22—Treatment of data
    • H01J2237/221—Image processing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24578—Spatial variables, e.g. position, distance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2611—Stereoscopic measurements and/or imaging

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Multimedia (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Engineering & Computer Science (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Microscoopes, Condenser (AREA)
JP2015243742A 2014-12-22 2015-12-15 基準マークに基づく相関顕微鏡法 Pending JP2016119300A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/579,056 2014-12-22
US14/579,056 US9368321B1 (en) 2014-12-22 2014-12-22 Fiducial-based correlative microscopy

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JP2016119300A true JP2016119300A (ja) 2016-06-30
JP2016119300A5 JP2016119300A5 (enExample) 2019-01-31

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US (1) US9368321B1 (enExample)
EP (1) EP3037862A1 (enExample)
JP (1) JP2016119300A (enExample)
CN (1) CN105717078A (enExample)

Cited By (5)

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WO2020080508A1 (ja) * 2018-10-19 2020-04-23 株式会社日立ハイテクノロジーズ アライメントシステム及び位置合わせ用シール
JP2020514822A (ja) * 2017-03-17 2020-05-21 ユナイテッド キングダム リサーチ アンド イノベーション 超解像顕微鏡法
JP2020136053A (ja) * 2019-02-19 2020-08-31 日本電子株式会社 観察方法、画像処理装置、および電子顕微鏡
US11676794B2 (en) 2017-03-17 2023-06-13 United Kingdom Research And Innovation Super-resolution microscopy
WO2024261804A1 (ja) * 2023-06-19 2024-12-26 日本電信電話株式会社 マーカ、位置合わせ装置、及び位置合わせ方法

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GB201701688D0 (en) * 2017-02-01 2017-03-15 Illumia Inc System and method with fiducials in non-recliner layouts
GB201701686D0 (en) * 2017-02-01 2017-03-15 Illunina Inc System & method with fiducials having offset layouts
GB201701689D0 (en) 2017-02-01 2017-03-15 Illumia Inc System and method with fiducials of non-closed shapes
GB201701691D0 (en) * 2017-02-01 2017-03-15 Illumina Inc System and method with reflective fiducials
CN109414673B (zh) 2017-02-01 2021-09-07 伊鲁米那股份有限公司 具有响应于多个激发频率的基准的系统和方法
US10589360B2 (en) 2018-06-17 2020-03-17 Arevo, Inc. Systems of articles of manufacture with corresponding fiducial marks and dimensional variations
CN111239085B (zh) * 2019-03-06 2022-11-22 南昌工程学院 基于深度学习的显微视觉伺服控制方法
EP3938763A4 (en) * 2019-03-14 2022-12-07 Applied Materials, Inc. IDENTIFICATION OF LANDMARK MARKERS IN MICROSCOPE IMAGES
CN110865058A (zh) * 2019-11-21 2020-03-06 成都博奥独立医学实验室有限公司 激光微阵列芯片扫描仪的浓度梯度荧光校准片及校准方法
US11551906B1 (en) * 2021-06-30 2023-01-10 Fei Company Time-gated detection, dual-layer SPAD-based electron detection
WO2024242993A2 (en) * 2023-05-19 2024-11-28 Yale University Systems and methods for subvoxel sem based volume electron microscopy
US20250290834A1 (en) * 2024-03-15 2025-09-18 Fei Company Preparation of planar lamella from a multi-layer structure
EP4679056A1 (en) * 2024-07-08 2026-01-14 Fei Company Method for creating a sample for use in a charged particle microscope

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020514822A (ja) * 2017-03-17 2020-05-21 ユナイテッド キングダム リサーチ アンド イノベーション 超解像顕微鏡法
JP7150743B2 (ja) 2017-03-17 2022-10-11 ユナイテッド キングダム リサーチ アンド イノベーション 超解像顕微鏡法
US11676794B2 (en) 2017-03-17 2023-06-13 United Kingdom Research And Innovation Super-resolution microscopy
WO2020080508A1 (ja) * 2018-10-19 2020-04-23 株式会社日立ハイテクノロジーズ アライメントシステム及び位置合わせ用シール
JPWO2020080508A1 (ja) * 2018-10-19 2021-09-09 株式会社日立ハイテク アライメントシステム及び位置合わせ用シール
US11538657B2 (en) 2018-10-19 2022-12-27 Hitachi High-Tech Corporation Alignment system and seal for positional alignment
JP2020136053A (ja) * 2019-02-19 2020-08-31 日本電子株式会社 観察方法、画像処理装置、および電子顕微鏡
WO2024261804A1 (ja) * 2023-06-19 2024-12-26 日本電信電話株式会社 マーカ、位置合わせ装置、及び位置合わせ方法

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EP3037862A1 (en) 2016-06-29
US9368321B1 (en) 2016-06-14
CN105717078A (zh) 2016-06-29
US20160181060A1 (en) 2016-06-23

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