JP2016113309A - 複合基板のスクライブ方法及びスクライブ装置 - Google Patents

複合基板のスクライブ方法及びスクライブ装置 Download PDF

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Publication number
JP2016113309A
JP2016113309A JP2014250603A JP2014250603A JP2016113309A JP 2016113309 A JP2016113309 A JP 2016113309A JP 2014250603 A JP2014250603 A JP 2014250603A JP 2014250603 A JP2014250603 A JP 2014250603A JP 2016113309 A JP2016113309 A JP 2016113309A
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JP
Japan
Prior art keywords
scribing
layer
scribe
resin layer
composite substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2014250603A
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English (en)
Japanese (ja)
Inventor
武田　真和
Masakazu Takeda
真和 武田
村上　健二
Kenji Murakami
健二 村上
木下　知子
Tomoko Kinoshita
知子 木下
直哉 木山
naoya Kiyama
直哉 木山
護 秀島
Mamoru Hideshima
護 秀島
健太 田村
kenta Tamura
健太 田村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Diamond Industrial Co Ltd
Original Assignee
Mitsuboshi Diamond Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Priority to JP2014250603A priority Critical patent/JP2016113309A/ja
Priority to TW104133294A priority patent/TWI684505B/zh
Priority to KR1020150147804A priority patent/KR20160071313A/ko
Priority to CN201510737321.4A priority patent/CN105693073A/zh
Publication of JP2016113309A publication Critical patent/JP2016113309A/ja
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laminated Bodies (AREA)
JP2014250603A 2014-12-11 2014-12-11 複合基板のスクライブ方法及びスクライブ装置 Pending JP2016113309A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2014250603A JP2016113309A (ja) 2014-12-11 2014-12-11 複合基板のスクライブ方法及びスクライブ装置
TW104133294A TWI684505B (zh) 2014-12-11 2015-10-08 複合基板之刻劃方法及刻劃裝置
KR1020150147804A KR20160071313A (ko) 2014-12-11 2015-10-23 복합기판의 스크라이브 방법 및 스크라이브 장치
CN201510737321.4A CN105693073A (zh) 2014-12-11 2015-11-03 复合基板的划线方法以及划线装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014250603A JP2016113309A (ja) 2014-12-11 2014-12-11 複合基板のスクライブ方法及びスクライブ装置

Publications (1)

Publication Number Publication Date
JP2016113309A true JP2016113309A (ja) 2016-06-23

Family

ID=56140931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014250603A Pending JP2016113309A (ja) 2014-12-11 2014-12-11 複合基板のスクライブ方法及びスクライブ装置

Country Status (4)

Country Link
JP (1) JP2016113309A (zh)
KR (1) KR20160071313A (zh)
CN (1) CN105693073A (zh)
TW (1) TWI684505B (zh)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003506814A (ja) * 1999-08-04 2003-02-18 コマッグ・インコーポレイテッド ガラス基板から構成される磁気ディスクの製造方法
WO2003040049A1 (fr) * 2001-11-08 2003-05-15 Sharp Kabushiki Kaisha Procede et dispositif destines a diviser un substrat de verre, panneau a cristaux liquides et dispositif de fabrication de panneau a cristaux liquides
JP2003335536A (ja) * 2002-05-17 2003-11-25 Sharp Corp ワーク分断方法および装置ならびにワーク分断方法を用いた液晶表示パネルの製造方法
JP2010132347A (ja) * 2008-10-01 2010-06-17 Nippon Electric Glass Co Ltd ガラスロール、ガラスロールの製造装置、及びガラスロールの製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI589420B (zh) * 2012-09-26 2017-07-01 Mitsuboshi Diamond Ind Co Ltd Metal multilayer ceramic substrate breaking method and trench processing tools
JP6191109B2 (ja) 2012-09-26 2017-09-06 三星ダイヤモンド工業株式会社 積層セラミックス基板の分断方法
JP6191122B2 (ja) * 2012-10-30 2017-09-06 三星ダイヤモンド工業株式会社 積層セラミックス基板の分断方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003506814A (ja) * 1999-08-04 2003-02-18 コマッグ・インコーポレイテッド ガラス基板から構成される磁気ディスクの製造方法
WO2003040049A1 (fr) * 2001-11-08 2003-05-15 Sharp Kabushiki Kaisha Procede et dispositif destines a diviser un substrat de verre, panneau a cristaux liquides et dispositif de fabrication de panneau a cristaux liquides
JP2003335536A (ja) * 2002-05-17 2003-11-25 Sharp Corp ワーク分断方法および装置ならびにワーク分断方法を用いた液晶表示パネルの製造方法
JP2010132347A (ja) * 2008-10-01 2010-06-17 Nippon Electric Glass Co Ltd ガラスロール、ガラスロールの製造装置、及びガラスロールの製造方法

Also Published As

Publication number Publication date
TWI684505B (zh) 2020-02-11
KR20160071313A (ko) 2016-06-21
CN105693073A (zh) 2016-06-22
TW201622933A (zh) 2016-07-01

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