JP2016112612A5 - - Google Patents

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Publication number
JP2016112612A5
JP2016112612A5 JP2014255974A JP2014255974A JP2016112612A5 JP 2016112612 A5 JP2016112612 A5 JP 2016112612A5 JP 2014255974 A JP2014255974 A JP 2014255974A JP 2014255974 A JP2014255974 A JP 2014255974A JP 2016112612 A5 JP2016112612 A5 JP 2016112612A5
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JP
Japan
Prior art keywords
unit
air
processing apparatus
laser processing
heat exchanger
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JP2014255974A
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English (en)
Japanese (ja)
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JP6396199B2 (ja
JP2016112612A (ja
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Priority to JP2014255974A priority Critical patent/JP6396199B2/ja
Priority claimed from JP2014255974A external-priority patent/JP6396199B2/ja
Publication of JP2016112612A publication Critical patent/JP2016112612A/ja
Publication of JP2016112612A5 publication Critical patent/JP2016112612A5/ja
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Publication of JP6396199B2 publication Critical patent/JP6396199B2/ja
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JP2014255974A 2014-12-18 2014-12-18 レーザ加工装置 Active JP6396199B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014255974A JP6396199B2 (ja) 2014-12-18 2014-12-18 レーザ加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014255974A JP6396199B2 (ja) 2014-12-18 2014-12-18 レーザ加工装置

Publications (3)

Publication Number Publication Date
JP2016112612A JP2016112612A (ja) 2016-06-23
JP2016112612A5 true JP2016112612A5 (enrdf_load_stackoverflow) 2018-02-01
JP6396199B2 JP6396199B2 (ja) 2018-09-26

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ID=56140532

Family Applications (1)

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JP2014255974A Active JP6396199B2 (ja) 2014-12-18 2014-12-18 レーザ加工装置

Country Status (1)

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JP (1) JP6396199B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108604770B (zh) * 2016-01-26 2020-07-24 富士胶片株式会社 激光器装置
CN115070218B (zh) * 2022-06-27 2025-07-04 武汉中谷联创光电科技股份有限公司 一种激光标刻设备
JP2024046220A (ja) * 2022-09-22 2024-04-03 東芝テック株式会社 電子機器

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0747184Y2 (ja) * 1990-02-23 1995-11-01 ミヤチテクノス株式会社 レーザ加工装置
JPH09206308A (ja) * 1996-01-31 1997-08-12 Matsushita Electric Ind Co Ltd レーザメス装置
JPH10229990A (ja) * 1997-02-20 1998-09-02 Olympus Optical Co Ltd レーザプローブ
JP4603936B2 (ja) * 2005-05-31 2010-12-22 財団法人光科学技術研究振興財団 レーザ加工装置
JP4860227B2 (ja) * 2005-10-04 2012-01-25 浜松ホトニクス株式会社 半導体レーザ装置

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