JP2016105513A - 形状記憶合金ワイヤのウエハ・レベルでの組込方法 - Google Patents
形状記憶合金ワイヤのウエハ・レベルでの組込方法 Download PDFInfo
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- JP2016105513A JP2016105513A JP2016039342A JP2016039342A JP2016105513A JP 2016105513 A JP2016105513 A JP 2016105513A JP 2016039342 A JP2016039342 A JP 2016039342A JP 2016039342 A JP2016039342 A JP 2016039342A JP 2016105513 A JP2016105513 A JP 2016105513A
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- B81—MICROSTRUCTURAL TECHNOLOGY
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
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Abstract
Description
本発明の教示によると、ワイヤ・ボンダを用いる間に、電気放電によってフリー・エア・ボールが形成され、次いでこのボールがそのアンカリング構造にアンカされ、SMAワイヤが与えられ全体のウエハ領域を跨いでその第2の固定構造まで導かれ、SMAワイヤは、複数のシリコン・カンチレバーの間にクランプされ、ボンド・キャピラリおよび大きなボンド力によってワイヤを断ち切ることによって最終的に切断される。
ive ion etching using a modified Bosch process”, JMM, vol. 17, pp. 1087−1092, (2007)には、両方のタイプの構造を、一連の非等方性および等方性のDRIEのステップによって実現可能であることが示されている。両方の組込構造のエッチングは、STS
ICPエッチング反応器の中で実行された。
151−154, (2007)を参照のこと。次に、フリー・エア・ボールはランド領域の中に下げられ、それに続いて、その隣接するアンカ部分の中に引っかけられる。ワイヤ・ボンダを用いることによって、SMAワイヤは、ウエハをわたってクランピング構造に配置され、そこで対向するカンチレバーの対間に押し込まれる。最後に、SMAワイ
ヤは、ボンド・キャピラリと大きなボンド力を用いてワイヤを断ち切ることによって、切断される。
using electroplating”, MEMS Proc. (2011)を参照のこと。
ワイヤは、ワイヤ・ボンダのボンド・キャピラリを通過して与えられる。ワイヤを引っ張ることを可能にするためには、ワイヤの先端を基板上に固定しなければならない。この概念では、ワイヤの先端を変形させることにより、ワイヤの先端の直径が、残りのワイヤおよびボンド・キャピラリの直径よりも大きくなるようにする。これにより、ワイヤの先端をフックインすること、または、ワイヤを基板における押込嵌合(スクイズ・フィット)構造の中に押し込むこと(スクイズ)が可能になる。
て、図8cで基板の構造の中にフックインされ、図8dでは、SMAワイヤを、ボンド・キャピラリを通過して引っ張ることが可能になる。
ンチの中に接着的にアンカするために、基板におけるトレンチを接着剤で充填することができる。図15および図16には、図9と類似の直線的なトレンチについては図15を用いて、図10に類似のV形状のトレンチについては図16を用いて、この概念が図解されている。SMAワイヤ(1501、1601)がボンド・キャピラリ(1502、1602)を通過して与えられ、フリー・エア・ボール(1503、1603)が形成される。基板(1504、1604)には、直線的な(1505)またはV形状の(1605)トレンチが形成され、次に、これらは、接着剤(1506、1606)で部分的に充填される(図15a、図16a)。フリー・エア・ボールの直径はボンド・キャピラリの直径よりも大きく、これにより、基板のトレンチにおける接着剤の中にフリー・エア・ボールをスクイズすることが可能になる(図15b、図16b)。フリー・エア・ボールは接着剤に埋め込まれ、接着剤が硬化され(1507、1607)、それによりフリー・エア・ボールをアンカする(図15c、図16c)。
ッティングが図解されている。図21は、図11に示されている概念に基づいていて、SMAワイヤの様々な直径を許容する、基板における変形可能なクランプ構造(2105)という特徴を示している。ワイヤは、ピストン(1904、2004、2104)を用いて、トレンチおよび/または変形可能なクランプ構造の中にスクイズされる。ここで、ピストンは、例えば、ウエハ・ボンダにおけるワイヤおよび第2の基板の上に押しつけられる第2の基板でありうる(図19b、図20b、図21b)。次にピストンが取り除かれるが、図9、図10および図11に示されている概念と同じ原理に従い、ワイヤはトレンチの中に残る(図19c、図20c、図21c)。
トする接着ウエハ・ボンディングと組み合わせることができる。図28に、直線的およびV形状のトレンチのいずれに対しても同様であるこの概念が図解されている。SMAワイヤ(2801)は、基板(2804)に形成され接着剤(2804)を用いて部分的に充填されているトレンチ/溝(2802、2803)の上方に配置される。ワイヤは、接着剤(2806)で被覆されワイヤと第1の基板(2803)との上に押しつけられる第2の基板(2805)を用いて、トレンチにおける接着剤の中にスクイズされる。次に、すべての接着剤が硬化され、ワイヤは接着剤とその上にある第2の基板との両方によってアンカされる。このようなアプローチは、金属ライナを有するクランプ構造を用いるスクイズ・フィットにも適している。図29には、この概念が図解されている。ワイヤ(2901)は、第1の基板(2904)における金属ライナ(2902)を有するトレンチ(2903)の上方に配置される。ワイヤは、金属(2906)で被覆されワイヤと第1の基板(2904)との上に押しつけられる第2の基板(2905)を用いて、金属ライナを有するトレンチ中にスクイズされる。次いで、第2の基板が、その金属を用いて、第1の基板上の金属に結合される。これにより、SMAは、金属膜を介して電気的に接触されることが可能であり、クランプは結合された第2の基板によってサポートされる。
ってスパンされ、最終的には、ワイヤは、基板の表面への高エネルギのウェッジ/ステッチ・ボンドによって切断される。必要な場合には、これらのステップは、さらに多くのワイヤを配置するために反復することができる。すべてのワイヤがしかるべき位置にある場合には、ピストンを用いて、これらすべてのワイヤは、下位にあるクランプ構造の中にスクイズされる。クランピングの強度が十分である場合には、基板をさらに処理することができる。そうでない場合には、クランプ構造のワイヤの上に追加的なボール・ボンドを配置することができるし、または、スクイズの間に、第2の基板をワイヤおよび第1の基板の上に、結合することができる。
Claims (20)
- ワイヤを基板に付着させる方法において、前記ワイヤは前記基板の一部である3次元構造に対し機械的に付着され、前記3次元構造は1つ以上のクランプ構造を含み、前記方法は、
前記ワイヤの一部と前記3次元構造との間に摩擦力又はアンカを生じさせる工程と、
力を加えることによって前記ワイヤを断ち切る工程と、を備え、
前記ワイヤはアンカによって第1の付着点においてアンカ構造に対し機械的に付着され、前記ワイヤと前記基板上の前記3次元構造との間に摩擦力を生じさせることによって第2の付着点において1つ以上のクランプ構造に対し付着される、方法。 - 前記ワイヤ、前記クランプ構造、またはその両方は変形可能である、請求項1に記載の方法。
- ワイヤ・ボンダを用いる間に、電気放電によって前記ワイヤの一端に、前記アンカ構造によってアンカされるフリー・エア・ボールを形成する工程と、
前記ワイヤの他端を、前記クランプ構造の少なくとも一対のカンチレバーの間にクランプされるように前記クランプ構造まで導く工程と、をさらに備える請求項1または2に記載の方法。 - 前記ワイヤは、ワイヤ・ボンダのボンド・キャピラリとボンド力とによって断ち切られる、請求項1〜3のいずれか一項に記載の方法。
- 前記アンカは、前記3次元構造に前記ワイヤの前記一部をフックイン、スクイズ・フィット、または固定することを含む、請求項1〜4のいずれか一項に記載の方法。
- 前記フリー・エア・ボールは、前記3次元構造の一部である変形可能な構造の中にスクイズ・フィットされる、請求項3〜5のいずれか一項に記載の方法。
- 前記フリー・エア・ボールは、V溝として形成される前記3次元構造の中にスクイズ・フィットされる、請求項3〜6のいずれか一項に記載の方法。
- 前記フリー・エア・ボールは、ピストンによりスクイズ・フィットされる、請求項3〜7のいずれか一項に記載の方法。
- 前記3次元構造上に金属膜が積層される、請求項3〜8のいずれか一項に記載の方法。
- 前記フリー・エア・ボールは、前記3次元構造の中にスクイズ・フィットされ、ワイヤの一端に付着された別のフリー・エア・ボールに結合され、それによって断ち切られる、請求項9に記載の方法。
- 前記フリー・エア・ボールは、接着剤を用いて前記3次元構造に対し固定される、請求項3〜5のいずれか一項に記載の方法。
- 前記3次元構造は、V溝として形成される、請求項11に記載の方法。
- 前記3次元構造は、スナップイン構造である、請求項3〜5のいずれか一項に記載の方法。
- 前記スナップイン構造は、バネ荷重を含む、請求項13に記載の方法。
- 基板に付着されたワイヤを備えたデバイスにおいて、前記ワイヤは前記基板上の3次元構造に対し機械的に付着されるように構成されており、前記基板は1つ以上のクランプ構造を含む固定対を備え、前記ワイヤは少なくとも前記固定対によって前記基板に対し機械的に固定されワイヤ・ボンダのボンド・キャピラリと加えられる力とによって断ち切られるように構成されており、前記ワイヤは第1の付着点においてアンカ構造に対しアンカされ、前記基板上に生じる摩擦力によって第2の付着点において1つ以上のクランプ構造に対し付着される、デバイス。
- 前記アンカ構造は、前記ワイヤ・ボンダの電気放電によって形成されるフリー・エア・ボールを有する前記ワイヤの一端にアンカされており、
前記クランプ構造は、前記ワイヤの他端において前記クランプ構造の少なくとも一対のカンチレバーの間にクランプされている、請求項15に記載のデバイス。 - 請求項1〜14のいずれか一項に記載の方法を実行するように構成されたワイヤ・ボンダであって、基板の一部である3次元構造に対し機械的に付着されるワイヤを供給するためのボンド・キャピラリを備え、1つ以上のクランプ構造を備える、ワイヤ・ボンダ。
- 前記ワイヤはSMAワイヤである、請求項1〜14のいずれか一項に記載の方法。
- 前記ワイヤはSMAワイヤである、請求項15または16に記載のデバイス。
- 前記ワイヤはSMAワイヤである、請求項17に記載のワイヤ・ボンダ。
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US6478212B1 (en) * | 2001-01-16 | 2002-11-12 | International Business Machines Corporation | Bond pad structure and method for reduced downward force wirebonding |
JP2014502422A (ja) * | 2010-11-22 | 2014-01-30 | センスエア アーベー | 形状記憶合金ワイヤのウエハ・レベルでの組込方法 |
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KR20140002677A (ko) | 2014-01-08 |
JP2014502422A (ja) | 2014-01-30 |
CA2818301A1 (en) | 2012-05-31 |
SG190201A1 (en) | 2013-06-28 |
JP6010242B2 (ja) | 2016-10-19 |
EP2643261A1 (en) | 2013-10-02 |
US9054224B2 (en) | 2015-06-09 |
CN103502138A (zh) | 2014-01-08 |
US20130292856A1 (en) | 2013-11-07 |
KR101856996B1 (ko) | 2018-06-20 |
EP2643261A4 (en) | 2018-01-17 |
AU2011332334B2 (en) | 2015-05-21 |
CN105719979B (zh) | 2018-01-16 |
CN105719979A (zh) | 2016-06-29 |
WO2012071003A1 (en) | 2012-05-31 |
AU2011332334A1 (en) | 2013-06-27 |
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