JP2016096139A5 - - Google Patents

Download PDF

Info

Publication number
JP2016096139A5
JP2016096139A5 JP2015220021A JP2015220021A JP2016096139A5 JP 2016096139 A5 JP2016096139 A5 JP 2016096139A5 JP 2015220021 A JP2015220021 A JP 2015220021A JP 2015220021 A JP2015220021 A JP 2015220021A JP 2016096139 A5 JP2016096139 A5 JP 2016096139A5
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
separation unit
detector
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015220021A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016096139A (ja
JP6153988B2 (ja
Filing date
Publication date
Priority claimed from US14/538,338 external-priority patent/US9330884B1/en
Application filed filed Critical
Publication of JP2016096139A publication Critical patent/JP2016096139A/ja
Publication of JP2016096139A5 publication Critical patent/JP2016096139A5/ja
Application granted granted Critical
Publication of JP6153988B2 publication Critical patent/JP6153988B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2015220021A 2014-11-11 2015-11-10 荷電粒子ビーム装置を作動させる方法及び荷電粒子ビーム装置 Expired - Fee Related JP6153988B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/538,338 2014-11-11
US14/538,338 US9330884B1 (en) 2014-11-11 2014-11-11 Dome detection for charged particle beam device

Publications (3)

Publication Number Publication Date
JP2016096139A JP2016096139A (ja) 2016-05-26
JP2016096139A5 true JP2016096139A5 (https=) 2016-07-07
JP6153988B2 JP6153988B2 (ja) 2017-06-28

Family

ID=55807587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015220021A Expired - Fee Related JP6153988B2 (ja) 2014-11-11 2015-11-10 荷電粒子ビーム装置を作動させる方法及び荷電粒子ビーム装置

Country Status (3)

Country Link
US (1) US9330884B1 (https=)
JP (1) JP6153988B2 (https=)
TW (1) TWI576887B (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11107656B2 (en) * 2017-06-02 2021-08-31 Hitachi High-Tech Corporation Charged particle beam device
US10345250B2 (en) * 2017-10-12 2019-07-09 Applied Materials, Inc. Method of inspecting a sample with a charged particle beam device, and charged particle beam device
US10504687B2 (en) * 2018-02-20 2019-12-10 Technische Universiteit Delft Signal separator for a multi-beam charged particle inspection apparatus
TWI821618B (zh) * 2019-12-19 2023-11-11 荷蘭商Ａｓｍｌ荷蘭公司 藉由多光束裝置執行以形成樣本之影像的方法及相關的多光束裝置
WO2022064628A1 (ja) * 2020-09-25 2022-03-31 株式会社日立ハイテク 電子顕微鏡

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6064071A (en) * 1997-04-23 2000-05-16 Nikon Corporation Charged-particle-beam optical systems
US6441384B1 (en) * 1998-04-08 2002-08-27 Nikon Corporation Charged particle beam exposure device exhibiting reduced image blur
JP2001124713A (ja) * 1999-10-27 2001-05-11 Hitachi Ltd 回路パターン検査装置、および回路パターン検査方法
JP2001307977A (ja) * 2000-02-18 2001-11-02 Nikon Corp 荷電粒子線露光装置の設計方法、荷電粒子線露光装置、及び半導体デバイスの製造方法
US6943351B2 (en) * 2000-02-19 2005-09-13 Multibeam Systems, Inc. Multi-column charged particle optics assembly
JP2001357808A (ja) * 2000-06-14 2001-12-26 Hitachi Ltd 回路パターン検査装置および方法
US7034297B2 (en) * 2003-03-05 2006-04-25 Applied Materials, Israel, Ltd. Method and system for use in the monitoring of samples with a charged particle beam
JP4092280B2 (ja) * 2003-10-23 2008-05-28 株式会社東芝 荷電ビーム装置および荷電粒子検出方法
EP1703538B1 (en) * 2005-03-17 2008-11-12 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device for high spatial resolution and multiple perspective imaging
CN101366095B (zh) * 2005-12-02 2010-11-10 阿利斯公司 离子源、系统和方法
JP5271491B2 (ja) * 2006-10-26 2013-08-21 株式会社日立ハイテクノロジーズ 電子線応用装置および試料検査方法
JP4913854B2 (ja) * 2008-10-08 2012-04-11 アイシーティー インテグレーテッド サーキット テスティング ゲゼルシャフト フィーア ハルプライタープリーフテヒニック エム ベー ハー 荷電粒子検出装置及び検出方法
EP2385542B1 (en) * 2010-05-07 2013-01-02 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Electron beam device with dispersion compensation, and method of operating same
JP5948083B2 (ja) * 2012-02-28 2016-07-06 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
JP5932428B2 (ja) * 2012-03-28 2016-06-08 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
JP6002470B2 (ja) * 2012-06-28 2016-10-05 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP6295027B2 (ja) * 2013-04-03 2018-03-14 株式会社日立ハイテクノロジーズ 荷電粒子線装置およびそれを用いた計測方法

Similar Documents

Publication Publication Date Title
JP2016096139A5 (https=)
TWI330861B (en) Analysing system and charged particle beam device
JP6846550B2 (ja) 電子ビーム画像化装置及び方法
TW202020920A (zh) 用於檢查樣品及/或成像樣品的帶電粒子束裝置及方法
NL2012618A (en) Scanning particle microscope having an energy selective detector system.
JP2018006339A (ja) 走査電子顕微鏡
TWI576887B (zh) 帶電粒子束裝置與用於帶電粒子束裝置的圓頂偵測方法
EP4020518A3 (en) Charged particle optical device, objective lens assembly, detector, detector array, and methods
CN105939566A (zh) 一种消色差双磁铁偏转装置
JP6420905B2 (ja) 電子エネルギー損失分光器
JP2005228743A (ja) 電子ビーム検査および欠陥の精査のための改善されたプリズムアレイ
JPWO2019187118A1 (ja) 荷電粒子線応用装置
NL8001482A (nl) Electronenmicroscoop.
CN103221836B (zh) 用于测量粒子射束内的主流自旋矢量的矢量分量的自旋检波器装置
JP2019521495A (ja) 電子顕微鏡用の収差補正装置およびこのような装置を備えた電子顕微鏡
JP5230197B2 (ja) 電子ビーム装置
US9543115B2 (en) Electron microscope
US11322332B2 (en) Apparatus and method for measuring energy spectrum of backscattered electrons
US11011342B2 (en) Beam bender
KR20210054922A (ko) 멀티 슬릿 와이어 장치를 포함하는 빔 에너지 측정 시스템
US9349566B1 (en) Charged particle beam device, beam deflector device and methods of operating thereof
US9245726B1 (en) Controlling charged particles with inhomogeneous electrostatic fields
US9202666B1 (en) Method for operating a charged particle beam device with adjustable landing energies
Gu et al. A split-electrode for clearing scattered electrons in the RHIC e-lens
Thieberger et al. Proposed electron halo detector system as one of the beam overlap diagnostic tools for the new RHIC electron lens