JP2016095412A5 - - Google Patents

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Publication number
JP2016095412A5
JP2016095412A5 JP2014231906A JP2014231906A JP2016095412A5 JP 2016095412 A5 JP2016095412 A5 JP 2016095412A5 JP 2014231906 A JP2014231906 A JP 2014231906A JP 2014231906 A JP2014231906 A JP 2014231906A JP 2016095412 A5 JP2016095412 A5 JP 2016095412A5
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JP
Japan
Prior art keywords
gas
exposure apparatus
gas supply
optical element
control means
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Application number
JP2014231906A
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English (en)
Japanese (ja)
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JP2016095412A (ja
JP6463087B2 (ja
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Priority to JP2014231906A priority Critical patent/JP6463087B2/ja
Priority claimed from JP2014231906A external-priority patent/JP6463087B2/ja
Publication of JP2016095412A publication Critical patent/JP2016095412A/ja
Publication of JP2016095412A5 publication Critical patent/JP2016095412A5/ja
Application granted granted Critical
Publication of JP6463087B2 publication Critical patent/JP6463087B2/ja
Expired - Fee Related legal-status Critical Current
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JP2014231906A 2014-11-14 2014-11-14 露光装置、および物品の製造方法 Expired - Fee Related JP6463087B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014231906A JP6463087B2 (ja) 2014-11-14 2014-11-14 露光装置、および物品の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014231906A JP6463087B2 (ja) 2014-11-14 2014-11-14 露光装置、および物品の製造方法

Publications (3)

Publication Number Publication Date
JP2016095412A JP2016095412A (ja) 2016-05-26
JP2016095412A5 true JP2016095412A5 (enExample) 2017-12-21
JP6463087B2 JP6463087B2 (ja) 2019-01-30

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ID=56071047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014231906A Expired - Fee Related JP6463087B2 (ja) 2014-11-14 2014-11-14 露光装置、および物品の製造方法

Country Status (1)

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JP (1) JP6463087B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6896404B2 (ja) * 2016-11-30 2021-06-30 キヤノン株式会社 露光装置及び物品の製造方法
JP7358106B2 (ja) * 2019-07-31 2023-10-10 キヤノン株式会社 光学装置、投影光学系、露光装置及び物品の製造方法
JP7427461B2 (ja) * 2020-02-06 2024-02-05 キヤノン株式会社 露光装置、及び物品の製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004039905A (ja) * 2002-07-04 2004-02-05 Nikon Corp 露光装置、ミラーの冷却方法、反射マスクの冷却方法及び露光方法
JP2008292761A (ja) * 2007-05-24 2008-12-04 Canon Inc 露光装置及びデバイス製造方法
JP6041541B2 (ja) * 2012-06-04 2016-12-07 キヤノン株式会社 露光装置及びデバイス製造方法
JP2014103343A (ja) * 2012-11-22 2014-06-05 Nikon Corp 露光装置、プログラム、及び管理システム

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