JP2016093002A - Fluid apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To achieve a fluid apparatus suitable for increasing an inter-electrode distance and an electrode height in pairs of electrodes arranged in a passage while suppressing an increase in thermal resistance of a heat transfer surface in the passage in which EHD fluid flows.SOLUTION: The fluid apparatus includes first electrodes 50 and second electrodes 60 arranged in a passage 40 in which EHD fluid 41 flows and allows the EHD fluid 41 to flow by applying voltage between the electrode pairs 50, 60. An interval between a first electrode substrate 10 and a second electrode substrate 20 separated and facing each other is constituted as the passage 40. The first electrodes 50 and the second electrodes 60 are respectively projected from one surface 11 of the first electrode substrate 10 and one surface 21 of the second electrode substrate 20 and both the electrodes 50, 60 are engaged with each other. Heating units 30 are respectively arranged on the other surfaces 12, 22 of both the electrode substrates 10, 20 so as to be cooled by the EHD fluid 41.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a fluid device that flows an EHD fluid exhibiting an electrohydrodynamic (EHD) phenomenon by applying a voltage, and more particularly to a fluid device for cooling a heating element.

  Conventionally, as this type of fluidic device, for example, the one described in Patent Document 1 has been proposed. This is a fluid device that causes ECF to flow by an electric conjugate fluid (ECF for short) effect which is a kind of EHD fluid.

  Specifically, this includes a thin fluid container that hermetically seals and stores the ECF, and at least forms a jet jet of the ECF by applying a voltage to either the bottom surface or the top surface of the fluid container. A pair of electrodes is provided.

  In this configuration, the bottom surface or the top surface of the fluid container is a surface that partitions the ECF flow path, and heat from a heating element including a semiconductor chip or the like provided outside the flow path is transferred to the ECF fluid. The heat transfer surface is radiated. In this device, a pair of electrodes, that is, a first electrode and a second electrode, which are a positive electrode and a negative electrode (including a GND electrode), are provided on one of the bottom surface and the top surface in these flow paths. Forming.

JP-A-2005-353887

  However, in the above conventional case, both the first electrode and the second electrode are formed on the same heat transfer surface in the flow path. Therefore, the heat transfer surface is provided with an insulating portion for insulating both the electrodes. It is necessary to provide the heat transfer surface, and there is a risk that an increase in thermal resistance and an increase in cost may occur.

  In addition, the electrodes are formed by processing such as etching. However, in the above-described conventional method, both electrodes are formed on the same surface of one substrate. It is difficult to reduce the size, or it is difficult to increase the electrode height. For this reason, conventionally, it is difficult to increase the electric field between the two electrodes and improve the flow rate of the EHD fluid by reducing the distance between the electrodes or increasing the electrode height.

  The present invention has been made in view of the above problems, and the first electrode and the second electrode disposed in the flow path while suppressing an increase in the thermal resistance of the heat transfer surface in the flow path through which the EHD fluid flows. It is an object of the present invention to realize a fluid device suitable for processing a wide distance between electrodes in both electrodes or processing a high electrode height.

  In order to achieve the above-mentioned object, the invention described in claim 1 includes a flow path (40) through which an EHD fluid (41) flowing by the EHD effect flows, a first electrode (50) provided in the flow path, and A fluidic device for flowing an EHD fluid in a flow path by applying a voltage between the first electrode and the second electrode, comprising: a second electrode (60); It is characterized by a point.

  Both are plate members made of a conductive material, and include a first electrode substrate (10) and a second electrode substrate (20) that are electrically independent from each other, and one surface (11) of the first electrode substrate and the second electrode substrate (2). The first electrode substrate and the second electrode substrate are laminated so that one surface (21) of the electrode substrate is spaced apart and opposed to each other, and an interval between the both surfaces is configured as the flow path.

  The first electrode is provided on one surface of the first electrode substrate so as to protrude at a protrusion height lower than the distance between the two surfaces, and the second electrode is formed on one surface of the second electrode substrate. The first electrode is protruded at a position away from the first surface at a protruding height lower than the distance between the two surfaces. In the flow path, the side surface along the protruding direction of the first electrode and the second electrode are provided. The first electrode and the second electrode are meshed so that an electrode interval (d1) to which a voltage is applied is formed between the side surfaces of the electrodes along the protruding direction.

  A heating element (30) is provided on at least one of the other surface (12) opposite to the one surface of the first electrode substrate and the other surface (22) opposite to the one surface of the second electrode substrate. It must be placed and the heating element is cooled by EHD fluid. The invention of claim 1 is characterized by these points.

  According to this, since both the first electrode and the second electrode are separately provided on the first electrode substrate and the second electrode substrate which are electrically independent from each other, the conventional electrode substrate As in the case of forming both electrodes, the heat transfer surface does not have to be made of an insulating material. Therefore, both the first and second electrode substrates can be made of a conductive material, and the thermal resistance can be reduced and the cost can be reduced.

  Further, in the present invention, both the first electrode and the second electrode are formed on separate electrode substrates, and an electrode pair is formed by meshing each other. Compared to the case of forming the electrodes, the distance between the electrodes can be increased and the electrode height can be increased in terms of processing.

  Therefore, according to the present invention, an electrode in both the first electrode and the second electrode disposed in the flow path while suppressing an increase in the thermal resistance of the heat transfer surface in the flow path through which the EHD fluid flows. It is possible to realize a fluid device suitable for processing a wide distance or processing a high electrode height.

  In addition, an electric field region where a driving force that causes the flow of the EHD fluid does not act easily occurs at both ends of the surfaces of both electrode substrates that are orthogonal to the flow direction of the EHD fluid in the flow path. The backflow with respect to the normal flow of the fluid tends to occur. In order to solve the problem of the backflow, the present invention according to claim 2 has been created.

  According to a second aspect of the present invention, in the fluid device according to the first aspect, a direction orthogonal to the flow direction of the EHD fluid on one surface of one surface of the first electrode substrate and one surface of the second electrode substrate. At both ends located at, a backflow prevention wall (70) for preventing backflow of EHD fluid is provided.

  According to this, in addition to the effect of the fluid device according to the first aspect, the effect that the back flow of the EHD fluid can be further prevented can be expected.

  In addition, the code | symbol in the bracket | parenthesis of each means described in the claim and this column is an example which shows a corresponding relationship with the specific means as described in embodiment mentioned later.

It is a schematic sectional drawing which shows the fluid apparatus concerning 1st Embodiment of this invention. It is an enlarged view which expands and shows the part of the electrode pair in the fluid apparatus shown by FIG. 1, and is equivalent to the schematic sectional drawing along the dashed-dotted line BB in FIG. FIG. 3 is a schematic cross-sectional view showing the electrode pair in FIG. 2 in a cross-section along the one-dot chain line AA in FIG. 2, It is equivalent. It is a schematic sectional drawing in alignment with the dashed-dotted line CC in FIG. It is a schematic plan view which shows the other example of 1st Embodiment. It is a schematic sectional drawing which shows the other example of 1st Embodiment. It is a schematic sectional drawing which shows one specific example which actualized the heat generating body in FIG. It is a schematic sectional drawing which shows the other example of 1st Embodiment. It is a schematic sectional drawing which shows the fluid apparatus concerning 2nd Embodiment of this invention. It is a schematic sectional drawing which shows the fluid apparatus concerning 3rd Embodiment of this invention. It is a schematic sectional drawing which shows the fluid apparatus concerning 4th Embodiment of this invention, and is equivalent to the schematic sectional drawing along the dashed-dotted line EE in FIG. It is a schematic sectional drawing which shows the electrode pair in FIG. 11 in the cross section along the DD line | wire in FIG.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiments, parts that are the same or equivalent to each other are given the same reference numerals in the drawings in order to simplify the description.

(First embodiment)
A fluid device according to a first embodiment of the present invention will be described with reference to FIGS. This fluid device is mounted on a vehicle such as an automobile and is applied as a device for driving various electronic devices for the vehicle. Specifically, the present invention is applied to a power conversion device such as an inverter in an automobile ECU.

  The fluidic device of this embodiment includes a first electrode substrate 10 and a second electrode substrate 20 that are electrically independent from each other, and a heating element 30 that generates heat during driving or the like. Both the first and second electrode substrates 10 and 20 are made of a plate material made of a conductive material such as Cu or Al, and one of the front and back plate surfaces is on one surface 11 and 21 and the other is on the other surface 12 and 22. It is said.

  Then, the first electrode substrate 10 and the second electrode substrate 20 are laminated so that the one surface 11 of the first electrode substrate 10 and the one surface 21 of the second electrode substrate 20 are opposed to each other. . Thereby, the space between the one surface 11 of the first electrode substrate 10 and the one surface 21 of the second electrode substrate 20 is configured as a flow path 40 through which the EHD fluid 41 flows.

  Here, the two electrode substrates 10 and 20 which are opposed to each other as described above are supported and fixed to each other by, for example, screw tightening or caulking. Although not shown, for example, an insulating member such as rubber or resin for sealing the flow path 40 is provided around the electrode substrates 10 and 20 so that the EHD fluid 41 does not leak. I have to.

  The EHD fluid 41 is supplied into the flow path 40 from an external tank or the like by a pump or the like. In addition, the EHD fluid 41 is not supplied from the outside to the flow path 40, but, for example, the shape in which the EHD fluid 41 circulates in the flow path 40 itself, for example, the path pattern of the flow path 40 has a single annular shape. May be.

  The EHD fluid 41 flows due to the EHD effect, and an electrode pair 50 including a first electrode 50 and a second electrode 60 for expressing the driving force of the flow of the EHD fluid 41 is provided in the flow path 40. , 60 are provided (one or more in this case). That is, by applying a voltage between the first electrode 50 and the second electrode 60, the fluid flow Y1 indicated by the arrow in FIGS. The fluid 41 flows.

  The power supply to the first electrode 50 and the second electrode 60 can be performed by an external power source (not shown) connected to the electrode substrates 10 and 20. Further, the power supply may be performed by using the potential from the heating element 30.

  Here, the first electrode 50 is provided so as to protrude on the one surface 11 of the first electrode substrate 10 with a protrusion height lower than the distance between the one surfaces 11 and 21 of the two electrode substrates 10 and 20. Further, the second electrode 60 has a protruding height lower than the distance between the first surfaces 11 and 21 of the two electrode substrates 10 and 20 at a part of the first surface 21 of the second electrode substrate 20 that is away from the first electrode 50. It is provided so as to protrude.

  Thereby, in the flow path 40, these 1st electrodes 50 and 2nd electrodes 60 are meshed | engaged in the electrically independent state, without mutually contacting. As shown in FIGS. 2 and 3, an electrode interval d <b> 1 where a voltage is applied between the side surface along the protruding direction of the first electrode 50 and the side surface along the protruding direction of the second electrode 60. Is configured.

  Here, the first electrode 50 and the first electrode substrate 10 may be made of the same material or different materials as long as they are conductive materials. In the case of the same material, for example, the first electrode 50 is formed by performing processing such as etching or cutting on the one surface 11 side of the first electrode substrate 10.

  In the case of different materials, the first electrode 50 and the first electrode substrate 10 are both made of different conductive materials, for example, different metals, but the first electrode 50 is welded, soldered, metal-bonded or the like. 50 and the first electrode substrate 10 may be fixed.

  Similarly, the second electrode 60 and the second electrode substrate 20 may be made of the same material or different materials as long as they are conductive materials. The method for forming the electrode 60 is the same as that for the first electrode 50 described above.

  Thus, for the first electrode 50 and the first electrode substrate 10, and the second electrode 60 and the second electrode substrate 20, the electrode and the substrate are integrally formed or separated from each other. Are electrically connected. Therefore, as described above, electric power is supplied from an external power source (not shown) or electric potential using a potential from the heating element through the electrode substrates 10 and 20, and a voltage is applied to the electrode pair. It is like that.

  The EHD fluid 41 used in the present embodiment is an EHD fluid that is biased in the direction from the strong electric field side to the weak electric field side by an EHD phenomenon when an electric field is applied. For example, a normal EHD fluid such as a fluorinate compound is used. Things are used. Further, for example, ECF may be used among EHD fluids.

  As the ECF, for example, as described in Japanese Patent Application Laid-Open Nos. 2000-2222072 and 11-125173, the horizontal axis is the conductivity σ, the vertical axis is the viscosity η, and the conductivity of the fluid at the operating temperature. In the graph showing the relationship between σ and viscosity η, conductivity σ = 4 × 10 −10 S / m, point P expressed by viscosity η = 1 × 100 Pa · s, conductivity σ = 4 × 10 −10 S / m , Point Q represented by viscosity η = 1 × 10 −4 Pa · s, conductivity R σ = 5 × 10 −6 S / m, point R represented by viscosity η = 1 × 10 −4 Pa · s It is possible to use a compound having conductivity σ and viscosity η located inside a right triangle or a mixture of two or more compounds prepared to have conductivity σ and viscosity η located inside the triangle. it can. For example, dibutyldecane-dioate can be used as the ECF. A flame-retardant / non-flammable halogen-containing liquid (fluorine, chlorine, bromine, etc.) can be used as the ECF.

  Further, as shown in FIG. 1, in the fluid device of the present embodiment, heating elements 30 are disposed on the other surface 12 of the first electrode substrate 10 and the other surface 22 of the second electrode substrate 20, respectively. ing. Here, the heating elements 30 are provided on the other surfaces 12 and 22 of the electrode substrates 10 and 20 on the side opposite to the flow path 40, but the arrangement of the heating elements 30 is the first electrode 50. Only the other surface 12 may be sufficient, and only the other surface 22 of the 2nd electrode substrate 20 may be sufficient.

  The heating element 30 is joined to the other surfaces 12 and 22 of the electrode substrates 10 and 20 by, for example, an adhesive or solder. Examples of such a heating element 30 include a mold package having a power element such as an IGBT and a bare chip having a power element.

  Then, heat exchange is performed between the heating element 30 and the EHD fluid 41 flowing in the flow path 40 using the one surface 11 and 21 of each electrode substrate 10 and 20 located in the flow path 40 as a heat transfer surface. The heating element 30 is cooled.

  Here, the driving of the EHD fluid 41 by the electrodes 50 and 60 of the present embodiment will be specifically described. As shown in FIGS. 2 and 3, the first electrode 50 is a pointed electrode whose planar shape seen from the protruding direction becomes narrower in the direction of the fluid flow Y <b> 1 of the EHD fluid 41, and the second electrode 60 is The planar shape is a slit electrode having a slit at a position facing the tip of the pointed electrode.

  As described above, the first electrode 50 and the second electrode 60 are configured as an electrode pair for expressing the driving force that causes the EHD fluid 41 to flow, and this electrode pair is configured as both electrode substrates 10, 20. A plurality are arranged in between. By applying a voltage between each pair of electrodes, the driving force is expressed, and the fluid flow Y1 of the EHD fluid 41 shown in FIGS. 2 and 3 occurs. In FIG. 3, the fluid flow Y1 is shown for one electrode pair, but the same applies to the other electrode pairs.

  Accordingly, in each of the electrode pairs, one of the first electrode 50 and the second electrode 60 is a positive electrode (+ pole) and the other is a negative electrode (−pole). As a result, the first electrode 50 An electric field is applied between the second electrode 60 and the second electrode 60. That is, an electric field is generated in the flow path 40 in which the EHD fluid 41 is accommodated, enclosed, and filled.

  The electric field generated in this way becomes a non-uniform electric field due to the difference in shape between the first electrode 50 that is a pointed electrode and the second electrode 60 that is a slit electrode. More specifically, since both the electrodes 50 and 60 have the shape as described above, the electric field on the first electrode 50 side that is a pointed electrode in the both electrodes 50 and 60 belonging to the same electrode pair. The absolute value increases, and the absolute value of the electric field on the second electrode 60 side, which is a slit electrode, decreases.

  That is, the first electrode 50 is an electrode on the strong electric field side, and the second electrode 60 is an electrode on the weak electric field side. This is because the first electrode 50, which is a pointed electrode, of both electrodes 50, 60 belonging to the same electrode pair becomes an anode and the second electrode 60, which is a slit electrode, becomes a cathode. The same applies to the case where the first electrode 50 is a cathode and the second electrode 60 is a slit electrode.

  When such a non-uniform electric field is generated, a driving force for energizing the EHD fluid 41 is generated due to the EHD phenomenon. This driving force causes the EHD fluid 41 of the present embodiment to flow from the first electrode 50 on the strong electric field side to the second electric field side on the weak electric field side as shown in the flow Y1 in FIGS. It is biased in the direction of the electrode 60.

  In order to urge the EHD fluid 41 from the first electrode 50 on the strong electric field side to the second electrode 60 on the weak electric field side by the EHD phenomenon, the polarity of both electrodes 50 and 60 should be determined as follows: It depends on the type of EHD fluid 41.

  By the way, according to this embodiment, both the electrodes 50 and 60 of the first electrode 50 and the second electrode 60 are separately provided on the first electrode substrate 10 and the second electrode substrate 20 which are electrically independent. ing. Therefore, as in the case where both electrodes are formed on one conventional electrode substrate, the one surface 11, 21 of each electrode substrate 10, 20 that is a heat transfer surface does not have to be made of an insulating material. Therefore, both the first and second electrode substrates 10 and 20 can be made of a conductive material, and thermal resistance can be reduced and cost can be reduced.

  Further, in the present embodiment, both electrodes 50 and 60 are formed on separate electrode substrates 10 and 20, respectively, and an electrode pair is formed by meshing each other, so that both electrodes 50 and 60 are on the same surface of one substrate. Compared to the case of forming the electrodes, the distance between the electrodes 50 and 60 can be increased or the height of the electrodes can be increased.

  Therefore, according to the present embodiment, the first electrode 50 and the second electrode disposed in the flow path 40 while suppressing an increase in the thermal resistance of the heat transfer surface in the flow path 40 through which the EHD fluid 41 flows. A fluid device suitable for processing a large distance between the electrodes of the two electrodes 50, 60 or processing a high electrode height is realized.

  Also, as shown in FIGS. 3 and 4, in the fluid device of the present embodiment, at both ends of the second surface 21 of the second electrode substrate 20 positioned in the direction orthogonal to the direction of the fluid flow Y <b> 1 of the EHD fluid 41. A backflow prevention wall 70 for preventing the backflow Y2 of the EHD fluid 41 is provided.

  Here, as shown in FIGS. 3 and 4, the backflow prevention walls 70 are provided at both ends of the one surface 21 of the second electrode substrate 20 so as to extend in the fluid flow Y1 direction. Here, the backflow prevention wall 70 is formed integrally with the second electrode 60 by etching or the like, and is formed of the same material and the same height as the second electrode 60.

  As a result, there is no gap between the second electrode 60 located on both ends of the second electrode substrate 20 and the backflow prevention wall 70, which is opposite to the fluid flow Y1 in the EHD fluid 41. The flow in the direction, that is, the backflow Y2 is prevented.

  If this backflow prevention wall 70 does not exist, as shown by the broken line arrow in FIG. 3 via the space further outside the second electrode 60 located on both ends of the second electrode substrate 20, Backflow Y2 is likely to occur. However, in this embodiment, the backflow prevention wall 70 prevents the backflow Y2.

  In the case of the first electrode 50 that is a pointed electrode and the second electrode 60 that is a slit electrode as shown in FIG. 3, structurally, the backflow prevention wall 70 is a second electrode that is a slit electrode. It can be formed only on the electrode 60 side, that is, on the one surface 21 side of the second electrode substrate 20, and cannot be formed on the first electrode substrate 10 side.

  However, as in another example shown in FIG. 5, for example, when both the first electrode 50 and the second electrode 60 are shaped like a prism or a cylinder having a rhombus cross section, the first electrode 50. The backflow prevention wall 70 can be formed on the side, that is, the first electrode substrate 10 side. That is, as in the case of this other example, the backflow prevention wall 70 can be provided on one of the first electrode substrate and the second electrode substrate depending on the shape of the electrodes 50 and 60.

  Here, when the backflow prevention wall 70 is made of the same material as the electrode substrate and the electrode on the side where the wall is provided, the backflow prevention wall 70 has the same height as the protruding height of the electrode. On the other hand, the backflow prevention wall 70 may be made of an insulating material different from the electrode substrate or the electrode, for example, a resin formed by coating, curing, or the like. Examples of this resin include polyimide and epoxy resin.

  When such an insulating backflow prevention wall 70 is used, the height of the wall may be the same as that of the electrode, but it is higher than the electrode and functions as a spacer that defines the distance between the electrode substrates 10 and 20. You may make it make it. FIG. 6 shows an example in which a backflow prevention wall 70 made of a resin of a different material from the second electrode 60 is formed on the one surface 21 of the second electrode substrate 20. The height is equivalent to the board interval to define the board interval.

  A specific example of the heating element 30 in FIG. 1 will be described with reference to FIG. A heating element 30 shown in FIG. 7 is configured as a mold package in which a heating element 31 made of a power element such as an IGBT or a MOS transistor is sealed with a molding resin 32.

  In the heating element 30, a part of the lead frame 33 is also sealed with the mold resin 32, and the inner lead in the mold resin 32 and the heating element 31 are connected by the bonding wire 34. Further, here, the surfaces on the other surfaces 12 and 22 side of the electrode substrates 10 and 20 in the heating element 30 are exposed from the mold resin 32 and are in contact with the electrode substrates 10 and 20, thereby ensuring cooling performance.

  Further, as shown in FIG. 2, in the present embodiment, between the protruding tip portion of the first electrode 50 and the one surface 21 of the second electrode substrate 20, and the protruding tip portion of the second electrode 60. And a surface 11 of the first electrode substrate 10 are provided with a gap to ensure insulation.

  On the other hand, as shown in FIG. 8, an insulating resin 80 may be provided in the gap to ensure insulation. Examples of the resin 80 include polyimide and epoxy resin formed by coating, curing, and the like.

(Second Embodiment)
The fluid device according to the second embodiment of the present invention will be described with reference to FIG. 9, focusing on the differences from the first embodiment. In the first embodiment, the electrode substrates 10 and 20 having a cooling function are provided only on one side of the heat generating body 30, and the heat radiation of the heat generating body 30 is a so-called one-surface heat radiation form. On the other hand, the present embodiment provides a so-called double-sided heat radiation form in which heat is radiated from both sides of the heating element 30.

  As shown in FIG. 9, in the present embodiment, the first electrode substrate 10 having the first electrode 50 and the second electrode having the second electrode 60 and facing the first electrode substrate 10. A set with the substrate 20 is defined as one substrate unit 1. This substrate unit 1 is the same as the both electrode substrates 10 and 20, both electrodes 50 and 60, and the flow path 40 shown in the above embodiments in both configuration and operation.

  Two substrate units 1 are provided, and the two substrate units 1 are provided on one side of the heating element 30 (lower side in FIG. 9) and the other side opposite to the one side (in FIG. 9). (Upper side). As a result, the substrate unit 1 on one side of the heating element 30, the heating element 30, and the substrate unit 1 on the other side of the heating element 30 are stacked to form the stacked body 2. Each substrate unit 1 and the heating element 30 are fixed by solder or the like or an adhesive.

  Thus, according to the present embodiment, both-side heat dissipation is possible by cooling with the EHD fluid 41 from one side and the other side of the heating element 30. Here, the heating element 30 is not particularly limited, but in FIG. 9, it is configured as a mold package suitable for double-sided heat dissipation.

  Specifically, as shown in FIG. 9, one surface side of the heating element 31 inside the mold resin 32 is connected to the other surface 22 of the second electrode substrate 20 in the substrate unit 1 on one side via solder or the like. Connected. On the other hand, the other surface side of the heat generating element 31 is connected to the other surface 12 of the first electrode substrate 10 in the substrate unit 1 on the other side via a metal block 35 and solder.

  The metal block 35 functions as a spacer for ensuring the loop height of the bonding wire 34 formed between the lead frame 33 and the heat generating element 31 in the mold resin 32. The metal block 35 is made of, for example, Cu.

  Thus, the heating element 30 according to the present embodiment is thermally connected to the substrate unit 1 on both sides of the heating element 31 so that both sides dissipate heat. Further, in this case, when the heating element 31 has opposite electrical polarity on the front and back sides, the polarities of the electrode substrates 10 and 20 connected on both sides of the heating element 31 can be set as an anode and a cathode, respectively. . In this case, the polarities of the substrate units 1 on one side and the other side of the heating element 30 may correspond to the polarity of the heating element 31 as appropriate.

(Third embodiment)
A fluid device according to a third embodiment of the present invention will be described with reference to FIG. In the present embodiment, a plurality of stacked bodies 2 in the second embodiment are stacked in series.

  Here, as shown in FIG. 10, in the adjacent laminates 2, the substrate unit 1 positioned between the heating element 30 of one laminate 2 and the heating element 30 of the other laminate 2 is It is shared by the adjacent laminates 2.

  In other words, the heating element 30 of one laminated body 2 is connected to the other surface 12 of the first electrode substrate 10 in one substrate unit 1, and the other surface 22 of the second electrode substrate 20 is connected to the other surface 12. The heating element 30 of the laminated body 2 is connected. For example, a plurality of IGBTs constituting the inverter are required, but if such a laminated structure is used, the size can be reduced.

  In this case, actually, a laminated body in which the first electrode substrate 10, the heating element 30, and the second electrode substrate 20 are sequentially laminated is integrated with the mold resin 32 to form one package unit. ing. The configuration of this embodiment is formed by stacking a plurality of the package units.

(Fourth embodiment)
A fluid device according to a fourth embodiment of the present invention will be described with reference to FIGS. This embodiment provides variations in the shapes of both electrodes 50 and 60 as the electrode pair shown in the first embodiment.

  In the first embodiment, the first electrode 50 is a pointed electrode whose tip is a line. However, in the present embodiment, the first electrode 50 has a pointed portion 51 whose tip is a point. It is said that. Here, the pointed portion 51 has a cone shape such as a cone or a pyramid.

  Further, the first electrode 50 is appropriately provided with a through hole 52 for allowing the EHD fluid 41 to flow in the Y1 direction. The second electrode 60 is a slit electrode having a slit 61 at a position facing the sharp tip of the sharpened portion 51.

  Then, the EHD fluid 41 flows through the slit 61 of the second electrode 60 by an electric field directed from the pointed end of the pointed portion 51 toward the second electrode 60. In the present embodiment, by using the point of the sharp part 51 of the first electrode 50 as a point, it is possible to generate a stronger non-uniform electric field compared to the case where the point is a line.

(Other embodiments)
Even when there is no backflow prevention wall 70, the backflow prevention wall 70 may be omitted when the possibility of backflow is low.

  Further, the shape of the first electrode 50 and the second electrode 60 constituting the electrode pair may be any shape as long as it can generate a driving force that causes the EHD fluid 41 to flow. It is not limited. For example, the electrode 50 and 60 may have a configuration in which the electrodes 50 and 60 mesh with each other in a comb shape.

  In addition, the electrode pair including both electrodes 50 and 60 provided in the flow path 40 functions as a pump that expresses a driving force that causes the EHD fluid 41 to flow. You may have an external pump other than an electrode pair which generate | occur | produces a flow. The external pump can be, for example, an electric pump for normal liquid flow, and at this time, the electrode pair can function as an auxiliary pump that adjusts the fluid flow in the flow path 40. Good.

  Further, the present invention is not limited to the above-described embodiment, and can be appropriately changed within the scope described in the claims. The above embodiments are not irrelevant to each other, and can be combined as appropriate unless the combination is clearly impossible, and the above embodiments are not limited to the illustrated examples. Absent. In each of the above-described embodiments, it is needless to say that elements constituting the embodiment are not necessarily essential unless explicitly stated as essential and clearly considered essential in principle. Yes. Further, in each of the above embodiments, when numerical values such as the number, numerical value, quantity, range, etc. of the constituent elements of the embodiment are mentioned, it is clearly limited to a specific number when clearly indicated as essential and in principle. The number is not limited to the specific number except for the case. Further, in each of the above embodiments, when referring to the shape, positional relationship, etc. of the component, etc., the shape, unless otherwise specified and in principle limited to a specific shape, positional relationship, etc. It is not limited to the positional relationship or the like.

DESCRIPTION OF SYMBOLS 10 1st electrode substrate 11 One surface of 1st electrode substrate 12 Other surface of 1st electrode substrate 20 2nd electrode substrate 21 One surface of 2nd electrode substrate 22 Other surface of 2nd electrode substrate 30 Heating element 40 Channel 50 First electrode 60 Second electrode 70 Backflow prevention wall 70
d1 Electrode interval between the first electrode and the second electrode

Claims (4)

A flow path (40) through which an EHD fluid (41) flowing by the EHD effect flows;
A first electrode (50) and a second electrode (60) provided in the flow path,
A fluidic device that causes the EHD fluid to flow in the flow path by applying a voltage between the first electrode and the second electrode;
Both are plate materials made of a conductive material, and include a first electrode substrate (10) and a second electrode substrate (20) that are electrically independent from each other,
The first electrode substrate and the second electrode substrate are laminated so that the one surface (11) of the first electrode substrate and the one surface (21) of the second electrode substrate are spaced apart from each other. , The distance between the two surfaces is configured as the flow path,
The first electrode is provided on one surface of the first electrode substrate so as to protrude at a protrusion height lower than the distance between the two surfaces.
The second electrode is provided at a portion of the one surface of the second electrode substrate that is separated from the first electrode and projecting at a projecting height lower than the distance between the two surfaces.
In the flow path, an electrode interval (d1) to which the voltage is applied is formed between a side surface along the protruding direction of the first electrode and a side surface along the protruding direction of the second electrode. As described above, the first electrode and the second electrode are meshed,
At least one of the other surface (12) opposite to the one surface of the first electrode substrate and the other surface (22) opposite to the one surface of the second electrode substrate has a heating element ( 30) is arranged,
The fluid device, wherein the heating element is cooled by the EHD fluid.   A backflow that prevents backflow of the EHD fluid is provided at both ends of the one surface of the first electrode substrate and the one surface of the second electrode substrate that are orthogonal to the flow direction of the EHD fluid. 2. Fluid device according to claim 1, characterized in that a prevention wall (70) is provided. A set of the first electrode substrate having the first electrode and the second electrode substrate having the second electrode and facing the first electrode substrate is a substrate unit (1). In this case, two board units are provided, and the two board units are arranged separately on one side of the heating element and the other side opposite to the one side, thereby It constitutes a laminate (2) in which the substrate unit on one side, the heating element, and the substrate unit on the other side of the heating element are laminated,
The fluid device according to claim 1 or 2, wherein cooling by the EHD fluid is performed from one side and the other side of the heating element. A plurality of the laminates are provided, and the plurality of laminates are stacked in series.
In the adjacent laminates, the substrate units located between the heating element of one of the laminates and the heating element of the other laminate are shared by the adjacent laminates. The fluidic device according to claim 3.

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