JP7032823B1 - Electrical response fluid pump - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electrically responsive fluid pump capable of stably obtaining a practically sufficient pressure. An electric response fluid pump is provided in a flow path of an electric response fluid formed between a first wall portion forming a first wall surface and a second wall portion forming a second wall surface. And the introduction path provided on the discharge side of the introduction path of the flow path, formed so that the distance between the first wall portion and the second wall portion is narrower than that of the introduction path, and passed through the introduction path. A linear path provided on the introduction path side of the first wall portion and intersecting the flow direction of the electric response fluid and extending in parallel with the first wall surface, and a narrow path for boosting the pressure in the flow process of the electric response fluid. An electrode pair including a first electrode and a linear second electrode provided in parallel with the first electrode on the downstream side of the flow path from the first electrode of the second wall portion. A booster unit comprising the above, and a voltage applying means for applying a voltage to the electrode pair. [Selection diagram] Fig. 1

Description

The present invention relates to an electrically responsive fluid pump utilizing an EHD (Electro Hydro Dynamics Phenomenon) phenomenon generated in an electrically responsive fluid.

Various electric response fluid pumps using the EHD phenomenon have been proposed, and for example, the one disclosed in Patent Document 1 below is known. In this electric response fluid pump, flat plate-shaped first and second electrodes provided in the introduction path of the electric response fluid so as to gradually narrow the interval from the introduction side to the discharge side are provided in the electric response liquid at a predetermined interval. Are placed facing each other.

Then, by applying a DC voltage of several kV to several tens of kV between both electrodes in this state, the liquid flows due to the attractive force generated between the heterocharge layer composed of ions ionized from the liquid and the electrode pair. While utilizing it, the pressure is increased in the flow process of the electric response fluid in the narrow path leading to the first and second electrodes. Since this type of electric response fluid pump utilizes the continuous flow of the electric response fluid, it is possible to realize a low noise pump without pulsation.

Japanese Patent No. 5085978

The conventional electric response fluid pump disclosed in Patent Document 1 can obtain a practically sufficient pressure, but cannot stably obtain the pressure depending on the manufacturing accuracy and the like, and further performance. There was room for improvement.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an electrically responsive fluid pump capable of stably obtaining a practically sufficient pressure.

The electric response fluid pump according to the embodiment of the present invention is provided in the flow path of the electric response fluid formed between the first wall portion forming the first wall surface and the second wall portion forming the second wall surface. The introduction path for introducing the electrical response fluid and the introduction path provided on the discharge side of the introduction path of the flow path are formed so that the distance between the first wall surface and the second wall surface is narrower than that of the introduction path. A narrow path for boosting the pressure of the passed electric response fluid in the flow process, and a line provided on the introduction path side of the first wall portion and intersecting the flow direction of the electric response fluid and extending in parallel with the first wall surface. An electrode including a first electrode having a shape and a second linear electrode provided in parallel with the first electrode on the downstream side of the flow path from the first electrode of the second wall portion. It is characterized by comprising a booster unit having a pair and a voltage applying means for applying a voltage to the electrode pair.

In one embodiment of the present invention, the first electrode is provided so that a part of the outer peripheral surface is exposed in the flow path from the first wall surface.

In another embodiment of the present invention, the second electrode is provided so that a part of the outer peripheral surface from the second wall surface is exposed in the flow path.

In still another embodiment of the present invention, the second wall surface extends in the flow direction of the electrical response fluid, and the first wall surface gradually approaches the second wall surface toward the narrow path in the introduction path. It forms an approaching inclined surface and extends parallel to the second wall surface in the narrow road, and the first electrode is provided on the inclined surface.

In yet another embodiment of the invention, the first electrode is the cathode and the second electrode is the anode.

In still another embodiment of the present invention, a plurality of the booster units are provided in series.

In still another embodiment of the present invention, a plurality of the booster units are provided in parallel.

In still another embodiment of the present invention, the exposed surfaces of the first electrode and the second electrode are curved surfaces.

According to the present invention, a linear first electrode provided on the introduction path side of the first wall portion and extending in parallel with the first wall surface and intersecting the flow direction of the electrical response fluid, and the first wall portion. An electrode pair containing a linear second electrode, which is provided parallel to the first electrode on the downstream side of the flow path of the electrical response fluid, allows the electrical response fluid to be narrowed from the introduction path in the flow path. As the electrical response fluid is sufficiently boosted in the process of moving toward and flowing through the narrow path, the electrode pair can be assembled accurately and easily, and sufficient pressure for practical use is stable. Can be obtained.

It is a figure which shows the EHD pump which concerns on 1st Embodiment of this invention. It is a figure for demonstrating the symmetric equal electric field formed by using a linear electrode pair. It is a figure for demonstrating the unequal electric field formed by the EHD pump. It is a figure for demonstrating the dimension of the main part of the pump. It is a figure which shows the modification 1 of the pump. It is a graph which shows the relationship between the applied voltage and the discharge pressure of the pump. It is a graph which shows the relationship between the applied voltage and the current value of the pump. It is a graph which shows the relationship between the applied voltage and the discharge pressure of the pump. It is a graph which shows the relationship between the applied voltage and the current value of the pump. It is a schematic diagram which shows the pressure measuring system using the same modification 1. FIG. It is a graph which shows the relationship between the applied voltage and the discharge pressure of the pump. It is a graph which shows the relationship between the applied voltage of the pump, and the current consumption value. It is a schematic diagram which shows the PQ measurement system using the same modification 1. FIG. It is a graph which shows the relationship between the discharge pressure and the flow rate of the same modification 1. It is a graph which shows the relationship between the current consumption value and the flow rate of the same modification 1. It is a figure which shows the modification 2 of the pump. It is a figure which shows the EHD pump which concerns on the 2nd Embodiment of this invention. It is a figure which shows the EHD pump which concerns on 3rd Embodiment of this invention. It is a figure which shows the EHD pump which concerns on 4th Embodiment of this invention. It is a figure which shows the EHD pump which concerns on 5th Embodiment of this invention. It is a figure which shows the EHD pump which concerns on the 6th Embodiment of this invention. It is a figure which shows the EHD pump which concerns on 7th Embodiment of this invention. It is a figure which shows the EHD pump which concerns on 8th Embodiment of this invention. It is a figure which shows the EHD pump which concerns on 9th Embodiment of this invention. It is a figure which shows the EHD pump which concerns on 10th Embodiment of this invention. It is a figure which shows the EHD pump which concerns on 11th Embodiment of this invention.

Hereinafter, the electrically responsive fluid pump according to the embodiment of the present invention will be described in detail with reference to the accompanying drawings. However, the following embodiments do not limit the invention according to each claim, and not all combinations of features described in the embodiments are essential for the means for solving the invention. ..

1A and 1B are views showing an EHD pump 1 according to a first embodiment of the present invention, FIG. 1A is a schematic cross-sectional view, FIG. 1B is a perspective view of a main part, and FIG. 1C. ) Is a perspective view in which a part of (b) is cut out. In addition, in FIG. 1 and subsequent drawings, the scale and dimensions of each component may be exaggerated or some components may be omitted.

As shown in FIG. 1A, the EHD pump 1 of the first embodiment is configured to include a step-up unit 100 and a DC power supply 200. As shown in FIG. 1B, the booster unit 100 has, for example, a cylindrical flow tube 101 having a rectangular cross section having a liquid inlet 101a at one end and a liquid discharge port 101b at the other end, and the flow thereof. It includes a cell 102 arranged inside the tube 101.

The upper wall portion 101c and the cell 102 in the drawing of the flow pipe 101 constitute the first wall portion W1. Further, the lower wall portion 101d in the drawing of the flow pipe 101 constitutes the second wall portion W2. The first wall portion W1 and the second wall portion W2 have a first wall surface S1 and a second wall surface S2 facing each other. The cell 102 is formed in a trapezoidal shape protruding downward from the lower surface of the first wall portion W1, for example, the slope 102a is formed obliquely on the introduction port 101a side so as to form a predetermined angle with respect to the second wall surface S2. At the same time, the slope 102b on the discharge port 101b side is formed diagonally with respect to the second wall surface S2 so as to form a predetermined angle in the direction opposite to the slope 102a. Further, the cell 102 forms a predetermined gap between the lower surface 102c and the second wall surface S2.

Then, a flow path F for the electrical response fluid is formed between the first wall surface S1 and the second wall surface S2 inside the flow pipe 101. A liquid introduction path 103 is formed on the introduction port 101a side from the slope 102a of the flow path F. Further, a narrow path 104 is formed between the lower surface 102c of the cell 102 following the introduction path 103 of the flow path F and the second wall surface S2.

A linear first electrode 105 is provided at the slope 102a of the cell 102 constituting the first wall portion W1 or at the connection portion between the slope 102a and the lower surface 102c. Further, a linear second electrode 106 is provided at a position corresponding to a narrow path 104 on the downstream side of the flow path F from the first electrode 105 of the wall portion 101d constituting the second wall portion W2. There is. Here, the term "linear" means various linear forms such as a rod shape, a long shape, and an annular shape.

The first electrode 105 and the second electrode 106 form an electrode pair, intersect with the flow direction of the electrical response fluid, and are formed so as to extend in parallel with the first wall surface S1 and the second wall surface S2. .. The first electrode 105 is provided so that a part of the outer peripheral surface is exposed in the flow path F from the first wall surface S1. The second electrode 106 is provided so that a part of the outer peripheral surface is exposed in the flow path F from the second wall surface S2.

Next, the operating principle of the EHD pump 1 configured in this way will be described.
The EHD pump 1 requires an unequal electric field as a premise. An unequal electric field can be formed by using a pair of flat plates that are not parallel. However, the EHD pump using a flat plate-shaped electrode is difficult in the manufacturing process and expensive. From the viewpoint of manufacturing process and cost, it is conceivable to use a linear electrode pair. For example, as shown in FIG. 2, when a linear electrode pair is used, a symmetric equal electric field potential field is obtained. Since they are formed, the forces applied to the fluid FE by the EHD phenomenon cancel each other out in opposite directions. This causes circulating convection that is meaningless to use as a pumping phenomenon. On the other hand, if the potential field of the unequal electric field can be formed in some way, the EHD phenomenon can be directed.

Therefore, in the present embodiment, as shown in FIG. 3, a protrusion by the cell 102 is provided in the vicinity of the first and second electrodes 105 and 106, and the first electrode 105 is attached to the cell 102 of the first wall portion W1. By arranging the slope 102a and the second electrode 106 at a position downstream of the first electrode 105 on the second wall portion W2, the space in which an unnecessary electric field that gives a momentum in the opposite direction to the liquid molecules exists is present. , I tried to set it so that liquid molecules would not pass through. As described above, in the EHD pump 1 of the present embodiment, by arranging the first and second electrodes 105 and 106 so as to leave only the necessary potential field as much as possible, the potential field and the electric field in which the liquid molecules can be used are arranged. Is made asymmetrical to eliminate the region where the forces are balanced, and the unequal electric field required for the EHD pump 1 is obtained. Further, as will be described in detail later, a high pump pressure can be obtained by setting the exposure amount of the first and second electrodes 105 and 106 to the flow path F to the optimum value.

According to the EHD pump 1 configured in this way, by applying a DC voltage from the DC power supply 200 to the first and second electrodes 105 and 106, the ions ionized from the liquid in the introduction path 103 and the first and first and second electrodes The liquid moves from the introduction path 103 toward the narrow path 104 by the attractive force with the second electrodes 105 and 106. Then, the liquid introduced into the narrow road 104 is boosted and discharged from the discharge port 101b side.

Here, the booster unit 100 can be specifically configured as follows.
First, the applicant applies for the first wall surface S1 and the second wall surface S2 (hereinafter, “wall surface S1”) of the first and second electrodes 105, 106 (hereinafter, may be referred to as “electrodes 105, 106”). And the effect of the degree of exposure (electrode exposure) e from (sometimes referred to as “wall surface S2”) on the EHD phenomenon was verified. That is, as shown in FIG. 4A, the electrodes 105 and 106 of the booster unit 100 were composed of round bar-shaped electrodes having a diameter φ of 1.0 mm. Further, the distance h between the electrodes 105 and 106 was set to 1.0 mm, and the angle θ formed by the line segment representing the distance h with respect to the horizontal reference line (hereinafter referred to as “electrode angle”) θ was set to 30 °.

Further, the length f of the slope 102a of the cell 102 was set to 4.5 mm to 5.0 mm, the flow path length l of the narrow road 104 was set to 2.0 mm, and the gap g was set to 0.5 mm to 0.75 mm. The angle formed by the second wall surface S2 and the slope 102a of the cell 102 is set to be, for example, 30 ° on the introduction port 101a side.

Then, as shown in FIG. 4C, the angle from the central axis of the electrodes 105 and 106 to the line of intersection between the outer peripheral surfaces of the electrodes 105 and 106 and the wall surfaces S1 and S2 is set as η, and the electrodes of the electrodes 105 and 106 are exposed. In order to verify the optimum electrode exposure degree e when the degree e is e = η / 360 × 100 (%), for example, FIG. 5 shows a booster unit 100 configured under conditions in which the electrode exposure degree e is variously changed. As shown in the above, a booster unit 170 provided in a 6-stage series (6 pairs of electrode pairs) was formed. That is, the booster unit 170 has a structure in which six cells 102 equivalent to the cell 102 of the booster unit 100 are provided in series inside the flow pipe 171 as a modification 1 of the EHD pump 1. It is configured to increase the specific discharge pressure. Then, the applied DC voltage is changed from 1 to 10 kV / mm, and hydrofluoroether (HFE-7200 manufactured by Sumitomo 3M Ltd., the same applies hereinafter) is used as the electric response fluid to make the electric response fluid. The discharge pressure was measured by a pressure sensor (not shown).

First, for the first electrode (cathode) 105, the electrode exposure degree e of the second electrode (anode) 106 is fixed at 50.0%, and then condition A (e = 50.0%) and condition B. Measurements were performed under four different electrode exposure degrees e: (e = 33.3%), condition C (e = 16.7%) and condition D (e = 8.3%). A graph of the discharge pressure with respect to the applied voltage in this case is shown in FIG. Similarly, a graph of the current value with respect to the applied voltage is shown in FIG. When referring to the graphs of FIGS. 6 and 7 for the booster unit 100 having a pair of electrode pairs, the X and Y coordinate values of the plots of each graph are divided by 6 (that is, the X and Y / 6 coordinate values). It is applicable by. This also applies to FIGS. 8 and 9 described later. The same applies when other hydrofluoroethers (HFE-7300 manufactured by Sumitomo 3M Co., Ltd.), fluorine-modified silicone oil, silicone oil, DBDN (di-n-butyl dodecanenate), etc. are used as the electrical response fluid. Since the tendency of the above was observed, the description thereof is omitted here.

As is clear from FIG. 6, in the hydrofluoroether fluid used, the pressure increases with the application of voltage, and when the applied voltage is 10 kV / mm when the electrode exposure degree e is the condition C, the highest pressure is obtained. The pressure rose to 23.7 kPa. Further, as shown in FIG. 7, the current value was 20.9 μA at the maximum when the electrode exposure degree e was the condition C, which was not a particularly high value. From these facts, since the electrode exposure degree e of the electrode 105 from which the highest pressure was obtained was 16.7% of the condition C, it was concluded that this condition C is optimal in consideration of the following considerations. rice field.

First, from the viewpoint of activating the EHD phenomenon, the following can be assumed as disadvantages when the electrode exposure degree e is higher than that of the condition C as in the condition A and the condition B. That is, the hydrofluoroether molecule used has the property of being more easily attracted to the anode than the cathode, so if the cathode protrudes significantly into the flow path, it receives electrons from the cathode and tends to move toward the anode. It will interfere with the movement of the (anion). In this way, the cathode that repels the anion narrows the flow path, which is expected to hinder the movement of the liquid molecule (anion), resulting in a low discharge pressure.

On the other hand, as in the case of the condition D, when the electrode exposure degree e is lower than that of the condition C, the following can be assumed. That is, if the electrode exposure degree e of the cathode is low and the electrode area exposed in the flow path is too narrow (too small), the area of the field that provides the electrons that are field-emitted to the liquid molecule is narrow. If the number of electrons provided to the liquid molecule decreases, the frequency of electrophoresis will naturally decrease, and the discharge pressure will decrease. Therefore, it can be said that the condition C in which the balance between the pressure and the current is considered to be the best is the optimum condition for the electrode exposure degree e of the electrode 105.

Regarding the electrode (anode) 106, the electrode exposure degree e of the electrode (cathode) 105 is fixed to 16.7% of the optimum condition, and then the condition E (e = 8.3%) and the condition F (e =). Measurements were performed under four different electrode exposure degrees e: 16.7%), condition G (e = 33.3%) and condition H (e = 50.0%). A graph of the discharge pressure with respect to the applied voltage in this case is shown in FIG. 8, and a graph of the current value with respect to the applied voltage is also shown in FIG.

As is clear from FIG. 8, in the same hydrofluoroether fluid, when the electrode exposure degree e is the condition G and the condition H, the pressure increases with the voltage application, and the applied voltage in the case of the condition H is 10 kV / mm. Occasionally, as the highest pressure, the pressure rose to 23.9 kPa. Further, as shown in FIG. 9, the current value was 31.5 μA at the maximum when the electrode exposure degree e was the condition H, which was not a particularly high value. When the electrode exposure degree e was sufficiently lower than the condition H as in the condition E and the condition F, the electric discharge was performed at a low voltage, and the high voltage could not be applied. From these facts, since the electrode exposure degree e of the electrode 106 from which the highest pressure was obtained was 50.0% of the condition H, it was concluded that this condition H is optimal in consideration of the following considerations. rice field.

First, from the viewpoint of activating the EHD phenomenon, the following can be assumed as disadvantages when the electrode exposure degree e is sufficiently lower than the condition H as in the condition E and the condition F. .. That is, as described above, the hydrofluoroether molecule used is more likely to be attracted to the anode than to the cathode, so that the area of the field that brings electrical attraction to the liquid when the electrode exposure degree e of the anode decreases (anode flow). The area of the electrodes exposed to the road) is reduced. Therefore, the driving force for causing electrophoresis is reduced, and the discharge pressure is reduced.

If the anode is exposed to the flow path by as much as 50.0%, the flow path is considerably narrowed (2/3 of the gap g is the exposed height), and there is a concern that the flow may be hindered. However, considering that the anode has the effect of attracting the anion rather than repelling it, and that the anion in contact with the anode loses its charge and becomes a neutral molecule, the cloning power received is reduced, so it is as liquid as the cathode. It can be said that it does not impair the movement of molecules.

Further, the following can be considered as the cause of the discharge occurring at a low voltage when the electrode exposure degree e is sufficiently low. That is, when the electrode exposure degree e of the anode is low, the moving orbits of the field-emitted electrons emitted from the surface of the cathode and the liquid molecules (anion) receiving the field-emitted electrons are narrowed down. Therefore, even if the total amount (current) of the moving charges is the same, the charge density and current density increase, and avalanche breakdown is likely to occur, resulting in low voltage discharge. It seems that it will happen. Therefore, it can be said that the condition H in which the balance between the pressure and the current is considered to be the best is the optimum condition for the electrode exposure degree e of the electrode 106.

Further, using the booster unit 170 of the modification 1 of the EHD pump 1, for example, the measurement system shown in FIG. 10 was constructed and the pressure was measured. The electrode exposure degree e of the electrode 105 of the booster unit 170 was set to the condition C (e = 16.7%), and the electrode exposure degree e of the electrode 106 was set to the condition H (e = 50.0%). A tank 179 for storing and supplying an electric response fluid via a connecting pipe 2 was connected to the introduction port 101a side of the booster unit 170, and a pressure sensor 178 was connected to the discharge port 101b side via a connecting pipe 3. Then, a tester 177 was interposed between the DC power supply 200 and the booster unit 170, for example, between the electrode 105 and the negative side of the DC power supply 200. In this way, the discharge pressure and the current value of the booster unit 170 were measured.

Then, the applied DC voltage was changed from 1 to 10 kV / mm, and the discharge pressure of the electric response fluid was similarly measured by the pressure sensor 178. A graph of the discharge pressure with respect to the applied voltage in this case is shown in FIG. 11, and a graph of the current consumption value with respect to the applied voltage is also shown in FIG.

As is clear from FIG. 11, in the fluid used, the pressure increased with the application of the voltage, and when the applied voltage was 10 kV / mm, the pressure increased to 24.0 kPa as the highest pressure. Therefore, in the booster unit 100 for one stage constituting the booster unit 170, the highest pressure was 4.0 kPa when the applied voltage was 10 kV / mm. Further, as shown in FIG. 12, the current consumption value was 21 μA at the maximum when the applied voltage was 10 kV / mm, which was not a particularly high value. Therefore, in the booster unit 100 for one stage constituting the booster unit 170, the current consumption value was 3.6 μA when the applied voltage was 10 kV / mm. Based on these facts, the booster unit in which the electrode 105 is set to the electrode exposure degree e under the condition C (e = 16.7%) and the electrode 106 is set to the electrode exposure degree e under the condition H (e = 50.0%). 100 was found to be the most suitable component of the EHD pump 1.

As described above, according to the EHD pump 1 of the first embodiment, in the booster unit 100, the rod-shaped electrode 105 is exposed from the slope 102a so that the electrode exposure degree e is 16.7%, and the rod-shaped electrode is exposed. The 106 is exposed from the second wall surface S2 so that the electrode exposure degree e is 50.0%. Then, the angle formed by the horizontal reference line of the line segment representing the distance h between the electrodes 105 and 106 is set to 30 ° to form the electrode pair. With this structure, the electrode pair can be assembled accurately and easily, and the booster unit 100 capable of sufficiently boosting the fluid in the process of passing through the narrow path 104 can be configured, so that a sufficient pressure for practical use can be obtained. It is possible to realize a stable EHD pump.

Next, a PQ measurement system using the booster unit 170 was configured as shown in FIG. 13, for example. That is, the first pressure sensor 7a was connected to the introduction port 101a side of the booster unit 170 via the connecting pipe 4, and the second pressure sensor 7b was connected to the discharge port 101b side via the connecting pipe 5. Further, a valve 8 as a flow path resistance generator is connected to the branch pipe 4a of the connecting pipe 4, a flow rate sensor 9 is connected to the branch pipe 5a of the connecting pipe 5, and the valve 8 and the flow rate sensor 9 are connected to the connecting pipe 6. Connected with. The supply system of the electrical response fluid is not shown. Then, in the same manner as described above, the tester 177 was interposed between the DC power supply 200 and the booster unit 170. In this way, the discharge pressure and the flow rate of the booster unit 170 were measured.

Further, the DC voltage applied to the booster unit 170 described above is changed from 7.0 to 10 kV / mm, and the electric response fluid made of hydrofluoroether is used to change the discharge pressure of the electric response fluid to the pressure sensors 7a and 7b ( The difference value) and the current were measured by the tester 177. The flow rate (flow rate per unit time of the liquid) was measured by the flow rate sensor 9 while gradually increasing the flow path resistance of the valve 8 applied to the booster unit 170. At the same time, the pressure at that time was also measured by the pressure sensors 7a and 7b. A graph of the PQ characteristics of the discharge pressure and the flow rate in this case is shown in FIG. Further, FIG. 15 shows a graph of the flow rate with respect to the current consumption value.

As is clear from FIG. 14, when the applied voltage is between 7.0 kV / mm and 10 kV / mm, the PQ characteristics of the discharge pressure and the flow rate of the booster unit 170 show almost the same tendency, and in particular, the applied voltage is 10 kV. At / mm, the discharge pressure stably changed from 24.0 kPa to 4.0 kPa so as to support the results of each of the above-mentioned verifications when the flow rate was between 0 and the maximum flow rate of 1550 mL / min. Further, as is clear from FIG. 15, the current consumption value when the applied voltage is 10 kV / mm as the highest applied voltage is 0.021 mA at the maximum, which is not a particularly high value as described above.

FIG. 16 is a diagram showing a modification 2 of the EHD pump 1. As shown in FIG. 16, in the second modification, the booster unit 180 has a cell 102 equivalent to the cell 102 of the booster unit 100 inside the flow tube 181 with the top and bottom turned upside down for each stage, and the electrode 105. , 106 are also different from the booster unit 170 of the first modification in that they are provided in a 6-stage series configuration by exchanging each stage. That is, in the modified example 2, the arrangement of the cell 102 and the electrodes 105 and 106 is changed from the modified example 1 without changing the basic principle of generating pressure. Even if the EHD pump 1 is formed by adopting the booster unit 180 having this configuration, it is possible to obtain the same effect as that of the first embodiment.

17A and 17B are views showing the EHD pump 1A according to the second embodiment of the present invention, FIG. 17A is a plan view with a part cut out, and FIG. 17B is a perspective view of a main part. FIG. (C) is a perspective view in which a part of (b) is cut out. In the following description including FIG. 17, since the same components as those in the first embodiment are designated by the same reference numerals, duplicate description will be omitted below.

As shown in FIG. 17, in the EHD pump 1A according to the second embodiment, the slope 102b on the discharge port 101b side of the cell 102 in the booster unit 100a is formed so as to form a right angle to the side wall of the flow pipe 101. This is different from the EHD pump 1 of the first embodiment. Even with such a configuration, the same effect as that of the first embodiment can be obtained.

FIG. 18 is a diagram showing an EHD pump 1B according to a third embodiment of the present invention, in which FIG. 18A is a plan view with a part cut out, and FIG. 18B is a part of a main part cut off. It is a missing perspective view.
As shown in FIG. 18A, in the third embodiment, one slope 132a and the other slope 132b of the cell 132 arranged inside the flow pipe 131 constituting the booster unit 130 are rod-shaped, respectively. A pair of electrodes is provided.

That is, rod-shaped electrodes 135a and 135b are provided on the slopes 132a and 132b of the cells 132 forming the introduction and discharge passages 133 and 134, respectively, and these electrodes are provided on the inner side wall 131c of the flow pipe 131 constituting the narrow passage 137. Rod-shaped electrodes 136a and 136b are provided so as to face the 135a and 135b so that the line segments representing the distance h form a predetermined angle, for example, 30 ° with respect to the horizontal reference line, respectively. Therefore, the electrodes 135a and 136a form the first electrode pair, and the electrodes 135b and 136b form the second electrode pair. The narrow passage 137 is formed in a gap between the lower surface 132d side of the cell 132 connecting the introduction / discharge passages 133 and 134 and the inner surface 131c of the side wall of the flow pipe 131.

A DC voltage from the DC power supply 200 is selectively applied to the electrodes 135a and 136b and the electrodes 135b and 136b via the changeover switches 201 and 202. According to such a configuration, the operation and effect of the first and second embodiments can be obtained, and the flow direction of the fluid can be switched by switching the changeover switches 201 and 202.

FIG. 19 is a diagram showing an EHD pump 1C according to a fourth embodiment of the present invention, in which FIG. 19A is a plan view with a part cut out, and FIG. It is a missing perspective view.
As shown in FIG. 19A, in the fourth embodiment, the cell 142 arranged inside the flow pipe 141 constituting the booster unit 140 further flows the fluid flow through the cell 132 in the third embodiment. The long side surfaces 132c are brought into contact with each other in a direction orthogonal to the direction of the above and arranged symmetrically.

Further, as shown in FIG. 19B, rod-shaped electrodes 135a and 135b are provided on the end faces 142a and 142b of the cells 142 forming the introduction discharge passages 143 and 144 in the orthogonal directions, respectively, and the narrow passages 137, On the inner surface 141c of the side wall of the flow tube 141 constituting the 138, the line segments representing the distances h from the electrodes 135a and 135b are formed at a predetermined angle, for example, 30 ° with respect to the horizontal reference line. Rod-shaped electrodes 136a and 136b arranged opposite to each other in the orthogonal direction are provided, respectively.

As a result, both ends of the cell 142 in the direction of fluid flow are formed by two surfaces having an acute angle of 30 °, and the end faces 142a and 142b on both sides of each of these two ends and the flow facing them. First and second introduction / discharge passages 143 and 144 are formed between the inner surfaces 141c of both side walls of the pipe 141. Narrow paths 137 and 138 are formed in the gaps between the short side surface 142d side of the cell 142 connecting the introduction discharge passages 143 and 144 and the side wall inner surface 141c of the flow pipe 141, respectively.

Also in this fourth embodiment, as in the third embodiment, the DC voltage from the DC power supply 200 is selectively applied to the electrodes 135a, 136a and the electrodes 135b, 136b via the changeover switches 201 and 202. It is designed to be applied, which makes it possible to switch the flow direction of the fluid. With such a configuration, it is possible to obtain the same effect as that of the third embodiment, and since two narrow roads 137 and 138 can be provided in a small space, the flow rate can be further increased.

FIG. 20 is a diagram showing an EHD pump 1D according to a fifth embodiment of the present invention.
As shown in FIG. 20, the booster unit 150 in the EHD pump 1D of the fifth embodiment is formed by arranging a plurality of stages (for example, three stages) of the booster units 100a of the second embodiment in series. Inside the flow pipe 151, a plurality of rows of cells 102 in the booster unit 100a of the first embodiment are directly arranged. Further, a DC voltage is applied to the electrodes 105 and 106 of each stage from the DC power supply 200 via the switch 203. If the booster unit 150 is configured by connecting a plurality of booster units 100 in series in multiple stages in this way, it is possible to obtain a higher pressure than that of the first embodiment.

FIG. 21 is a diagram showing an EHD pump 1E according to a sixth embodiment of the present invention.
As shown in FIG. 21, the booster unit 160 in the EHD pump 1E of the sixth embodiment is formed by arranging a plurality (for example, three) of the booster units 100a of the second embodiment in parallel. Inside the flow pipe 161, a plurality of cells 102 in the booster unit 100a of the second embodiment are arranged in parallel. Further, a DC voltage is applied to the electrodes 105 and 106 in each row from the DC power supply 200 via the switch 203. By connecting the booster unit 160 in parallel to the plurality of booster units 100 in this way, it is possible to increase the flow rate as compared with one booster unit 100.

22 is a view showing the EHD pump 1F according to the seventh embodiment of the present invention, FIG. 22A is a plan view with a part cut out, and FIG. 22B is a perspective view as well.
As shown in FIG. 22A, the seventh embodiment is an example in which the booster units 140 of the fourth embodiment shown in FIG. 19 are arranged in series in a plurality of stages.

In the pump case 1101, four grooves 1102a to 1102d are formed in parallel. For example, a liquid inlet (or discharge port) 1103 is provided on one end side of the first-stage groove 1102a, and the fourth-stage groove 1102d is provided. A liquid discharge port (or introduction port) 1104 is provided on one end side of the above. The other end side of the first stage groove 1102a and the second stage groove 1102b, and the other end side of the third stage groove 1102c and the fourth stage groove 1102d are connected by a U-shaped groove 1105, respectively. Further, one end side of the second-stage groove 1102b and the third-stage groove 1102c is connected by a U-shaped groove 1106. As a result, the grooves 1102a to 1102d are connected in series. In each of these grooves 1102a to 1102d, the cell 142 and the electrodes 135a and 135b and the electrodes 136a and 136b according to the fourth embodiment are arranged in series in multiple stages. A DC voltage from the DC power supply 200 is selectively applied to each of the electrodes 135a and 136b and each of the electrodes 135b and 136b via the changeover switches 201 and 202, whereby the flow direction of the fluid is changed. Can be switched. According to the structure of the seventh embodiment, the booster units 140 can be arranged in a sufficient number of stages in a small space to secure a sufficient distance of the flow path, so that a higher pressure can be obtained. Become.

FIG. 23 is a view showing a main part of the EHD pump according to the eighth embodiment of the present invention, and is a perspective view with a part cut out.
As shown in FIG. 23, in the eighth embodiment, the cell 1112 in which a cone and a cylinder are connected to the inside of the cylindrical flow tube 1111 and the cell 1112 and the flow tube formed in an annular shape (donut shape) are formed. The booster unit 1110 is formed by coaxially arranging the electrodes 1115 and 1116 provided on the 1111 with a part of the surface exposed.

According to the configuration of the booster unit 1110 of the eighth embodiment, since the electrodes 1115 and 1116 and their peripheral shapes form a circular curved surface, the utilization efficiency in the circumferential direction is improved and more efficient boosting is possible. become. Regarding the holding of the cell 1112, a part of the cell 1112 may be connected to the flow tube 1111 in the circumferential direction, or the central portion of the shaft may be extended to connect to the part of the flow tube 1111.

FIG. 24 is a view showing a main part of the EHD pump according to the ninth embodiment of the present invention, and is a perspective view with a part cut out.
As shown in FIG. 24, in the ninth embodiment, a cell 1122 in which a cone is coupled to the inside of the cylindrical flow tube 1121 also on the downstream side of the cell 1112 of the eighth embodiment shown in FIG. 23 is provided. By coaxially arranging the annular electrodes 1115a and 1115b in the cell 1122 and in the flow tube 1121 of the electrodes 1116a and 1116b so that a part of the surface is exposed, the booster unit 1120 is provided. Is a bidirectional type.

Note that FIG. 25 shows an example in which such booster units 1120 are arranged in a plurality of stages, and FIG. 26 shows an example in which a plurality of booster units 1120 are provided in parallel. The electrodes 1115a, 1116a and the electrodes 1115b, 1116b are configured so that the DC voltage from the DC power supply 200 is selectively applied via the changeover switches 201, 202, and the flow direction of the fluid is switched. Can be done.

As described above, according to each of the above-described embodiments, the rod-shaped electrodes having a part of the outer peripheral surface exposed in the road are arranged so as to form a predetermined angle with respect to the horizontal reference line, and the electrode pairs are arranged. Since it is configured, the fluid can be sufficiently boosted in the process of moving from the introduction path toward the narrow path and flowing through the narrow path. Therefore, it is possible to assemble the electrode pair in the EHD pump with high accuracy and easily, and it is possible to stably obtain a practically sufficient pressure.

Although some embodiments of the present invention have been described above, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other embodiments, and various omissions, replacements, and changes can be made without departing from the gist of the invention. These embodiments and variations thereof are included in the scope and gist of the invention, and are also included in the scope of the invention described in the claims and the equivalent scope thereof.

The EHD pumps of the various examples described above can be applied to various applications such as hydrostatic bearings, fluid bearings, power of robot arms, and cooling in a closed space.

100 Booster unit 101 Flow pipe 102 Cell 103 Introductory path 104 Narrow path 105 First electrode 106 Second electrode 200 DC power supply 133,134 Introductory discharge path

Claims (7)

An introduction path provided in the flow path of the electric response fluid formed between the first wall portion forming the first wall surface and the second wall portion forming the second wall surface and introducing the electric response fluid.
It has a slope that is arranged in the flow path and that follows the introduction path of the flow path and approaches the second wall surface as the distance from the introduction path increases, and a lower surface that follows the slope and extends in parallel with the second wall surface. And the cell that forms a narrow road between the second wall surface and
A linear first electrode provided at the slope or a connection portion between the slope and the lower surface and extending in parallel with the first wall surface and intersecting the flow direction of the electrical response fluid, and the first one. An electrode pair including a linear second electrode provided in parallel with the first electrode at a position corresponding to the narrow path downstream of the flow path from the electrode.
With a booster unit,
An electrical response fluid pump comprising: a voltage applying means for applying a voltage to the electrode pair. The electric response fluid pump according to claim 1, wherein the first electrode is provided so that a part of the outer peripheral surface from the slope is exposed in the flow path. The electric response fluid pump according to claim 1 or 2, wherein the second electrode is provided so that a part of the outer peripheral surface from the second wall surface is exposed in the flow path. The electrical response fluid pump according to any one of claims 1 to 3 , wherein the first electrode is a cathode and the second electrode is an anode. The electric response fluid pump according to any one of claims 1 to 4 , wherein the booster unit is provided in series. The electric response fluid pump according to any one of claims 1 to 4 , wherein the booster unit is provided in parallel. The electrical response fluid pump according to any one of claims 1 to 6 , wherein the exposed surfaces of the first electrode and the second electrode are curved surfaces.

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