JP2016086161A5 - - Google Patents

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Publication number
JP2016086161A5
JP2016086161A5 JP2015205143A JP2015205143A JP2016086161A5 JP 2016086161 A5 JP2016086161 A5 JP 2016086161A5 JP 2015205143 A JP2015205143 A JP 2015205143A JP 2015205143 A JP2015205143 A JP 2015205143A JP 2016086161 A5 JP2016086161 A5 JP 2016086161A5
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JP
Japan
Prior art keywords
wafer
buffer
purge gas
support
buffer according
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Application number
JP2015205143A
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English (en)
Japanese (ja)
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JP6590632B2 (ja
JP2016086161A (ja
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Publication date
Priority claimed from US14/523,122 external-priority patent/US9881826B2/en
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Publication of JP2016086161A publication Critical patent/JP2016086161A/ja
Publication of JP2016086161A5 publication Critical patent/JP2016086161A5/ja
Application granted granted Critical
Publication of JP6590632B2 publication Critical patent/JP6590632B2/ja
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JP2015205143A 2014-10-24 2015-10-19 排出流の方向が単一のバッファステーション Active JP6590632B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/523,122 US9881826B2 (en) 2014-10-24 2014-10-24 Buffer station with single exit-flow direction
US14/523,122 2014-10-24

Publications (3)

Publication Number Publication Date
JP2016086161A JP2016086161A (ja) 2016-05-19
JP2016086161A5 true JP2016086161A5 (https=) 2018-12-27
JP6590632B2 JP6590632B2 (ja) 2019-10-16

Family

ID=55792562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015205143A Active JP6590632B2 (ja) 2014-10-24 2015-10-19 排出流の方向が単一のバッファステーション

Country Status (4)

Country Link
US (2) US9881826B2 (https=)
JP (1) JP6590632B2 (https=)
KR (1) KR102433494B1 (https=)
TW (1) TWI682482B (https=)

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