JP2016084546A - Position sensor roll - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a position sensor roll which is built into a vacuum chamber of a vacuum film deposition device, which accurately measures a position of each end part in both ends in a width direction of a long resin film 13, and a position of each end part in both ends in a width direction of a thin film formed on the long resin film.SOLUTION: A rear feel roll 12 (a position sensor roll 12) arranged in a downstream side of a cooling can roll 10 provided in the vacuum chamber has a cylindrical body with a deposition face contacting an outer peripheral face, a pair of openings (slits) 14 and 15 provided in a position corresponding to near both ends in a width direction of the film in the outer peripheral face of the cylindrical body, and a sensor head having a light emission part provided in a part corresponding to the slit which emits light to the slit in the cylindrical body, and a light receiving part to which reflection light from the slit is incident.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a vacuum film forming apparatus for forming a film such as sputtering by winding a long resin film conveyed by a roll-to-roll method in a vacuum chamber around a cooling can roll outer peripheral surface. The present invention relates to a position sensor roll which is incorporated in a vacuum chamber of an apparatus and can detect a shift in a width direction of a long resin film during film formation and a position shift in a film formation area.

  Flexible wiring boards are used in liquid crystal panels, notebook computers, digital cameras, mobile phones, and the like. The flexible wiring board is manufactured from a heat-resistant resin film with a metal film in which a metal film is formed on one side or both sides of a heat-resistant resin film. In recent years, wiring patterns formed on flexible wiring boards have become increasingly finer and denser, and it has become important that the heat-resistant resin film with metal film itself is smooth and free from wrinkles.

  As a manufacturing method of this kind of heat-resistant resin film with a metal film, a method of manufacturing by attaching a metal foil to a heat-resistant resin film with an adhesive (referred to as a manufacturing method of a three-layer substrate), heat-resistant to the metal foil By coating with a conductive resin solution and drying to manufacture (called casting method), dry plating method (vacuum film forming method) or a combination of dry plating method (vacuum film forming method) and wet plating method A method for producing a metal film on a heat-resistant resin film (referred to as a metallizing method) has been conventionally known. Further, the dry plating method (vacuum film forming method) in the metalizing method includes a vacuum deposition method, a sputtering method, an ion plating method, an ion beam sputtering method and the like.

  Regarding the metallizing method, Patent Document 1 discloses a method in which chromium is sputtered on a polyimide insulating layer and then copper is sputtered to form a conductor layer on the polyimide insulating layer. In Patent Document 2, a first metal thin film formed by sputtering using a copper nickel alloy as a target and a second metal thin film formed by sputtering using copper as a target are laminated on a polyimide film in this order. A flexible circuit board material (that is, a copper-clad laminated resin film substrate) is disclosed.

  Note that when a heat-resistant resin film with a metal film (hereinafter, may be abbreviated as a resin film with a metal film) is manufactured by vacuum film formation on a heat-resistant resin film such as a polyimide film, a sputtering web coater is used. It is common. Hereinafter, this type of sputtering web coater will be briefly described with reference to FIG.

  A sputtering web coater 50 includes an unwinding roll 51 for unwinding a long heat-resistant resin film (hereinafter abbreviated as a long resin film) 52 as shown in FIG. A take-up roll 64 for taking up the length resin film 52, and a cooling can roll 56 provided between the take-out roll 51 and the take-up roll 64 and having a temperature-controlled refrigerant circulating therein and rotated by a motor. A motor-driven front feed roll 55 that is provided on the upstream side of the cooling can roll 56 and carries the long resin film 52 supplied from the unwinding roll 51 to the cooling can roll 56, and on the downstream side of the cooling can roll 56. A motor-driven post-feed roller that feeds the long resin film 52 provided and fed from the cooling can roll 56 to the take-up roll 64 side. The magnetron sputtering cathodes 57, 58, 59, and 60 are disposed on the opposite side of the cooling can roll 56 along the vicinity of the outer peripheral surface of the cooling can roll 56 as film forming means. Is provided.

  Further, on the upstream conveyance path from the unwinding roll 51 to the cooling can roll 56, a free roll 53 for guiding the long resin film 52, a tension sensor roll 54 for measuring the tension of the long resin film 52, The front feed rolls 55 are respectively arranged (these rolls may be referred to as upstream roll groups hereinafter) and adjusted so that the peripheral speed of the motor-driven cooling can roll 56 is slow. The long resin film 52 sent out from the tension sensor roll 54 by the action of the front feed roll 55 is brought into close contact with the outer peripheral surface of the cooling can roll 56 and conveyed.

  In addition, the downstream feed roll 61, the tension sensor roll 62 for measuring the tension of the long resin film 52, and the long resin film 52 are also guided on the downstream conveyance path from the cooling can roll 56 to the take-up roll 64. Each of these free rolls 63 is arranged (these rolls may be referred to as downstream roll groups hereinafter) and is adjusted so that the peripheral speed thereof is the same or faster than the motor-driven cooling can roll 56. After that, the long resin film 52 is discharged from the cooling can roll 56 toward the winding roll 64 by the action of the feed roll 61.

  The illustrated sputtering web coater incorporates a motor-driven front feed roll 55 and a rear feed roll 61, respectively. However, the front feed roll 55 and the rear feed roll 61 are not necessarily constituted by a drive roll. May be constituted by a free roll or a tension sensor roll.

  The unwinding roll 51 and the winding roll 64 are configured so that the tension balance of the long resin film 52 is maintained by torque control using a powder clutch or the like. Further, the long resin film 52 is unwound from the unwinding roll 51 by the rotation of the motor-driven cooling can roll 56 and the action of the motor-driven front feed roll 55 and the rear feed roll 61 that rotate in conjunction with the rotation. It is wound around the winding roll 64.

In sputtering film formation, the pressure in the reduced pressure chamber (vacuum chamber) of the sputtering web coater 50 is reduced to an ultimate pressure of about 10 ⁻⁴ Pa, and then the pressure is adjusted to about 0.1 to 10 Pa by introducing a sputtering gas. . A known gas such as argon is used as the sputtering gas, and a gas such as oxygen is further added depending on the purpose. The shape and material of the sputtering web coater 50 are not particularly limited as long as they can withstand a reduced pressure state, and various types are used. Moreover, in order to maintain the decompressed state in the decompression chamber (vacuum chamber) in the sputtering web coater 50, the sputtering web coater 50 is provided with various devices such as a dry pump, a turbo molecular pump, and a cryocoil (not shown). .

  By the way, in the above metallizing method for producing a long heat-resistant resin film with a metal film (long resin film with a metal film) by combining a dry plating method (vacuum film forming method) and a wet plating method, When a metal film is formed over the entire surface of the long resin film including both ends in the width direction of the long resin film by the vacuum film formation method, the electrical contact with the back surface of the long resin film is applied when wet plating is applied to this metal film. Since there is a concern about a short circuit, an undeposited area called a bare area may be provided on both ends of the long resin film in the width direction. This bare area (undeposited area) is wound around a cooling can roll. It is formed by interposing a shielding mask for regulating the film formation region between the long resin film to be formed and the sputtering target as the film forming means. Specifically, as shown in FIGS. 2A and 2B, shielding that regulates a film formation region between the long resin film 101 wound around the outer peripheral surface of the cooling can roll 100 and the sputtering target 106. With the mask 102 interposed, bare areas (non-deposition regions) 103 and 104 are formed on both ends in the width direction of the long resin film 101 as shown in FIG.

  In order to continuously form bare areas (non-deposition regions) 103 and 104 having the same or substantially the same width dimension on both ends in the width direction of the long resin film 101, the conveyance line of the long resin film 101 is designated at a specified position. It is necessary to accurately set the positions of the shielding mask 102 that forms the bare area (non-deposition region), respectively, with reference to 57, 58, 59, and 60 in FIG. As shown, since a plurality of sputtering targets are usually arranged along the vicinity of the outer peripheral surface of the cooling can roll 56, it is necessary to accurately align the positions of the shielding masks. However, in the vacuum chamber during film formation, the shielding mask and the long resin film are exposed to a higher temperature than in non-film formation. Therefore, in order to continuously form bare areas (non-deposition regions) having the same or substantially the same width dimension on both ends in the width direction of the long resin film, the width of the long resin film 101 during conveyance Each end position at both ends in the direction and each end position at both ends in the width direction of the metal film or the like formed on the long resin film 101 are measured, and film formation is performed while correcting the transport line and the position of the shielding mask. Must be performed.

  And as a measuring method for measuring the width direction end portion position of the long resin film, conventionally, a web edge detecting device including a light projecting portion and a light receiving portion described in Patent Literature 3 and Patent Literature 4 is known. . That is, the web edge detection device is configured so that the main body of the device having a substantially U-shaped cross section from above and below the web edge with respect to the web being transferred that is not in contact with the outer peripheral surface of the transport roll, the guide roll, or the like. It arrange | positions so that it may pinch | interpose, light is irradiated toward a web edge from a light projection part, and the optical signal through a web edge is detected by a light-receiving part, and the edge position of a web is measured.

  However, the web edge detection devices described in Patent Document 3 and Patent Document 4 have a conveyance roll and a guide roll due to a structural limitation that the apparatus body having a substantially U-shaped cross section is sandwiched from above and below the web edge. Since it becomes a device that measures the web being transferred that is not in contact with the outer peripheral surface, such as a long heat-resistant resin film with a thin film thickness, the width direction end of the film is There has been a problem that it is difficult to perform accurate position measurement due to curling or vibration of the film during film conveyance.

Japanese Patent Laid-Open No. 2-98994 (see claims) Japanese Patent No. 3447070 (see paragraph 0008) Japanese Utility Model Publication No. 62-147646 (see FIG. 1) Japanese Utility Model Publication No. 62-2558 (see FIG. 1)

  In order to reduce measurement errors caused by curling at the width direction end of thin heat-resistant resin film or film vibration during film transport, on the outer peripheral surface of transport roll, guide roll, etc. It is desirable to perform the above measurement. That is, when a thin heat-resistant resin film is transported on the outer peripheral surface of a transport roll or the like, the heat-resistant resin film is in close contact with the outer peripheral surface of a transport roll or the like, so curling on the width direction end side hardly occurs. Moreover, it is because there is little vibration of the film at the time of film conveyance. And light is irradiated to the thin heat-resistant resin film conveyed on the outer peripheral surface such as a conveyance roll, the continuous reflectance of the film is measured, or the camera image is analyzed. It is possible to accurately measure the position and the end position in the width direction of a thin film such as a formed metal film.

  By the way, in the sputtering web coater shown in FIG. 1, when performing the correction of the transport line and the position of the shielding mask, etc., immediately after the formation of a thin film such as a metal film, measurement of each end position at both ends in the width direction is performed. It is desirable in terms of accuracy to promptly perform the correction based on the measured data. For that purpose, the measurement of each end position at both ends in the width direction of the thin film such as the metal film is promptly performed on the feed roll 61 provided at the position closest to the cooling can roll 56 where the thin film such as the metal film is formed. There is a need.

  However, as can be seen from the structure of the sputtering web coater shown in FIG. 1, a thin film such as a metal film formed on the surface side of the long resin film 52 wound around the cooling can roll 56 is in the immediate vicinity of the cooling can roll 56. The positional relationship existing on the inner side with respect to the rear feed roll 61 provided at the position (that is, the positional relationship where the thin film forming surface of the long resin film 52 is in contact with the outer peripheral surface of the rear feed roll 61). Since the formation surface is not exposed on the surface side, the end position of the bare area (non-deposition region) is measured from the outside of the roll with respect to the long resin film 52 existing on the rear feed roll 61, or the long resin film 52 It is structurally impossible to measure the end position of a thin film such as a metal film formed on the surface.

  In the tension sensor roll 62 of the downstream roll group disposed downstream from the rear feed roll 61, the positional relationship (long) where the thin film forming surface of the long resin film 52 does not contact the outer peripheral surface of the tension sensor roll 62. Since the back surface side of the length resin film 52 is in contact with the outer peripheral surface of the tension sensor roll 62 and the thin film forming surface is exposed to the front surface side), the long resin film 52 existing on the tension sensor roll 62 is From the outside of the roll, it is possible to measure the end position of the bare area (non-deposition region) or the end position of a thin film such as a metal film formed on the surface of the long resin film 52. However, as the distance from the cooling can roll 56 increases, the timing for measuring the end position is delayed, and accordingly, the timing for performing the above-described correction of the conveyance line, the correction of the position of the shielding mask, and the like is also delayed.

  The present invention has been made paying attention to such problems, and the problem is that each end position at both ends in the width direction of the long resin film is incorporated into the vacuum chamber of the vacuum film forming apparatus. And each end position at both ends in the width direction of the thin film formed on the long resin film can be accurately measured, and each end position at both ends in the width direction with respect to the long resin film immediately after the thin film is formed. The object is to provide a position sensor roll capable of measurement.

That is, the invention according to claim 1
Each end position at both ends in the width direction of the long resin film incorporated in the vacuum chamber of the vacuum film forming apparatus and formed with the thin film and each end position at both ends in the width direction of the thin film formed on the long resin film In the position sensor roll to detect,
A cylindrical main body provided in contact with the thin film forming surface of the long resin film and rotatably provided, and a portion corresponding to the vicinity of both ends in the width direction of the long resin film on the outer peripheral surface of the cylindrical main body. A sensor head having at least a pair of opening portions, a light emitting portion that is provided in a portion corresponding to the opening portion in the cylindrical main body and that emits light toward the opening portion, and a light receiving portion into which reflected light from the opening portion is incident It is composed of and
The invention according to claim 2
The position sensor roll according to claim 1,
The vacuum film forming apparatus is provided with an unwinding roll for unwinding a long resin film, a winding roll for winding the long resin film, and a cooling can which is provided between the unwinding roll and the winding roll and is driven to rotate. A plurality of upstream and downstream roll groups provided between the roll, the cooling can roll and the unwinding roll, and between the cooling can roll and the winding roll, and along the vicinity of the outer peripheral surface of the cooling can roll A film forming means for forming a thin film on the surface side of the long resin film which is provided and is carried into the cooling can roll through the upstream roll group and wound around the outer peripheral surface of the cooling can roll; and the cooling can roll The thin film formation region in the long resin film provided between the film forming means and the film forming means is regulated so as to extend in the length direction of the long resin film on both ends in the width direction of the long resin film. A shielding mask for forming a deposition region, characterized in that it comprises a vacuum chamber.

Next, the invention according to claim 3 is
The position sensor roll according to claim 2,
It is constituted by a post-feed roll that is provided in the vicinity of the cooling can roll and feeds the long resin film sent out from the cooling can roll to the winding roll side,
The invention according to claim 4
In the position sensor roll according to any one of claims 1 to 3,
The cylindrical main body is rotatably supported by a fixed shaft, and the sensor head is fixed to the fixed shaft or an attachment member provided on the fixed shaft,
The invention according to claim 5
In the position sensor roll according to any one of claims 1 to 4,
The light emitting part of the sensor head is configured by the light emitting optical fiber connected to the light source with the tip directed toward the opening, and the sensor head is configured with the light receiving optical fiber connected to the light receiving element with the tip directed toward the opening. The light receiving unit is configured,
The invention according to claim 6
The position sensor roll according to claim 5,
The light emitting portion and the light receiving portion of the sensor head are configured by combining two or more sets of fiber bundles formed by bundling the light emitting optical fiber and the light receiving optical fiber,
The invention according to claim 7 provides:
The position sensor roll according to claim 6,
The sensor head is composed of a box-shaped case having a rectangular opening, a plurality of fiber bundles arranged in a staggered manner in the box-shaped case, and a microlens attached to the tip of each fiber bundle. It is characterized by
The invention according to claim 8 provides:
The position sensor roll according to claim 5,
A box-shaped case having a rectangular opening, a light-emitting optical fiber group and a light-receiving optical fiber group arranged in parallel to each other in the length direction in the box-shaped case, and the opening of the box-shaped case The sensor head is composed of a cylindrical lens attached to the lens.

  A position sensor roll according to the present invention incorporated in a vacuum chamber of a vacuum film-forming apparatus includes a cylindrical main body that is provided so that an outer peripheral surface is in contact with a thin film forming surface of a long resin film and is rotatable, and an outer peripheral surface of the cylindrical main body And at least a pair of openings provided in the portions corresponding to the vicinity of both ends in the width direction of the long resin film, and light emission that is provided in the portions corresponding to the openings in the cylindrical main body and emits light toward the openings And a sensor head having a light receiving portion to which reflected light from the opening is incident, and therefore, each end portion position and the long resin at both ends in the width direction of the long resin film conveyed on the position sensor roll This has the effect of being able to accurately measure each end position at both ends in the width direction of the thin film formed on the film.

  In particular, immediately after a thin film is formed by configuring the position sensor roll with a feed roll that is provided in the vicinity of the cooling can roll and feeds the long resin film fed from the cooling can roll to the take-up roll side. With respect to the long resin film, the end positions at both ends in the width direction of the thin film can be quickly measured.

Structure explanatory drawing of a vacuum film-forming apparatus (sputtering web coater). FIG. 2 (A) is formed on both ends in the width direction of the long resin film by interposing a shielding mask for regulating the film formation region between the long resin film wound around the outer peripheral surface of the cooling can roll and the sputtering target. FIG. 2B is a schematic cross-sectional explanatory view of a bare area (non-deposition region) to be performed. The schematic perspective view which shows the principal part (a cooling can roll, a front feed roll, and a back feed roll) of the vacuum film-forming apparatus which concerns on embodiment which the position sensor roll was comprised by the back feed roll. The schematic plan view which shows the relationship between the position sensor roll of the vacuum film-forming apparatus which concerns on embodiment, and the elongate resin film conveyed on this roll. In the vacuum film forming apparatus according to the embodiment, the cylindrical body of the position sensor roll is rotatably supported by the fixed shaft, and the sensor head of the position sensor roll is fixed to the mounting member provided on the fixed shaft. FIG. FIG. 6A is composed of a box-shaped case having a rectangular opening, a plurality of fiber bundles arranged in a staggered manner in the box-shaped case, and a microlens attached to the tip of each fiber bundle. FIG. 6B is a plan view of the sensor head with the microlens omitted, and FIG. 6C is a right side view of the sensor head. FIG. 7A shows a box-type case having a rectangular open portion, a light-emitting optical fiber group arranged in parallel with each other in the length direction in the box-type case, and a light-receiving optical fiber group and the box-type. FIG. 7B is a plan view of the sensor head in which the illustration of the cylindrical head lens is omitted, and FIG. 7C is a front view of the sensor head configured with the cylindrical lens attached to the open portion of the case. The right side view of a sensor head. A sensor head having a fiber bundle group formed by bundling a light-emitting optical fiber and a light-receiving optical fiber, an optical amplifier connected to each fiber bundle and including a light source and a light-receiving element, and a signal line connected to each optical amplifier FIG. Light emitting optical fiber group and light receiving optical fiber group arranged in parallel to each other, a light source connected to each light emitting optical fiber, an optical amplifier connected to each light receiving optical fiber and including a light receiving element, and each light FIG. 6 is a configuration explanatory diagram of a sensor head having a signal line connected to an amplifier. FIG. 10A is an explanatory view showing the positional relationship between a pair of openings provided in the position sensor roll and both ends in the width direction of the long resin film, and FIG. 10B is a long resin on which a thin film is formed. Explanatory drawing which shows the schematic cross section of the left side edge part located in the conveyance direction left side in a film, and the reflected light intensity from the said left side edge part, FIG.10 (C) is a position in the conveyance direction right side in the long resin film in which the thin film was formed. Explanatory drawing which shows the schematic cross section of the right side edge part to perform, and the reflected light intensity from the said right side edge part.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(1) Vacuum Film Forming Apparatus The vacuum film forming apparatus according to the embodiment has substantially the same structure as the above-described sputtering web coater, and unwinds the long resin film 52 as shown in FIG. A roll 51, a take-up roll 64 for taking up the long resin film 52, a cooling can roll 56 provided between the unwind roll 51 and the take-up roll 64 and driven to rotate by a motor; The upstream roll group (free roll 53, tension sensor roll 54, front feed roll 55) provided on the conveyance path between the roll and the unwind roll 51, and the conveyance between the cooling can roll 56 and the take-up roll 64 A group of downstream rolls (rear feed roll 61, tension sensor roll 62, and free roll 63) provided on the road, and the vicinity of the outer peripheral surface of the cooling can roll 56 are provided. A thin film (metal film) is formed on the surface side of the long resin film 52 that is carried into the cooling can roll 56 through the upstream roll group and wound around the outer peripheral surface of the cooling can roll 56 and does not contact the outer peripheral surface. The long resin film 52 is formed by regulating the thin film formation region in the long resin film 52 provided between the film forming means (magnetron sputtering cathodes 57, 58, 59, 60), the cooling can roll 56 and the film forming means. The vacuum chamber is provided with a shielding mask (not shown in FIG. 1; see reference numeral 102 in FIG. 2) for forming an undeposited region (bare area) in the length direction of the long resin film 52 at both ends in the width direction. In addition, the position sensor roll is constituted by the rear feed roll 61.

  That is, as shown in the schematic perspective view of FIG. 3, the front feed roll 11 is disposed on the upstream side closest to the cooling can roll 10, and the position sensor roll is configured on the downstream side closest to the cooling can roll 10. After that, a feed roll 12 is arranged, and the long resin film 13 is carried into the cooling can roll 10 via the front feed roll 11 and is formed on the cooling can roll 10 by a film forming means (not shown). After film formation, the film is unloaded to a take-up roll (not shown) through a rear feed roll (position sensor roll) 12.

  In the vacuum film forming apparatus according to the embodiment, the front feed roll 11 and the rear feed roll (position sensor roll) 12 are constituted by motor-driven drive rolls, but are constituted by free rolls or tension sensor rolls. It may be optional.

  Further, the outer peripheral surface of the rear feed roll (position sensor roll) 12 is in contact with the thin film forming surface side of the long resin film 13 formed on the nearest cooling can roll 10, and the rear feed roll (position sensor roll) ) It is possible to measure (detect) each end position at both ends in the width direction of the thin film (metal film) through at least a pair of openings (slits) 14 and 15 provided on the outer peripheral surface of 12.

  In this vacuum film forming apparatus, since the rear feed roll 12 constituting the position sensor roll is arranged in the immediate vicinity of the cooling can roll 10, the position of each end portion in the width direction immediately after the thin film formation is quickly measured. Since (detection) can be performed, it becomes possible to quickly correct the conveyance line, the position of the shielding mask, and the like based on the measurement (detection) data.

  In addition, about the said position sensor roll, you may comprise with the free roll (refer the code | symbol 63 of FIG. 1) of the downstream which the outer peripheral surface of a roll contacts the thin film formation surface side of a long resin film. However, compared with the case where the position sensor roll is configured by the rear feed roll, the position of the free roll is separated from the cooling can roll as shown in FIG. The timing for measuring (detecting) is slightly delayed.

  Here, a thin film (metal film) can be formed by sputtering using a plate-like target as shown in FIG. 1, but when a plate-like target is used, nodules (growth of foreign matter) are formed on the target. May occur. When this becomes a problem, it is preferable to use a cylindrical rotary target that generates no nodules and has high target use efficiency. In the sputtering web coater (vacuum film forming apparatus) 50 shown in FIG. 1, magnetron sputtering cathodes 57, 58, 59 and 60 are shown. Another vacuum film forming means is provided in place of the target. Examples of other vacuum film forming means include CVD (chemical vapor deposition) and vacuum deposition.

(2) Position Sensor Roll A position sensor roll (rear feed roll) 12 provided between the cooling can roll 10 and the take-up roll (not shown) shown in FIG. A cylindrical main body provided in contact with the outer peripheral surface and rotatably, and at least a pair of openings (slits) 14 provided at portions corresponding to the vicinity of both ends in the width direction of the long resin film 13 on the outer peripheral surface of the cylindrical main body. , 15 and a light emitting part and an opening (slit) 14, which are provided in a portion corresponding to the opening (slit) 14 and 15 in the cylindrical main body and emit light toward the openings (slits) 14 and 15, The main part is composed of a sensor head having a light receiving part to which reflected light from 15 is incident.

  As shown in FIG. 4, the cylindrical body 20 of the position sensor roll (rear feed roll) has a fixed shaft 21 inserted and can rotate to the fixed shaft 21 via a bearing 22 in the same manner as a normal roll structure. It is supported by. In addition, at least a pair of openings (slits) 23 and 24 are provided in a portion corresponding to the vicinity of both ends in the width direction of the long resin film 25 on the outer peripheral surface of the cylindrical main body 20. In addition, about said opening part (slit), you may open two or more pairs, such as two pairs, three pairs, four pairs, etc. through the circumferential direction of the cylindrical main body 20 outer peripheral surface suitably.

  Further, the structure of the position sensor roll including the sensor head will be specifically described. The position sensor roll includes a cylindrical main body 30 rotatably supported on a fixed shaft 31 via a bearing 32 as shown in FIG. In addition, at least a pair of openings (slits) 33 and 34 provided in the vicinity of both ends in the width direction of the long resin film 35 on the outer peripheral surface of the cylindrical main body 30, and the openings (slits) in the cylindrical main body 30. ) A pair of light-emitting portions that are provided at portions corresponding to 33 and 34 and that irradiate light toward the openings (slits) 33 and 34 and a light-receiving portion that receives light reflected from the openings (slits) 33 and 34. The sensor heads 36 and 37 are the main parts, and each sensor head 36 and 37 is fixed to a mounting member 105 provided on the fixed shaft 31 and Source and has a light receiving element optical fiber 38, 39 is connected to (both not shown).

  In the vacuum film forming apparatus according to the embodiment, one of the light emitting part and the light receiving part constituting the sensor heads 36 and 37 is not a “transmission type” disposed outside the cylindrical main body 30 but a “reflection type”. The reason why the structure is adopted is that the convenience of removal in the position sensor roll (rear feed roll) is taken into consideration.

  In the vacuum film forming apparatus according to the embodiment, the openings (slits) 33 and 34 are not fitted with transparent glass, plastic members, or the like. This is because when transparent glass or the like is fitted in the openings (slits) 33 and 34, the detection result may be affected due to reflection or attenuation of light from the transparent glass or the like. However, when an antireflection treatment is applied to transparent glass, plastic member, etc., it may be applied as a matter of course.

  And the dimension of the said opening part (slit) 33 and 34 can be suitably set from the workability of a slit, the mechanical strength of the cylindrical main body 30 outer peripheral surface, etc. For example, if the width is 3 mm to 7 mm and the length is 15 mm to 25 mm, it can be easily processed. Further, the corners may be rounded to prevent the long resin film from being damaged at the corners of the openings (slits) 33 and 34.

(3) Sensor head The above-mentioned light emitting part is constituted by an optical fiber (light emitting optical fiber) connected to the light source and having the tip directed toward the opening, and an optical fiber (receiving light) connected to the light receiving element and directed toward the opening. A sensor head according to an embodiment in which a light receiving unit is configured by an optical fiber) will be specifically described below with reference to the drawings.

  First, a sensor head to which the fiber bundle 41 shown in FIG. 6B is applied will be described. The fiber bundle 41 is formed by bundling six light emitting optical fibers 42 around a single light receiving optical fiber 43.

  As shown in FIGS. 6A to 6C, the sensor head of the first example includes a box-shaped case 40 having a rectangular open portion, and a plurality of zigzag arranged in the box-shaped case 40. The fiber bundle 41 and the microlens 44 attached to the tip of each fiber bundle 41 constitute the main part of the sensor head 45.

  The reason why the plurality of fiber bundles 41 are arranged in a staggered manner in the box-shaped case 40 is to increase the positional accuracy of each fiber bundle 41. In the sensor head 45, the fiber bundle 41 has a structure in which the light receiving optical fiber 43 is in the center and the periphery thereof is bundled with the light emitting optical fiber 42. The optical fiber 43 may be bundled.

  Each fiber bundle 80 is connected to an optical amplifier 82 including a light source and a light receiving element (both not shown) via an optical fiber 81 as shown in FIG. 8, and the opening (slit) of the position sensor roll. An electric signal corresponding to the intensity of reflected light from the signal line 83 is output from the signal line 83, and each end position at both ends in the width direction of the long resin film and each end portion at both ends in the width direction of the thin film formed on the long resin film Each position is measured (detected).

  Moreover, the sensor head of the second example includes a box-type case 70 having a rectangular opening as shown in FIGS. 7A to 7C, and the box-type case 70 with each other over the length direction. The main part of the sensor head 74 is constituted by the light emitting optical fiber 71 group and the light receiving optical fiber 72 group arranged in parallel and the cylindrical lens 73 attached to the open part of the box-type case 70. is there.

  Each light-emitting optical fiber 71 of the sensor head 90 is connected to a light source 92 via an optical fiber 91 as shown in FIG. 9, and each light-receiving optical fiber 72 is connected to a light-receiving element via an optical fiber 93 as shown in FIG. An electric signal corresponding to the intensity of reflected light from the opening (slit) of the position sensor roll is output from the signal line 95 and is connected to an optical amplifier 94 (not shown). Each end position at both ends in the width direction and each end position at both ends in the width direction of the thin film formed on the long resin film are measured (detected).

(4) End position measurement (detection)
The explanatory diagram of FIG. 10A shows the positional relationship between a pair of openings (slits) 112 and 111 provided in the position sensor roll and both ends in the width direction of the long resin film 110, and FIG. FIG. 10 shows a schematic cross section of the left end portion located on the left side in the transport direction in the long resin film 113 on which the thin film 114 is formed, and the reflected light intensity from the left end portion, and FIG. The explanatory view shows a schematic cross section of the right end portion located on the right side in the transport direction in the long resin film 115 on which the thin film 116 is formed, and the reflected light intensity from the right end portion.

  Since the film formation areas of the thin films 114 and 116 are formed through the shielding mask 102 shown in FIG. 2, the thickness gradually increases as shown in FIGS. 10 (B) and 10 (C). It has changed.

  And the reflectance from the site | part in which the long resin films 113 and 115 of the said opening part (slit) do not exist is extremely low, as shown to FIG. 10 (B) and FIG.10 (C), and the said opening part (slit). The reflectance from the surface of the long resin films 113 and 115 is about 5 to 10%, and the reflectance from the thin films (metal surfaces) 114 and 116 in the film formation area is close to 80%. From the intensity signal change corresponding to the reflected light intensity, the positions of the end portions at both ends in the width direction of the long resin films 113 and 115 and the widths of the thin films (metal surfaces) 114 and 116 formed on the long resin films 113 and 115 are obtained. It is possible to simultaneously measure (detect) each end position at both ends in the direction.

  And the measurement of each edge part position in the width direction both ends of the long resin films 113 and 115 and each edge position in the width direction both ends of the thin films (metal surface) 114 and 116 formed in the long resin films 113 and 115 ( The detection result) is used as a feedback signal to change the position of the unwinding roll, or to tilt the intermediate roll (intermediate roll composed of upstream and downstream roll groups), etc. , 115 can be corrected to the initially designated position. Furthermore, regarding the correction of the position of the shielding mask, external adjustment by a vacuum manipulator or the like is possible during film formation.

(5) Heat-resistant resin film with metal film (long resin film with metal film)
A heat-resistant resin film with a metal film (long resin film with a metal film) can be manufactured using the vacuum film forming apparatus according to the embodiment.

  And as said heat resistant resin film with a metal film (long resin film with a metal film), the base metal layer which consists of Ni type alloys etc. on the surface of a heat resistant resin film, and the copper thin film laminated | stacked on the surface of the base metal layer The structure comprised with the layer (Cu film | membrane) is illustrated. The heat resistant resin film with a metal film having such a structure is processed into a flexible wiring board by a subtractive method. Here, the subtractive method is a method of manufacturing a flexible wiring substrate by removing a metal film (for example, the Cu film) not covered with a resist by etching.

  The layer made of the Ni-based alloy or the like is called a seed layer (underlying metal layer), and its composition is selected depending on desired characteristics such as electrical insulation and migration resistance of the heat-resistant resin film with a metal film. The seed layer can be made of various known alloys such as Ni—Cr alloy or Inconel, Condanthan, Monel and the like. Moreover, when it is desired to further increase the thickness of the metal film (Cu film) of the heat-resistant resin film with metal film, the metal film may be formed using a wet plating method. And when a metal film is formed only by electroplating (that is, electrolytic plating), or when electroless plating is performed as primary plating, and wet plating such as electrolytic plating is combined as secondary plating. is there. The wet plating process may employ various conditions of a conventional wet plating method.

  Examples of the heat-resistant resin film used for the heat-resistant resin film with a metal film include, for example, a polyimide film, a polyamide film, a polyester film, a polytetrafluoroethylene film, a polyphenylene sulfide film, and a polyethylene naphthalate film. Or the resin film chosen from a liquid crystal polymer film is mentioned, The flexibility as a heat resistant resin film with a metal film, the intensity | strength required practically, and the point which has the electrical insulation suitable as a wiring material are preferable.

  In addition, as the heat-resistant resin film with a metal film, a structure in which a metal film such as a Ni—Cr alloy or Cu is laminated on a long heat-resistant resin film is exemplified. It is also possible to use a material film, a nitride film, a carbide film, or the like.

  Examples of the present invention will be specifically described below with reference to comparative examples.

[Example 1]
A vacuum film forming apparatus (sputtering web coater) 50 shown in FIG. 1 is used, and a long resin film (long heat-resistant resin film) 52 has a width of 500 mm, a length of 1000 m, and a thickness of 12.5 μm. A heat-resistant polyimide film “Kapton (registered trademark)” manufactured by DuPont was used.

  The cooling can roll 56 has a diameter of 800 mm and a width of 800 mm, and hard chrome plating is applied to the surface of the can roll main body. The front feed roll 55 and the rear feed roll 61 each have a diameter of 150 mm and an effective width of 500 mm.

  The position sensor roll is configured by the rear feed roll 61.

  That is, as shown in FIG. 5, the position sensor roll includes a cylindrical main body 30 rotatably supported by a fixed shaft 31 via a bearing 32, and the vicinity of both ends in the width direction of the long resin film 35 on the outer peripheral surface of the cylindrical main body 30. A pair of openings (slits) 33, 34 provided in a part corresponding to the above, and an opening (slit) 33 provided in a part corresponding to the opening (slit) 33, 34 in the cylindrical body 30; The main part is composed of a pair of sensor heads 36 and 37 each having a light emitting part for irradiating light toward 34 and a light receiving part on which reflected light from the openings (slits) 33 and 34 is incident. 36 and 37 have optical fibers 38 and 39 fixed to a mounting member 105 provided on the fixed shaft 31 and connected to a light source and a light receiving element (both not shown).

  The dimensions of the openings (slits) 33 and 34 correspond to positions of 15 mm inward from both ends in the width direction of the long resin film 35 traveling on the specified travel line, and 5 mm from each end to the outside, respectively. The length dimension is set to 20 mm and the width dimension is set to 3 mm.

  And if the long resin film 35 has passed the designated travel line, the area | region of 15 mm inside the said opening part (slit) 33 and 34 will be covered with the long resin film 35, as shown in FIG. become. For this reason, there is almost no reflection from the area | region which is not covered with the elongate resin film 35 of the said opening part (slit) 33,34.

  Moreover, the width direction both ends of the elongate resin film 35 which covers the said opening part (slit) 33 and 34 are as follows. That is, an undeposited area called a bare area having a low reflectivity is set to 3 mm inside from both ends in the width direction, and an area of the deposit area where the reflectivity increases as the film thickness gradually increases is set to 2 mm. In addition, a film-forming area having a large film thickness and a substantially constant reflectivity inside is formed.

  Further, the pair of sensor heads 36 and 37 provided in the cylindrical main body 30 of the position sensor roll shown in FIG. 5 is a box-shaped case having a rectangular opening as shown in FIGS. 40, a fiber bundle 41 having a diameter of 2 mm in which two rows × 10 pieces (20 pieces in total) are arranged in a staggered manner in the box-type case 40, and a microlens 44 attached to the tip of each fiber bundle 41, The main part is composed of. Each of the fiber bundles 41 is a bundle of six light-emitting optical fibers 42 around the center of one light-receiving optical fiber 43. And by arranging the fiber bundles 41 in a staggered manner, the positional accuracy of the reflectance is improved to a 1 mm interval which is doubled.

  The metal film formed on the heat-resistant polyimide film (long heat-resistant resin film) 52 is formed by forming a Cu film on the Ni—Cr film as a seed layer, and the magnetron sputtering target 57. A Ni—Cr target was used for the magnet, a Cu target was used for the magnetron sputter targets 58, 59 and 60, and 300 sccm of argon gas was introduced. The power applied to each cathode was controlled by power control.

  Moreover, the tension | tensile_strength of the said unwinding roll 51 and the winding roll 64 was 100N. The heat-resistant polyimide film (long heat-resistant resin film) 52 was set on the unwinding roll 51, and the tip of the heat-resistant polyimide film 52 was attached to the winding roll 64 via the cooling can roll 56. .

The decompression chamber (vacuum chamber) was evacuated to 5 Pa with a plurality of dry pumps, and then evacuated to 3 × 10 ⁻³ Pa using a plurality of turbo molecular pumps and a cryocoil.

  Then, after setting the conveyance speed of the heat-resistant polyimide film (long heat-resistant resin film) 52, argon gas is introduced into each of the magnetron sputter cathodes 57, 58, 59, and 60, and electric power is applied to form a seed layer. The Ni-Cr film to be formed and the Cu film to be formed on the Ni-Cr film were started.

  Then, when the reflected light intensity from the optical fiber bundle 41 during the running of the heat resistant polyimide film (long heat resistant resin film) 52 was measured, the reflected light intensity as shown in FIGS. 10B and 10C was obtained. It was. That is, the long resin film 113 located on the left side in the transport direction and having a reflected light intensity of almost 0 has a left end in the width direction of 3 mm, and is located on the right side in the transport direction and has a reflected light intensity of almost 0. The right end of the length resin film 113 in the width direction was 7 mm. Therefore, it was confirmed that the running line of the long heat resistant resin film 52 is shifted 2 mm to the left side.

  Meanwhile, the width of the bare area (bare area) (from the end of the long heat-resistant resin film where the reflected light intensity is almost zero to the position near the film end where the Cu film is completely formed and the reflected light intensity is high) The distance from the bare area where the film is not formed to the middle of the position near the edge of the Cu film where the reflected light intensity is low, that is, from the middle point of the film formation area where the film thickness of the Cu film gradually increases The distance to the end of the heat resistant resin film is defined as the width of the bare area). The left end side was 6 mm and the right end side was 4 mm. Therefore, it was confirmed that the shielding mask is 1 mm closer to the left side.

[Example 2]
A vacuum film forming apparatus (sputtering web coater) 50 shown in FIG. 1 is used, and a long resin film (long heat-resistant resin film) 52 has a width of 500 mm, a length of 1000 m, and a thickness of 12.5 μm. A heat-resistant polyimide film “Kapton (registered trademark)” manufactured by DuPont was used.

  The cooling can roll 56 has a diameter of 800 mm and a width of 800 mm, and hard chrome plating is applied to the surface of the can roll main body. The front feed roll 55 and the rear feed roll 61 each have a diameter of 150 mm and an effective width of 500 mm.

  The position sensor roll is configured by the rear feed roll 61.

  That is, as shown in FIG. 5, the position sensor roll includes a cylindrical main body 30 rotatably supported by a fixed shaft 31 via a bearing 32, and the vicinity of both ends in the width direction of the long resin film 35 on the outer peripheral surface of the cylindrical main body 30. A pair of openings (slits) 33, 34 provided in a part corresponding to the above, and an opening (slit) 33 provided in a part corresponding to the opening (slit) 33, 34 in the cylindrical body 30; The main part is composed of a pair of sensor heads 36 and 37 each having a light emitting part for irradiating light toward 34 and a light receiving part on which reflected light from the openings (slits) 33 and 34 is incident. 36 and 37 have optical fibers 38 and 39 fixed to a mounting member 105 provided on the fixed shaft 31 and connected to a light source and a light receiving element (both not shown).

  The dimensions of the openings (slits) 33 and 34 correspond to positions of 15 mm inward from both ends in the width direction of the long resin film 35 traveling on the specified travel line, and 5 mm from each end to the outside, respectively. The length dimension is set to 20 mm and the width dimension is set to 3 mm.

  And if the long resin film 35 has passed the designated travel line, the area | region of 15 mm inside the said opening part (slit) 33 and 34 will be covered with the long resin film 35, as shown in FIG. become. For this reason, there is almost no reflection from the area | region which is not covered with the elongate resin film 35 of the said opening part (slit) 33,34.

  Moreover, the width direction both ends of the elongate resin film 35 which covers the said opening part (slit) 33 and 34 are as follows. That is, an undeposited area called a bare area having a low reflectivity is set to 3 mm inside from both ends in the width direction, and an area of the deposit area where the reflectivity increases as the film thickness gradually increases is set to 2 mm. In addition, a film-forming area having a large film thickness and a substantially constant reflectivity inside is formed.

  Further, the pair of sensor heads 36 and 37 provided in the cylindrical main body 30 of the position sensor roll shown in FIG. 5 is a box-shaped case having a rectangular open portion as shown in FIGS. 70, a group of light emitting optical fibers 71 having a diameter of 0.5 mm arranged in parallel and 41 × 2 rows in the box-shaped case 70, and a group of light emitting optical fibers 72 arranged in a row. The main part of the sensor head 74 is composed of a group of optical fibers 72 for receiving light having a diameter of 0.5 mm, which are provided and arranged in 40 × 1 row, and a cylindrical lens 73 attached to the open part of the box-shaped case 70. Is configured.

  The metal film formed on the heat-resistant polyimide film (long heat-resistant resin film) 52 is formed by forming a Cu film on the Ni—Cr film as a seed layer, and the magnetron sputtering target 57. A Ni—Cr target was used for the magnet, a Cu target was used for the magnetron sputter targets 58, 59 and 60, and 300 sccm of argon gas was introduced. The power applied to each cathode was controlled by power control.

  Moreover, the tension | tensile_strength of the said unwinding roll 51 and the winding roll 64 was 100N. The heat-resistant polyimide film (long heat-resistant resin film) 52 was set on the unwinding roll 51, and the tip of the heat-resistant polyimide film 52 was attached to the winding roll 64 via the cooling can roll 56. .

The decompression chamber (vacuum chamber) was evacuated to 5 Pa with a plurality of dry pumps, and then evacuated to 3 × 10 ⁻³ Pa using a plurality of turbo molecular pumps and a cryocoil.

  Then, after setting the conveyance speed of the heat-resistant polyimide film (long heat-resistant resin film) 52, argon gas is introduced into each of the magnetron sputter cathodes 57, 58, 59, and 60, and electric power is applied to form a seed layer. The Ni-Cr film to be formed and the Cu film to be formed on the Ni-Cr film were started.

  Then, when the reflected light intensity from the light receiving optical fiber 72 during the running of the heat resistant polyimide film (long heat resistant resin film) 52 was measured, the reflected light intensity as shown in FIGS. 10B and 10C was obtained. Obtained. That is, the long resin film 113 located on the left side in the transport direction and having a reflected light intensity of almost 0 has a left end in the width direction of 3 mm, and is located on the right side in the transport direction and has a reflected light intensity of almost 0. The right end of the length resin film 113 in the width direction was 7 mm. Therefore, it was confirmed that the running line of the long heat resistant resin film 52 is shifted 2 mm to the left side.

  Meanwhile, the width of the bare area (bare area) (from the end of the long heat-resistant resin film where the reflected light intensity is almost zero to the position near the film end where the Cu film is completely formed and the reflected light intensity is high) The distance from the bare area where the film is not formed to the middle of the position near the edge of the Cu film where the reflected light intensity is low, that is, from the middle point of the film formation area where the film thickness of the Cu film gradually increases The distance to the end of the heat resistant resin film is defined as the width of the bare area). The left end side was 6 mm and the right end side was 4 mm. Therefore, it was confirmed that the shielding mask is 1 mm closer to the left side.

[Comparative example]
A vacuum film forming apparatus (sputtering web coater) 50 shown in FIG. 1 is used, and a long resin film (long heat-resistant resin film) 52 has a width of 500 mm, a length of 1000 m, and a thickness of 12.5 μm. A heat-resistant polyimide film “Kapton (registered trademark)” manufactured by DuPont was used.

  The cooling can roll 56 has a diameter of 800 mm and a width of 800 mm, and hard chrome plating is applied to the surface of the can roll main body. The front feed roll 55 and the rear feed roll 61 each have a diameter of 150 mm and an effective width of 500 mm.

  Further, in the comparative example, the position sensor rolls of Examples 1 and 2 configured by the rear feed roll 61 are not applied, and the web edge composed of the light projecting unit and the light receiving unit described in Patent Documents 3 to 4 is used. A detection device is applied.

  That is, the main body of the web edge detection device having a substantially U-shaped cross section is sandwiched from above and below the edge of the long resin film 52 in the middle of the conveyance path between the rear feed roll 61 and the tension sensor roll 62 shown in FIG. It is arranged. This web edge detection device has a structure in which a light receiving element array (or CCD array) as a light receiving unit is arranged on the upper side of the main body, and an LED illumination array as a light projecting unit is arranged on the lower side of the main body. In addition, the end edge of the long resin film 52 shields light and is the “transmission type” in which the edge position is detected.

  The metal film formed on the heat-resistant polyimide film (long heat-resistant resin film) 52 is formed by forming a Cu film on the Ni—Cr film as a seed layer, and the magnetron sputtering target 57. A Ni—Cr target was used for the magnet, a Cu target was used for the magnetron sputter targets 58, 59 and 60, and 300 sccm of argon gas was introduced. The power applied to each cathode was controlled by power control.

  Moreover, the tension | tensile_strength of the said unwinding roll 51 and the winding roll 64 was 100N. The heat-resistant polyimide film (long heat-resistant resin film) 52 was set on the unwinding roll 51, and the tip of the heat-resistant polyimide film 52 was attached to the winding roll 64 via the cooling can roll 56. .

The decompression chamber (vacuum chamber) was evacuated to 5 Pa with a plurality of dry pumps, and then evacuated to 3 × 10 ⁻³ Pa using a plurality of turbo molecular pumps and a cryocoil.

  Then, after setting the conveyance speed of the heat-resistant polyimide film (long heat-resistant resin film) 52, argon gas is introduced into each of the magnetron sputter cathodes 57, 58, 59, and 60, and electric power is applied to form a seed layer. The Ni-Cr film to be formed and the Cu film to be formed on the Ni-Cr film were started.

  And the edge position of the long resin film 52 during running was measured using the web edge detecting device, but the end of the thin resin film with a thickness of 12.5 μm was curled during running, and the accurate position Position detection was difficult.

  According to the position sensor roll of the present invention, each end position at both ends in the width direction of the long resin film conveyed on the position sensor roll and each end at both ends in the width direction of the thin film formed on the long resin film. Since it is possible to accurately measure the position of the part, it can be used in industrial applications that are built into a vacuum film-forming device that is a film-forming device such as a copper-clad laminated resin film (heat-resistant resin film with a metal film). It has a possibility.

10 Cooling can roll 11 Front feed roll 12 Position sensor roll (rear feed roll)
13 Long resin film 14 Opening (slit)
15 Opening (slit)
20 Cylindrical body 21 Fixed shaft 22 Bearing 23 Opening (slit)
24 Opening (slit)
25 Long resin film 30 Cylindrical body 31 Fixed shaft 32 Bearing 33 Opening (slit)
34 Opening (slit)
35 long resin film 36 sensor head 37 sensor head 38 optical fiber 39 optical fiber 40 box case 41 fiber bundle 42 optical fiber for light emission 43 optical fiber for light reception 44 microlens 45 sensor head 50 vacuum film forming apparatus (sputtering web coater)
51 Unwinding Roll 52 Long Resin Film 53 Free Roll 54 Tension Sensor Roll 55 Front Feed Roll 56 Cooling Can Roll 57 Magnetron Sputtering Cathode 58 Magnetron Sputtering Cathode 59 Magnetron Sputtering Cathode 60 Magnetron Sputtering Cathode 61 Post Feed Roll 62 Tension Sensor Roll 63 Free Roll 64 Winding roll 70 Box-shaped case 71 Light emitting optical fiber 72 Light receiving optical fiber 73 Cylindrical lens 74 Sensor head 80 Fiber bundle 81 Optical fiber 82 Optical amplifier 83 Signal line 90 Sensor head 91 Optical fiber 92 Light source 93 Optical fiber 94 Optical amplifier 95 Signal line 100 Cooling can roll 101 Long resin film 10 Shielding mask 103 Beaeria (ungrown region)
104 Bare area (non-deposition area)
105 Mounting member 106 Sputtering target 110 Long resin film 111 Opening (slit)
112 opening (slit)
113 Long resin film 114 Thin film (metal surface)
115 Long resin film 116 Thin film (metal surface)

Claims (8)

Each end position at both ends in the width direction of the long resin film incorporated in the vacuum chamber of the vacuum film forming apparatus and formed with the thin film and each end position at both ends in the width direction of the thin film formed on the long resin film In the position sensor roll to detect,
A cylindrical main body provided in contact with the thin film forming surface of the long resin film and rotatably provided, and a portion corresponding to the vicinity of both ends in the width direction of the long resin film on the outer peripheral surface of the cylindrical main body. A sensor head having at least a pair of opening portions, a light emitting portion that is provided in a portion corresponding to the opening portion in the cylindrical main body and that emits light toward the opening portion, and a light receiving portion into which reflected light from the opening portion is incident A position sensor roll characterized by comprising:   The vacuum film forming apparatus is provided with an unwinding roll for unwinding a long resin film, a winding roll for winding the long resin film, and a cooling can which is provided between the unwinding roll and the winding roll and is driven to rotate. A plurality of upstream and downstream roll groups provided between the roll, the cooling can roll and the unwinding roll, and between the cooling can roll and the winding roll, and along the vicinity of the outer peripheral surface of the cooling can roll A film forming means for forming a thin film on the surface side of the long resin film which is provided and is carried into the cooling can roll through the upstream roll group and wound around the outer peripheral surface of the cooling can roll; and the cooling can roll The thin film formation region in the long resin film provided between the film forming means and the film forming means is regulated so as to extend in the length direction of the long resin film on both ends in the width direction of the long resin film. Position sensor roll according shielding mask for forming a deposition region to claim 1, characterized in that it comprises a vacuum chamber.   The position sensor according to claim 2, wherein the position sensor is configured by a post-feed roll that is provided in the vicinity of the cooling can roll and feeds a long resin film fed from the cooling can roll to the winding roll side. roll.   The cylindrical body is rotatably supported by a fixed shaft, and the sensor head is fixed to the fixed shaft or an attachment member provided on the fixed shaft. The described position sensor roll.   The light emitting part of the sensor head is configured by the light emitting optical fiber connected to the light source with the tip directed toward the opening, and the sensor head is configured with the light receiving optical fiber connected to the light receiving element with the tip directed toward the opening. The position sensor roll according to claim 1, wherein the light receiving unit is configured.   6. The position sensor according to claim 5, wherein the light emitting part and the light receiving part of the sensor head are configured by combining two or more fiber bundles formed by bundling the light emitting optical fiber and the light receiving optical fiber. roll.   The sensor head is composed of a box-shaped case having a rectangular opening, a plurality of fiber bundles arranged in a staggered manner in the box-shaped case, and a microlens attached to the tip of each fiber bundle. The position sensor roll according to claim 6, wherein the position sensor roll is provided.   A box-shaped case having a rectangular opening, a light-emitting optical fiber group and a light-receiving optical fiber group arranged in parallel to each other in the length direction in the box-shaped case, and the opening of the box-shaped case The position sensor roll according to claim 5, wherein the sensor head is constituted by a cylindrical lens attached to the lens.

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