JP7285431B2 - Vacuum deposition apparatus and vacuum deposition method - Google Patents

Description

In the present invention, a long resin film conveyed by roll-to-roll is wrapped around the outer peripheral surface of a cooling can roll, and a metal film is formed on the surface side of the long resin film that is not in contact with the outer peripheral surface of the cooling can roll. The present invention relates to a film forming apparatus and a vacuum film forming method, and more particularly to an improvement in a vacuum film forming apparatus and a vacuum film forming method in which a long resin film surface or metal film surface in contact with the outer peripheral surface of a cooling can roll is less likely to be scratched. be.

Various types of flexible wiring boards are used in liquid crystal panels, notebook computers, digital cameras, mobile phones, and the like. As the material for this flexible wiring board, a resin film with a metal film is used, in which metal films are formed on both sides of a heat-resistant resin film. By doing so, a flexible wiring board having a predetermined wiring pattern can be obtained. In recent years, wiring patterns of flexible wiring substrates have become finer and denser, so it has become more important that the metal film of the metal film-coated resin film is free of defects such as pinholes.

As a method for producing this kind of resin film with a metal film, there is a method in which a metal foil is attached to a heat-resistant resin film with an adhesive (called a method for manufacturing a three-layer substrate), and a method in which a heat-resistant resin solution is applied to a metal foil. A method of manufacturing by drying after coating (called a casting method), a method of forming a metal film on a heat-resistant resin film by a vacuum film-forming method, or a heat-resistant resin film by a vacuum film-forming method Conventionally known is a method of forming a metal film thereon and forming a wet plated layer on the metal film by a wet plating method (referred to as a metallizing method). Vacuum deposition methods in the metallizing method include a vacuum deposition method, a sputtering method, an ion plating method, an ion beam sputtering method, and the like.

As the metallizing method, Patent Document 1 discloses a method of forming a conductor layer on the polyimide insulating layer by sputtering chromium on the polyimide insulating layer and then sputtering copper. Further, in Patent Document 2, a first metal thin film formed by sputtering with a copper-nickel alloy as a target and a second metal thin film formed by sputtering with copper as a target are formed in this order on a polyimide film. A material for a flexible circuit board obtained by laminating to a substrate is disclosed. When performing vacuum film formation on a heat-resistant resin film (substrate) such as a polyimide film, it is common to use a sputtering web coater.

In recent years, resin films with metal films on both sides have been produced as high-density wiring boards by the metallizing method. Specifically, a metal film (referred to as a metal seed) as a base is formed on both sides of a heat-resistant long resin film by a vacuum film formation method such as sputtering, and the metal film (metal seed) is formed. A resin film with metal films on both sides is manufactured by forming a wet plating layer thereon by a wet plating method. The metal film (metal seed) is formed using a vacuum film forming apparatus such as a sputtering web coater, and the wet plating layer is formed using a wet plating apparatus. is manufactured through a two-stage process using different manufacturing equipment. That is, a long resin film having metal films (metal seeds) formed on both sides by a vacuum film-forming device is once wound into a roll in the vacuum film-forming device, and then carried out from the vacuum film-forming device. A wet plating layer is formed on the metal film (metal seed) of the long resin film.

2. Description of the Related Art Conventionally, a sputtering web coater (vacuum film forming apparatus) as shown in FIG. 1 is known as this type of vacuum film forming apparatus for forming metal films (metal seeds) on both sides of a long resin film. That is, as shown in FIG. 1, an unwinding chamber 10 for unwinding the long resin film 1 wound around the unwinding roll 11 and a first surface side of the long resin film 1 supplied from the unwinding chamber 10 are provided. and a second film forming chamber 50 for forming a second metal film (metal seed) on the second surface side of the long resin film 1. and a winding chamber 60 for winding the long resin film 1 on which the first metal film and the second metal film are formed on a winding roll 61, the first film forming chamber 30 and the second film forming chamber 50 is a first cooling can roll 31 and a second cooling can roll 51 that are rotated and cooled by winding the long resin film 1 transported by roll-to-roll around the outer peripheral surface, and on the outer peripheral surface of these cooling can rolls. Sputtering web coaters (vacuum coating apparatuses) are known which have first coating means 32, 33, 34, 35 and second coating means 52, 53, 54, 55 with thermal loads arranged along .

Then, by using the sputtering web coater (vacuum film forming apparatus) shown in FIG. 1, the first metal film m1 is formed on the first surface 1α (see FIG. 2a) side of the long resin film 1 supplied from the unwinding chamber 10. (see FIG. 2b) is formed, a second metal film m2 (see FIG. 2c) is formed on the second surface 1β (see FIG. 2a) of the long resin film 1, and the The interleaving paper 63 is put on the side of the first metal film m1 (see FIG. 2d).

Reference numeral 62 in FIG. 1 denotes a long interleaving paper 63 (formed first metal film m1 and second metal film m2) sandwiched between the layers of the long resin film 1 accommodated in the take-up roll 61. 1 shows a long interleaving paper unwinding roll for unwinding interleaving paper for preventing blocking in which the long resin film 1 sticks through the interleaving paper. The cross-sectional view of the long resin film 1 shown in FIG. 2(a) corresponds to the cross-section of the long resin film 1 shown in FIG. The cross-sectional view of the film 1 corresponds to the cross-section of the long resin film 1 indicated by reference numeral (b) in FIG. 1, and the cross-sectional view of the long resin film 1 illustrated in FIG. Corresponding to the cross section of the long resin film 1 shown in (c), the cross-sectional view of the long resin film 1 shown in FIG. Each corresponds to the cross section of the elongated resin film 1 .

JP-A-2-98994 JP-A-6-97616

By the way, in the sputtering web coater (vacuum film forming apparatus) shown in FIG. The conveying tension of the long resin film 1 in the film chamber 30 and the second film forming chamber 50 is set higher than the conveying tension of the long resin film 1 in the other unwinding chamber 10 and winding chamber 60 . Therefore, the long resin film 1 conveyed in the first film forming chamber 30 is strongly against the outer peripheral surfaces of the first cooling can roll 31 and the motor-driven rolls 36 and 37 provided in the first film forming chamber 30. The long resin film 1 that is in contact with and transported in the second film forming chamber 50 is provided on the outer peripheral surfaces of the second cooling can roll 51 and the motor-driven rolls 56 and 57 provided in the second film forming chamber 50. Therefore, if the long resin film 1 side in contact with the outer peripheral surface is an uncoated film surface, the uncoated film surface is easily scratched and contacts the outer peripheral surface. When the long resin film 1 side is a metal film after film formation, the metal film is easily scratched. If the surface of the unformed film is scratched, unevenness is formed on the surface of the metal film that will be formed later, and if the metal film is scratched, the metal film will be damaged. As a result, there is a problem that defects such as pinholes are likely to occur in the resin film with metal films on both sides.

The present invention has been made by paying attention to such problems, and the object thereof is to provide a vacuum film forming method in which the long resin film surface or metal film surface in contact with the outer peripheral surface of the cooling can roll is less likely to be scratched. An object of the present invention is to provide an apparatus and a vacuum film forming method.

That is, the first invention according to the present invention is
An unwinding chamber for unwinding the long resin film wound around the unwinding roll, and a first film forming chamber for forming a first metal film on the first surface side of the long resin film supplied from the unwinding chamber. a second film forming chamber for forming a second metal film on the second surface side of the long resin film; and a winding chamber for winding,
The first film forming chamber includes a rotationally driven first cooling can roll that wraps and cools a long resin film transported by roll-to-roll around the outer peripheral surface;
a pair of tension measuring rolls for measuring the tension of the long resin film upstream and downstream of the first cooling can roll;
Based on the tension of the long resin film upstream and downstream of the first cooling can roll measured by the pair of tension measuring rolls, the conveying tension of the long resin film in the first film forming chamber is determined by the unwinding chamber and the winding chamber. A pair of motor-driven rolls controlled to be higher than the conveying tension of the long resin film in
Having a first film forming means with a heat load arranged along the outer peripheral surface of the first cooling can roll, and
The second film forming chamber includes a rotationally driven second cooling can roll that wraps and cools a long resin film transported by roll-to-roll around the outer peripheral surface;
a pair of tension measuring rolls for measuring the tension of the long resin film upstream and downstream of the second cooling can roll;
Based on the tension of the long resin film upstream and downstream of the second cooling can roll measured by the pair of tension measuring rolls, the conveying tension of the long resin film in the second film forming chamber is determined by the unwinding chamber and the winding chamber. A pair of motor-driven rolls controlled to be higher than the conveying tension of the long resin film in the first film forming chamber and equal to the conveying tension of the long resin film in the first film forming chamber;
In a vacuum film forming apparatus having a second film forming means with a heat load arranged along the outer peripheral surface of the second cooling can roll ,
Between the unwinding chamber and the first film forming chamber, the first protective film is polymerized on the second surface side of the long resin film during transportation, and the first cooling can roll and the second surface of the long resin film are formed. A protective film polymerization chamber is provided in which a first protective film is interposed between and, and between the first film formation chamber and the second film formation chamber, the first metal film is formed on the first surface side A second protective film is polymerized on the first metal film side of the long resin film to interpose the second protective film between the second cooling can roll and the first metal film of the long resin film, A protective film polymerization and separation chamber is provided for separating the first protective film polymerized on the second surface side of the long resin film and exposing the second surface of the long resin film to the second film forming means side. It is characterized by

Moreover, the second invention is
In the vacuum film forming apparatus according to the first invention,
The protective film is polyethylene, polypropylene, polyethylene terephthalate, polyethylene naphthalate, polystyrene, polyvinyl alcohol, polycarbonate, polyphenylene sulfide, polyether ether ketone, polyether sulfone, aramid, polyimide, triacetate, or a laminate thereof. characterized by being composed of a complex,
The third invention is
In the vacuum film forming apparatus according to the first invention,
The film forming means involving heat load is magnetron sputtering.

Next, the fourth invention according to the present invention is
A film unwinding step of unwinding the long resin film wound around the unwinding roll in the unwinding chamber ;
The second surface side of the long resin film unwound in the first film forming chamber is wound around the first cooling can roll, and the first cooling can roll is arranged along the outer peripheral surface of the first cooling can roll. a first film forming step of forming a first metal film on the first surface side of the long resin film by film forming means;
In the second film-forming chamber, the first metal film side of the long resin film on which the first metal film is formed is wound around the second cooling can roll, and is arranged along the outer peripheral surface of the second cooling can roll. a second film forming step of forming a second metal film on the second surface side of the long resin film by a second film forming means accompanied by a heat load;
A film winding step of winding the long resin film on which the first metal film and the second metal film are formed in the winding chamber onto a winding roll;
has
A pair of tension measuring rolls provided in the first film forming chamber measures the tension of the long resin film upstream and downstream of the first cooling can roll. A pair of motor-driven rolls provided in the first film forming chamber is controlled based on the tension of the long resin film, and the conveying tension of the long resin film in the first film forming chamber is adjusted to the tension in the unwinding chamber and the winding chamber. Along with making it higher than the conveying tension of the length resin film,
A pair of tension measuring rolls provided in the second film forming chamber measures the tension of the long resin film upstream and downstream of the second cooling can roll. A pair of motor-driven rolls provided in the second film forming chamber is controlled based on the tension of the long resin film, and the conveying tension of the long resin film in the second film forming chamber changes the tension in the unwinding chamber and the winding chamber. In the vacuum film forming method in which the conveying tension is higher than the conveying tension of the long resin film and equal to the conveying tension of the long resin film in the first film forming chamber,
Between the film unwinding step and the first film forming step, the first protective film is polymerized on the second surface side of the long resin film to form a bond between the first cooling can roll and the second surface of the long resin film. A long resin film having a first protective film interposed therebetween and having a first metal film formed on the first surface side between the first film forming step and the second film forming step The second protective film is polymerized on the first metal film side so that the second protective film is interposed between the second cooling can roll and the first metal film of the long resin film, and the long resin film The second surface of the elongated resin film is exposed to the second film forming means side by separating the first protective film polymerized on the second surface side.

Moreover, the fifth invention is
In the vacuum film forming method according to the fourth invention,
The protective film is polyethylene, polypropylene, polyethylene terephthalate, polyethylene naphthalate, polystyrene, polyvinyl alcohol, polycarbonate, polyphenylene sulfide, polyether ether ketone, polyether sulfone, aramid, polyimide, triacetate, or a laminate thereof. characterized by being composed of a complex,
The sixth invention is
In the vacuum film forming method according to the fourth invention,
The film forming means involving heat load is magnetron sputtering.

According to the vacuum film forming apparatus and the vacuum film forming method according to the present invention,
The first protective film is polymerized on the second surface (unformed surface) of the long resin film in the stage before being carried into the first film forming chamber, and the long resin film is polymerized in the stage before being carried into the second film forming chamber. Since the second protective film is polymerized on the first surface of the film (the first metal film formed in the first film forming chamber), the long resin film in the first film forming chamber and the second film forming chamber It is wound around the outer peripheral surface of each cooling can roll with the first protective film and the second protective film interposed.

Even if the long resin film strongly contacts the outer peripheral surface of each cooling can roll in the first film forming chamber and the second film forming chamber, the first protective film interposed between the long resin film and each cooling can roll And the second protective film has the effect of making it difficult for the uncoated film surface (second surface side) and the first metal film surface (first surface side) of the long resin film to be scratched.

FIG. 11 is a configuration explanatory diagram of a conventional sputtering web coater (vacuum film forming apparatus) for forming metal films on both sides of a long resin film. 2(a) is a cross-sectional view of the long resin film indicated by reference numeral (a) in FIG. 1, FIG. 2(b) is a cross-sectional view of the long resin film indicated by reference character (b) in FIG. 1, and FIG. 2(c). ) is a cross-sectional view of the long resin film indicated by symbol (c) in FIG. 1, and FIG. 2(d) is a cross-section of the long resin film wound on the winding roll indicated by symbol (d) in FIG. figure. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a configuration explanatory diagram of a sputtering web coater (vacuum film forming apparatus) according to an embodiment of the present invention for forming metal films on both sides of a long resin film; FIG. 4(A) is a cross-sectional view of the long resin film wound around the unwinding roll indicated by reference numeral (A) in FIG. 3, and FIG. 4(B) is a long resin film indicated by reference numeral (B) in FIG. 4(C) is a cross-sectional view of the long resin film indicated by the symbol (C) in FIG. 3, FIG. 4(D) is a cross-sectional view of the long resin film indicated by the symbol (D) in FIG. 4(E) is a cross-sectional view of the long resin film indicated by reference numeral (E) in FIG. 3, FIG. 4(F) is a cross-sectional view of the long resin film indicated by reference numeral (F) in FIG. ) is a cross-sectional view of the long resin film indicated by the symbol (G) in FIG. 3, and FIG. figure.

Hereinafter, a vacuum film forming apparatus according to an embodiment of the present invention will be described in detail together with a conventional vacuum film forming apparatus and problems thereof.

1. Vacuum deposition apparatus according to conventional example
(1) Configuration of Conventional Vacuum Film Forming Apparatus First, a conventional vacuum film forming apparatus will be described in detail with reference to FIG.

In FIG. 1, a roll driven by a motor is denoted by M (motor), a tension measurement roll is denoted by TP (tension pickup), and a free roll is denoted by F (free).

As shown in FIG. 1, the conventional vacuum film forming apparatus includes an unwinding chamber 10, a drying chamber 20, a first film forming chamber 30, a transfer chamber 40, a second film forming chamber 50, and a winding chamber 60. consists of In some cases, a "surface treatment chamber" is installed between the drying chamber 20 and the first film forming chamber 30 to improve adhesion between the film and the metal film by performing plasma irradiation or ion beam irradiation.

In the unwinding chamber 10, an unwinding roll 11 around which the uncoated long resin film 1 is wound is arranged. It is configured to be carried out to a drying chamber 20 via rolls 13 and free rolls 14 . The unwinding force of the film is measured by the tension measuring roll 13 and feedback-controlled to the unwinding roll 11 .

In the drying chamber 20, a heater 22 for drying the film is arranged, and the uncoated long resin film 1 carried in from the unwinding chamber 10 is dried. It is configured to be carried out to the first film forming chamber 30 via the measurement roll 24 , the free roll 25 and the free roll 26 . The drying tension of the film is measured by the tension measuring roll 24 and is feedback-controlled to the motor-driven roll 21 .

Sputtering cathodes 32, 33, 34, and 35 as first film forming means are arranged in the first film forming chamber 30, and one side (first A first metal film (metal seed) m1 is deposited on the surface 1α: see FIG. , and the motor-driven roll 37 to be carried out to the transfer chamber 40 . In addition, the film tension (carrying-in tension) upstream of the first cooling can roll 31 is measured by a tension measuring roll 38 and feedback-controlled to a motor-driven roll 36, and the film tension downstream of the first cooling can roll 31 is measured. (Conveyance force) is measured by the tension measuring roll 39 and configured to be feedback-controlled to the motor-driven roll 37 . Reference numeral 3p in FIG. 1 denotes a shielding plate, which is configured to prevent sputtering particles ejected from the target of the sputtering cathode from deviating from a predetermined traveling path and heading toward the drying chamber 20, the transfer chamber 40, and the like. It is In addition, the film tension (carrying in and carrying out force) in the first film forming chamber 30 is determined from the film winding force in the unwinding chamber 10, the film drying tension in the drying chamber 20, and the film winding tension in the winding chamber 60. It is set about 2 to 4 times higher.

Free rolls 41, 42, and 43 are arranged in the transfer chamber 40, and a long film having a first metal film (metal seed) m1 on one side (first surface 1α) carried in from the first film forming chamber 30 is provided. It is configured such that the resin film 1 is carried out to the second film forming chamber 50 via the free rolls 41 , 42 , 43 . By passing the long resin film 1 through the transfer chamber 40, the non-deposited surface (second surface 1β: see FIG. 2a) side of the long resin film 1 becomes It is adjusted so that the second surface 1β side of the long resin film 1 is also exposed to the second film forming means side of the second film forming chamber 50 and formed.

Next, sputtering cathodes 52, 53, 54, and 55 as second film forming means are arranged in the second film forming chamber 50, and the other side ( A second metal film (metal seed) m2 is formed on the second surface 1β), and a motor-driven roll 56, a tension measurement roll 58, a second cooling can roll 51, a tension measurement roll 59, and a motor-driven roll 57 are formed. It is configured to be carried out to the winding chamber 60 via. In addition, the film tension (carrying-in tension) upstream of the second cooling can roll 51 is measured by a tension measuring roll 58 and is configured to be feedback-controlled to a motor-driven roll 56, and the film tension downstream of the second cooling can roll 51 is (Conveying force) is measured by the tension measuring roll 59 and configured to be feedback-controlled to the motor-driven roll 57 . In addition, the code|symbol 5p in FIG. 1 has shown the shielding plate. In addition, the film tension (carrying-in and carrying-out force) in the second film forming chamber 50 also includes the film winding tension in the unwinding chamber 10, the film drying tension in the drying chamber 20, and the film winding tension in the winding chamber 60. It is set about 2 to 4 times higher than that.

In the winding chamber 60, a winding roll 61 and a long interleaving paper unwinding roll 62 are arranged. While the film 1 sandwiches the long interleaving paper 63 unwound from the long interleaving paper unwinding roll 62 between the layers of the film via the free roll 67, the free roll 64, the tension measuring roll 65, and the free roll 66. It is configured to be taken up by the take-up roll 61 via. The winding tension of the film is measured by the tension measuring roll 65 and is feedback-controlled to the winding roll 61 . In this way, it passed through the unwinding chamber 10, the drying chamber 20, the first film forming chamber 30, the transfer chamber 40, and the second film forming chamber 50, and the metal film (metal seed) was formed on both surfaces. The long resin film 1 is wound around the winding roll 61 in the winding chamber 60 while sandwiching the long interleaving paper 63 between the layers.

By the way, when the long resin film 1 having metal films (metal seeds) formed on both sides is wound on the winding roll 61 as it is, one side (first side 1α) and the other side (second side 1β) A blocking phenomenon occurs in which the metal films (metal seeds) formed on the respective surfaces come into strong contact with each other in a vacuum and stick to each other. In order to prevent this blocking phenomenon, the long resin film 1 may be wound onto the take-up roll 61 while the long interleaving paper 63 unwound from the long interleaving paper unwinding roll 62 is sandwiched between the layers of the film as described above. . In FIG. 1, only the minimum number of rolls for explaining the sputtering web coater (vacuum film forming apparatus) is shown, but some rolls are not shown.

Each vacuum chamber constituting the unwinding chamber 10, the drying chamber 20, the first film forming chamber 30, the transfer chamber 40, the second film forming chamber 50, and the winding chamber 60 is equipped with an exhaust system. In the first film-forming chamber 30 and the second film-forming chamber 50, the pressure is reduced to about 10 ^-4 Pa for sputtering film formation, and the pressure is then adjusted to about 0.1 to 10 Pa by introducing sputtering gas. A known gas such as argon is used as the sputtering gas, and a gas such as oxygen is further added depending on the purpose. The shape and material of each vacuum chamber are not particularly limited as long as they can withstand such a reduced pressure state, and various types can be used. Various devices such as a dry pump, a turbomolecular pump, and a cryo-coil (not shown) are provided to reduce the pressure in each vacuum chamber and maintain that state.

When a metal film (metal seed) is formed by sputtering, a plate-shaped target is used as shown in FIG. may occur. If this is a problem, it is preferable to use a cylindrical rotary target that does not generate nodules and has a high target usage efficiency. In addition, although a magnetron sputtering cathode is illustrated in the vacuum film forming apparatus of FIG. A film forming means is incorporated.

(2) Problems of the vacuum film forming apparatus according to the conventional example In the vacuum film forming apparatus according to the conventional example shown in FIG. Since the long resin film 1 is brought into close contact with the outer peripheral surface, the conveying tension of the long resin film 1 in the first film forming chamber 30 and the second film forming chamber 50 depends on the film unwinding force in the unwinding chamber 10 and the drying chamber 10 as described above. 20, the film winding tension in the winding chamber 60 is set to be about two to four times higher. Therefore, the long resin film 1 conveyed in the first film forming chamber 30 is strongly against the outer peripheral surfaces of the first cooling can roll 31 and the motor-driven rolls 36 and 37 provided in the first film forming chamber 30. The long resin film 1 that is in contact with and transported in the second film forming chamber 50 is provided on the outer peripheral surfaces of the second cooling can roll 51 and the motor-driven rolls 56 and 57 provided in the second film forming chamber 50. Therefore, if the long resin film 1 side in contact with the outer peripheral surface is an uncoated film surface, the uncoated film surface is easily scratched and contacts the outer peripheral surface. When the long resin film 1 side is a metal film after film formation, the metal film is easily scratched.

If the surface of the unformed film is scratched, unevenness is formed on the surface of the metal film that will be formed later, and if the metal film is scratched, the metal film will be damaged. As a result, there is a problem that defects such as pinholes are likely to occur in the resin film with metal films on both sides.

2. A vacuum film forming apparatus according to an embodiment of the present invention
(1) Configuration of Vacuum Film Forming Apparatus According to Embodiment of Present Invention Next, a vacuum film forming apparatus according to an embodiment of the present invention will be specifically described with reference to FIG. In FIG. 3 as well, a motor-driven roll is denoted by M (motor), a tension measuring roll by TP (tension pickup), and a free roll by F (free).

As shown in FIG. 3, the vacuum film forming apparatus according to this embodiment includes an unwinding chamber 100, a drying chamber 200, a protective film polymerization chamber 300, a first film forming chamber 400, a protective film polymerization and separation chamber 500, a second film forming chamber 500, and a second film forming chamber. It consists of a film chamber 600 and a winding chamber 700 . As in the apparatus according to the conventional example, a "surface treatment chamber" is provided between the drying chamber 200 and the protective film polymerization chamber 300 to improve adhesion between the film and the metal film by performing plasma irradiation or ion beam irradiation. It may be incorporated.

In the unwinding chamber 100, there are an unwinding roll 110 around which the uncoated long resin film 1 is wound, and a film sandwiched between the layers of the long resin film 1 when the long resin film 1 is unwound from the unwinding roll 110. A long interleaving paper take-up roll 120 is arranged to separate and collect the long interleaving paper 101, and the long resin film 1 unwound from the unwinding roll 110 is transferred to the free roll 111, the tension measuring roll 112, and the , the free roll 113 and the long interleaving paper 101 separated from the long resin film 1 is conveyed to the drying chamber 200 via the free roll 121, the tension measuring roll 122, and It is configured to be collected by the long interleaving paper take-up roll 120 via the free roll 123 . In addition, the film unwinding force [for example, 100 Newton (N)] from the unwinding roll 110 is measured by the tension measuring roll 112, and is configured to be feedback-controlled to the unwinding roll 110. The winding tension is measured by the tension measuring roll 122 and is configured to be feedback-controlled to the long interleaving paper winding roll 120 . In addition, the long interleaving paper 101 is sandwiched between film layers in order to prevent blocking between the film surfaces in the long resin film having both surfaces uncoated (see FIG. 4A).

A heater 222 for drying a film is arranged in the drying chamber 200, and the long resin film 1 (see FIG. 4B) carried in from the unwinding chamber 100 is dried, and motor-driven rolls 221 and free rolls 223 are provided. , a tension measuring roll 224 , a free roll 225 , a free roll 226 and a free roll 227 to be carried out to the protective film polymerization chamber 300 . Also, the dry tension of the film [eg, 50 Newton (N)] is measured by a tension measuring roll 224 and configured to be feedback-controlled to the motor-driven roll 221 .

A protective film unwinding roll 310 for unwinding a first protective film 301 is disposed in the protective film polymerization chamber 300, and the first protective film 301 unwound from the protective film unwinding roll 310 is transferred to a free roll 311. and the tension measuring roll 312 onto the free roll 313, while the long resin is transferred from the drying chamber 200 onto the free roll 313 through the free roll 227 and the free roll 314 of the protective film polymerization chamber 300. The film 1 is conveyed, and after the first protective film 301 is polymerized on the second surface 1β side of the long resin film 1 on the free roll 313 (see FIG. 4C), it is carried out to the first film forming chamber 400. is configured as The first protective film unwinding force from the protective film unwinding roll 310 is measured by a tension measuring roll 312 and is configured to be feedback-controlled to the protective film unwinding roll 310 .

Next, sputtering cathodes 432, 433, 434, and 435 as first film-forming means are arranged in the first film-forming chamber 400, are carried in from the protective film polymerization chamber 300, and are placed on the second surface 1β side. A first metal film (metal seed) m1 is formed on one side (first surface 1α: see FIG. 4C) of the long resin film 1 on which the one protective film 301 is polymerized (see FIG. 4D), and a free roll 401 , a motor-driven roll 436, a tension-measuring roll 438, a first cooling can roll 431, a tension-measuring roll 439, a motor-driven roll 437, and a free roll 402 to the protective film polymerization and separation chamber 500. It is configured. In addition, the film tension [loading tension: for example, 200 Newton (N)] upstream of the first cooling can roll 431 is measured by a tension measurement roll 438 and configured to be feedback-controlled to a motor-driven roll 436, and the first The film tension downstream of the cooling can roll 431 [carrying force: for example, 200 Newtons (N)] is measured by the tension measuring roll 439 and configured to be feedback-controlled to the motor driven roll 437 . Incidentally, reference numeral 400p in FIG. 3 denotes a shielding plate, and sputtering particles ejected from the target of the sputtering cathode as the first film-forming means deviate from a predetermined traveling path and reach the protective film polymerization chamber 300 or the protective film polymerization chamber 300. Also, it is configured to prevent it from going to the separation chamber 500 or the like.

In the protective film polymerization and separation chamber 500, a protective film unwinding roll 510 for unwinding the second protective film 501 is arranged, and the first protective film 501 unwound from the protective film unwinding roll 510 is While being transported onto the free roll 541 via the free roll 511 and the tension measuring roll 512, the free roll 402 and the protective film polymerization from the first film forming chamber 400 and the motor driven roll 513 and the tension measuring roll in the separation chamber 500 514, the long resin film 1 is transported onto the free roll 541, and on the free roll 541, the first surface 1α of the long resin film 1 (the first surface 1α formed in the first film forming chamber 400). The second protective film 501 is polymerized on the metal film m1) side (see FIG. 4E). The second protective film unwinding force from the protective film unwinding roll 510 is measured by a tension measuring roll 512 and is configured to be feedback-controlled to the protective film unwinding roll 510 . Further, in the protective film polymerization and separation chamber 500, a protective film take-up roll for separating and collecting the first protective film 301 (see FIG. 4C) polymerized on the second surface 1β side of the long resin film 1 is provided. 520 is arranged, and the first protective film 301 is separated from the long resin film 1 conveyed onto the free roll 543 via the free rolls 541 and 542, and the separated first protective film 301 is It is configured to be collected by the protective film take-up roll 520 via the tension measurement roll 522 and the free roll 521 . The winding tension of the first protective film 301 is measured by a tension measuring roll 522 and feedback-controlled to the protective film winding roll 520 . Then, on the free roll 543, the first protective film 301 is separated and the second surface 1β side is exposed (see FIG. 4F). It is configured to be carried out to the second film forming chamber 600 .

Next, in the second film forming chamber 600, sputtering cathodes 652, 653, 654, and 655 as second film forming means are arranged, and the protective film is polymerized and the long resin film 1 carried in from the separation chamber 500 is removed. A second metal film (metal seed) m2 is formed on the other side (second surface 1β: see FIG. 4B) (see FIG. 4G), and a motor drive roll 656, a tension measurement roll 658, and a second cooling can roll 651 , a tension measuring roll 659 , and a motor-driven roll 657 to be carried out to the winding chamber 700 . In addition, the film tension [loading tension: for example, 200 Newton (N)] upstream of the second cooling can roll 651 is measured by a tension measurement roll 658 and configured to be feedback-controlled to a motor-driven roll 656. The film tension [carrying force: eg, 200 Newton (N)] downstream of the second cooling can roll 651 is measured by a tension measuring roll 659 and is configured to be feedback-controlled to a motor-driven roll 657 . Incidentally, reference numeral 600p in FIG. 3 indicates a shielding plate.

A winding roll 741 and a long interleaving paper unwinding roll 742 are arranged in the winding chamber 700, and the long resin film 1 having metal films (metal seeds) on both sides carried in from the second film forming chamber 600 is used. However, while sandwiching the long interleaving paper 63 unwound from the long interleaving paper unwinding roll 742 between the layers of the film via the free roll 701, the tension measuring roll 702, and the free roll 747 (see FIG. 4H), It is configured to be taken up by a take-up roll 741 via a free roll 744 , a tension measurement roll 745 and a free roll 746 . The winding tension [for example, 100 Newton (N)] of the long resin film is measured by the tension measuring roll 745 and is configured to be feedback-controlled to the winding roll 741. The long interleaving paper winding force from the roll 742 is measured by the tension measuring roll 702 and feedback-controlled to the long interleaving paper unwinding roll 742 .

Then, it passes through the unwinding chamber 100, the drying chamber 200, the protective film polymerization chamber 300, the first film formation chamber 400, the protective film polymerization and separation chamber 500, and the second film formation chamber 600, and the metal film ( The long resin film 1 on which the metal seed is deposited is wound around the winding roll 741 in the winding chamber 700 while sandwiching the long interleaving paper 63 between the layers.

In addition, each of the unwinding chamber 100, the drying chamber 200, the protective film polymerization chamber 300, the first film forming chamber 400, the protective film polymerization and separation chamber 500, the second film forming chamber 600, and the winding chamber 700 The vacuum chambers are equipped with exhaust equipment. In particular, the first film-forming chamber 400 and the second film-forming chamber 600 are reduced in pressure to about 10 ^-4 Pa for sputtering film formation, and then reduced to 0.1 by introducing the sputtering gas. A pressure adjustment of about 10 Pa is performed. A known gas such as argon is used as the sputtering gas, and a gas such as oxygen is further added depending on the purpose. The shape and material of each vacuum chamber are not particularly limited as long as they can withstand such a reduced pressure state, and various types can be used. Various devices such as a dry pump, a turbomolecular pump, and a cryo-coil (not shown) are provided to reduce the pressure in each vacuum chamber and maintain that state.

Also, when a metal film (metal seed) is formed by sputtering, a plate-shaped target is used as shown in FIG. may occur. If this is a problem, it is preferable to use a cylindrical rotary target that does not generate nodules and has a high target usage efficiency. Also, although a magnetron sputtering cathode is illustrated in the vacuum film forming apparatus of FIG. A film forming means is incorporated.

(2) Effects of the Vacuum Film Forming Apparatus According to the Embodiment of the Present Invention According to the vacuum film forming apparatus according to the present embodiment, the long resin film 1 can The first protective film 301 is polymerized on the surface 1β (non-film-formed surface) side, and the first surface 1α (formed in the first film-forming chamber 400) of the long resin film 1 before being carried into the second film-forming chamber 600. Since the second protective film 501 is polymerized on the side of the deposited first metal film m1), the long resin film 1 in the first film forming chamber 400 and the second film forming chamber 600 is covered with the first protective film 301 and the second film forming chamber 600. It is wrapped around the outer peripheral surfaces of the first cooling can roll 431 and the second cooling can roll 651 with the second protective film 501 interposed therebetween.

Then, in the first film forming chamber 400, the long resin film 1 is brought into strong contact with the outer peripheral surface of the first cooling can roll 431 and the outer peripheral surfaces of the motor-driven rolls 436 and 437. Even if the long resin film 1 strongly contacts the outer peripheral surface of the second cooling can roll 651, the motor-driven roll 656, and the outer peripheral surface of the motor-driven roll 657 in the chamber 600, the long resin film 1 and these rolls do not move. Due to the first protective film 301 and the second protective film 501 interposed in the long resin film 1, the non-film-formed surface (second surface 1β) and the first metal film m1 surface (first surface 1α) are less likely to be scratched. Therefore, it is possible to produce a high-quality metal-coated resin film free from pinholes in the wet-plated layers formed on the first metal film m1 and the second metal film m2 (metal seed).

(3) Film material (3-1) Long resin film Long resin films that can be applied to resin films with metal films include polyimide films, polyamide films, polyester films, polytetrafluoroethylene films, Heat-resistant resin films selected from polyphenylene sulfide films, polyethylene naphthalate films, and liquid crystal polymer films are exemplified. This is because the resin film with a metal film obtained by using these resin films is excellent in the flexibility required for the flexible wiring substrate described above, the strength required in practical use, and the electrical insulation suitable as a wiring material. .

(3-2) Protective film Examples of protective films include polyethylene, polypropylene, polyethylene terephthalate, polyethylene naphthalate, polystyrene, polyvinyl alcohol, polycarbonate, polyphenylene sulfide, polyetheretherketone, polyethersulfone, aramid, polyimide and triacetate. A single substance or a composite obtained by pasting these together is exemplified.

(3-3) Long interleaving paper Examples of the long interleaving paper sandwiched between the layers of the long resin film include polyimide film, polyamide film, polyester film, polytetrafluoroethylene film, polyphenylene sulfide film, Resin films selected from polyethylene naphthalate films and liquid crystal polymer films are exemplified.

Examples of the present invention will be specifically described below.

[Deposition of metal film (metal seed)]
A metal film (metal seed) was formed on both surfaces (first surface 1α and second surface 1β) of the long resin film using the vacuum film forming apparatus (sputtering web coater) shown in FIG. For the long resin film 1 shown in FIG. 3, a heat-resistant polyimide film "Upilex (registered trademark)" manufactured by Ube Industries, Ltd. having a width of 600 mm, a length of 1000 m, and a thickness of 25 μm is used. The first metal film m1 and the second metal film m2 (metal seed) formed on the first surface 1α and the second surface 1β of 1 are a second layer Cu film formed on the first layer Ni—Cr film. It was supposed to be a film.

That is, a Ni—Cr target is used as the target of the magnetron sputtering cathode 432 in the first film forming chamber 400, and a Cu target is used as the target of the magnetron sputtering cathodes 433, 434, and 435. A Ni—Cr target was used as the target of the sputtering cathode 652, and a Cu target was used as the targets of the magnetron sputtering cathodes 653, 654, and 655. FIG.

Then, after exhausting the air in the first film formation chamber 400 and the second film formation chamber 600 to 5 Pa using a plurality of dry pumps, 3 × 10 It was evacuated to ^-3 Pa.

Next, while starting the rotary drive device of the sputtering web coater to transport the long resin film 1 at a transport speed of 5 m/min, argon gas was introduced at 300 sccm, and 20 kW was supplied to the Ni—Cr target magnetron sputtering cathode. , a power of 30 kW is applied to the magnetron sputtering cathode of the Cu target, and the Ni—Cr film 25 nm as the first layer and the Cu film 100 nm as the second layer are formed on the first surface 1α of the long resin film 1 and the second surface. A film was formed on each of the two surfaces 1β.

Then, the long resin film 1 in which the metal film (metal seed) is formed on the first surface 1α and the second surface 1β is carried into the winding chamber 700, and the long resin film 1 is held so as not to cause blocking. The long resin film 1 was wound around the take-up roll 741 while sandwiching the long interleaving paper 63 between the layers.

A PET film having a thickness of 10 μm is applied to the first protective film 301, the second protective film 501, and the long interleaving paper 63. The projecting force is set to 100 Newtons (N), the film drying tension in the drying chamber 200 is set to 50 Newtons (N), and the film tension upstream of the can rolls of the first film forming chamber 400 and the second film forming chamber 600 [ Carry-in tension] and film tension downstream of the can roll [carrying out force] are each set to 200 Newtons (N), and the film winding tension in the winding chamber 700 is set to 100 Newtons (N).

[Formation of wet plating layer]
A metal film (metal seed) composed of a Ni—Cr layer and a Cu layer is formed on both sides, a long interleaving paper 63 for blocking prevention is sandwiched between the film layers, and a second protective film is provided on the first surface 1α side. The long resin film 1 on which 501 is polymerized is unwound from the unwinding roll of the "wet plating device" while separating the long interleaving paper 63 and the second protective film 501, respectively, and the long resin film is placed in the plating bath. 1 is carried in, the surface of the metal film (metal seed) is washed with an "atmospheric pressure plasma cleaning device", and after that, a long resin The film 1 was carried in and a Cu layer (wet plating layer) of 1 μm was plated on the metal film (metal seed).

[Evaluation method]
The presence or absence of pinholes in the obtained resin film with a metal film was evaluated. First, the metal layer [metal seed and wet plating layer] on one side is masked and the metal layer on the other side is removed by etching. Pinholes with a diameter of 3 μm or more were counted and evaluated by image analysis.

As a result, it was confirmed that pinholes were remarkably reduced in the metal film-attached resin film obtained in this example, as compared with the case of using the vacuum film forming apparatus according to the conventional example.

INDUSTRIAL APPLICABILITY According to the present invention, high-quality metal-coated resin films free from pinholes can be produced with a high yield. It has industrial applicability applied as a device.

m1 first metal film (metal seed)
m2 second metal film (metal seed)
1 long resin film 1α first surface 1β second surface 10 unwinding chamber 11 unwinding roll 12 free roll 13 tension measuring roll 14 free roll 20 drying chamber 21 motor driven roll 22 heater 23 free roll 24 tension measuring roll 25 free roll 26 free roll 3p shielding plate 30 first film forming chamber 31 first cooling can roll 32 first film forming means (sputtering cathode)
33 first film forming means (sputtering cathode)
34 first film forming means (sputtering cathode)
35 first film forming means (sputtering cathode)
36 motor driven roll 37 motor driven roll 38 tension measurement roll 39 tension measurement roll 40 transfer chamber 41 free roll 42 free roll 43 free roll 50 second film forming chamber 51 second cooling can roll 52 second film forming means (sputtering cathode)
53 second film forming means (sputtering cathode)
54 second film forming means (sputtering cathode)
55 second film forming means (sputtering cathode)
56 motor-driven roll 57 motor-driven roll 58 tension measurement roll 59 tension measurement roll 60 winding chamber 61 winding roll 62 long interleaving paper unwinding roll 63 long interleaving paper 64 free roll 65 tension measuring roll 66 free roll 67 free roll 100 Unwinding chamber 101 Long interleaving paper 110 Unwinding roll 111 Free roll 112 Tension measuring roll 113 Free roll 120 Long interleaving paper winding roll 121 Free roll 122 Tension measuring roll 123 Free roll 200 Drying chamber 221 Motor drive roll 222 Heater 223 Free Roll 224 Tension measuring roll 225 Free roll 226 Free roll 227 Free roll 300 Protective film polymerization chamber 301 First protective film 310 Protective film unwinding roll 311 Free roll 312 Tension measuring roll 313 Free roll 314 Free roll 400p Shield plate 400 First composition Film Chamber 401 Free Roll 402 Free Roll 431 First Cooling Can Roll 432 First Film Forming Means (Sputtering Cathode)
433 first film forming means (sputtering cathode)
434 first film forming means (sputtering cathode)
435 first film forming means (sputtering cathode)
436 motor-driven roll 437 motor-driven roll 438 tension-measuring roll 439 tension-measuring roll 500 protective film polymerization and separation chamber 501 second protective film 510 protective film unwinding roll 511 free roll 512 tension-measuring roll 513 motor-driven roll 514 tension-measuring roll 520 Protective film take-up roll 521 Free roll 522 Tension measurement roll 531 Motor driven roll 532 Tension measurement roll 541 Free roll 542 Free roll 543 Free roll 600p Shielding plate 600 Second film forming chamber 601 Free roll 602 Free roll 651 Second cooling can roll 652 second film forming means (sputtering cathode)
653 second film forming means (sputtering cathode)
654 second film forming means (sputtering cathode)
655 second film forming means (sputtering cathode)
656 Motor drive roll 657 Motor drive roll 658 Tension measurement roll 659 Tension measurement roll 700 Winding chamber 701 Free roll 702 Tension measurement roll 741 Winding roll 742 Long interleaving paper unwinding roll 744 Free roll 745 Tension measurement roll 746 Free roll 747 Free roll

Claims (6)

An unwinding chamber for unwinding the long resin film wound around the unwinding roll, and a first film forming chamber for forming a first metal film on the first surface side of the long resin film supplied from the unwinding chamber. a second film forming chamber for forming a second metal film on the second surface side of the long resin film; and a winding chamber for winding,
The first film forming chamber includes a rotationally driven first cooling can roll that wraps and cools a long resin film transported by roll-to-roll around the outer peripheral surface;
a pair of tension measuring rolls for measuring the tension of the long resin film upstream and downstream of the first cooling can roll;
Based on the tension of the long resin film upstream and downstream of the first cooling can roll measured by the pair of tension measuring rolls, the conveying tension of the long resin film in the first film forming chamber is determined by the unwinding chamber and the winding chamber. A pair of motor-driven rolls controlled to be higher than the conveying tension of the long resin film in
Having a first film forming means with a heat load arranged along the outer peripheral surface of the first cooling can roll, and
The second film forming chamber includes a rotationally driven second cooling can roll that wraps and cools a long resin film transported by roll-to-roll around the outer peripheral surface;
a pair of tension measuring rolls for measuring the tension of the long resin film upstream and downstream of the second cooling can roll;
Based on the tension of the long resin film upstream and downstream of the second cooling can roll measured by the pair of tension measuring rolls, the conveying tension of the long resin film in the second film forming chamber is determined by the unwinding chamber and the winding chamber. A pair of motor-driven rolls controlled to be higher than the conveying tension of the long resin film in the first film forming chamber and equal to the conveying tension of the long resin film in the first film forming chamber;
In a vacuum film forming apparatus having a second film forming means with a heat load arranged along the outer peripheral surface of the second cooling can roll ,
Between the unwinding chamber and the first film forming chamber, the first protective film is polymerized on the second surface side of the long resin film during transportation, and the first cooling can roll and the second surface of the long resin film are formed. A protective film polymerization chamber is provided in which a first protective film is interposed between and, and between the first film formation chamber and the second film formation chamber, the first metal film is formed on the first surface side A second protective film is polymerized on the first metal film side of the long resin film to interpose the second protective film between the second cooling can roll and the first metal film of the long resin film, A protective film polymerization and separation chamber is provided for separating the first protective film polymerized on the second surface side of the long resin film and exposing the second surface of the long resin film to the second film forming means side. A vacuum deposition apparatus characterized by comprising: The protective film is polyethylene, polypropylene, polyethylene terephthalate, polyethylene naphthalate, polystyrene, polyvinyl alcohol, polycarbonate, polyphenylene sulfide, polyether ether ketone, polyether sulfone, aramid, polyimide, triacetate, or a laminate thereof. 2. The vacuum film forming apparatus according to claim 1, wherein the vacuum film forming apparatus is composed of a composite. 2. The vacuum film-forming apparatus according to claim 1, wherein said film-forming means involving heat load is magnetron sputtering. A film unwinding step of unwinding the long resin film wound around the unwinding roll in the unwinding chamber ;
The second surface side of the long resin film unwound in the first film forming chamber is wound around the first cooling can roll, and the first cooling can roll is arranged along the outer peripheral surface of the first cooling can roll. a first film forming step of forming a first metal film on the first surface side of the long resin film by film forming means;
In the second film-forming chamber, the first metal film side of the long resin film on which the first metal film is formed is wound around the second cooling can roll, and is arranged along the outer peripheral surface of the second cooling can roll. a second film forming step of forming a second metal film on the second surface side of the long resin film by a second film forming means accompanied by a heat load;
A film winding step of winding the long resin film on which the first metal film and the second metal film are formed in the winding chamber onto a winding roll;
has
A pair of tension measuring rolls provided in the first film forming chamber measures the tension of the long resin film upstream and downstream of the first cooling can roll. A pair of motor-driven rolls provided in the first film forming chamber is controlled based on the tension of the long resin film, and the conveying tension of the long resin film in the first film forming chamber is adjusted to the tension in the unwinding chamber and the winding chamber. Along with making it higher than the conveying tension of the length resin film,
A pair of tension measuring rolls provided in the second film forming chamber measures the tension of the long resin film upstream and downstream of the second cooling can roll. A pair of motor-driven rolls provided in the second film forming chamber is controlled based on the tension of the long resin film, and the conveying tension of the long resin film in the second film forming chamber changes the tension in the unwinding chamber and the winding chamber. In the vacuum film forming method in which the conveying tension is higher than the conveying tension of the long resin film and equal to the conveying tension of the long resin film in the first film forming chamber,
Between the film unwinding step and the first film forming step, the first protective film is polymerized on the second surface side of the long resin film to form a bond between the first cooling can roll and the second surface of the long resin film. A long resin film having a first protective film interposed therebetween and having a first metal film formed on the first surface side between the first film forming step and the second film forming step The second protective film is polymerized on the first metal film side so that the second protective film is interposed between the second cooling can roll and the first metal film of the long resin film, and the long resin film A vacuum film forming method, wherein the first protective film polymerized on the second surface side of is separated so that the second surface of the long resin film is exposed to the second film forming means side. The protective film is polyethylene, polypropylene, polyethylene terephthalate, polyethylene naphthalate, polystyrene, polyvinyl alcohol, polycarbonate, polyphenylene sulfide, polyether ether ketone, polyether sulfone, aramid, polyimide, triacetate, or a laminate thereof. 5. The vacuum film forming method according to claim 4, wherein the film is composed of a composite. 5. The vacuum film forming method according to claim 4, wherein said film forming means involving heat load is magnetron sputtering.

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