JP2016070930A5 - - Google Patents

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JP2016070930A5
JP2016070930A5 JP2015184244A JP2015184244A JP2016070930A5 JP 2016070930 A5 JP2016070930 A5 JP 2016070930A5 JP 2015184244 A JP2015184244 A JP 2015184244A JP 2015184244 A JP2015184244 A JP 2015184244A JP 2016070930 A5 JP2016070930 A5 JP 2016070930A5
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Japan
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correction
value
correction value
reference device
group
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JP2015184244A
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Japanese (ja)
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JP6487302B2 (ja
JP2016070930A (ja
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Priority claimed from DE102014219188.2A external-priority patent/DE102014219188A1/de
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JP2015184244A 2014-09-23 2015-09-17 位置測定装置のエラーを補正する方法 Active JP6487302B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014219188.2 2014-09-23
DE102014219188.2A DE102014219188A1 (de) 2014-09-23 2014-09-23 Verfahren zur Fehlerkorrektur in Positionsmesseinrichtungen

Publications (3)

Publication Number Publication Date
JP2016070930A JP2016070930A (ja) 2016-05-09
JP2016070930A5 true JP2016070930A5 (https=) 2018-11-01
JP6487302B2 JP6487302B2 (ja) 2019-03-20

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JP2015184244A Active JP6487302B2 (ja) 2014-09-23 2015-09-17 位置測定装置のエラーを補正する方法

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US (1) US10060772B2 (https=)
EP (1) EP3001151B1 (https=)
JP (1) JP6487302B2 (https=)
CN (1) CN105444708B (https=)
DE (1) DE102014219188A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016222275A1 (de) * 2016-11-14 2018-05-17 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Verfahren zum Betreiben einer Positionsmesseinrichtung
CN108038331B (zh) * 2017-12-27 2022-11-11 重庆工商职业学院 一种基于云计算的高精度温度数据校正方法
CN112697186B (zh) * 2019-10-23 2022-03-25 上海微电子装备（集团）股份有限公司 测量校正装置和测量校正方法
CN116457634A (zh) * 2020-11-20 2023-07-18 松下知识产权经营株式会社 编码器和信息处理方法
DE102021121869A1 (de) 2021-08-24 2023-03-02 Schaeffler Technologies AG & Co. KG Verfahren zur Kalibrierung und/oder Linearisierung eines Positionssensors; Positionssensor; Hinterachslenkung; Fahrzeug; Computerprogramm

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3024716C2 (de) * 1980-06-30 1986-10-23 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Digitales Längen- oder Winkelmeßsystem
DE58904087D1 (de) * 1989-07-21 1993-05-19 Heidenhain Gmbh Dr Johannes Verfahren zum interpolieren von positionsmesssignalen.
JPH08201110A (ja) * 1995-01-30 1996-08-09 Sony Magnescale Inc 内挿装置
US6606510B2 (en) * 2000-08-31 2003-08-12 Mallinckrodt Inc. Oximeter sensor with digital memory encoding patient data
DE10244650A1 (de) * 2002-09-25 2004-04-08 Siemens Ag Kalibriersystem, insbesondere für ein Schwingungsmesssystem
DE10359415A1 (de) 2003-12-16 2005-07-14 Trimble Jena Gmbh Verfahren zur Kalibrierung eines Vermessungsgeräts
CN1947062A (zh) 2004-02-23 2007-04-11 Asml荷兰有限公司 基于散射测量数据确定工艺参数值的方法
DE102005043569A1 (de) * 2005-09-12 2007-03-22 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US7619207B2 (en) 2006-11-08 2009-11-17 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
ES2769304T3 (es) 2012-04-05 2020-06-25 Fidia Spa Dispositivo para corrección de errores para máquinas CNC
CN103591913B (zh) 2013-11-18 2016-01-13 沈阳黎明航空发动机(集团)有限责任公司 一种五坐标测量机综合误差校准方法

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