JP2016040988A5 - - Google Patents

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Publication number
JP2016040988A5
JP2016040988A5 JP2014164622A JP2014164622A JP2016040988A5 JP 2016040988 A5 JP2016040988 A5 JP 2016040988A5 JP 2014164622 A JP2014164622 A JP 2014164622A JP 2014164622 A JP2014164622 A JP 2014164622A JP 2016040988 A5 JP2016040988 A5 JP 2016040988A5
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JP
Japan
Prior art keywords
piezoelectric
diaphragm
drive device
leaf spring
piezoelectric drive
Prior art date
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Application number
JP2014164622A
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English (en)
Japanese (ja)
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JP6361365B2 (ja
JP2016040988A (ja
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Priority to JP2014164622A priority Critical patent/JP6361365B2/ja
Priority claimed from JP2014164622A external-priority patent/JP6361365B2/ja
Publication of JP2016040988A publication Critical patent/JP2016040988A/ja
Publication of JP2016040988A5 publication Critical patent/JP2016040988A5/ja
Application granted granted Critical
Publication of JP6361365B2 publication Critical patent/JP6361365B2/ja
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JP2014164622A 2014-08-13 2014-08-13 圧電駆動装置及びその駆動方法、ロボット及びその駆動方法 Active JP6361365B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014164622A JP6361365B2 (ja) 2014-08-13 2014-08-13 圧電駆動装置及びその駆動方法、ロボット及びその駆動方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014164622A JP6361365B2 (ja) 2014-08-13 2014-08-13 圧電駆動装置及びその駆動方法、ロボット及びその駆動方法

Publications (3)

Publication Number Publication Date
JP2016040988A JP2016040988A (ja) 2016-03-24
JP2016040988A5 true JP2016040988A5 (enExample) 2017-08-24
JP6361365B2 JP6361365B2 (ja) 2018-07-25

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ID=55541148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014164622A Active JP6361365B2 (ja) 2014-08-13 2014-08-13 圧電駆動装置及びその駆動方法、ロボット及びその駆動方法

Country Status (1)

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JP (1) JP6361365B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6828342B2 (ja) 2016-09-23 2021-02-10 セイコーエプソン株式会社 圧電アクチュエーター、圧電モーター、ロボット、電子部品搬送装置、プリンターおよび圧電アクチュエーターの製造方法
JP7272177B2 (ja) * 2019-08-27 2023-05-12 セイコーエプソン株式会社 圧電駆動装置およびロボット

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009096205A1 (ja) * 2008-01-29 2009-08-06 Konica Minolta Opto, Inc. アクチュエータ機構
JP5217489B2 (ja) * 2008-02-25 2013-06-19 コニカミノルタアドバンストレイヤー株式会社 駆動機構
JP5611565B2 (ja) * 2009-10-27 2014-10-22 スタンレー電気株式会社 圧電振動発電機及びこれを用いた発電装置
JP5765993B2 (ja) * 2011-03-31 2015-08-19 キヤノン株式会社 振動型駆動装置
JP5978907B2 (ja) * 2012-10-12 2016-08-24 セイコーエプソン株式会社 圧電アクチュエーター、ロボットハンド、ロボット、電子部品搬送装置、電子部品検査装置、送液ポンプ、印刷装置、電子時計、投影装置、搬送装置

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