JP2016014657A5 - - Google Patents

Download PDF

Info

Publication number
JP2016014657A5
JP2016014657A5 JP2015113703A JP2015113703A JP2016014657A5 JP 2016014657 A5 JP2016014657 A5 JP 2016014657A5 JP 2015113703 A JP2015113703 A JP 2015113703A JP 2015113703 A JP2015113703 A JP 2015113703A JP 2016014657 A5 JP2016014657 A5 JP 2016014657A5
Authority
JP
Japan
Prior art keywords
light beam
optical axis
inclination
tilting
measuring apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015113703A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016014657A (ja
JP6566416B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2015113703A priority Critical patent/JP6566416B2/ja
Priority claimed from JP2015113703A external-priority patent/JP6566416B2/ja
Publication of JP2016014657A publication Critical patent/JP2016014657A/ja
Publication of JP2016014657A5 publication Critical patent/JP2016014657A5/ja
Application granted granted Critical
Publication of JP6566416B2 publication Critical patent/JP6566416B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2015113703A 2014-06-10 2015-06-04 光ビーム測定装置 Active JP6566416B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015113703A JP6566416B2 (ja) 2014-06-10 2015-06-04 光ビーム測定装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014119392 2014-06-10
JP2014119392 2014-06-10
JP2015113703A JP6566416B2 (ja) 2014-06-10 2015-06-04 光ビーム測定装置

Publications (3)

Publication Number Publication Date
JP2016014657A JP2016014657A (ja) 2016-01-28
JP2016014657A5 true JP2016014657A5 (cg-RX-API-DMAC10.html) 2018-04-12
JP6566416B2 JP6566416B2 (ja) 2019-08-28

Family

ID=54769344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015113703A Active JP6566416B2 (ja) 2014-06-10 2015-06-04 光ビーム測定装置

Country Status (2)

Country Link
US (1) US9488519B2 (cg-RX-API-DMAC10.html)
JP (1) JP6566416B2 (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6878866B2 (ja) * 2016-12-15 2021-06-02 株式会社サタケ 光学式選別機用光学ユニット

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61140887A (ja) * 1984-12-14 1986-06-27 富士通株式会社 ２軸ゴニオステ−ジ
JP3529486B2 (ja) * 1995-04-18 2004-05-24 株式会社東芝 光ディスクドライブの組み立て方法
JP2000352505A (ja) * 1999-04-05 2000-12-19 Toshiba Corp 膜厚測定方法および装置、薄膜処理装置並びに半導体装置の製造方法
JP2003121572A (ja) * 2001-10-10 2003-04-23 Fuji Photo Optical Co Ltd 載物ステージ
JP2006330210A (ja) 2005-05-24 2006-12-07 Olympus Corp レンズの心出し方法及び装置
JP2009243920A (ja) * 2008-03-28 2009-10-22 Jfe Steel Corp 基準板、表面検査装置の光軸調整方法、及び表面検査装置
JP5134603B2 (ja) * 2009-09-09 2013-01-30 株式会社日立ハイテクノロジーズ 光ビーム調整方法及び光ビーム調整装置
US8325344B2 (en) * 2009-12-18 2012-12-04 Hewlett-Packard Development Company, L.P. Optical density determination methods and apparatus

Similar Documents

Publication Publication Date Title
JP2014139938A5 (cg-RX-API-DMAC10.html)
JP2017053803A5 (cg-RX-API-DMAC10.html)
JP2009193008A5 (cg-RX-API-DMAC10.html)
WO2017165343A3 (en) lMAGING SYSTEM WITH ANCILLARY lMAGE DETECTOR FOR SAMPLE LOCATION
RU2015119372A (ru) Устройство и способ определения отклонения двух тел от заданного положения
EA201691636A1 (ru) Двухрежимные система и способ досмотра быстро движущихся объектов с использованием излучения
JP2015106104A5 (cg-RX-API-DMAC10.html)
RU2017116529A (ru) Поворот детектора, управляемый коллимацией рентгеновского излучения
JP2015049280A5 (cg-RX-API-DMAC10.html)
JP2014147500A5 (cg-RX-API-DMAC10.html)
EP2775721A3 (en) Projector
JP2017044773A5 (cg-RX-API-DMAC10.html)
JP2018527962A5 (cg-RX-API-DMAC10.html)
JP2018072495A5 (cg-RX-API-DMAC10.html)
WO2018101023A8 (ja) Ｘ線反射率測定装置
JP2018072267A5 (cg-RX-API-DMAC10.html)
JP2009100947A5 (cg-RX-API-DMAC10.html)
JP2017500603A5 (cg-RX-API-DMAC10.html)
JP2019118652A5 (cg-RX-API-DMAC10.html)
WO2017101895A3 (de) Transparente mess-sonde für strahl-abtastung
JP2018151187A5 (cg-RX-API-DMAC10.html)
JP2016118445A5 (cg-RX-API-DMAC10.html)
JP2017215516A5 (cg-RX-API-DMAC10.html)
JP2015157040A5 (cg-RX-API-DMAC10.html)
JP2016118636A5 (cg-RX-API-DMAC10.html)