JP2016013146A5 - - Google Patents

Download PDF

Info

Publication number
JP2016013146A5
JP2016013146A5 JP2014135134A JP2014135134A JP2016013146A5 JP 2016013146 A5 JP2016013146 A5 JP 2016013146A5 JP 2014135134 A JP2014135134 A JP 2014135134A JP 2014135134 A JP2014135134 A JP 2014135134A JP 2016013146 A5 JP2016013146 A5 JP 2016013146A5
Authority
JP
Japan
Prior art keywords
electrode
piezoelectric layer
ultrasonic
ultrasonic sensor
ultrasonic element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014135134A
Other languages
English (en)
Japanese (ja)
Other versions
JP6323671B2 (ja
JP2016013146A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2014135134A priority Critical patent/JP6323671B2/ja
Priority claimed from JP2014135134A external-priority patent/JP6323671B2/ja
Publication of JP2016013146A publication Critical patent/JP2016013146A/ja
Publication of JP2016013146A5 publication Critical patent/JP2016013146A5/ja
Application granted granted Critical
Publication of JP6323671B2 publication Critical patent/JP6323671B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2014135134A 2014-06-30 2014-06-30 超音波センサー及びその製造方法 Active JP6323671B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014135134A JP6323671B2 (ja) 2014-06-30 2014-06-30 超音波センサー及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014135134A JP6323671B2 (ja) 2014-06-30 2014-06-30 超音波センサー及びその製造方法

Publications (3)

Publication Number Publication Date
JP2016013146A JP2016013146A (ja) 2016-01-28
JP2016013146A5 true JP2016013146A5 (enExample) 2017-07-27
JP6323671B2 JP6323671B2 (ja) 2018-05-16

Family

ID=55229923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014135134A Active JP6323671B2 (ja) 2014-06-30 2014-06-30 超音波センサー及びその製造方法

Country Status (1)

Country Link
JP (1) JP6323671B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6862820B2 (ja) * 2016-12-26 2021-04-21 セイコーエプソン株式会社 超音波デバイス及び超音波装置
JP6874463B2 (ja) * 2017-03-27 2021-05-19 セイコーエプソン株式会社 圧電素子、圧電アクチュエーター、超音波探触子、超音波装置、電子機器、液体噴射ヘッド、及び液体噴射装置
JP7327637B2 (ja) * 2020-02-26 2023-08-16 株式会社村田製作所 超音波センサ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61114178A (ja) * 1984-11-08 1986-05-31 Omron Tateisi Electronics Co マトリクスアレイ型超音波振動子
JPS646858A (en) * 1987-06-30 1989-01-11 Yokogawa Medical Syst Ultrasonic diagnostic device
US20050124884A1 (en) * 2003-12-05 2005-06-09 Mirsaid Bolorforosh Multidimensional transducer systems and methods for intra patient probes
JP2006025805A (ja) * 2004-07-12 2006-02-02 Fujinon Corp 超音波検査装置

Similar Documents

Publication Publication Date Title
JP2009164481A5 (enExample)
JP2012146793A5 (enExample)
JP2018528622A5 (enExample)
JP2009003434A5 (enExample)
JP2017513572A5 (enExample)
JP2016033979A5 (enExample)
JP2013168419A5 (enExample)
EP2770409A3 (en) Touch panel and manufacturing method thereof
JP2017005117A5 (enExample)
EP3018711A8 (en) Semiconductor device and manufacturing method for the semiconductor device
JP2016040993A5 (enExample)
JP2016013146A5 (enExample)
JP2016035967A5 (enExample)
EP2873527A1 (en) Piezoelectric actuator array
JP2013046086A5 (enExample)
JP2016207959A5 (enExample)
JP2016107420A5 (enExample)
JP2019536274A5 (enExample)
JP2014138071A5 (enExample)
JP2014057124A5 (enExample)
JP2014172202A5 (enExample)
JP2017069998A5 (enExample)
JP2014235134A5 (enExample)
EP2829960A3 (en) Touch screen panel and fabricating method thereof
JP2018032757A5 (enExample)