JP2016009767A5 - - Google Patents
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- JP2016009767A5 JP2016009767A5 JP2014129706A JP2014129706A JP2016009767A5 JP 2016009767 A5 JP2016009767 A5 JP 2016009767A5 JP 2014129706 A JP2014129706 A JP 2014129706A JP 2014129706 A JP2014129706 A JP 2014129706A JP 2016009767 A5 JP2016009767 A5 JP 2016009767A5
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- JP
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- 238000001514 detection method Methods 0.000 claims description 29
- 239000000758 substrate Substances 0.000 claims description 24
- 230000003287 optical effect Effects 0.000 claims description 7
- 238000000034 method Methods 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000012986 modification Methods 0.000 claims 1
- 230000004048 modification Effects 0.000 claims 1
- 239000002243 precursor Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014129706A JP6371602B2 (ja) | 2014-06-24 | 2014-06-24 | 露光装置、露光方法、および物品の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014129706A JP6371602B2 (ja) | 2014-06-24 | 2014-06-24 | 露光装置、露光方法、および物品の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016009767A JP2016009767A (ja) | 2016-01-18 |
| JP2016009767A5 true JP2016009767A5 (enExample) | 2017-08-03 |
| JP6371602B2 JP6371602B2 (ja) | 2018-08-08 |
Family
ID=55227136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014129706A Active JP6371602B2 (ja) | 2014-06-24 | 2014-06-24 | 露光装置、露光方法、および物品の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6371602B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6853700B2 (ja) * | 2017-03-14 | 2021-03-31 | キヤノン株式会社 | 露光装置、露光方法、プログラム、決定方法及び物品の製造方法 |
| KR20210001968A (ko) * | 2019-06-27 | 2021-01-06 | 캐논 가부시끼가이샤 | 패턴 형성 방법 및 물품의 제조 방법 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0616478B2 (ja) * | 1983-12-19 | 1994-03-02 | 株式会社ニコン | 投影露光装置の位置合せ装置 |
| JPS62183515A (ja) * | 1986-02-07 | 1987-08-11 | Canon Inc | 位置合せ装置 |
| JP2773147B2 (ja) * | 1988-08-19 | 1998-07-09 | 株式会社ニコン | 露光装置の位置合わせ装置及び方法 |
| JPH10172890A (ja) * | 1996-12-12 | 1998-06-26 | Nikon Corp | 投影露光方法 |
| JP2001118768A (ja) * | 1999-10-15 | 2001-04-27 | Nikon Corp | マスクのアライメント方法および露光装置 |
| JP2003017382A (ja) * | 2001-06-28 | 2003-01-17 | Canon Inc | 露光装置およびデバイス製造方法 |
| JP2003059807A (ja) * | 2001-08-20 | 2003-02-28 | Nikon Corp | 露光方法及び露光装置、並びにデバイス製造方法 |
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2014
- 2014-06-24 JP JP2014129706A patent/JP6371602B2/ja active Active