JP2016006422A5 - - Google Patents

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Publication number
JP2016006422A5
JP2016006422A5 JP2015126670A JP2015126670A JP2016006422A5 JP 2016006422 A5 JP2016006422 A5 JP 2016006422A5 JP 2015126670 A JP2015126670 A JP 2015126670A JP 2015126670 A JP2015126670 A JP 2015126670A JP 2016006422 A5 JP2016006422 A5 JP 2016006422A5
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JP
Japan
Prior art keywords
illumination
configurations
area
shift
different
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JP2015126670A
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English (en)
Japanese (ja)
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JP6259422B2 (ja
JP2016006422A (ja
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Priority claimed from US12/409,788 external-priority patent/US8144973B2/en
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JP2015126670A 2009-03-24 2015-06-24 マルチモード・イメージング Active JP6259422B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/409,788 US8144973B2 (en) 2009-03-24 2009-03-24 Multi-modal imaging
US12/409,788 2009-03-24

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2012501500A Division JP6013181B2 (ja) 2009-03-24 2010-03-23 マルチモード・イメージング

Publications (3)

Publication Number Publication Date
JP2016006422A JP2016006422A (ja) 2016-01-14
JP2016006422A5 true JP2016006422A5 (enExample) 2017-08-24
JP6259422B2 JP6259422B2 (ja) 2018-01-10

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ID=42780217

Family Applications (2)

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JP2012501500A Active JP6013181B2 (ja) 2009-03-24 2010-03-23 マルチモード・イメージング
JP2015126670A Active JP6259422B2 (ja) 2009-03-24 2015-06-24 マルチモード・イメージング

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2012501500A Active JP6013181B2 (ja) 2009-03-24 2010-03-23 マルチモード・イメージング

Country Status (7)

Country Link
US (1) US8144973B2 (enExample)
JP (2) JP6013181B2 (enExample)
KR (1) KR101691242B1 (enExample)
CN (1) CN102341692B (enExample)
IL (1) IL214416A (enExample)
TW (1) TWI484163B (enExample)
WO (1) WO2010109455A1 (enExample)

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TWI724590B (zh) * 2019-10-25 2021-04-11 精信精密工業股份有限公司 自動缺陷檢測系統及檢測方法
TWI765337B (zh) 2019-12-13 2022-05-21 旺矽科技股份有限公司 雷射晶片檢測方法及設備
KR102216999B1 (ko) * 2020-09-28 2021-02-18 주식회사 하이브비젼 라인 스캔용 논-램버시안 표면 검사 시스템
US11734812B2 (en) * 2021-03-18 2023-08-22 UnitX, Inc. Fused imaging device and method
WO2023119883A1 (ja) * 2021-12-24 2023-06-29 富士フイルム株式会社 検査装置、印刷システム、検査システム及びキュアシステム、基板の製造方法及びプログラム
JP2023122140A (ja) * 2022-02-22 2023-09-01 株式会社Ｓｃｒｅｅｎホールディングス 教師データ生成装置、教師データ生成方法およびプログラム
TWI891285B (zh) * 2024-03-15 2025-07-21 由田新技股份有限公司 多重自動光學複判系統以及多重自動光學複判方法
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