JP2015537191A5 - - Google Patents
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- JP2015537191A5 JP2015537191A5 JP2015534776A JP2015534776A JP2015537191A5 JP 2015537191 A5 JP2015537191 A5 JP 2015537191A5 JP 2015534776 A JP2015534776 A JP 2015534776A JP 2015534776 A JP2015534776 A JP 2015534776A JP 2015537191 A5 JP2015537191 A5 JP 2015537191A5
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- JP
- Japan
- Prior art keywords
- sensor
- laser radiation
- layer
- substrate
- buffer layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261709060P | 2012-10-02 | 2012-10-02 | |
| US61/709,060 | 2012-10-02 | ||
| US13/944,830 US9012848B2 (en) | 2012-10-02 | 2013-07-17 | Laser power and energy sensor utilizing anisotropic thermoelectric material |
| US13/944,830 | 2013-07-17 | ||
| PCT/US2013/062450 WO2014055374A1 (en) | 2012-10-02 | 2013-09-27 | Laser power and energy sensor utilizing anisotropic thermoelectric material |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015537191A JP2015537191A (ja) | 2015-12-24 |
| JP2015537191A5 true JP2015537191A5 (enExample) | 2016-03-17 |
| JP6279589B2 JP6279589B2 (ja) | 2018-02-14 |
Family
ID=50384323
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015534776A Active JP6279589B2 (ja) | 2012-10-02 | 2013-09-27 | 異方性熱電材料を利用するレーザーパワーおよびエネルギーセンサ |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US9012848B2 (enExample) |
| EP (1) | EP2904360B1 (enExample) |
| JP (1) | JP6279589B2 (enExample) |
| CN (1) | CN104884918B (enExample) |
| WO (1) | WO2014055374A1 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9012848B2 (en) | 2012-10-02 | 2015-04-21 | Coherent, Inc. | Laser power and energy sensor utilizing anisotropic thermoelectric material |
| US9059346B2 (en) | 2012-10-02 | 2015-06-16 | Coherent, Inc. | Laser power and energy sensor utilizing anisotropic thermoelectric material |
| US20180087959A1 (en) * | 2016-09-29 | 2018-03-29 | Coherent, Inc. | Laser power and energy sensor using anisotropic thermoelectric material |
| IT201700070601A1 (it) * | 2017-06-23 | 2018-12-23 | Laser Point S R L | Rilevatore veloce di radiazione elettromagnetica. |
| IT201700070606A1 (it) * | 2017-06-23 | 2018-12-23 | Laser Point S R L | Rilevatore di radiazione elettromagnetica. |
| CN109103324A (zh) * | 2018-06-26 | 2018-12-28 | 昆明理工大学 | 一种热感生电压材料及其应用 |
| LV15536A (lv) * | 2019-04-26 | 2020-11-20 | Latvijas Universitātes Cietvielu Fizikas Institūts | Ātrdarbīgs redzamās gaismas un infrasarkanā starojuma sensors, tā izgatavošanas paņēmiens |
| CN110993778A (zh) * | 2019-12-13 | 2020-04-10 | 西南科技大学 | 一种基于薄膜横向热电效应的热流传感器 |
| CN111223983B (zh) * | 2020-02-28 | 2023-01-06 | 昆明先导新材料科技有限责任公司 | 宽禁带薄膜激光探测元件 |
| CN111710777B (zh) * | 2020-07-23 | 2025-08-26 | 中国空气动力研究与发展中心超高速空气动力研究所 | 一种以块状金属为敏感元件基底的新型原子层热电堆热流传感器及其封装工艺 |
| CN113206184B (zh) * | 2021-04-30 | 2023-04-07 | 河北大学 | 一种基于硒化铅薄膜的自驱动紫外光探测器 |
| CN115666203B (zh) | 2022-12-26 | 2023-06-16 | 山东大学 | 热流传感器 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3596514A (en) | 1968-01-02 | 1971-08-03 | Coherent Radiation Lab Inc | Power meter for measurement of radiation |
| US3851174A (en) * | 1973-05-04 | 1974-11-26 | Ibm | Light detector for the nanosecond-dc pulse width range |
| US4082413A (en) | 1974-11-29 | 1978-04-04 | The Perkin-Elmer Corporation | Selective radiation absorption devices for producing heat energy |
| DE4306497C2 (de) | 1993-03-03 | 1995-01-05 | Hans Dr Lengfellner | Thermoelektrischer Detektor zur Detektion von kontinuierlicher und gepulster Strahlung und Verfahren zur Herstellung |
| JP3623001B2 (ja) | 1994-02-25 | 2005-02-23 | 住友電気工業株式会社 | 単結晶性薄膜の形成方法 |
| DE4434904A1 (de) * | 1994-09-29 | 1996-06-05 | Max Planck Gesellschaft | Thermoelektrische Strahlungsdetektoren auf der Basis perovskitartiger dotierter Schichten und Übergitter |
| US5678924A (en) | 1995-09-25 | 1997-10-21 | Coherent Inc. | Power meter head for laser power measurement apparatus |
| DE19605384C1 (de) | 1996-02-14 | 1997-02-13 | Fortech Hts Gmbh | Thermoelektrischer Sensor |
| JP4268224B2 (ja) * | 1996-12-06 | 2009-05-27 | テファ デュンシヒトテヒニク ゲーエムベーハー | 層構造及び層構造の製造方法 |
| DE19804487C2 (de) | 1998-02-05 | 1999-11-25 | Hans Lengfellner | Thermoelektrischer Detektor zur Detektion von kontinuierlicher und gepulster Strahlung und Verfahren zur Herstellung |
| US6361598B1 (en) | 2000-07-20 | 2002-03-26 | The University Of Chicago | Method for preparing high temperature superconductor |
| US6518609B1 (en) * | 2000-08-31 | 2003-02-11 | University Of Maryland | Niobium or vanadium substituted strontium titanate barrier intermediate a silicon underlayer and a functional metal oxide film |
| JP4135857B2 (ja) | 2001-03-27 | 2008-08-20 | 独立行政法人産業技術総合研究所 | 赤外線センサの製造方法 |
| US6579360B2 (en) | 2001-07-13 | 2003-06-17 | The University Of Chicago | Fabrication of high temperature superconductors |
| WO2005083808A1 (ja) * | 2004-03-01 | 2005-09-09 | Matsushita Electric Industrial Co., Ltd. | 熱電変換デバイス、およびこれを用いた冷却方法および発電方法 |
| KR101372059B1 (ko) * | 2004-12-23 | 2014-03-07 | 슈파컨덕터 테크놀로지스 인코포레이티드 | (ｒｅ)ｂａ2ｃｕ3ｏ7-ｄ 박막 초전도체의 ｒｆ-성질의 최적화 조성 |
| CN101356657B (zh) | 2006-11-10 | 2010-04-21 | 松下电器产业株式会社 | 使用热发电元件的发电方法、热发电元件及其制造方法、热发电器件 |
| CN101246055A (zh) * | 2008-03-13 | 2008-08-20 | 电子科技大学 | 钽酸锂薄膜红外探测器及制法 |
| WO2010058559A1 (ja) * | 2008-11-21 | 2010-05-27 | パナソニック株式会社 | 放射検出器および放射検出方法 |
| US8049154B2 (en) | 2009-02-20 | 2011-11-01 | Panasonic Corporation | Radiation detector with AL2O3 substrate and radiation detection method |
| WO2011027774A1 (ja) * | 2009-09-03 | 2011-03-10 | 独立行政法人産業技術総合研究所 | ボロメータ用抵抗体膜 |
| JP2011243824A (ja) * | 2010-05-20 | 2011-12-01 | Panasonic Corp | 異方的熱電材料とこれを用いた放射検出器および発電デバイス |
| CN102356305A (zh) * | 2010-05-27 | 2012-02-15 | 松下电器产业株式会社 | 热电变换器件和辐射检测器以及使用它的辐射检测方法 |
| US9012848B2 (en) | 2012-10-02 | 2015-04-21 | Coherent, Inc. | Laser power and energy sensor utilizing anisotropic thermoelectric material |
-
2013
- 2013-07-17 US US13/944,830 patent/US9012848B2/en not_active Ceased
- 2013-09-27 EP EP13773581.7A patent/EP2904360B1/en active Active
- 2013-09-27 WO PCT/US2013/062450 patent/WO2014055374A1/en not_active Ceased
- 2013-09-27 CN CN201380051638.1A patent/CN104884918B/zh active Active
- 2013-09-27 JP JP2015534776A patent/JP6279589B2/ja active Active
-
2016
- 2016-05-05 US US15/147,816 patent/USRE48028E1/en active Active
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