JP6279589B2 - 異方性熱電材料を利用するレーザーパワーおよびエネルギーセンサ - Google Patents

異方性熱電材料を利用するレーザーパワーおよびエネルギーセンサ Download PDF

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JP6279589B2
JP6279589B2 JP2015534776A JP2015534776A JP6279589B2 JP 6279589 B2 JP6279589 B2 JP 6279589B2 JP 2015534776 A JP2015534776 A JP 2015534776A JP 2015534776 A JP2015534776 A JP 2015534776A JP 6279589 B2 JP6279589 B2 JP 6279589B2
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sensor
layer
laser radiation
substrate
sensor element
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JP2015537191A5 (enExample
JP2015537191A (ja
Inventor
ロバート セメラッド，
ロバート セメラッド，
エリック クロウス，
エリック クロウス，
ジェイムズ シュロス，
ジェイムズ シュロス，
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コヒレント， インコーポレイテッド
コヒレント， インコーポレイテッド
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/10—Semiconductor bodies
    • H10F77/16—Material structures, e.g. crystalline structures, film structures or crystal plane orientations
    • H10F77/162—Non-monocrystalline materials, e.g. semiconductor particles embedded in insulating materials
    • H10F77/164—Polycrystalline semiconductors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/046—Materials; Selection of thermal materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K17/00—Measuring quantity of heat
    • G01K17/003—Measuring quantity of heat for measuring the power of light beams, e.g. laser beams

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP2015534776A 2012-10-02 2013-09-27 異方性熱電材料を利用するレーザーパワーおよびエネルギーセンサ Active JP6279589B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261709060P 2012-10-02 2012-10-02
US61/709,060 2012-10-02
US13/944,830 US9012848B2 (en) 2012-10-02 2013-07-17 Laser power and energy sensor utilizing anisotropic thermoelectric material
US13/944,830 2013-07-17
PCT/US2013/062450 WO2014055374A1 (en) 2012-10-02 2013-09-27 Laser power and energy sensor utilizing anisotropic thermoelectric material

Publications (3)

Publication Number Publication Date
JP2015537191A JP2015537191A (ja) 2015-12-24
JP2015537191A5 JP2015537191A5 (enExample) 2016-03-17
JP6279589B2 true JP6279589B2 (ja) 2018-02-14

Family

ID=50384323

Family Applications (1)

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JP2015534776A Active JP6279589B2 (ja) 2012-10-02 2013-09-27 異方性熱電材料を利用するレーザーパワーおよびエネルギーセンサ

Country Status (5)

Country Link
US (2) US9012848B2 (enExample)
EP (1) EP2904360B1 (enExample)
JP (1) JP6279589B2 (enExample)
CN (1) CN104884918B (enExample)
WO (1) WO2014055374A1 (enExample)

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* Cited by examiner, † Cited by third party
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US9012848B2 (en) 2012-10-02 2015-04-21 Coherent, Inc. Laser power and energy sensor utilizing anisotropic thermoelectric material
US9059346B2 (en) 2012-10-02 2015-06-16 Coherent, Inc. Laser power and energy sensor utilizing anisotropic thermoelectric material
US20180087959A1 (en) * 2016-09-29 2018-03-29 Coherent, Inc. Laser power and energy sensor using anisotropic thermoelectric material
IT201700070601A1 (it) * 2017-06-23 2018-12-23 Laser Point S R L Rilevatore veloce di radiazione elettromagnetica.
IT201700070606A1 (it) * 2017-06-23 2018-12-23 Laser Point S R L Rilevatore di radiazione elettromagnetica.
CN109103324A (zh) * 2018-06-26 2018-12-28 昆明理工大学 一种热感生电压材料及其应用
LV15536A (lv) * 2019-04-26 2020-11-20 Latvijas Universitātes Cietvielu Fizikas Institūts Ātrdarbīgs redzamās gaismas un infrasarkanā starojuma sensors, tā izgatavošanas paņēmiens
CN110993778A (zh) * 2019-12-13 2020-04-10 西南科技大学 一种基于薄膜横向热电效应的热流传感器
CN111223983B (zh) * 2020-02-28 2023-01-06 昆明先导新材料科技有限责任公司 宽禁带薄膜激光探测元件
CN111710777B (zh) * 2020-07-23 2025-08-26 中国空气动力研究与发展中心超高速空气动力研究所 一种以块状金属为敏感元件基底的新型原子层热电堆热流传感器及其封装工艺
CN113206184B (zh) * 2021-04-30 2023-04-07 河北大学 一种基于硒化铅薄膜的自驱动紫外光探测器
CN115666203B (zh) 2022-12-26 2023-06-16 山东大学 热流传感器

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US3851174A (en) * 1973-05-04 1974-11-26 Ibm Light detector for the nanosecond-dc pulse width range
US4082413A (en) 1974-11-29 1978-04-04 The Perkin-Elmer Corporation Selective radiation absorption devices for producing heat energy
DE4306497C2 (de) 1993-03-03 1995-01-05 Hans Dr Lengfellner Thermoelektrischer Detektor zur Detektion von kontinuierlicher und gepulster Strahlung und Verfahren zur Herstellung
JP3623001B2 (ja) 1994-02-25 2005-02-23 住友電気工業株式会社 単結晶性薄膜の形成方法
DE4434904A1 (de) * 1994-09-29 1996-06-05 Max Planck Gesellschaft Thermoelektrische Strahlungsdetektoren auf der Basis perovskitartiger dotierter Schichten und Übergitter
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DE19804487C2 (de) 1998-02-05 1999-11-25 Hans Lengfellner Thermoelektrischer Detektor zur Detektion von kontinuierlicher und gepulster Strahlung und Verfahren zur Herstellung
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US6518609B1 (en) * 2000-08-31 2003-02-11 University Of Maryland Niobium or vanadium substituted strontium titanate barrier intermediate a silicon underlayer and a functional metal oxide film
JP4135857B2 (ja) 2001-03-27 2008-08-20 独立行政法人産業技術総合研究所 赤外線センサの製造方法
US6579360B2 (en) 2001-07-13 2003-06-17 The University Of Chicago Fabrication of high temperature superconductors
WO2005083808A1 (ja) * 2004-03-01 2005-09-09 Matsushita Electric Industrial Co., Ltd. 熱電変換デバイス、およびこれを用いた冷却方法および発電方法
KR101372059B1 (ko) * 2004-12-23 2014-03-07 슈파컨덕터 테크놀로지스 인코포레이티드 (ｒｅ)ｂａ2ｃｕ3ｏ7-ｄ 박막 초전도체의 ｒｆ-성질의 최적화 조성
CN101356657B (zh) 2006-11-10 2010-04-21 松下电器产业株式会社 使用热发电元件的发电方法、热发电元件及其制造方法、热发电器件
CN101246055A (zh) * 2008-03-13 2008-08-20 电子科技大学 钽酸锂薄膜红外探测器及制法
WO2010058559A1 (ja) * 2008-11-21 2010-05-27 パナソニック株式会社 放射検出器および放射検出方法
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JP2011243824A (ja) * 2010-05-20 2011-12-01 Panasonic Corp 異方的熱電材料とこれを用いた放射検出器および発電デバイス
CN102356305A (zh) * 2010-05-27 2012-02-15 松下电器产业株式会社 热电变换器件和辐射检测器以及使用它的辐射检测方法
US9012848B2 (en) 2012-10-02 2015-04-21 Coherent, Inc. Laser power and energy sensor utilizing anisotropic thermoelectric material

Also Published As

Publication number Publication date
EP2904360B1 (en) 2019-09-18
US9012848B2 (en) 2015-04-21
WO2014055374A1 (en) 2014-04-10
EP2904360A1 (en) 2015-08-12
USRE48028E1 (en) 2020-06-02
CN104884918B (zh) 2018-01-30
JP2015537191A (ja) 2015-12-24
US20140091304A1 (en) 2014-04-03
CN104884918A (zh) 2015-09-02

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