JP2015533945A - セラミックバリア層を有する無接着剤ガスバリア膜の製造装置 - Google Patents
セラミックバリア層を有する無接着剤ガスバリア膜の製造装置 Download PDFInfo
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- JP2015533945A JP2015533945A JP2015532327A JP2015532327A JP2015533945A JP 2015533945 A JP2015533945 A JP 2015533945A JP 2015532327 A JP2015532327 A JP 2015532327A JP 2015532327 A JP2015532327 A JP 2015532327A JP 2015533945 A JP2015533945 A JP 2015533945A
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- Prior art keywords
- film
- coating
- layer
- gas barrier
- coating chamber
- Prior art date
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- Granted
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- 238000001704 evaporation Methods 0.000 claims description 13
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- ZGEGCLOFRBLKSE-UHFFFAOYSA-N methylene hexane Natural products CCCCCC=C ZGEGCLOFRBLKSE-UHFFFAOYSA-N 0.000 description 2
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- 125000003504 2-oxazolinyl group Chemical group O1C(=NCC1)* 0.000 description 1
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0245—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to a moving work of indefinite length, e.g. to a moving web
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
- B05D3/0466—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases the gas being a non-reacting gas
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C48/00—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C48/00—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor
- B29C48/03—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor characterised by the shape of the extruded material at extrusion
- B29C48/07—Flat, e.g. panels
- B29C48/08—Flat, e.g. panels flexible, e.g. films
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C71/00—After-treatment of articles without altering their shape; Apparatus therefor
- B29C71/04—After-treatment of articles without altering their shape; Apparatus therefor by wave energy or particle radiation, e.g. for curing or vulcanising preformed articles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/221—Ion beam deposition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
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Abstract
Description
−少なくとも1つのロックシステムへキャリアフィルムを搬送する、特にインライン搬送するステップ、
―キャリアフィルムを、ロックシステムを介してコーティング室へ導入するステップ、
−キャリアフィルム上にバリア層を堆積するステップ、
−選択的に、フィルムウェブを排出するステップ
−好ましくは、例えば溶融押出コーティング処理後のプラスチック溶融液を塗布して、セラミックバリア層のコーティング、特にインラインコーティング、つまりフィルム搬送を中断せずにコーティングを行うステップ。
−少なくとも1つのキャリアフィルムまたは1つの基板フィルムを製造するための少なくとも1つの押出ノズルを用いて、少なくとも1種のプラスチック溶融液を押出成形するステップと、
−押出されたフィルムをコーティング室に搬送するステップとを、インラインで行ってキャリアフィルムを得てもよい。
−単層/多層キャリアフィルムの押出成形、
−真空ロックシステムによる、フィルムウェブのコーティング設備内への導入、
−セラミック材料のイオンビーム支援蒸着法(IBAD)による、フィルムのコーティング、
−真空ロックシステムによる、フィルムの排出
−溶融押出成形により単層/多層カバー層で複合フィルムをコーティングする
ことにより行われる。
キャリア層(340):
厚さ:30μm
構成:ボレアレスHD601CFホモポリプロピレン 100%
バリア層(330):
厚さ:50nm
構成:SiO1.7±0.2
カバー層(320):
厚さ:130μm
構成:ボレアレスRD204CFポリプロピレンのランダム共重合体 70%
クレイトンG1652SEBS 30%
シール層(310):
厚さ:20μm
構成:ボレアレスRD204CFポリプロピレンのランダム共重合体 80%
クレイトンG1652SEBS 20%
例示した複合体層は、例えば、食品や薬剤の包装手段として用いられる、即用性を有するガスバリア膜となる。
(好ましくは、≦10、さらに好ましくは、≦5、さらに好ましくは、≦1)
フィルムの透過性は規格に基づいて決定される。例えば、ASTM−D1434またはDIN53380が適当である。
Claims (22)
- 無接着剤ガスバリア膜の製造装置であって、
フィルムウェブを搬送する搬送手段と、
前記フィルムウェブを前記装置(100)のコーティング室(130)に導入するための少なくとも1つの第1ロックシステム(135)と、
前記コーティング室(130)内でバリア材料を堆積することにより、前記フィルムウェブを少なくとも部分的にコーティングできる少なくとも1つの第1コーティング手段(170、180)とを備え、
前記(130)コーティング室から前記フィルムウェブ(30’)を排出するための少なくとも1つの第2ロックシステム(200)を選択的に備え、
プラスチック溶融液の押出成形により、コーティングされたフィルムウェブを少なくとも部分的にコーティングできる少なくとも1つの第2コーティング手段(240)を備える装置。 - 請求項1に記載の装置(100)において、
前記コーティング室内は、前記コーティング室外よりも低圧であり、
前記第1ロックシステム(135)は、前記コーティング室の高圧側から低圧側へ前記フィルムウェブを導入するために設けられ、
選択的に設けられる前記第2ロックシステム(200)は、低圧側から高圧側へ前記フィルムウェブを排出するために設けられることを特徴とする装置。 - 請求項1または2に記載の装置(100)において、
少なくとも1種のプラスチック溶融液を押し出し、それによって該プラスチック溶融液から前記フィルムウェブ(30)を得るための少なくとも1つの押出ノズルと、
押し出されたプラスチック溶融液から得た前記フィルムウェブ(30)を搬送する1つ以上のローラをさらに備えることを特徴とする装置。 - 請求項1〜3のうちのいずれか1つに記載の装置(100)において、前記フィルムウェブ(30)は、少なくとも3m/min、特に30m/min〜45m/min、さらに30〜300m/min、または240m/minまで、または150m/minまで、特に最高300m/min、好ましくは、60m/minまでの搬送速度で搬送されることを特徴とする装置。
- 請求項1〜4のうちのいずれか1つに記載の装置(100)において、
前記第1および/または選択的に設けられる前記第2ロックシステム(135、200)は、少なくとも1つのローラロック(140、210)および/または少なくとも1つのスリットロック(160、220)を有することを特徴とする装置。 - 請求項1〜5のうちのいずれか1つに記載の装置(100)において、
前記第1ロックシステムに1つ以上の吸引室(150)が設けられ、さらに/または、
選択的に設けられる前記第2ロックシステム(135)に1つ以上の吸引室が設けられることを特徴とする装置。 - 請求項1〜6のうちのいずれか1つに記載の装置(100)において、
前記コーティング室は、セラミックバリア層を前記フィルムウェブ上に堆積する手段を有することを特徴とする装置。 - 請求項1〜7のうちのいずれか1つに記載の装置(100)において、
前記コーティング室(130)は、フィルムの前処理を行うためのイオン源(190)を有し、
イオン源(190)は、希ガスおよび/または反応性ガスであり、好ましくは、アルゴンおよび酸素であり、さらに/または、
前記コーティング室(130)は、1種以上のイオン源(180)が配置されるコーティングゾーンを有し、
前記コーティングゾーンにより前記フィルムウェブ(30)が処理され、
前記イオン源(190)は、同様に好ましくは、希ガスおよび/または反応性ガスであり、特に、アルゴンおよび酸素であることを特徴とする装置。 - 請求項1〜8のうちのいずれか1つに記載の装置(100)において、
前記コーティング室(130)には、シリコンおよび酸素系の少なくとも1つの蒸発材料、特にSi蒸発材料および/またはSiOx蒸発材料が設けられ、該蒸発材料によりSiおよび/またはSiOxが蒸発し、前記フィルムウェブ上に堆積でき、
さらに好ましくは、前記堆積は、1000℃〜1500℃、または1250℃〜1500℃、または1200℃±100℃、または1300℃±100℃、特に1250℃の温度で行われることを特徴とする装置。 - 請求項1〜9のうちのいずれか1つに記載の装置(100)において、
前記コーティング室(130)には、少なくとも1つの冷却コーティングローラが設けられ、前記冷却コーティングローラは、好ましくは、−70℃〜+70℃の温度範囲で作動可能であることを特徴とする装置。 - 無接着剤ガスバリア膜の製造方法であって、
選択的にプラスチック溶融液を押出成形して、キャリアフィルムを形成するステップと、
キャリアフィルム(30)を少なくとも1つのロックシステム(135)に搬送、特にインライン搬送するステップと、
前記キャリアフィルム(30)を前記ロックシステム(135)を介してコーティング室(130)に導入するステップと、
バリア層を前記キャリアフィルム(30)に堆積するステップと、
選択的に、前記キャリアフィルム(30)をロックシステム(200)を介して排出するステップと、
プラスチック溶融液を塗布して前記バリア層をコーティング、特にインラインコーティングするステップとを備えることを特徴とする方法。 - 請求項11に記載の方法において、始めに
少なくとも1種のプラスチック溶融液を少なくとも1つの押出ノズルを介して押出成形して、少なくとも1つのキャリアフィルム(30)を製造するステップと、
得られた押出フィルムを前記コーティング室に搬送するステップとを
インラインで行い、前記キャリアフィルム(30)を得ることを特徴とする方法。 - 請求項11または12に記載の方法において、
前記フィルムの搬送速度は、少なくとも3m/min、特に30m/min〜45m/min、さらに30〜300m/min、または240m/minまで、または150m/minまで、特に最高で300m/min、好ましくは、最高で60m/minまでとすることを特徴とする方法。 - 請求項11〜13のうちのいずれか1つに記載の方法において、
各々圧力段階を構成する1つ以上の吸引室(150,230)が設けられ、
前記吸引室(150)の後段に少なくとも1つのガス抜き室(120)が設けられることを特徴とする方法。 - 請求項11〜14のうちのいずれか1つに記載の方法において、
前記コーティング室(130)において、フィルムの前処理は、少なくとも1種のイオン源を用いた照射により行われ、イオン源(190)は、好ましくは希ガスおよび/または反応性ガスであり、特にアルゴンおよび酸素であり、さらに/または
前記コーティング室(130)は、1種以上のイオン源(180)が配置されるコーティングゾーンを有し、前記コーティングゾーンによりフィルムウェブ(30)が処理され、前記イオン源(190)は、同様に好ましくは、希ガスおよび/または反応性ガスであり、特に、アルゴンおよび酸素であることを特徴とする方法。 - 請求項11〜15のうちのいずれか1つに記載の方法において、
コーティング室(130)において、シリコンおよび酸素系の蒸発材料、特にSiおよび/またはSiOxが蒸発し、前記フィルムウェブ上に堆積し、
さらに好ましくは、前記堆積は、1000℃〜1500℃、または1250℃〜1500℃、または1200℃±100℃、または1300℃±100℃、特に1250℃の温度で行われることを特徴とする方法。 - 請求項11〜16のうちのいずれか1つに記載の方法において、
前記フィルムウェブの冷却は、好ましくは、冷却ローラにより、−70℃〜+70℃の温度で行われることを特徴とする方法。 - 多層無接着剤ガスバリア膜であって、
ポリオレフィン、ポリエステル、ポリアミド、熱可塑性エラストマー、熱可塑性ウレタン、熱可塑性ポリオレフィンからなる群から選ばれる1つ以上の熱可塑性プラスチック材料である単層または多層構造のキャリアフィルムと、
セラミックバリア層と、
前記セラミックバリア層の上に配置され、ポリオレフィン、熱可塑性エラストマー、ポリエステル、または、ポリアミド、TPUからなる群から選ばれるプラスチック材料からなる単層または多層のカバー層を備え、
前記カバー層は、ガスバリア層の上にポリマー溶融液を塗布することにより設けられ、
前記カバー層と前記バリア層との間には、接着層が配置されないことを特徴とする多層ガスバリア膜。 - 請求項18に記載の多層ガスバリア膜において、
キャリア層の厚さは、10〜300μm、特に20〜250μm、好ましくは、30〜100μmであり、さらに/または
ガスバリア層は、低級酸化シリコンSiOxを含むセラミック層であり、さらに/または
ガスバリア層の厚さは、30〜300nm、特に30〜100nm、好ましくは、50nmであることを特徴とする多層ガスバリア膜。 - 請求項18または19に記載の多層ガスバリア膜において、
前記多層ガスバリア膜は、請求項1〜10のいずれか1つに記載の装置において、および/または請求項11〜17のいずれか1つに記載の方法によって製造されることを特徴とする多層ガスバリア膜。 - 請求項11〜17のいずれか1つに記載の方法を実施するための、特に請求項18〜20のいずれか1つに記載の多層ガスバリア膜を製造するための、請求項1〜10のいずれか1つに記載の前記装置(100)の使用方法。
- 請求項18〜20のいずれか1つに記載の多層ガスバリア膜を含みかつ/または少なくとも部分的に当該多層ガスバリア膜から構成される使い捨て用品。
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5249276A (en) * | 1975-10-16 | 1977-04-20 | Idearisaachi Yuugen | Method of preparating vacuum evaporation film and its apparatus |
JPH0368754A (ja) * | 1989-08-03 | 1991-03-25 | Toppan Printing Co Ltd | 複合材料の製造方法 |
JP2011214089A (ja) * | 2010-03-31 | 2011-10-27 | Dainippon Printing Co Ltd | 蒸着フィルム製造方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2972330A (en) * | 1956-02-15 | 1961-02-21 | Nat Steel Corp | Vacuum seal for coating apparatus |
US2983249A (en) * | 1958-07-25 | 1961-05-09 | Nat Steel Corp | Vacuum seal for vapor deposition apparatus |
US3442686A (en) * | 1964-03-13 | 1969-05-06 | Du Pont | Low permeability transparent packaging films |
US3480464A (en) * | 1964-09-21 | 1969-11-25 | Dow Chemical Co | Laminate material and method of making |
GB1271281A (en) * | 1968-07-31 | 1972-04-19 | Ethyl Corp | Coating of webs by freeze-drying and products therefrom |
US4528234A (en) * | 1982-01-08 | 1985-07-09 | Toyo Ink Manufacturing Co., Ltd. | Transparent laminates |
JP2612602B2 (ja) * | 1987-12-17 | 1997-05-21 | 東洋インキ製造 株式会社 | 連続蒸着フィルムの製造方法および装置 |
JPH0367684A (ja) * | 1988-12-23 | 1991-03-22 | Asahi Glass Co Ltd | 記録物 |
CA2040638A1 (en) * | 1990-04-20 | 1991-10-21 | Gedeon I. Deak | Barrier materials useful for packaging |
US5085904A (en) * | 1990-04-20 | 1992-02-04 | E. I. Du Pont De Nemours And Company | Barrier materials useful for packaging |
US5084356A (en) * | 1990-04-20 | 1992-01-28 | E. I. Du Pont De Nemours And Company | Film coated with glass barrier layer with metal dopant |
JPH05311412A (ja) * | 1992-05-11 | 1993-11-22 | Toppan Printing Co Ltd | 蒸着材料および透明バリヤーフィルムの製造方法 |
DE4221800A1 (de) | 1992-07-03 | 1992-11-12 | Hilmar Dipl Ing Weinert | Vakuum-bedampfungsanlage zur erzeugung von oxidschichten auf kunststoffolien |
DE4328767C2 (de) | 1993-08-26 | 1995-08-31 | Fraunhofer Ges Forschung | Verfahren zum Herstellen von Folienverbunden und die mit diesen Verfahren hergestellten Verbunde |
DE19515254C2 (de) | 1995-04-26 | 1998-06-04 | Fresenius Ag | PVC-freie Mehrschichtfolie, Verfahren zur Herstellung derselben und deren Verwendung |
US5728224A (en) * | 1995-09-13 | 1998-03-17 | Tetra Laval Holdings & Finance S.A. | Apparatus and method for manufacturing a packaging material using gaseous phase atmospheric photo chemical vapor deposition to apply a barrier layer to a moving web substrate |
AU748247B2 (en) * | 1998-08-13 | 2002-05-30 | Ppg Industries Ohio, Inc. | Compositions, apparatus and methods for forming coatings of selected color on a substrate and articles produced thereby |
US6894418B2 (en) * | 2002-07-30 | 2005-05-17 | Comprehensive Power, Inc. | Nested stator coils for permanent magnet machines |
WO2009121685A1 (en) * | 2008-04-04 | 2009-10-08 | Applied Materials Inc., A Corporation Of The State Of Delaware | Method for depositing of barrier layers on a plastic substrate as well as coating device therefor and a layer system |
US8262297B2 (en) * | 2010-07-30 | 2012-09-11 | Tyco Electronics Corporation | Body having a dedicated lens for imaging an alignment feature |
-
2012
- 2012-09-19 DE DE201210018525 patent/DE102012018525A1/de not_active Ceased
-
2013
- 2013-09-16 WO PCT/EP2013/002778 patent/WO2014044378A1/de active Application Filing
- 2013-09-16 EP EP13763189.1A patent/EP2898108B1/de active Active
- 2013-09-16 CN CN201380048672.3A patent/CN104685094B/zh not_active Expired - Fee Related
- 2013-09-16 US US14/028,261 patent/US20140087161A1/en not_active Abandoned
- 2013-09-16 JP JP2015532327A patent/JP6382199B2/ja not_active Expired - Fee Related
- 2013-09-16 KR KR1020157009971A patent/KR102190860B1/ko active IP Right Grant
-
2016
- 2016-12-30 US US15/395,979 patent/US20170175257A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5249276A (en) * | 1975-10-16 | 1977-04-20 | Idearisaachi Yuugen | Method of preparating vacuum evaporation film and its apparatus |
JPH0368754A (ja) * | 1989-08-03 | 1991-03-25 | Toppan Printing Co Ltd | 複合材料の製造方法 |
JP2011214089A (ja) * | 2010-03-31 | 2011-10-27 | Dainippon Printing Co Ltd | 蒸着フィルム製造方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20150058422A (ko) | 2015-05-28 |
EP2898108A1 (de) | 2015-07-29 |
JP6382199B2 (ja) | 2018-08-29 |
CN104685094B (zh) | 2018-04-03 |
KR102190860B1 (ko) | 2020-12-15 |
DE102012018525A1 (de) | 2014-03-20 |
WO2014044378A1 (de) | 2014-03-27 |
US20170175257A1 (en) | 2017-06-22 |
EP2898108B1 (de) | 2018-07-18 |
US20140087161A1 (en) | 2014-03-27 |
CN104685094A (zh) | 2015-06-03 |
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