JP2015531171A - 基板処理装置 - Google Patents
基板処理装置 Download PDFInfo
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- JP2015531171A JP2015531171A JP2015528403A JP2015528403A JP2015531171A JP 2015531171 A JP2015531171 A JP 2015531171A JP 2015528403 A JP2015528403 A JP 2015528403A JP 2015528403 A JP2015528403 A JP 2015528403A JP 2015531171 A JP2015531171 A JP 2015531171A
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- 239000000758 substrate Substances 0.000 title claims abstract description 119
- 238000000034 method Methods 0.000 claims abstract description 64
- 238000009434 installation Methods 0.000 claims abstract description 28
- 238000010438 heat treatment Methods 0.000 claims abstract description 27
- 239000007789 gas Substances 0.000 claims description 113
- 238000009792 diffusion process Methods 0.000 claims description 32
- 239000011261 inert gas Substances 0.000 claims description 11
- 239000010408 film Substances 0.000 description 8
- 230000004308 accommodation Effects 0.000 description 5
- 238000005137 deposition process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 238000005019 vapor deposition process Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 229910000953 kanthal Inorganic materials 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45519—Inert gas curtains
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45559—Diffusion of reactive gas to substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45587—Mechanical means for changing the gas flow
- C23C16/45591—Fixed means, e.g. wings, baffles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
- C23C16/481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation by radiant heating of the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
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- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
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- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims (8)
- 上部が開放された形状を有するメインチャンバと、
前記メインチャンバの内部に設置されて、基板が置かれるサセプタと、
前記メインチャンバの開放された上部に設置されて、前記サセプタの上部に位置する上部設置空間と前記上部設置空間の外側に配置されるガス供給通路を有するチャンバ蓋と、
前記上部設置空間に設置されて、前記基板を加熱するヒーティングブロックと、
前記ガス供給通路と連結されて前記メインチャンバの内部にプロセスガスを供給するガス供給ポートと、を含むことを特徴とする基板処理装置。 - 前記メインチャンバは一側に形成されて前記基板が出入する通路を有し、
前記基板処理装置は前記サセプタと隣接した前記通路の一側に設置されて不活性ガスを噴射する補助ガスノズルを含むことを特徴とする請求項1記載の基板処理装置。 - 前記基板処理装置は、
前記ガス供給通路の下端部に設置され、前記ガス供給ポートを介して供給された前記プロセスガスを拡散する拡散板を更に含むことを特徴とする請求項1記載の基板処理装置。 - 前記ガス供給通路及び前記拡散板は前記サセプタと同心の円弧状であり、
前記ガス供給通路及び前記拡散板の幅は前記基板の直径と大体一致することを特徴とする請求項3記載の基板処理装置。 - 前記メインチャンバは底面から窪んで前記サセプタが収容される下部設置空間を有し、
前記基板処理装置は前記サセプタを囲むように配置されて前記下部設置空間内に収容され、上部に向かって不活性ガスを噴射するノズルリングを更に含むことを特徴とする請求項3記載の基板処理装置。 - 前記メインチャンバはガス供給通路の反対側に形成された排気通路を有し、
前記基板処理装置は、
前記サセプタの外側に配置され、前記ガス供給通路から供給された前記プロセスガスを前記排気通路に向かって案内するフローガイドを更に含むことを特徴とする請求項1記載の基板処理装置。 - 前記フローガイドは、
前記サセプタと同心の円弧状であり、前記プロセスガスが通過する複数のガイド孔を有する円状ガイド部と、
前記円状ガイド部の両側に連結されて前記サセプタの両側に配置され、前記ガス供給通路の中心と前記排気通路の中心を連結する直線と大体平行するガイド面を有する直線ガイド部と、を更に含むことを特徴とする請求項6記載の基板処理装置。 - 前記メインチャンバは底面から窪んで前記サセプタが収容される下部設置空間を有し、
前記ガス供給通路は前記下部設置空間の外側に位置する前記メインチャンバの底面の上部に位置することを特徴とする請求項3記載の基板処理装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020120094384A KR101387518B1 (ko) | 2012-08-28 | 2012-08-28 | 기판처리장치 |
KR10-2012-0094384 | 2012-08-28 | ||
PCT/KR2013/007571 WO2014035096A1 (ko) | 2012-08-28 | 2013-08-23 | 기판처리장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015531171A true JP2015531171A (ja) | 2015-10-29 |
JP6093860B2 JP6093860B2 (ja) | 2017-03-08 |
Family
ID=50183854
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2015528403A Active JP6093860B2 (ja) | 2012-08-28 | 2013-08-23 | 基板処理装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20150211116A1 (ja) |
JP (1) | JP6093860B2 (ja) |
KR (1) | KR101387518B1 (ja) |
CN (1) | CN104718602B (ja) |
TW (1) | TWI560310B (ja) |
WO (1) | WO2014035096A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019514214A (ja) * | 2016-04-11 | 2019-05-30 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 半導体処理チャンバ |
JP2020532130A (ja) * | 2017-08-25 | 2020-11-05 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | エピタキシャル堆積プロセスのための注入アセンブリ |
JP2021511667A (ja) * | 2018-01-25 | 2021-05-06 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 遠隔プラズマ酸化チャンバ用ドッグボーン入口錐体輪郭 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101452828B1 (ko) * | 2012-08-28 | 2014-10-23 | 주식회사 유진테크 | 기판처리장치 |
US20160033070A1 (en) * | 2014-08-01 | 2016-02-04 | Applied Materials, Inc. | Recursive pumping member |
JP2019515493A (ja) * | 2016-04-25 | 2019-06-06 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 自己組織化単分子層処理のための化学物質供給チャンバ |
KR102514043B1 (ko) * | 2016-07-18 | 2023-03-24 | 삼성전자주식회사 | 반도체 소자의 제조 방법 |
CN117187780A (zh) * | 2022-05-30 | 2023-12-08 | 长鑫存储技术有限公司 | 半导体基板加工装置与膜厚改善方法 |
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2012
- 2012-08-28 KR KR1020120094384A patent/KR101387518B1/ko active IP Right Grant
-
2013
- 2013-06-26 TW TW102122656A patent/TWI560310B/zh active
- 2013-08-23 JP JP2015528403A patent/JP6093860B2/ja active Active
- 2013-08-23 CN CN201380045392.7A patent/CN104718602B/zh active Active
- 2013-08-23 US US14/419,762 patent/US20150211116A1/en not_active Abandoned
- 2013-08-23 WO PCT/KR2013/007571 patent/WO2014035096A1/ko active Application Filing
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JPH05347254A (ja) * | 1991-04-16 | 1993-12-27 | Ulvac Japan Ltd | 薄膜形成装置 |
JPH07193015A (ja) * | 1993-07-30 | 1995-07-28 | Applied Materials Inc | ウェハ処理チャンバ用ガス入口 |
JPH08236451A (ja) * | 1994-10-21 | 1996-09-13 | Applied Materials Inc | 半導体基板のエッジ成膜の制御 |
JPH08124859A (ja) * | 1994-10-25 | 1996-05-17 | Shin Etsu Handotai Co Ltd | 気相成長方法及びその装置 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2019514214A (ja) * | 2016-04-11 | 2019-05-30 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 半導体処理チャンバ |
US10741428B2 (en) | 2016-04-11 | 2020-08-11 | Applied Materials, Inc. | Semiconductor processing chamber |
JP2020532130A (ja) * | 2017-08-25 | 2020-11-05 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | エピタキシャル堆積プロセスのための注入アセンブリ |
JP2021511667A (ja) * | 2018-01-25 | 2021-05-06 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 遠隔プラズマ酸化チャンバ用ドッグボーン入口錐体輪郭 |
JP7050159B2 (ja) | 2018-01-25 | 2022-04-07 | アプライド マテリアルズ インコーポレイテッド | 遠隔プラズマ酸化チャンバ用ドッグボーン入口錐体輪郭 |
US11501954B2 (en) | 2018-01-25 | 2022-11-15 | Applied Materials, Inc. | Dogbone inlet cone profile for remote plasma oxidation chamber |
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CN104718602A (zh) | 2015-06-17 |
CN104718602B (zh) | 2017-04-26 |
JP6093860B2 (ja) | 2017-03-08 |
KR101387518B1 (ko) | 2014-05-07 |
WO2014035096A1 (ko) | 2014-03-06 |
US20150211116A1 (en) | 2015-07-30 |
KR20140030409A (ko) | 2014-03-12 |
TW201408813A (zh) | 2014-03-01 |
TWI560310B (en) | 2016-12-01 |
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