JP2015530284A5 - - Google Patents
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- Publication number
- JP2015530284A5 JP2015530284A5 JP2015523090A JP2015523090A JP2015530284A5 JP 2015530284 A5 JP2015530284 A5 JP 2015530284A5 JP 2015523090 A JP2015523090 A JP 2015523090A JP 2015523090 A JP2015523090 A JP 2015523090A JP 2015530284 A5 JP2015530284 A5 JP 2015530284A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- sacrificial
- backfill
- structured
- transfer film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 41
- 229920000642 polymer Polymers 0.000 claims description 19
- 238000000034 method Methods 0.000 description 17
- 239000011521 glass Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229920001621 AMOLED Polymers 0.000 description 4
- 230000001737 promoting effect Effects 0.000 description 3
- 239000002086 nanomaterial Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/553,987 | 2012-07-20 | ||
| US13/553,987 US9780335B2 (en) | 2012-07-20 | 2012-07-20 | Structured lamination transfer films and methods |
| PCT/US2013/046075 WO2014014595A1 (en) | 2012-07-20 | 2013-06-17 | Structured lamination transfer films and methods |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015530284A JP2015530284A (ja) | 2015-10-15 |
| JP2015530284A5 true JP2015530284A5 (OSRAM) | 2016-07-28 |
| JP6272855B2 JP6272855B2 (ja) | 2018-01-31 |
Family
ID=49945813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015523090A Expired - Fee Related JP6272855B2 (ja) | 2012-07-20 | 2013-06-17 | 構造化積層転写フィルム及び方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US9780335B2 (OSRAM) |
| JP (1) | JP6272855B2 (OSRAM) |
| KR (1) | KR102127748B1 (OSRAM) |
| CN (2) | CN107020854B (OSRAM) |
| TW (1) | TWI590504B (OSRAM) |
| WO (1) | WO2014014595A1 (OSRAM) |
Families Citing this family (49)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6268614B2 (ja) * | 2012-11-30 | 2018-01-31 | エルジー・ケム・リミテッド | 有機電子素子用基板、有機電子装置、ディスプレイ用光源、照明器機、有機電子素子用基板の製造方法及び有機電子装置の製造方法 |
| US9711744B2 (en) | 2012-12-21 | 2017-07-18 | 3M Innovative Properties Company | Patterned structured transfer tape |
| US20140175707A1 (en) * | 2012-12-21 | 2014-06-26 | 3M Innovative Properties Company | Methods of using nanostructured transfer tape and articles made therefrom |
| US20140242343A1 (en) * | 2013-02-27 | 2014-08-28 | 3M Innovative Properties Company | Lamination transfer films for forming embedded nanostructures |
| US9878954B2 (en) | 2013-09-13 | 2018-01-30 | 3M Innovative Properties Company | Vacuum glazing pillars for insulated glass units |
| EP3096945B1 (en) * | 2014-01-20 | 2019-08-14 | 3M Innovative Properties Company | Lamination transfer films for forming reentrant structures |
| US9246134B2 (en) | 2014-01-20 | 2016-01-26 | 3M Innovative Properties Company | Lamination transfer films for forming articles with engineered voids |
| US20150202834A1 (en) | 2014-01-20 | 2015-07-23 | 3M Innovative Properties Company | Lamination transfer films for forming antireflective structures |
| JP2017508641A (ja) | 2014-01-22 | 2017-03-30 | スリーエム イノベイティブ プロパティズ カンパニー | グレイジング用微小光学体 |
| TW201539736A (zh) | 2014-03-19 | 2015-10-16 | 3M Innovative Properties Co | 用於藉白光成色之 oled 裝置的奈米結構 |
| DE102014106634B4 (de) * | 2014-05-12 | 2019-08-14 | Osram Oled Gmbh | Beleuchtungsvorrichtung, Verfahren zum Herstellen einer Beleuchtungsvorrichtung |
| KR102387234B1 (ko) | 2014-06-13 | 2022-04-18 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 스파클 감소를 위한 광학 적층물 |
| US10353214B2 (en) | 2014-06-13 | 2019-07-16 | 3M Innovative Properties Company | Optical stacks for sparkle reduction |
| US9577129B1 (en) * | 2014-06-16 | 2017-02-21 | Solaero Technologies Corp. | Flexible glass support for a solar cell assembly |
| US9472788B2 (en) * | 2014-08-27 | 2016-10-18 | 3M Innovative Properties Company | Thermally-assisted self-assembly method of nanoparticles and nanowires within engineered periodic structures |
| SG11201701508SA (en) * | 2014-08-27 | 2017-03-30 | 3M Innovative Properties Co | Electrical multilayer lamination transfer films |
| US11247501B2 (en) | 2014-08-27 | 2022-02-15 | 3M Innovative Properties Company | Layer-by-layer assembled multilayer lamination transfer films |
| US9586385B2 (en) * | 2014-08-27 | 2017-03-07 | 3M Innovative Properties Company | Inorganic multilayer lamination transfer films |
| EP3209841B1 (en) * | 2014-10-20 | 2021-04-07 | 3M Innovative Properties Company | Insulated glazing units and microoptical layer comprising microstructured diffuser and methods |
| US9800561B2 (en) * | 2014-11-06 | 2017-10-24 | Intel Corporation | Secure sharing of user annotated subscription media with trusted devices |
| US10518512B2 (en) | 2015-03-31 | 2019-12-31 | 3M Innovative Properties Company | Method of forming dual-cure nanostructure transfer film |
| US10106643B2 (en) | 2015-03-31 | 2018-10-23 | 3M Innovative Properties Company | Dual-cure nanostructure transfer film |
| JP2018513038A (ja) * | 2015-04-17 | 2018-05-24 | スリーエム イノベイティブ プロパティズ カンパニー | 個別の弾性フィーチャを組み込んだ物品 |
| CN104777483B (zh) * | 2015-04-17 | 2017-09-29 | 业成光电(深圳)有限公司 | 高解析触觉感测装置 |
| US11086056B2 (en) | 2015-06-19 | 2021-08-10 | 3M Innovative Properties Company | Micro-optical assemblies including transparent substrates having graphic layer and method of making thereof |
| CN107820461B (zh) | 2015-06-19 | 2019-12-17 | 3M创新有限公司 | 分段式转印带及其制备和使用方法 |
| US10618247B2 (en) | 2015-06-19 | 2020-04-14 | 3M Innovative Properties Company | Segmented and non-segmented transfer tapes, articles therefrom and method of making and use thereof |
| EP3317090B1 (en) | 2015-06-30 | 2022-05-04 | 3M Innovative Properties Company | Insulated glazing units and microoptical layer including microstructured anisotropic diffuser and methods |
| TWI578517B (zh) * | 2015-08-14 | 2017-04-11 | 群創光電股份有限公司 | 有機發光二極體顯示面板 |
| CN106469742A (zh) * | 2015-08-14 | 2017-03-01 | 群创光电股份有限公司 | 有机发光二极管显示面板 |
| TWI538581B (zh) | 2015-11-20 | 2016-06-11 | 財團法人工業技術研究院 | 金屬導體結構及線路結構 |
| DE102015015452A1 (de) | 2015-12-02 | 2017-06-08 | Forschungszentrum Jülich GmbH | Verfahren zum Planarisieren von Nanostrukturen |
| KR20180089538A (ko) | 2015-12-28 | 2018-08-08 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 미세구조화 층을 갖는 물품 |
| KR20180089541A (ko) | 2015-12-28 | 2018-08-08 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 미세구조화 층을 갖는 물품 |
| SG11201810474SA (en) | 2016-05-27 | 2018-12-28 | 3M Innovative Properties Co | Oled display with improved color uniformity |
| CN109476964B (zh) | 2016-07-22 | 2022-04-26 | 3M创新有限公司 | 作为陶瓷前体的聚合物粘合剂层 |
| WO2018017554A1 (en) | 2016-07-22 | 2018-01-25 | 3M Innovative Properties Company | Siloxane-based adhesive layers as ceramic precursors |
| CN106098940B (zh) * | 2016-08-26 | 2019-09-06 | 武汉华星光电技术有限公司 | 无损剥离柔性基板的方法 |
| US10707081B2 (en) | 2017-11-15 | 2020-07-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Fine line patterning methods |
| JP2021504736A (ja) * | 2017-11-21 | 2021-02-15 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 導波結合器の製造方法 |
| CN111492313A (zh) | 2017-11-29 | 2020-08-04 | 应用材料公司 | 波导组合器的直接蚀刻制造的方法 |
| US11635622B1 (en) * | 2018-12-07 | 2023-04-25 | Meta Platforms Technologies, Llc | Nanovided spacer materials and corresponding systems and methods |
| CN111384286B (zh) * | 2018-12-29 | 2021-07-06 | Tcl科技集团股份有限公司 | 量子点发光二极管及其制备方法 |
| US11217770B2 (en) * | 2019-08-12 | 2022-01-04 | Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Display panel and manufacturing method thereof |
| CN110950299A (zh) * | 2019-10-31 | 2020-04-03 | 歌尔股份有限公司 | 微纳米结构组件制造方法、以及以该法制造的微纳米结构组件 |
| WO2022200867A1 (en) | 2021-03-22 | 2022-09-29 | 3M Innovative Properties Company | Edge-sealed porous substrate diagnostic devices and methods of making same |
| US11926113B2 (en) | 2022-08-03 | 2024-03-12 | Himax Technologies Limited | Optical element and method for manufacturing optical element |
| EP4336229A1 (en) * | 2022-08-03 | 2024-03-13 | Himax Technologies Limited | Optical element and method for manufacturing optical element |
| EP4634722A1 (en) * | 2022-12-15 | 2025-10-22 | Massachusetts Institute of Technology | Non-planar metasurfaces and related fabrication methods |
Family Cites Families (42)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3444053B2 (ja) | 1995-10-13 | 2003-09-08 | ソニー株式会社 | 薄膜半導体装置 |
| AU736875B2 (en) | 1997-01-21 | 2001-08-02 | Georgia Tech Research Corporation | Fabrication of a semiconductor device with air gaps for ultra-low capacitance interconnections |
| EP0945254B1 (en) | 1998-03-17 | 2004-12-22 | Chi Mei Optoelectronics Corporation | Material comprising an anti-reflective coating on a flexible glass substrate |
| US6027595A (en) | 1998-07-02 | 2000-02-22 | Samsung Electronics Co., Ltd. | Method of making optical replicas by stamping in photoresist and replicas formed thereby |
| US6329058B1 (en) | 1998-07-30 | 2001-12-11 | 3M Innovative Properties Company | Nanosize metal oxide particles for producing transparent metal oxide colloids and ceramers |
| EP1003078A3 (en) | 1998-11-17 | 2001-11-07 | Corning Incorporated | Replicating a nanoscale pattern |
| US6521324B1 (en) * | 1999-11-30 | 2003-02-18 | 3M Innovative Properties Company | Thermal transfer of microstructured layers |
| JP2002093315A (ja) | 2000-09-14 | 2002-03-29 | Matsushita Electric Ind Co Ltd | プラズマディスプレイパネルのリブ形成方法と装置 |
| US6664786B2 (en) | 2001-07-30 | 2003-12-16 | Rockwell Automation Technologies, Inc. | Magnetic field sensor using microelectromechanical system |
| US6849558B2 (en) | 2002-05-22 | 2005-02-01 | The Board Of Trustees Of The Leland Stanford Junior University | Replication and transfer of microstructures and nanostructures |
| WO2004002746A1 (en) | 2002-07-01 | 2004-01-08 | Inca Digital Printers Limited | Printing with ink |
| US7419912B2 (en) | 2004-04-01 | 2008-09-02 | Cree, Inc. | Laser patterning of light emitting devices |
| DE102005017170B4 (de) * | 2005-04-13 | 2010-07-01 | Ovd Kinegram Ag | Transferfolie, Verfahren zu deren Herstellung sowie Mehrschichtkörper und dessen Verwendung |
| US20060270806A1 (en) | 2005-05-26 | 2006-11-30 | Hale Wesley R | Miscible high Tg polyester/polymer blend compositions and films formed therefrom |
| AU2006282042B2 (en) * | 2005-06-17 | 2011-12-22 | The University Of North Carolina At Chapel Hill | Nanoparticle fabrication methods, systems, and materials |
| US7569254B2 (en) * | 2005-08-22 | 2009-08-04 | Eastman Kodak Company | Nanocomposite materials comprising high loadings of filler materials and an in-situ method of making such materials |
| US7643203B2 (en) | 2006-04-10 | 2010-01-05 | Qualcomm Mems Technologies, Inc. | Interferometric optical display system with broadband characteristics |
| US20070298176A1 (en) * | 2006-06-26 | 2007-12-27 | Dipietro Richard Anthony | Aromatic vinyl ether based reverse-tone step and flash imprint lithography |
| US7419757B2 (en) * | 2006-10-20 | 2008-09-02 | 3M Innovative Properties Company | Structured thermal transfer donors |
| US7604916B2 (en) * | 2006-11-06 | 2009-10-20 | 3M Innovative Properties Company | Donor films with pattern-directing layers |
| WO2008069320A1 (ja) * | 2006-12-08 | 2008-06-12 | Mitsubishi Rayon Co., Ltd., | レンズシート、面光源装置及び液晶表示装置 |
| US20080233404A1 (en) | 2007-03-22 | 2008-09-25 | 3M Innovative Properties Company | Microreplication tools and patterns using laser induced thermal embossing |
| US7604381B2 (en) | 2007-04-16 | 2009-10-20 | 3M Innovative Properties Company | Optical article and method of making |
| US8179034B2 (en) | 2007-07-13 | 2012-05-15 | 3M Innovative Properties Company | Light extraction film for organic light emitting diode display and lighting devices |
| US20090015142A1 (en) * | 2007-07-13 | 2009-01-15 | 3M Innovative Properties Company | Light extraction film for organic light emitting diode display devices |
| US8293354B2 (en) | 2008-04-09 | 2012-10-23 | The Regents Of The University Of Michigan | UV curable silsesquioxane resins for nanoprint lithography |
| GB2464111B (en) * | 2008-10-02 | 2011-06-15 | Cambridge Display Tech Ltd | Organic electroluminescent device |
| TWI365812B (en) * | 2008-10-23 | 2012-06-11 | Compal Electronics Inc | Transfer film, method of manufacturing the same, transfer method and object surface structure |
| US8222352B2 (en) | 2008-12-24 | 2012-07-17 | Nitto Denko Corporation | Silicone resin composition |
| JP5052534B2 (ja) | 2009-01-08 | 2012-10-17 | 株式会社ブリヂストン | 光硬化性転写シート、及びこれを用いた凹凸パターンの形成方法 |
| JP5597356B2 (ja) * | 2009-03-02 | 2014-10-01 | リンテック株式会社 | シート製造装置および製造方法 |
| US8499810B2 (en) | 2009-08-27 | 2013-08-06 | Transfer Devices Inc. | Molecular transfer lithography apparatus and method for transferring patterned materials to a substrate |
| US9305571B2 (en) * | 2009-12-23 | 2016-04-05 | HGST Netherlands B.V. | Magnetic devices and magnetic media with graphene overcoat |
| WO2011088161A1 (en) | 2010-01-13 | 2011-07-21 | 3M Innovative Properties Company | Optical films with microstructured low refractive index nanovoided layers and methods therefor |
| WO2011155582A1 (ja) | 2010-06-11 | 2011-12-15 | 株式会社日立ハイテクノロジーズ | 微細構造転写用スタンパ及び微細構造転写装置 |
| EP2585875B1 (en) * | 2010-06-28 | 2016-06-29 | Toray, Plastics (America), Inc. | Releasable metalized embossed transfer film |
| US8469551B2 (en) | 2010-10-20 | 2013-06-25 | 3M Innovative Properties Company | Light extraction films for increasing pixelated OLED output with reduced blur |
| MY164197A (en) | 2010-12-09 | 2017-11-30 | Asahi Kasei E Materials Corp | Fine-structure laminate, method for preparing fine-structure laminate, and production method for fine-structure laminate |
| US20120153527A1 (en) | 2010-12-21 | 2012-06-21 | Toyota Motor Engineering & Manufacturing North America, Inc. | Process for manufacturing a stand-alone thin film |
| US8900988B2 (en) * | 2011-04-15 | 2014-12-02 | International Business Machines Corporation | Method for forming self-aligned airgap interconnect structures |
| KR101999253B1 (ko) * | 2011-10-13 | 2019-10-01 | 캄브리오스 필름 솔루션스 코포레이션 | 금속 나노와이어들을 통합한 전극을 갖는 광전기 디바이스들 |
| US9246134B2 (en) | 2014-01-20 | 2016-01-26 | 3M Innovative Properties Company | Lamination transfer films for forming articles with engineered voids |
-
2012
- 2012-07-20 US US13/553,987 patent/US9780335B2/en not_active Expired - Fee Related
-
2013
- 2013-06-17 CN CN201610937586.3A patent/CN107020854B/zh not_active Expired - Fee Related
- 2013-06-17 KR KR1020157003981A patent/KR102127748B1/ko not_active Expired - Fee Related
- 2013-06-17 JP JP2015523090A patent/JP6272855B2/ja not_active Expired - Fee Related
- 2013-06-17 CN CN201380037772.6A patent/CN104471739B/zh not_active Expired - Fee Related
- 2013-06-17 WO PCT/US2013/046075 patent/WO2014014595A1/en not_active Ceased
- 2013-07-02 TW TW102123690A patent/TWI590504B/zh not_active IP Right Cessation
-
2017
- 2017-08-31 US US15/692,296 patent/US10957878B2/en not_active Expired - Fee Related
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