JP2015523917A5 - - Google Patents

Info

Publication number

JP2015523917A5

JP2015523917A5 JP2015510287A JP2015510287A JP2015523917A5 JP 2015523917 A5 JP2015523917 A5 JP 2015523917A5 JP 2015510287 A JP2015510287 A JP 2015510287A JP 2015510287 A JP2015510287 A JP 2015510287A JP 2015523917 A5 JP2015523917 A5 JP 2015523917A5

Authority

JP

Japan

Prior art keywords

composite material

soc

layer

polymer substrate

soc layer

Prior art date

2013-03-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 239000002131 composite material Substances 0.000 claims description 35
• 229920000307 polymer substrate Polymers 0.000 claims description 26
• 238000000034 method Methods 0.000 claims description 21
• 238000000151 deposition Methods 0.000 claims description 16
• 239000012707 chemical precursor Substances 0.000 claims description 12
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 10
• 229910052760 oxygen Inorganic materials 0.000 claims description 10
• 239000001301 oxygen Substances 0.000 claims description 10
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
• 229910052710 silicon Inorganic materials 0.000 claims description 8
• 239000010703 silicon Substances 0.000 claims description 8
• WZJUBBHODHNQPW-UHFFFAOYSA-N 2,4,6,8-tetramethyl-1,3,5,7,2$l^{3},4$l^{3},6$l^{3},8$l^{3}-tetraoxatetrasilocane Chemical compound C[Si]1O[Si](C)O[Si](C)O[Si](C)O1 WZJUBBHODHNQPW-UHFFFAOYSA-N 0.000 claims description 6
• 230000004888 barrier function Effects 0.000 claims description 6
• 230000008021 deposition Effects 0.000 claims description 6
• HMMGMWAXVFQUOA-UHFFFAOYSA-N octamethylcyclotetrasiloxane Chemical compound C[Si]1(C)O[Si](C)(C)O[Si](C)(C)O[Si](C)(C)O1 HMMGMWAXVFQUOA-UHFFFAOYSA-N 0.000 claims description 6
• BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 5
• 238000009792 diffusion process Methods 0.000 claims description 5
• 229910000077 silane Inorganic materials 0.000 claims description 5
• 230000003647 oxidation Effects 0.000 claims description 4
• 238000007254 oxidation reaction Methods 0.000 claims description 4
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
• 229910052799 carbon Inorganic materials 0.000 claims description 3
• 239000011248 coating agent Substances 0.000 claims description 3
• 238000000576 coating method Methods 0.000 claims description 3
• 150000004756 silanes Chemical class 0.000 claims 3
• 230000001737 promoting effect Effects 0.000 description 7
• 239000004642 Polyimide Substances 0.000 description 4
• 229910010293 ceramic material Inorganic materials 0.000 description 4
• 239000011159 matrix material Substances 0.000 description 4
• 239000007769 metal material Substances 0.000 description 4
• 150000001282 organosilanes Chemical class 0.000 description 4
• 230000001590 oxidative effect Effects 0.000 description 4
• 229920001721 polyimide Polymers 0.000 description 4
• 230000004580 weight loss Effects 0.000 description 4
• XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 description 2
• 239000004593 Epoxy Substances 0.000 description 2
• 239000004643 cyanate ester Substances 0.000 description 2
• 229920003192 poly(bis maleimide) Polymers 0.000 description 2
• 229920000642 polymer Polymers 0.000 description 2
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• 230000000052 comparative effect Effects 0.000 description 1
• 229910052814 silicon oxide Inorganic materials 0.000 description 1