JP2015510692A - 金属層からのコーティングの選択的除去およびその太陽電池用途 - Google Patents
金属層からのコーティングの選択的除去およびその太陽電池用途 Download PDFInfo
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 176
- 239000002184 metal Substances 0.000 title claims abstract description 176
- 238000000576 coating method Methods 0.000 title claims abstract description 75
- 239000011248 coating agent Substances 0.000 claims abstract description 74
- 239000000758 substrate Substances 0.000 claims abstract description 68
- 238000000034 method Methods 0.000 claims abstract description 58
- 238000000151 deposition Methods 0.000 claims abstract description 11
- 238000000059 patterning Methods 0.000 claims abstract description 8
- 239000010408 film Substances 0.000 claims description 83
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims description 8
- 238000007650 screen-printing Methods 0.000 claims description 8
- 238000005530 etching Methods 0.000 claims description 6
- 238000007641 inkjet printing Methods 0.000 claims description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 5
- 230000003667 anti-reflective effect Effects 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 239000004332 silver Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 229910018487 Ni—Cr Inorganic materials 0.000 claims description 4
- NPXOKRUENSOPAO-UHFFFAOYSA-N Raney nickel Chemical compound [Al].[Ni] NPXOKRUENSOPAO-UHFFFAOYSA-N 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- HZEWFHLRYVTOIW-UHFFFAOYSA-N [Ti].[Ni] Chemical compound [Ti].[Ni] HZEWFHLRYVTOIW-UHFFFAOYSA-N 0.000 claims description 4
- 239000000443 aerosol Substances 0.000 claims description 4
- QRRWWGNBSQSBAM-UHFFFAOYSA-N alumane;chromium Chemical compound [AlH3].[Cr] QRRWWGNBSQSBAM-UHFFFAOYSA-N 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 239000011651 chromium Substances 0.000 claims description 4
- IUWCPXJTIPQGTE-UHFFFAOYSA-N chromium cobalt Chemical compound [Cr].[Co].[Co].[Co] IUWCPXJTIPQGTE-UHFFFAOYSA-N 0.000 claims description 4
- SZMZREIADCOWQA-UHFFFAOYSA-N chromium cobalt nickel Chemical compound [Cr].[Co].[Ni] SZMZREIADCOWQA-UHFFFAOYSA-N 0.000 claims description 4
- DYRBFMPPJATHRF-UHFFFAOYSA-N chromium silicon Chemical compound [Si].[Cr] DYRBFMPPJATHRF-UHFFFAOYSA-N 0.000 claims description 4
- 239000002082 metal nanoparticle Substances 0.000 claims description 4
- 150000002739 metals Chemical class 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- FEBJSGQWYJIENF-UHFFFAOYSA-N nickel niobium Chemical compound [Ni].[Nb] FEBJSGQWYJIENF-UHFFFAOYSA-N 0.000 claims description 4
- PCLURTMBFDTLSK-UHFFFAOYSA-N nickel platinum Chemical compound [Ni].[Pt] PCLURTMBFDTLSK-UHFFFAOYSA-N 0.000 claims description 4
- 229910001000 nickel titanium Inorganic materials 0.000 claims description 4
- MOWMLACGTDMJRV-UHFFFAOYSA-N nickel tungsten Chemical compound [Ni].[W] MOWMLACGTDMJRV-UHFFFAOYSA-N 0.000 claims description 4
- HBVFXTAPOLSOPB-UHFFFAOYSA-N nickel vanadium Chemical compound [V].[Ni] HBVFXTAPOLSOPB-UHFFFAOYSA-N 0.000 claims description 4
- ZSJFLDUTBDIFLJ-UHFFFAOYSA-N nickel zirconium Chemical compound [Ni].[Zr] ZSJFLDUTBDIFLJ-UHFFFAOYSA-N 0.000 claims description 4
- 238000007639 printing Methods 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- ZTXONRUJVYXVTJ-UHFFFAOYSA-N chromium copper Chemical compound [Cr][Cu][Cr] ZTXONRUJVYXVTJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 239000002105 nanoparticle Substances 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- QQHSIRTYSFLSRM-UHFFFAOYSA-N alumanylidynechromium Chemical compound [Al].[Cr] QQHSIRTYSFLSRM-UHFFFAOYSA-N 0.000 claims description 2
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- -1 aluminum-silicon-copper Chemical compound 0.000 claims description 2
- ZGDWHDKHJKZZIQ-UHFFFAOYSA-N cobalt nickel Chemical compound [Co].[Ni].[Ni].[Ni] ZGDWHDKHJKZZIQ-UHFFFAOYSA-N 0.000 claims description 2
- 238000011161 development Methods 0.000 claims description 2
- 238000011065 in-situ storage Methods 0.000 claims description 2
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 claims description 2
- 239000006117 anti-reflective coating Substances 0.000 abstract description 7
- 230000004888 barrier function Effects 0.000 abstract description 6
- 230000005855 radiation Effects 0.000 abstract description 6
- 230000015572 biosynthetic process Effects 0.000 abstract description 5
- 238000000608 laser ablation Methods 0.000 description 18
- 230000008569 process Effects 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000007747 plating Methods 0.000 description 8
- 238000003754 machining Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000001465 metallisation Methods 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000002679 ablation Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/02168—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
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- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
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- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
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- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
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Abstract
Description
本出願は、2012年1月23日に出願された米国特許仮出願第61/589,459号明細書の優先権を主張する。本出願はまた、2010年4月21日に出願され、国際公開第2010/123974号パンフレットとして2010年10月28日に公開され、2009年4月21日に出願された米国特許仮出願第61/171,194号明細書の優先権を主張する、「高効率太陽電池構造および製造方法(High−Efficiency Solar Cell Structures and Methods of Manufacture)」と題されるPCT出願第PCT/US2010/031869号にも関連している。これらの出願はそれぞれ、参照によりその全体が本明細書中に援用される。本発明の態様はすべて、上記出願の開示と組み合わせて使用することができる。
1.基板上に金属フィルムを堆積させる。
2.レジストを施す。
3.金属をエッチングし、レジストを取り除く。
4.誘電体フィルムを堆積させる。
5.レーザアブレーションを行う。
6.めっきする。
Claims (21)
- 基板の上に金属フィルムパターンをパターン形成する方法であって、
前記基板の上に金属フィルムパターンを形成するステップと、
前記基板表面および前記金属フィルムパターンの上にコーティングを堆積させるステップと、
レーザ照射によって前記金属フィルムパターンの上の前記コーティングを取り除くステップとを含むことを特徴とする方法。 - 前記基板の表面の上に金属フィルムを堆積させるステップと、
前記金属フィルムの上にエッチレジストを堆積させるステップと、
前記金属フィルムをエッチングするステップと、
前記エッチレジストを取り除くステップと
によって前記金属フィルムパターンが形成されることを特徴とする請求項1に記載の方法。 - 前記金属フィルムパターンは、金属ペーストをスクリーン印刷すること、ナノ粒子金属インクをインクジェット印刷すること、または金属ナノ粒子をエアロゾル印刷することによって形成されることを特徴とする請求項1に記載の方法。
- 前記基板およびコーティングは、前記レーザ照射と有意には相互作用しないことを特徴とする請求項1に記載の方法。
- 前記レーザ照射は、前記金属フィルムパターンおよび前記コーティングと相互作用し、その結果前記金属フィルムパターンの上の前記コーティングが取り除かれることを特徴とする請求項4に記載の方法。
- 前記基板は、太陽電池向けの基板を備えることを特徴とする上記請求項のいずれかに記載の方法。
- 前記金属フィルムパターンは、太陽電池の前方および/または後方コンタクト電極を形成することを特徴とする請求項6に記載の方法。
- 前記金属フィルムパターンは、後に金属で電気めっきされて、前記金属フィルムパターンの電気伝導性を向上させることを特徴とする請求項6に記載の方法。
- 前記コーティングは、誘電体光反射防止層であることを特徴とする請求項6に記載の方法。
- 前記コーティングは光反射層であることを特徴とする請求項6に記載の方法。
- 基板の上で、金属フィルムフィンガーパターンがコーティングに取り囲まれ、前記金属フィルムフィンガーと前記取り囲んでいるコーティングとの間に隙間が存在しないことを特徴とする上記請求項1〜10のいずれかに従って形成される構造。
- 前記パターン形成されたレジストは、続くパターンマスクの露光および現像を必要とすることなく、直接書き込まれ、その場で硬化されることを特徴とする請求項2に記載の方法。
- 前記レジストをパターン形成する直接書込み技法は、インクジェットまたはスクリーン印刷であることを特徴とする請求項12に記載の方法。
- 前記金属フィルムパターンは、様々な組成の複数の薄膜金属層を備えることを特徴とする請求項1に記載の方法。
- 前記金属フィルムパターンは、以下の金属または金属合金:クロム、銀、銅、ニッケル、チタン、アルミニウム、ニッケル−バナジウム、ニッケル−ニオブ、ニッケル−チタン、ニッケル−ジルコニウム、ニッケル−クロム、ニッケル−白金、ニッケル−アルミニウム、ニッケル−タングステン、チタン−タングステン、コバルト−ニッケル、クロム−コバルト−ニッケル、クロム−コバルト、クロム−ニッケル、クロム−シリコン、クロム−銅、クロム−アルミニウム、アルミニウム−シリコン−銅、アルミニウム−シリコンまたはアルミニウム−クロムのうちの1または複数で構成されることを特徴とする請求項1に記載の方法。
- 複数の薄膜金属の積層における最上金属フィルムは直接電気めっき可能で、以下の金属層:銀、銅、ニッケル、クロム、ニッケル−ニオブ、ニッケル−バナジウム、ニッケル−チタン、ニッケル−ジルコニウム、ニッケル−クロム、ニッケル−白金、ニッケル−アルミニウム、ニッケル−タングステン、クロム−コバルト−ニッケル、クロム−コバルト、クロム−ニッケル、クロム−シリコン、クロム−銅またはクロム−アルミニウムのうち1つからなることを特徴とする請求項14または15に記載の方法。
- 前記レーザ照射は、パルス幅が200nsec未満で平均出力密度が2ジュール毎平方センチメートル未満のパルス状であることを特徴とする請求項1に記載の方法。
- 前記レーザ照射は、250nmから2000nmの範囲、理想的には900nmから2000nmの範囲の波長を有することを特徴とする請求項1に記載の方法。
- 前記レーザ照射5は、トップハットビームプロファイルを有することを特徴とする請求項1に記載の方法。
- 前記基板は、光トラッピングを向上させるためにその一方または両方の表面がテクスチャ加工された太陽電池向けシリコンウエハであることを特徴とする請求項1に記載の方法。
- 前記レーザ照射は、前記金属フィルムパターンの上の前記コーティングを部分的に取り除く、または分断させることを特徴とする請求項1または20に記載の方法。
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PCT/US2013/022674 WO2013112533A1 (en) | 2012-01-23 | 2013-01-23 | Selective removal of a coating from a metal layer, and solar cell applications thereof |
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EP (1) | EP2807679A4 (ja) |
JP (1) | JP2015510692A (ja) |
KR (1) | KR20140126313A (ja) |
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HK (1) | HK1205354A1 (ja) |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016225332A (ja) * | 2015-05-27 | 2016-12-28 | 信越化学工業株式会社 | 太陽電池及びその製造方法 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3309845A3 (en) | 2010-03-26 | 2018-06-27 | Tetrasun, Inc. | Shielded electrical contact and doping through a passivating dielectric layer in a high-efficiency crystalline solar cell, including structure and methods of manufacture |
US10118712B2 (en) * | 2011-08-17 | 2018-11-06 | The Boeing Company | Electrical conductor pathway system and method of making the same |
WO2013185054A1 (en) * | 2012-06-08 | 2013-12-12 | Tetrasun, Inc. | Selective and/or faster removal of a coating from an underlying layer, and solar cell applications thereof |
US20150072515A1 (en) * | 2013-09-09 | 2015-03-12 | Rajendra C. Dias | Laser ablation method and recipe for sacrificial material patterning and removal |
US20150236175A1 (en) * | 2013-12-02 | 2015-08-20 | Solexel, Inc. | Amorphous silicon passivated contacts for back contact back junction solar cells |
KR101867855B1 (ko) * | 2014-03-17 | 2018-06-15 | 엘지전자 주식회사 | 태양 전지 |
US9673341B2 (en) | 2015-05-08 | 2017-06-06 | Tetrasun, Inc. | Photovoltaic devices with fine-line metallization and methods for manufacture |
CN105537772A (zh) * | 2016-02-03 | 2016-05-04 | 中国科学院合肥物质科学研究院 | 一种激光直写氧化铝基板材料形成图形化铝导电层的方法 |
CN106312300A (zh) * | 2016-09-28 | 2017-01-11 | 中国科学院半导体研究所 | 一种激光对铝化物基板金属化的方法及铝化物基板 |
CN108055016A (zh) * | 2017-12-29 | 2018-05-18 | 应达利电子股份有限公司 | 具有低等效串联电阻的小型石英晶片的制作方法 |
CN108512518A (zh) * | 2018-03-28 | 2018-09-07 | 应达利电子股份有限公司 | 一种低等效串联电阻小型晶片制作方法及系统 |
CN112171068B (zh) * | 2020-08-28 | 2022-03-22 | 江苏大学 | 一种高效率大面积去除厚涂层的方法及其应用 |
CN112687755B (zh) * | 2020-12-28 | 2023-03-28 | 正泰新能科技有限公司 | 一种N型TopCOn太阳能电池的背面金属电极及制备方法和电池 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04259285A (ja) * | 1991-02-13 | 1992-09-14 | Nec Corp | 配線基板の製造方法 |
JPH0982803A (ja) * | 1995-09-20 | 1997-03-28 | Nec Corp | バイアホール形成方法および装置 |
JP2000312016A (ja) * | 1999-04-27 | 2000-11-07 | Kyocera Corp | 太陽電池の製造方法 |
JP2004165068A (ja) * | 2002-11-14 | 2004-06-10 | Sanyo Electric Co Ltd | 有機電界発光パネルの製造方法 |
JP2007052966A (ja) * | 2005-08-17 | 2007-03-01 | Sony Corp | 表示装置および表示装置の製造方法 |
JP2008533737A (ja) * | 2005-03-16 | 2008-08-21 | コリア アドバンスト インスティテュート オブ サイエンス アンド テクノロジー | 集積型薄膜太陽電池、その製造方法と集積型薄膜太陽電池用透明電極の加工方法、その構造及びその透明電極が形成された透明基板 |
JP2010535415A (ja) * | 2007-07-31 | 2010-11-18 | リニューアブル・エナジー・コーポレーション・エーエスエー | 太陽電池の裏面上にコンタクトを設ける方法、及び該方法によって設けられた接点を有する太陽電池 |
JP2011054994A (ja) * | 2003-01-17 | 2011-03-17 | Semiconductor Energy Lab Co Ltd | 半導体装置の作製方法 |
JP2011114194A (ja) * | 2009-11-27 | 2011-06-09 | Alps Electric Co Ltd | 透明電極パターンの形成方法 |
JP2012004532A (ja) * | 2010-06-21 | 2012-01-05 | Samsung Electro-Mechanics Co Ltd | 導電性電極パターンの形成方法及びこれを含む太陽電池の製造方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5265114C1 (en) * | 1992-09-10 | 2001-08-21 | Electro Scient Ind Inc | System and method for selectively laser processing a target structure of one or more materials of a multimaterial multilayer device |
US6524880B2 (en) * | 2001-04-23 | 2003-02-25 | Samsung Sdi Co., Ltd. | Solar cell and method for fabricating the same |
US20080105303A1 (en) * | 2003-01-03 | 2008-05-08 | Bp Corporation North America Inc. | Method and Manufacturing Thin Film Photovoltaic Modules |
KR20060100108A (ko) * | 2005-03-16 | 2006-09-20 | 한국과학기술원 | 집적형 박막 태양전지용 투명전극의 가공 방법과 그 구조,그 투명전극이 형성된 투명기판 |
DE102006040352B3 (de) * | 2006-08-29 | 2007-10-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Aufbringen von elektrischen Kontakten auf halbleitende Substrate, halbleitendes Substrat und Verwendung des Verfahrens |
JP4703687B2 (ja) * | 2008-05-20 | 2011-06-15 | 三菱電機株式会社 | 太陽電池セルの製造方法および太陽電池モジュールの製造方法 |
KR101498619B1 (ko) * | 2009-06-05 | 2015-03-05 | 엘지전자 주식회사 | 태양전지의 전극 형성 방법 및 이를 이용한 태양전지 |
US8975177B2 (en) | 2013-03-14 | 2015-03-10 | Intel Corporation | Laser resist removal for integrated circuit (IC) packaging |
-
2013
- 2013-01-23 JP JP2014554790A patent/JP2015510692A/ja active Pending
- 2013-01-23 KR KR1020147021542A patent/KR20140126313A/ko not_active Application Discontinuation
- 2013-01-23 CN CN201380008602.5A patent/CN104205360B/zh not_active Expired - Fee Related
- 2013-01-23 EP EP13741480.1A patent/EP2807679A4/en not_active Withdrawn
- 2013-01-23 US US14/373,938 patent/US9634179B2/en not_active Expired - Fee Related
- 2013-01-23 WO PCT/US2013/022674 patent/WO2013112533A1/en active Application Filing
- 2013-01-23 TW TW102102428A patent/TWI615986B/zh not_active IP Right Cessation
-
2015
- 2015-06-08 HK HK15105440.8A patent/HK1205354A1/xx not_active IP Right Cessation
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04259285A (ja) * | 1991-02-13 | 1992-09-14 | Nec Corp | 配線基板の製造方法 |
JPH0982803A (ja) * | 1995-09-20 | 1997-03-28 | Nec Corp | バイアホール形成方法および装置 |
JP2000312016A (ja) * | 1999-04-27 | 2000-11-07 | Kyocera Corp | 太陽電池の製造方法 |
JP2004165068A (ja) * | 2002-11-14 | 2004-06-10 | Sanyo Electric Co Ltd | 有機電界発光パネルの製造方法 |
JP2011054994A (ja) * | 2003-01-17 | 2011-03-17 | Semiconductor Energy Lab Co Ltd | 半導体装置の作製方法 |
JP2008533737A (ja) * | 2005-03-16 | 2008-08-21 | コリア アドバンスト インスティテュート オブ サイエンス アンド テクノロジー | 集積型薄膜太陽電池、その製造方法と集積型薄膜太陽電池用透明電極の加工方法、その構造及びその透明電極が形成された透明基板 |
JP2007052966A (ja) * | 2005-08-17 | 2007-03-01 | Sony Corp | 表示装置および表示装置の製造方法 |
JP2010535415A (ja) * | 2007-07-31 | 2010-11-18 | リニューアブル・エナジー・コーポレーション・エーエスエー | 太陽電池の裏面上にコンタクトを設ける方法、及び該方法によって設けられた接点を有する太陽電池 |
JP2011114194A (ja) * | 2009-11-27 | 2011-06-09 | Alps Electric Co Ltd | 透明電極パターンの形成方法 |
JP2012004532A (ja) * | 2010-06-21 | 2012-01-05 | Samsung Electro-Mechanics Co Ltd | 導電性電極パターンの形成方法及びこれを含む太陽電池の製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016225332A (ja) * | 2015-05-27 | 2016-12-28 | 信越化学工業株式会社 | 太陽電池及びその製造方法 |
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HK1205354A1 (en) | 2015-12-11 |
KR20140126313A (ko) | 2014-10-30 |
EP2807679A4 (en) | 2015-08-05 |
CN104205360A (zh) | 2014-12-10 |
US20150027528A1 (en) | 2015-01-29 |
EP2807679A1 (en) | 2014-12-03 |
CN104205360B (zh) | 2017-02-22 |
US9634179B2 (en) | 2017-04-25 |
TWI615986B (zh) | 2018-02-21 |
WO2013112533A1 (en) | 2013-08-01 |
TW201347203A (zh) | 2013-11-16 |
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